JPH04139034A - Formation of unevenness on surface of glass - Google Patents
Formation of unevenness on surface of glassInfo
- Publication number
- JPH04139034A JPH04139034A JP25991890A JP25991890A JPH04139034A JP H04139034 A JPH04139034 A JP H04139034A JP 25991890 A JP25991890 A JP 25991890A JP 25991890 A JP25991890 A JP 25991890A JP H04139034 A JPH04139034 A JP H04139034A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- molten salt
- monovalent
- magnetic recording
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 60
- 230000015572 biosynthetic process Effects 0.000 title description 2
- 150000003839 salts Chemical class 0.000 claims abstract description 30
- 150000001768 cations Chemical class 0.000 claims abstract description 22
- 229910002651 NO3 Inorganic materials 0.000 claims abstract description 6
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims abstract description 6
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims abstract description 6
- 238000005530 etching Methods 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims abstract description 5
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 claims abstract description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 18
- 239000007864 aqueous solution Substances 0.000 claims description 3
- -1 cation carbonate Chemical class 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 description 22
- 150000002500 ions Chemical class 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 239000005329 float glass Substances 0.000 description 3
- 150000002823 nitrates Chemical class 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 229910000420 cerium oxide Inorganic materials 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 2
- 239000004323 potassium nitrate Substances 0.000 description 2
- 235000010333 potassium nitrate Nutrition 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910001415 sodium ion Inorganic materials 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910001422 barium ion Inorganic materials 0.000 description 1
- 229910001417 caesium ion Inorganic materials 0.000 description 1
- 229910001424 calcium ion Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910001425 magnesium ion Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001427 strontium ion Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
- C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
- C03C21/002—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は、ガラス基板の表面に微細な凹凸を形成する方
法に関し、とりわけ磁気記録ディスクの基板として使用
するのに適したガラス基板を製造する方法に関する。Detailed Description of the Invention "Industrial Application Field" The present invention relates to a method for forming fine irregularities on the surface of a glass substrate, and in particular to manufacturing a glass substrate suitable for use as a substrate for a magnetic recording disk. Regarding the method.
「従来の技術」
磁気ディスク用基板と、その上に形成した磁性膜および
保護膜からなる構成体は磁気記録媒体と呼ばれ、磁気記
録装置は磁気記録媒体と記録再生用の磁気ヘッドを主構
成部とする。この磁気記録装置は操作開始時には磁気記
録媒体と磁気ヘッドとは接触状態にあり、磁気記録媒体
に所要の回転を与えることにより、磁気記録媒体と磁気
記録へノドとの間に空気層をからなる空間をつくり、こ
の状態で記録再生を行う。そして操作終了時には磁気記
録媒体の回転を停止し操作開始時と同じ状態になる。操
作の開始時および停止時には磁気ディスクと磁気ヘッド
との間には、接触摩擦力が生じ、磁気記録媒体と磁気へ
ノドの接触面が摩耗して磁気特性の劣化原因となる。
(この一連の動作方式をフンタクト・スタート・スト、
プ略してCSSと称している。)
ところで、湿分がある雰囲気中で磁気記録媒体を放置し
ておくと、磁気記録媒体表面に水分が吸着する。この状
態では、磁気へノドは磁気記録媒体表面にくっついてし
まい、操作開始時に大きな抵抗力が生じて磁気へノドの
損傷や磁気記録媒体の破壊を招くという問題がある。"Prior Art" A structure consisting of a magnetic disk substrate, a magnetic film and a protective film formed thereon is called a magnetic recording medium, and a magnetic recording device mainly consists of a magnetic recording medium and a magnetic head for recording and reproducing. Department. In this magnetic recording device, the magnetic recording medium and the magnetic head are in contact at the start of operation, and by applying the required rotation to the magnetic recording medium, an air layer is created between the magnetic recording medium and the magnetic recording head. Create a space and perform recording and playback in this state. At the end of the operation, the rotation of the magnetic recording medium is stopped and the state is the same as at the start of the operation. At the start and stop of operation, a contact friction force is generated between the magnetic disk and the magnetic head, and the contact surface between the magnetic recording medium and the magnetic head is worn out, causing deterioration of magnetic properties.
(This series of operations can be described as
It is abbreviated as CSS. ) By the way, if a magnetic recording medium is left in a humid atmosphere, moisture will be adsorbed onto the surface of the magnetic recording medium. In this state, the magnetic nodal sticks to the surface of the magnetic recording medium, creating a large resistance force at the start of operation, resulting in damage to the magnetic nodal and destruction of the magnetic recording medium.
ガラス基板は平滑性が優れて高密度記録を行う上では良
好な基板であるが、上記の耐C8S性が良くないという
問題がある。かかるガラス基板が有する問題点を解決す
るために基板表面に凹凸を形成したガラス基板が考えら
れ、表面に凹凸を形成する方法としては、たとえば機械
的手段で微小な凹凸を形成する方法(特開昭53−12
3906号公報)や、酸水溶液によりガラス表面をエツ
チングして表面に凹凸を形成する方法(特開昭60−1
36035号公報)や、両者を組み合わせた方法(特開
昭63−160010)が開示されている。Glass substrates have excellent smoothness and are suitable for high-density recording, but they have the problem of poor C8S resistance. In order to solve the problems of such glass substrates, a glass substrate with irregularities formed on the surface of the substrate has been considered.As a method of forming irregularities on the surface, for example, a method of forming minute irregularities by mechanical means (Japanese Patent Application Laid-Open No. Showa 53-12
3906) and a method of etching the glass surface with an acid aqueous solution to form irregularities on the surface (Japanese Patent Application Laid-open No. 60-1
36035) and a method combining the two (Japanese Patent Application Laid-Open No. 160010/1983).
「発明が解決しようとする課題」
上記機械的方法では、ガラス基板表面に微小クラックが
発生してガラスの強度が低下したり、クラックに汚れが
入り込み磁気特性を劣化せせるという問題があり、これ
らの問題の発生を少なくするためには粒度の小さい砥粒
で長時間研磨しなければならないという問題があった。``Problems to be Solved by the Invention'' The mechanical method described above has the problem that microcracks occur on the surface of the glass substrate, reducing the strength of the glass, and that dirt enters the cracks, degrading the magnetic properties. In order to reduce the occurrence of problems, there has been a problem in that polishing must be performed for a long time using abrasive grains with small grain size.
また、上記の酸溶液を用いる方法では、あらかじめ金属
層を形成し熱処理をする必要があり、工程が複雑である
という問題点があった。Furthermore, the method using the acid solution described above has the problem that it is necessary to form a metal layer in advance and perform heat treatment, making the process complicated.
さらに両者を組み合わせる上記の方法では、工程が複数
になり、さらに弗化水素酸濃度を厳密に管理せねばなら
ず表面凹凸形成の再現性がよくないという問題点があっ
た。Furthermore, the above-mentioned method in which the two are combined requires a plurality of steps, and the hydrofluoric acid concentration must be strictly controlled, resulting in poor reproducibility of surface unevenness formation.
本発明の目的は、上記の従来の方法が有する問題点を解
決し、磁気記録用のガラス基板に適した凹凸をガラス表
面に形成する方法を提供するものである。An object of the present invention is to solve the problems of the above-mentioned conventional methods and to provide a method for forming irregularities on a glass surface suitable for a glass substrate for magnetic recording.
「課題を解決するための手段J
本発明は、1価の陽イオ/の硝酸塩、2価の陽イオ/の
硝酸塩、1価の陽イオンの硫酸塩、2価の陽イオンの硫
a!塩の少なくとも一つを含むアルカリ性の溶融塩にガ
ラス表面を接触させ、前記ガラス表面をエツチングする
ことより、ガラス表面に凹凸を形成する方法である。Means for Solving the Problems J The present invention provides monovalent cation/nitrates, divalent cation/ nitrates, monovalent cation sulfates, and divalent cation sulfate a! This is a method of forming irregularities on the glass surface by bringing the glass surface into contact with an alkaline molten salt containing at least one of the above and etching the glass surface.
本発明にかかる溶融塩としては、1価の陽イオンの硝酸
塩、2価の陽イオンの硝酸塩、1価の陽イオンの硫酸塩
、2価の陽イオンの硫酸塩の少なくとも一つを含み、か
つ、加熱されて溶融状態にあるアルカリ性を呈する塩で
ある。1価の陽イオンとしてはLlイオン、Naイオン
、Kイオン。The molten salt according to the present invention contains at least one of a nitrate of a monovalent cation, a nitrate of a divalent cation, a sulfate of a monovalent cation, and a sulfate of a divalent cation, and , is a salt that exhibits alkalinity when heated and in a molten state. Monovalent cations include Ll ions, Na ions, and K ions.
Csイオン、TIイオンが例示でき、2価の陽イオンと
してはMgイオン、Caイオン、Baイオン、Srイオ
ン、Pbイオン、Cuイオンが例示できる。なかでもガ
ラスを早くエツチングし凹凸を形成する時間を短くする
上で、Naイオンやにイオンの硝酸塩が好ましい。Examples include Cs ions and TI ions, and examples of divalent cations include Mg ions, Ca ions, Ba ions, Sr ions, Pb ions, and Cu ions. Among these, nitrates of Na ions and ions are preferred because they can quickly etch the glass and shorten the time it takes to form unevenness.
また、本発明の溶融塩は、ガラス表面と接触してガラス
をエツチングすることによりガラス表面に凹凸を形成す
るためにアルカリ性であることが必要である。溶融塩を
アルカリ性にするためには、1価または2価の陽イオ/
の水酸化物、2価または2価の陽イオンの炭酸塩、1価
または2価の陽イオンの重炭酸塩の少なくとも一つを溶
融塩に添加することができる。また溶融塩を熱分解して
アルカリ性にするカーボン粉末や炭化珪素粉末などの炭
素含有物を添加することもできる。とりわけ水酸化カリ
ウムや水酸化ナトリウムは、ガラスの表面に残りかすを
呈することなく清浄な表面が得られるので好ましい。Further, the molten salt of the present invention needs to be alkaline in order to form irregularities on the glass surface by etching the glass by coming into contact with the glass surface. In order to make the molten salt alkaline, monovalent or divalent cations/
hydroxide, a carbonate of a divalent or divalent cation, and a bicarbonate of a monovalent or divalent cation can be added to the molten salt. It is also possible to add a carbon-containing substance such as carbon powder or silicon carbide powder that thermally decomposes the molten salt to make it alkaline. Particularly, potassium hydroxide and sodium hydroxide are preferable because they provide a clean surface without leaving any residue on the glass surface.
本発明の溶融塩のアルカリ性の強さは、冷却した溶融塩
3gを水100m1に溶かした水溶液のpHが10以上
であることが、凹凸の形成を短時間でおこなう上で好ま
しく、さらには11以上であることがさらに好ましい。Regarding the alkalinity strength of the molten salt of the present invention, it is preferable that the pH of an aqueous solution prepared by dissolving 3 g of the cooled molten salt in 100 ml of water is 10 or more, in order to form unevenness in a short time, and more preferably 11 or more. It is more preferable that
アルカリ性の強さの上限は、ガラス基板を大きく侵食し
ない範囲で定められ、その上限はガラスの組成により異
なり、−a的に定めることは困難である。The upper limit of the strength of alkalinity is determined within a range that does not significantly corrode the glass substrate, and the upper limit varies depending on the composition of the glass, and is difficult to set in terms of -a.
