CN214793591U - Differential pressure sensor - Google Patents
Differential pressure sensor Download PDFInfo
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- CN214793591U CN214793591U CN202120977560.8U CN202120977560U CN214793591U CN 214793591 U CN214793591 U CN 214793591U CN 202120977560 U CN202120977560 U CN 202120977560U CN 214793591 U CN214793591 U CN 214793591U
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- pressure sensor
- differential pressure
- digital circuit
- processing board
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Abstract
The utility model provides a differential pressure sensor, including packaging shell, measuring device, a plurality of metal probe and digital circuit processing board, packaging shell includes first encapsulation body and second encapsulation body, first encapsulation body is connected relatively and forms first cavity with the second encapsulation body, digital circuit processing board and measuring device locate in the first cavity, measuring device includes differential pressure sensor and static pressure sensor, differential pressure sensor and static pressure sensor are connected with digital circuit processing board respectively, metal probe runs through first encapsulation body and is connected with digital circuit processing board, be provided with the data processing chip on the digital circuit processing board; the utility model discloses in differential pressure measurement, provide accurate static pressure signal, the data processing chip is revised in real time to differential pressure measurement value according to differential pressure signal and static pressure signal, eliminates static pressure error's influence, has improved encapsulation differential pressure sensor's measurement accuracy.
Description
Technical Field
The utility model relates to a sensor manufacturing technology field particularly, relates to a differential pressure sensor.
Background
The differential pressure sensor is widely applied in the field of industrial automation, and can measure parameters such as flow rate, liquid level, density and the like of fluid. Because the industrial field is often in severe environments such as high temperature, low temperature, corrosion, vibration, impact, radiation and the like, and the requirements of large-scale and complicated process flow, accurate and intelligent control of a computer and the like, the accuracy of the sensor is required to be very high, and therefore, the research of the differential pressure sensor is highly valued at home and abroad. The main reason influencing the measurement accuracy of the differential pressure sensor is that the output-input characteristic of the sensor has a nonlinear characteristic and drifts along with time; the differential pressure signal is susceptible to drift due to changes in ambient temperature, static pressure, and the like. The main factors influencing the accurate measurement of the differential pressure sensor are nonlinear error, repeatability error, zero-position time drift, thermal zero point and thermal sensitivity drift.
As shown in FIG. 1, in the existing differential pressure sensor, the contact areas S1 and S2 of the high pressure side and the low pressure side of the sensing film are not equal, the differential pressure scale is usually verified under the condition that the negative pressure chamber is communicated with the atmosphere, and when the device is communicated with an actual use static pressure zero calibration on site, the zero output is often found to be inconsistent with the zero output value when the negative pressure is communicated with the atmosphere for verification. The static pressure error is called when the same static pressure is introduced into the positive and negative pressure chambers to obtain zero output which deviates from the zero position when the atmospheric pressure is introduced for verification. As a result, the accuracy of the differential pressure sensor is affected. Therefore, it is a great demand for a differential pressure sensor manufacturing technique to improve the accuracy of the differential pressure sensor.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a differential pressure sensor, when its differential pressure measurement, provided accurate static pressure signal, revise differential pressure measurement value in real time according to differential pressure signal and static pressure signal again, eliminate static pressure error's influence, improved encapsulation differential pressure sensor's measurement accuracy.
The embodiment of the utility model discloses a realize through following technical scheme:
a differential pressure sensor comprises a packaging shell, a measuring device and a digital circuit processing board, wherein the measuring device and the digital circuit processing board are arranged inside the packaging shell, the measuring device is arranged on the digital circuit processing board, and a data processing chip is arranged on the digital circuit processing board.
Preferably, the measuring device comprises a differential pressure sensor and a static pressure sensor, and the differential pressure sensor and the static pressure sensor are respectively arranged on the digital circuit processing board.
Preferably, the package case includes a first package body and a second package body, the first package body is connected to an outer wall of the second package body, and a first cavity is formed inside the first package body, the measuring device and the digital circuit processing board are disposed in the first cavity, the digital circuit processing board is located at a side of the bottom of the first cavity close to the second package body, and the measuring device is connected to the first package body.
Preferably, the high precision packaged differential pressure sensor further comprises a plurality of metal probes connected with the digital circuit processing board through the first package body.
Preferably, the first package body is provided with a plurality of second cavities in a penetrating manner, hollow glass is sintered in the second cavities, and the metal probe penetrates through the hollow glass and is connected to the digital circuit processing board.
Preferably, the outer wall of the first packaging body is provided with a screw hole.
Preferably, the first cavity is filled with silicone oil.
The utility model discloses technical scheme has following advantage and beneficial effect at least:
1. the utility model discloses a measuring device includes differential pressure sensor and static pressure sensor, gathers differential pressure signal and static pressure signal respectively, is equipped with the data processing chip who carries out analog-to-digital conversion function and static pressure error correction algorithm on the digital circuit processing board, can revise differential pressure measurement signal in real time according to differential pressure signal and the static pressure signal gathered, eliminates the influence of static pressure error, improves the measurement accuracy of encapsulation differential pressure sensor;
2. the utility model arranges the digital circuit processing board, the differential pressure sensor and the static pressure sensor in the stable first cavity, and the first cavity is filled with silicon oil, so that the digital processing circuit board, the data processing chip, the differential pressure sensor and the static pressure sensor are in the stable environment, are not influenced by external factors, and ensure the measuring precision;
the utility model relates to a rationally, simple structure, the practicality is strong.
