JPH04145221A - Flow measuring method for porous static-pressure gas bearing - Google Patents

Abstract

PURPOSE:To improve the measuring accuracy of gas flow by providing a flow meter, a ring elastic body, a spherical bearing and a compression spring, and pressing the ring elastic body at constant pressure to the radial bearing face of a porous static-pressure bearing. CONSTITUTION:A porous gas bearing is formed of an NC robot 60, a flow detecting part B, a flow regulating part C and a work indexing part D. When the flow detecting part B is lowered by an air cylinder 20 and stopped in a specified position, the NC robot 60 is moved to the X-axis (+) side so as to press a ring elastic body 2 to a bearing face 1a, and a compression spring 4 starts its deflection. Then a spherical bearing 3 is moved to the (+) side and stopped in a position taught by the NC robot 60, and the ring elastic body 2 is pressed at constant pressure to the bearing face 1a. At this time, a pin 6 guides the movement of a bracket 5, and the ring elastic body 2 fitted to the bracket 5 is brought into close contact with a measuring part since a piston 7 is supported by the spherical bearing 3 so as to measure the gas passing flow quantity with accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a flow rate measuring means for a porous hydrostatic gas bearing, particularly a cylindrical radial bearing.

[Conventional technology] In order to obtain predetermined bearing performance such as rotational accuracy, load capacity, and bearing rigidity with a porous gas bearing, when gas is supplied to the porous body at a predetermined pressure, it is necessary to It is required that the flow rate of the ejected gas, that is, the flow rate of gas passing through the bearing surface is uniform over the entire bearing surface at a predetermined value. Conventionally, the method for adjusting the flow rate is to impregnate the bearing surface with resin to close the pores of the porous material so that the flow rate is below a predetermined flow rate, and then remove the resin as appropriate with a solvent while measuring the gas flow rate. The flow rate was adjusted to be uniform.

The conventional method for measuring gas flow rate is! As shown in FIG. 10, the measurement was carried out by manually pressing a measuring butt 130 with a ring-shaped elastic body 2 attached to the tip against the radial bearing surface 1a.

[Problem to be solved by the invention] In the conventional method for measuring flow rate on a radial bearing surface, measurement was performed by pressing a measuring pad manually against the inner surface of a cylindrical porous body, which resulted in poor workability and problems. Because the elastic body was not seated properly, the measured values were unstable and it took a long time. Furthermore, since the pressure was applied by hand, the pressing force was not constant and the amount of deformation of the elastic body varied with each measurement, causing problems such as a lack of reproducibility of the measured values.

The present invention has been made in view of the above-mentioned drawbacks of the prior art, and it is an object of the present invention to provide a flow rate measuring means for a radial bearing that can automatically and accurately measure the flow rate on a radial bearing surface.

[Means and effects for solving the problem] In order to achieve the above object, the present invention provides a porous hydrostatic bearing having a predetermined curvature using a flowmeter, a ring-shaped elastic body, a spherical bearing, and a compression spring. By pressing a ring-shaped elastic body at a constant pressure against the radial bearing surface of the porous hydrostatic gas bearing, the gas flow rate through the porous hydrostatic gas bearing can be measured accurately and efficiently.

Embodiment U Fig. 1 is an overall plan view of the device, and Fig. 2 is a side view of the device. (section 0), a flow rate adjustment section (section 0), and a workpiece indexing and pattern indexing section (section D). 70 is an operation section. The NC robot (section A) positions each of the flow rate detection section (section B) and the flow rate adjustment section (section 0) with respect to the radial bearing surface 1a of the porous hydrostatic bearing 1 according to a preset program without adjusting the flow rate. let

Figure 3 (A) shows the external appearance of the porous static pressure gas bearing, and
Figure (B) shows its cross section. 1a is a radial bearing surface, 1
b is a thrust bearing surface, IC is a compressed air supply path, and 1d is an air supply to which a joint is attached. With the above configuration, the rotating body IE (-dotted chain line) is supported by static pressure.

FIG. 4 shows details of the flow rate detection section (section B). Figure 4 (A
) is a plan view, and (8) is a longitudinal sectional view.

1a indicates a radial bearing. 2 is a ring-shaped elastic body, and a soft material such as a silicone O-ring is used. This ring-shaped elastic body 2 is pressed against the bearing surface 1a and collects the gas passing through it. 3 is a spherical bearing, and when the ring-shaped elastic body 2 is pressed against the bearing surface 1a, the elastic body is brought into close contact with the bearing surface. 3a is a movable side bearing, and 3b is a fixed side bearing. 4 is a compression spring;
During measurement, a constant pressure is applied to the bearing surface. Reference numeral 5 denotes a bracket for fixing the ring-shaped elastic body 2, and the mounting surface of the elastic body 2 has an R shape in accordance with the curvature of the radial bearing surface 1a.
It has been processed. The elastic body 2 is fixed to the bracket 5 with adhesive. A plurality of brackets 5 to which the ring-shaped elastic body 2 is attached may be prepared and replaced as appropriate depending on the curvature of the radial bearing surface to be measured. A pin 6 is fixed to the spherical bearing side to prevent rotation of the bracket 5 and guide the spherical bearing 3 during measurement. The bracket 5 is fixedly supported on the piston 7 by a hollow bolt 10. Further, the piston 7 is inserted into the movable part 3a of the spherical bearing and can freely slide in the axial direction. 8 is a joint, and the flow rate sensor 1
．． Connected to 09 by piping. 9 is a gas communication path for collecting and measuring the gas passing flow rate.

In the above configuration, the flow rate detection section 8 is connected to the air cylinder 2o.
(FIG. 2), it descends without contacting the inside of the radial bearing 1 and stops at a predetermined position. Next, the NC robot 60 moves in the X-axis (+) direction and brings the ring-shaped elastic body 2 into contact with the radial bearing surface 1a. Press the body 2. Next, when the pressing force becomes stronger than the compression spring 4, the compression spring 4 begins to bend, the piston 7 becomes a kite, the spherical bearing 3 moves to the (+) side, and stops at the position previously taught by the NC robot 60. . The compression spring 4 presses the elastic body 2 against the bearing surface 1a with a constant pressure. At this time, the pin 6 guides the movement of the bracket 5 and also prevents it from rotating. Furthermore, since the piston 7 is supported by the spherical bearing 3 at this time, the ring-shaped elastic body 2 attached to the bracket 5 is securely brought into close contact with the measuring section, making it possible to accurately measure the flow rate.

The flow rate adjustment section (part 0) is equipped with a spray for applying a solvent and a mask for limiting the range in which the flow rate should be adjusted. Fifth
The details of this part 0 are shown in the figure.

A is a side view, B is a front view, and C is a view taken along the EE' arrow. 1
1 is a spray main body for making the solvent dew and applying a certain amount; 12 is an adjustment knob for adjusting the amount of solvent sprayed; 1
3 is a spray nozzle, and a hole 13a for blowing out the solvent is provided on the side surface of the tip. Reference numeral 14 is a mask for restricting the range in which the flow rate should be adjusted, and prevents the solvent from going around to other parts. 14a is a window for allowing the solvent to pass through the range to be adjusted.

The indexing section (section D) is composed of a pattern indexing section for controlling the amount of solvent applied and a workpiece indexing section for dividing and positioning the workpiece in the circumferential direction. FIG. 6 shows details of the pattern indexing section. Work 1 as shown in the figure
The pattern 17 is manufactured in a cylindrical shape so that the clearance is about 1 mm with respect to the radial bearing 1a, and the pattern 17 is
It is arranged coaxially with respect to a. FIG. 7(A) shows a developed view of the pattern. The pattern 17 has five types of openings (17g to 17k) arranged equally around the circumference. Each opening is provided with a hollow hole 17a having a diameter of approximately 0.5 mm, as shown in FIG. 7(B). Table 1 shows the aperture ratio of each aperture.

Table 1 The pattern 17 is connected to a stepping motor 18 with a reduction gear, and the required opening ratio is determined according to the flow rate.

Further, the pattern indexing section is connected to an air cylinder 21,
When the flow rate is detected, it is released downward.

The 7-7 indexing portion is composed of a small gear 30 and a large gear 40, and the small gear 30 is fitted with the shaft of a reduction gear 31. Further, the reducer 31 is connected to the DC servo motor 3 via a coupling 32.
It is connected to 3. 34 is a motor fixing bracket. Further, the large gear 40 is supported by a cross roller hair ring 41. 42 is a jig for supporting the work 1.

An embodiment of the present invention will be further described with reference to FIG.

FIG. 8 is a block diagram showing the configuration of the device.

In the figure, 60 is an orthogonal two-axis NC robot, which positions the detection pad 2, mask 14, and spray gun 13 with respect to adjustment points on the radial bearing surface 1a. 104
102 is a motor driver of the NC robot 60, and 102 is an NC controller connected to the CPU 114. Memory 115 is connected to CPU 114. memory 11
5 stores a flow rate adjustment control program, and the CPU 1
14 controls a flow rate adjustment operation, which will be described later, based on this program. 22 is an air cylinder for vertically moving the mask and spray; 23 is a solenoid valve for switching the air cylinder 22 up and down; and 24 is a driver for the solenoid valve 23, which is connected to the CPU 114. 25 is a solenoid valve for intermittently feeding compressed air to the spray can 13, and 26 is a driver thereof, which is connected to the CPU 114. 109 is a flow rate sensor that converts the detected flow rate into an electrical signal, and 110 is an A/D converter that converts an analog signal into a digital signal, which is connected to the CPU 114. 27 is a solenoid valve for switching the air cylinder 20;
28 is a driver for the solenoid valve 27 and is connected to the CPU 114. 29 is a motor driver for operating the surf motor 33, and is connected to the CPU 1114.

43 indicates ON/O of compressed air supplied to the porous hydrostatic bearing 1.
A solenoid valve 44 for switching the FF is a driver for the solenoid valve 43 and is connected to the CPU 114 . 45 is a driver for the motor 18 that drives the pattern 17;
Connected to U114. 21 is an air cylinder for raising and lowering the pattern split part, 46 is a solenoid valve for switching between raising and lowering the cylinder, and 47 is a driver for the solenoid valve 46, which is connected to the CPU 14.

101 is a compressed air source compressor, which is connected to each of the above-mentioned solenoid valves.

Next, the operation of the above-mentioned component device will be explained.

A workpiece (bearing) 1 is set on a large gear 40 using a jig. The tla valve is set to 4 valves and the pipe is set to 3, and compressed air is supplied to the workpiece 1. Next, connect the flow rate detection section (detection pad 2) to the CPU1.
14 to a pre-taught start point (a position where it can be inserted into the bearing 1).

At this position, the solenoid valve 27 is switched, the cylinder 20 is operated, and the flow rate pressure detection part is lowered to the inside of the radial bearing 1.

Further, the NC robot 60 receives a command from the CPU 114.
moves in the X-axis direction, the pad 2 is pressed against the radial bearing surface 1a, and the flow rate is detected. At this time, the pattern 17 descends and is in a retracted state away from the radial bearing surface downward in the figure. The detected flow rate is converted into an electrical signal by the flow rate sensor 109, and then converted into a digital signal by the A/D converter 110 and sent to the CPU 114. Next, the solenoid valve 27 is switched, the cylinder 20 is operated, and the detection section is raised.

The CPUI 14 generates an appropriate pattern 17 using a pre-programmed calculation method based on the captured flow rate data.
(Fig. 7) is selected. Next, the CPU 114 issues a command to the driver 45 to operate the motor 18 and index the selected pattern 17. Furthermore, the solenoid valve 46
is switched, the cylinder 21 operates, and the pattern 17 rises and is inserted into the radial bearing 1. Next, a command is issued to the NC robot 60, and the positions of the mask 14 and the flow rate detection section 2 are switched to the previously taught positions. Further, a command is issued from the CPU 114, the solenoid valve 23 is switched, the cylinder 22 is operated, and the mask 14 and spray 13 are lowered. Further, the electromagnetic valve 25 is operated intermittently to supply compressed air to the spray gun body 11, and the solvent is atomized from the tip of the nozzle 13 and sprayed onto the radial bearing surface 1a via the mask 14 and the pattern 17. The state of this solvent spraying is shown in FIG. Spray nozzle 13 and mask 1
4 is inserted inside the pattern 17.

