JPH0415142U - - Google Patents

Info

Publication number
JPH0415142U
JPH0415142U JP5584690U JP5584690U JPH0415142U JP H0415142 U JPH0415142 U JP H0415142U JP 5584690 U JP5584690 U JP 5584690U JP 5584690 U JP5584690 U JP 5584690U JP H0415142 U JPH0415142 U JP H0415142U
Authority
JP
Japan
Prior art keywords
power supply
ion source
control
voltage
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5584690U
Other languages
English (en)
Japanese (ja)
Other versions
JP2506766Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990055846U priority Critical patent/JP2506766Y2/ja
Publication of JPH0415142U publication Critical patent/JPH0415142U/ja
Application granted granted Critical
Publication of JP2506766Y2 publication Critical patent/JP2506766Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Control Of Voltage And Current In General (AREA)
JP1990055846U 1990-05-28 1990-05-28 イオン源の制御装置 Expired - Fee Related JP2506766Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990055846U JP2506766Y2 (ja) 1990-05-28 1990-05-28 イオン源の制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990055846U JP2506766Y2 (ja) 1990-05-28 1990-05-28 イオン源の制御装置

Publications (2)

Publication Number Publication Date
JPH0415142U true JPH0415142U (hu) 1992-02-06
JP2506766Y2 JP2506766Y2 (ja) 1996-08-14

Family

ID=31579160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990055846U Expired - Fee Related JP2506766Y2 (ja) 1990-05-28 1990-05-28 イオン源の制御装置

Country Status (1)

Country Link
JP (1) JP2506766Y2 (hu)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108695128A (zh) * 2017-04-11 2018-10-23 上海伟钊光学科技股份有限公司 具有束流自动反馈控制的考夫曼离子源

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074299A (ja) * 1983-09-30 1985-04-26 株式会社東芝 イオン源電源装置
JPS60182639A (ja) * 1984-03-01 1985-09-18 Toshiba Corp イオン源放電電源装置
JPH01265438A (ja) * 1988-04-18 1989-10-23 Nippon Telegr & Teleph Corp <Ntt> イオン発生器
JPH0254850A (ja) * 1988-08-18 1990-02-23 Nissin Electric Co Ltd イオン処理装置の制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074299A (ja) * 1983-09-30 1985-04-26 株式会社東芝 イオン源電源装置
JPS60182639A (ja) * 1984-03-01 1985-09-18 Toshiba Corp イオン源放電電源装置
JPH01265438A (ja) * 1988-04-18 1989-10-23 Nippon Telegr & Teleph Corp <Ntt> イオン発生器
JPH0254850A (ja) * 1988-08-18 1990-02-23 Nissin Electric Co Ltd イオン処理装置の制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108695128A (zh) * 2017-04-11 2018-10-23 上海伟钊光学科技股份有限公司 具有束流自动反馈控制的考夫曼离子源

Also Published As

Publication number Publication date
JP2506766Y2 (ja) 1996-08-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees