JPH0414489U - - Google Patents

Info

Publication number
JPH0414489U
JPH0414489U JP5521390U JP5521390U JPH0414489U JP H0414489 U JPH0414489 U JP H0414489U JP 5521390 U JP5521390 U JP 5521390U JP 5521390 U JP5521390 U JP 5521390U JP H0414489 U JPH0414489 U JP H0414489U
Authority
JP
Japan
Prior art keywords
pair
conductors
electrostatic
adsorption layer
adsorption device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5521390U
Other languages
English (en)
Japanese (ja)
Other versions
JP2516020Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990055213U priority Critical patent/JP2516020Y2/ja
Publication of JPH0414489U publication Critical patent/JPH0414489U/ja
Application granted granted Critical
Publication of JP2516020Y2 publication Critical patent/JP2516020Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1990055213U 1990-05-25 1990-05-25 静電吸着装置 Expired - Lifetime JP2516020Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990055213U JP2516020Y2 (ja) 1990-05-25 1990-05-25 静電吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990055213U JP2516020Y2 (ja) 1990-05-25 1990-05-25 静電吸着装置

Publications (2)

Publication Number Publication Date
JPH0414489U true JPH0414489U (US06272168-20010807-M00014.png) 1992-02-05
JP2516020Y2 JP2516020Y2 (ja) 1996-11-06

Family

ID=31577963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990055213U Expired - Lifetime JP2516020Y2 (ja) 1990-05-25 1990-05-25 静電吸着装置

Country Status (1)

Country Link
JP (1) JP2516020Y2 (US06272168-20010807-M00014.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6164637A (ja) * 1984-09-07 1986-04-03 Fuji Xerox Co Ltd 給紙装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6164637A (ja) * 1984-09-07 1986-04-03 Fuji Xerox Co Ltd 給紙装置

Also Published As

Publication number Publication date
JP2516020Y2 (ja) 1996-11-06

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