Next, the solenoid valves 23 and 46 are switched simultaneously, and the cylinder 22
．． 21 is operated, the mask 14 and the spray 13' are raised, and the pattern indexing section is lowered. Furthermore, a command is issued to the robot to switch the positions of the detection part, mask, and spray part, and detect the flow rate after spraying.

The above operation is repeated to complete the flow rate detection in the previously set flow rate range. Next, the detection pad 2 is moved to the escape position, and the NC robot 60 is moved downward to slide the detection section downward to position the bearing 1 at the next point (next measurement range) along the vertical direction. Here, the same adjustment as above is carried out, and when the adjustment of all the vertical division points is completed, the detection unit is moved upward, and the CPU 114 to 21
The command is sent to the motor driver, the servo motor 33 is operated, and the next point in the circumferential direction of the radial bearing surface 1a is indexed. The above operations are repeated in sequence, and when the flow rate adjustment is completed at all divided points, the initial state is returned and all operations are completed.

[Effects of the Invention] As explained above, according to the present invention, it is possible to reliably and accurately measure the flow rate of a porous hydrostatic gas bearing, and to automatically and continuously adjust the flow rate, thereby reducing costs by reducing the number of work steps. and uniform quality can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing the configuration of an embodiment of the present invention, FIG. 2 is a side view showing the configuration of the embodiment of FIG. 1, and FIGS.
) are an external view and a cross-sectional view of the porous hydrostatic gas bearing, respectively. Figures 4 (A) and (B) are a plan view and a vertical cross-sectional view of the flow rate detection section, respectively. Figures 5 (A), (B), and (C) are respectively are a side view, a front view, and a cross-sectional view of the spray and mask, respectively, Figure 6 is an external view of the pattern and porous hydrostatic bearing, and Figure 7 (
A) and (B) are a developed view of the pattern and a detailed view of the small hole, respectively. Figure 8 is a block diagram showing the configuration of the embodiment of the present invention. Figure 9 is an external view of the embodiment of the present invention during solvent application. , FIG. 10 is an explanatory diagram of the prior art. 1. Porous static pressure gas bearing, 2. Ring-shaped elastic body, 11. Nispre gun body, 13. Nispre gun body, 13. Nispre gun body, 14. Mask, 17. Pattern, 60: Orthogonal Z-axis (X, Z) NC robot, 10. Compressor. Patent Applicant Canon Co., Ltd. Representative Patent Attorney Tetsuya Ito Representative Patent Attorney Tatsuo Ito Figure fi (A) Figure (B) Figure (A) (B) Figure (C) Figure Ko (A) Figure (B) Figure 1r

Claims (3)

[Claims] (1) The flow rate detection section connected to the flow rate measurement means is connected to the radial bearing surface inside the cylindrical porous hydrostatic gas bearing through a ring-shaped elastic body using a compression spring and a guide means in a constant direction at a constant pressure. 1. A method for measuring a flow rate of a porous hydrostatic gas bearing, characterized in that the permeation flow rate of the bearing is detected through the ring-shaped elastic body. (2) The static pressure gas bearing is attached to a measurement position indexing means that is rotatable around the axis, and the flow rate detection section is attached to a positioning means that is movable in the Z direction along the axis and the X direction perpendicular to the axis. 2. A method for measuring a flow rate of a porous hydrostatic gas bearing according to claim 1, wherein the porous hydrostatic gas bearings are connected. (3) The method for measuring a flow rate in a porous hydrostatic gas bearing according to claim 1, wherein the flow rate detection section comprises a piston through which a gas passage passes and a spherical bearing into which the piston is inserted.