JPH0413950U - - Google Patents

Info

Publication number
JPH0413950U
JPH0413950U JP5577690U JP5577690U JPH0413950U JP H0413950 U JPH0413950 U JP H0413950U JP 5577690 U JP5577690 U JP 5577690U JP 5577690 U JP5577690 U JP 5577690U JP H0413950 U JPH0413950 U JP H0413950U
Authority
JP
Japan
Prior art keywords
photomask
corner
mounting
frame
exposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5577690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5577690U priority Critical patent/JPH0413950U/ja
Publication of JPH0413950U publication Critical patent/JPH0413950U/ja
Pending legal-status Critical Current

Links

JP5577690U 1990-05-28 1990-05-28 Pending JPH0413950U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5577690U JPH0413950U (US20100056889A1-20100304-C00004.png) 1990-05-28 1990-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5577690U JPH0413950U (US20100056889A1-20100304-C00004.png) 1990-05-28 1990-05-28

Publications (1)

Publication Number Publication Date
JPH0413950U true JPH0413950U (US20100056889A1-20100304-C00004.png) 1992-02-04

Family

ID=31579029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5577690U Pending JPH0413950U (US20100056889A1-20100304-C00004.png) 1990-05-28 1990-05-28

Country Status (1)

Country Link
JP (1) JPH0413950U (US20100056889A1-20100304-C00004.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61264725A (ja) * 1985-05-17 1986-11-22 Nec Corp ステツプ・アンド・リピ−ト用軟x線転写マスク及びその製造方法
JPS6236670A (ja) * 1985-08-12 1987-02-17 Matsushita Electronics Corp フオトマスク用基板保持装置
JPH0294428A (ja) * 1988-09-30 1990-04-05 Canon Inc X線マスク構造体

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61264725A (ja) * 1985-05-17 1986-11-22 Nec Corp ステツプ・アンド・リピ−ト用軟x線転写マスク及びその製造方法
JPS6236670A (ja) * 1985-08-12 1987-02-17 Matsushita Electronics Corp フオトマスク用基板保持装置
JPH0294428A (ja) * 1988-09-30 1990-04-05 Canon Inc X線マスク構造体

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