JPH0414793U - - Google Patents
Info
- Publication number
- JPH0414793U JPH0414793U JP5436190U JP5436190U JPH0414793U JP H0414793 U JPH0414793 U JP H0414793U JP 5436190 U JP5436190 U JP 5436190U JP 5436190 U JP5436190 U JP 5436190U JP H0414793 U JPH0414793 U JP H0414793U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- power source
- external power
- energized
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案による真空ポンプの一実施例を
示す全体断面図である。 １１８，１１９，１２０，１２１……シール部
材、１２２……電線、１２４……コネクタ。
示す全体断面図である。 １１８，１１９，１２０，１２１……シール部
材、１２２……電線、１２４……コネクタ。
Claims (1)
- 磁気浮上式の軸受を用いた真空ポンプにおいて
、外部と内部を気密シールするシール部材に金属
材料を用い、外部電源から通電する各内部装置に
連結される電線の被覆材に耐放射線性材料を用い
、前記電線が外部電源と導通する内外境界部にセ
ラミツク製のハーメチツクコネクタを採用したこ
とを特徴とする真空ポンプ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5436190U JPH0414793U (ja) | 1990-05-24 | 1990-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5436190U JPH0414793U (ja) | 1990-05-24 | 1990-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0414793U true JPH0414793U (ja) | 1992-02-06 |
Family
ID=31576360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5436190U Pending JPH0414793U (ja) | 1990-05-24 | 1990-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414793U (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005124158A1 (ja) * | 2004-06-17 | 2005-12-29 | Osaka Vacuum, Ltd. | 耐放射線用分子ポンプ |
| JP2009121466A (ja) * | 2007-11-13 | 2009-06-04 | Pfeiffer Vacuum Gmbh | 真空ポンプ |
| EP2472120A1 (en) * | 2009-08-28 | 2012-07-04 | Edwards Japan Limited | Vacuum pump and member used for vacuum pump |
-
1990
- 1990-05-24 JP JP5436190U patent/JPH0414793U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005124158A1 (ja) * | 2004-06-17 | 2005-12-29 | Osaka Vacuum, Ltd. | 耐放射線用分子ポンプ |
| JP2009121466A (ja) * | 2007-11-13 | 2009-06-04 | Pfeiffer Vacuum Gmbh | 真空ポンプ |
| EP2472120A1 (en) * | 2009-08-28 | 2012-07-04 | Edwards Japan Limited | Vacuum pump and member used for vacuum pump |
| JP2014080981A (ja) * | 2009-08-28 | 2014-05-08 | Edwards Kk | 真空ポンプ |
| EP2472120A4 (en) * | 2009-08-28 | 2017-08-02 | Edwards Japan Limited | Vacuum pump and member used for vacuum pump |