JPH04147028A - Pirani vacuum gauge - Google Patents
Pirani vacuum gaugeInfo
- Publication number
- JPH04147028A JPH04147028A JP27175990A JP27175990A JPH04147028A JP H04147028 A JPH04147028 A JP H04147028A JP 27175990 A JP27175990 A JP 27175990A JP 27175990 A JP27175990 A JP 27175990A JP H04147028 A JPH04147028 A JP H04147028A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- jacket
- gauge
- pirani
- constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、真空計に関し、特にピラニ真空計に関する。[Detailed description of the invention] [Industrial application field] TECHNICAL FIELD The present invention relates to vacuum gauges, and more particularly to Pirani vacuum gauges.
従来ピラニ真空計は、図面には示さないが、円筒状の外
部体にホイートストーンブリッヂの一部にフィラメント
を組み込み、このフィラメントの温度変化に伴う抵抗変
化を検流計で検出して真空測定とするものである。一般
にこの真空計は低真空度を測定するときに用いられてい
た。Although not shown in the drawing, the conventional Pirani vacuum gauge incorporates a filament into a cylindrical external body as part of a Wheatstone bridge, and uses a galvanometer to detect changes in resistance of this filament due to temperature changes to measure vacuum. That is. Generally, this vacuum gauge was used to measure low degrees of vacuum.
第２図は従来の一例におけるピラニ真空計を真空容器に
取付は状態を示す図である。また、この真空計を使用し
て真空容器の真空度を測定する場合は、同図に示すよう
に、ピラニ真空計のゲージ本体３の一部を真空容器７の
ボートに気密に取付け、露出した外部体３より導出する
ケーブル２を検流計であるメータ１に接続し、測定して
いた。FIG. 2 is a diagram showing a state in which a conventional Pirani vacuum gauge is attached to a vacuum vessel. In addition, when using this vacuum gauge to measure the degree of vacuum in a vacuum vessel, as shown in the figure, a part of the gauge body 3 of the Pirani vacuum gauge is airtightly attached to the boat of the vacuum vessel 7, and the exposed A cable 2 led out from an external body 3 was connected to a meter 1, which is a galvanometer, for measurement.
しかしながら、従来のピラニ真空計では、取付けた場所
の周囲温度に左右され、正確な真空測定が出来ないとい
う欠点がある。However, conventional Pirani vacuum gauges have the disadvantage that they cannot accurately measure vacuum because they are affected by the ambient temperature at the location where they are installed.
本発明の目的は、かかる問題を解消すべく、外部体の周
囲温度を一定にし、正確に真空測定のできるピラニ真空
計を提供することである。SUMMARY OF THE INVENTION In order to solve this problem, it is an object of the present invention to provide a Pirani vacuum gauge that can keep the ambient temperature of the external body constant and accurately measure vacuum.
本発明のピラニ真空計は、真空容器より露出するゲージ
本体の外部を覆うジャケットと、このジャケットに恒温
水を供給する配管とを有している。The Pirani vacuum gauge of the present invention includes a jacket that covers the outside of the gauge body exposed from the vacuum container, and piping that supplies constant temperature water to the jacket.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の一実施例におけるピラニ真空計を真空
容器に取付けた状態を示す図である。このピラニ真空セ
ンサは、同図に示すように、ゲージ本体３の外部を覆う
とともに内部が空調となっているジャケット４と、この
ジャケット４に恒温水を供給する配管５及び６とを設け
たことである。それ以外は、従来例と同じである。FIG. 1 is a diagram showing a state in which a Pirani vacuum gauge according to an embodiment of the present invention is attached to a vacuum container. As shown in the figure, this Pirani vacuum sensor is equipped with a jacket 4 that covers the outside of the gauge body 3 and whose interior is air-conditioned, and piping 5 and 6 that supply constant-temperature water to the jacket 4. It is. Other than that, it is the same as the conventional example.
このような構造にすれば、ゲージ本体の周囲温度は、ｇ
Ａｉえば、２５℃一定にすることができ、常に安定した
正確な真空度が測定出来る。With this structure, the ambient temperature of the gauge body will be g
With Ai, the temperature can be kept constant at 25°C, and a stable and accurate degree of vacuum can be measured at all times.
以上説明したように本発明は、ゲージ本体の外部を常に
温度一定の部材で覆うことにより、周囲の温度が変化し
ても、内部に影響することがないので、より正確に真空
度を測定できるピラニ真空計が得られるという効果があ
る。As explained above, in the present invention, by covering the outside of the gauge body with a member whose temperature is always constant, even if the ambient temperature changes, it does not affect the inside, making it possible to measure the degree of vacuum more accurately. This has the effect of providing a Pirani vacuum gauge.
【図面の簡単な説明】
第１図は本発明の一実施例におけるピラニ真空計を真空
容器に取付けた状態を示す図、第２図は従来の一例にお
けるピラニ真空計を真空容器に取付けな状態を示す図で
ある。
１・・・メータ、２・・・ケーブル、３・・・ゲージ本
体、４・・・ジャケット、５，６・・・配管、７・・・
真空容器。[Brief Description of the Drawings] Figure 1 is a diagram showing a Pirani vacuum gauge according to an embodiment of the present invention installed in a vacuum vessel, and Figure 2 is a diagram showing a conventional example of a Pirani vacuum gauge not installed in a vacuum vessel. FIG. 1...Meter, 2...Cable, 3...Gauge body, 4...Jacket, 5, 6...Piping, 7...
vacuum container.
Claims (1)
トと、このジャケットに恒温水を供給する配管とを有す
ることを特徴とするピラニ真空計。A Pirani vacuum gauge characterized by having a jacket that covers the outside of a gauge body exposed from a vacuum container, and piping that supplies constant temperature water to this jacket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27175990A JPH04147028A (en) | 1990-10-09 | 1990-10-09 | Pirani vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27175990A JPH04147028A (en) | 1990-10-09 | 1990-10-09 | Pirani vacuum gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04147028A true JPH04147028A (en) | 1992-05-20 |
Family
ID=17504445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27175990A Pending JPH04147028A (en) | 1990-10-09 | 1990-10-09 | Pirani vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04147028A (en) |
-
1990
- 1990-10-09 JP JP27175990A patent/JPH04147028A/en active Pending
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