Drawings
Fig. 1 is a schematic structural diagram of a conventional differential pressure sensor in the background art of the present invention;
fig. 2 is a schematic view of an internal structure of a high-precision packaged differential pressure sensor provided in embodiment 1 of the present invention;
fig. 3 is a schematic structural diagram of a first package according to embodiment 1 of the present invention;
fig. 4 is a schematic view of a connection structure between a first package and a digital circuit processing board according to embodiment 1 of the present invention;
icon: 1-packaging shell, 11-first packaging body, 111-hollow glass, 112-screw hole, 12-second packaging body, 13-first cavity, 2-differential pressure sensor, 3-static pressure sensor, 4-digital circuit processing board, 41-data processing chip and 5-metal probe.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
Example 1
As shown in fig. 2 to 4, a differential pressure sensor includes a package case 1, a measuring device and a digital circuit processing board 4, wherein the measuring device and the digital circuit processing board 4 are disposed inside the package case 1, the measuring device is disposed on the digital circuit processing board 4, and a data processing chip 41 is disposed on the digital circuit processing board 4. The measuring device is used for collecting differential pressure signals and static pressure signals, the data processing chip 41 is used for converting the collected differential pressure signals and static pressure signals into corresponding digital signals, and the data circuit processing board is used for transmitting the digital signals output by the data processing chip 41 to the instrument. In particular, the data processing chip 41 is provided with an existing static pressure error correction algorithm, and the static pressure error correction algorithm can correct the differential pressure measurement signal in real time according to the collected differential pressure signal and the static pressure signal, so that the influence of the static pressure error is eliminated, and the measurement accuracy of the packaged differential pressure sensor 2 is improved.
The measuring device comprises a differential pressure sensor 2 and a static pressure sensor 3, and the differential pressure sensor 2 and the static pressure sensor 3 are respectively arranged on the digital circuit processing board 4. The differential pressure sensor 2 is used for acquiring differential pressure signals, and the static pressure sensor 3 is used for acquiring static pressure signals.
The packaging shell 1 comprises a first packaging body 11 and a second packaging body 12, the first packaging body 11 is connected with the outer wall of the second packaging body 12, a first cavity 13 is formed inside the first packaging body, the measuring device is arranged in the first cavity 13 with the digital circuit processing board 4, the digital circuit processing board 4 is positioned at the bottom of the first cavity 13 and close to one side of the second packaging body 12, and the measuring device is connected with the first packaging body 11. The data processing chip 41 is arranged in the stable first cavity 13, so that the interference of external factors such as temperature and humidity is avoided, the transmission loss of analog signals is eliminated, the measurement precision and the measurement stability of the differential pressure sensor 2 are improved, and the differential pressure sensor 2 can stably output actual measured differential pressure signals for a long time.
The high-precision packaged differential pressure sensor 2 further comprises a plurality of metal probes 5, and the metal probes 5 penetrate through the first packaging body 11 and are connected with the digital circuit processing board 4. The digital circuit processing board 4 is connected with an external instrument through a metal probe 5.
The first package body 11 is provided with a plurality of second cavities in a penetrating manner, hollow glass 111 is sintered in the second cavities, and the metal probe 5 penetrates through the hollow glass 111 and is connected to the digital circuit processing board 4.
The outer wall of the first package body 11 is provided with a screw hole 112. The high-precision packaged differential pressure sensor 2 is fixed by the screw hole 112.
The first cavity 13 is filled with silicone oil, and the silicone oil fills the first cavity 13, so that a relatively stable internal environment is maintained.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The differential pressure sensor is characterized by comprising a packaging shell (1), a measuring device and a digital circuit processing board (4), wherein the measuring device and the digital circuit processing board (4) are arranged inside the packaging shell (1), the measuring device is arranged on the digital circuit processing board (4), and a data processing chip (41) is arranged on the digital circuit processing board (4).
2. The differential pressure sensor according to claim 1, characterized in that the measuring means comprise a differential pressure sensor (2) and a static pressure sensor (3), the differential pressure sensor (2) and the static pressure sensor (3) being respectively arranged on the digital circuit processing board (4).
3. The differential pressure sensor according to claim 1, characterized in that the package (1) comprises a first package (11) and a second package (12), the first package (11) is connected with the outer wall of the second package (12) and forms a first cavity (13) inside, the measuring device and the digital circuit processing board (4) are arranged in the first cavity (13), the digital circuit processing board (4) is arranged at the bottom of the first cavity (13) on the side close to the second package (12), and the measuring device is connected with the first package (11).
4. The differential pressure sensor according to claim 3, further comprising a plurality of metal probes (5), the metal probes (5) being connected with the digital circuit processing board (4) through the first package body (11).
5. The differential pressure sensor according to claim 4, wherein a plurality of second cavities are formed through the first packaging body (11), hollow glass (111) is sintered in the second cavities, and the metal probes (5) are connected to the digital circuit processing board (4) through the hollow glass (111).
6. The differential pressure sensor according to claim 3, characterized in that the outer wall of the first packing body (11) is provided with a screw hole (112).
7. Differential pressure sensor according to claim 3, characterized in that the first cavity (13) is filled with silicone oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120977560.8U CN214793591U (en) | 2021-05-08 | 2021-05-08 | Differential pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120977560.8U CN214793591U (en) | 2021-05-08 | 2021-05-08 | Differential pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214793591U true CN214793591U (en) | 2021-11-19 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120977560.8U Active CN214793591U (en) | 2021-05-08 | 2021-05-08 | Differential pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214793591U (en) |
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2021
- 2021-05-08 CN CN202120977560.8U patent/CN214793591U/en active Active
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