JPH04147028A - Pirani vacuum gauge - Google Patents
Pirani vacuum gaugeInfo
- Publication number
- JPH04147028A JPH04147028A JP27175990A JP27175990A JPH04147028A JP H04147028 A JPH04147028 A JP H04147028A JP 27175990 A JP27175990 A JP 27175990A JP 27175990 A JP27175990 A JP 27175990A JP H04147028 A JPH04147028 A JP H04147028A
- Authority
- JP
- Japan
- Prior art keywords
- jacket
- vacuum
- main body
- constant
- gauge main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable degree of vacuum to be measured accurately by providing a jacket for covering an outside of a gauge main body which is exposed from a vacuum container and a piping which supplies constant-temperature water to the jacket.
CONSTITUTION: A jacket 4 which covers an outside of a gauge main body 3 and whose inside is a cavity and pipes 5 and 6 which supply a constant- temperature water to the jacket 4 are provided at a Pirani vacuum sensor. This configuration allows ambient temperature of the gauge main body 3 to be constant (25°C) for example and the degree of vacuum to be measured constantly stably and accurately.
COPYRIGHT: (C)1992,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27175990A JPH04147028A (en) | 1990-10-09 | 1990-10-09 | Pirani vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27175990A JPH04147028A (en) | 1990-10-09 | 1990-10-09 | Pirani vacuum gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04147028A true JPH04147028A (en) | 1992-05-20 |
Family
ID=17504445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27175990A Pending JPH04147028A (en) | 1990-10-09 | 1990-10-09 | Pirani vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04147028A (en) |
-
1990
- 1990-10-09 JP JP27175990A patent/JPH04147028A/en active Pending
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