溶融塩の加熱温度は、使用する溶融塩の組成により異な
るが、通常350〜600℃でおこなわれる。The heating temperature of the molten salt varies depending on the composition of the molten salt used, but heating is usually carried out at 350 to 600°C.
磁気ディスク用のガラス基板に要求される表面凹凸とす
るには、硝酸カリウムに1価の水酸化物を添加した溶融
塩を用いるのがもっとも好ましい。In order to obtain the surface roughness required for a glass substrate for a magnetic disk, it is most preferable to use a molten salt prepared by adding a monovalent hydroxide to potassium nitrate.
このとき溶融塩と空気中の炭酸ガスとの接触を避けて水
酸化物が経時的に変質するのを防止することが好ましい
。At this time, it is preferable to avoid contact between the molten salt and carbon dioxide gas in the air to prevent the hydroxide from deteriorating over time.
溶融塩とガラス表面とを接触する方法はとくに限定され
ないが、溶融塩中にガラス基板を漬ける方法やガラス基
板の上に塩を塗布し、その後ガラス基板を加熱する方法
などを用いることができる。The method of bringing the molten salt into contact with the glass surface is not particularly limited, but methods such as immersing the glass substrate in molten salt, applying salt onto the glass substrate, and then heating the glass substrate, etc. can be used.
また、溶融塩中に含まれる陽イオンのイオン半径をガラ
ス中のアルカリイオンのイオン半径よりも大きく選ぶこ
とにより、エツチングによる表面凹凸の形成と同時に、
表面近傍に圧縮応力層を形成して機械的強度を大きくす
ることができる。In addition, by selecting the ionic radius of the cations contained in the molten salt to be larger than the ionic radius of the alkali ions in the glass, it is possible to simultaneously form surface irregularities by etching.
Mechanical strength can be increased by forming a compressive stress layer near the surface.
本発明に用いられるガラス基板としては、とくにその組
成が限定されない。ソーダライム組成のフロートガラス
や硼珪酸組成のガラスを用いることができる。The composition of the glass substrate used in the present invention is not particularly limited. Float glass having a soda lime composition or glass having a borosilicate composition can be used.
本発明の方法は、太陽電池用用のガラス基板表面の微細
凹凸の形成や無反射ガラスとするための表面の凹凸の形
成にも用いることができる。The method of the present invention can also be used to form fine irregularities on the surface of a glass substrate for solar cells, and to form irregularities on the surface for making non-reflective glass.
「作用J
本発明にかかる溶融塩中に含まれるアルカリ性゛成分は
、溶融塩が接触するガラス表面を迅速にエツチングする
。これによりに表面凹凸が形成される。Function J: The alkaline component contained in the molten salt according to the present invention rapidly etches the glass surface with which the molten salt comes into contact.As a result, surface irregularities are formed.
「実施例」
以下に実施例に基づいて本発明を説明する。第1図は、
本発明の実施により得られたガラス表面の電子顕微鏡観
察から、ガラス表面の形状を模式的に表した図で、策1
図(a)はガラス基板の表面を上からみた図、第1図(
b)はガラス基板の断面図である。"Examples" The present invention will be described below based on Examples. Figure 1 shows
This is a diagram schematically representing the shape of the glass surface obtained from electron microscopic observation of the glass surface obtained by implementing the present invention.
Figure (a) is a view of the surface of the glass substrate viewed from above, and Figure 1 (
b) is a cross-sectional view of the glass substrate.
実施例
ソーダライム組成のフロートガラス板を円盤状に切断し
、ガラス表面を微小の酸化セリウム粉末を@濁したう、
ピング液により平滑にし、さらにエツジ部分を面取り加
工をして円盤ガラスとした。Example A float glass plate having a soda lime composition was cut into disk shapes, and the glass surface was clouded with fine cerium oxide powder.
It was smoothed with a ping solution, and the edges were chamfered to create a disk glass.
この円盤ガラスを、窒素ガス雰囲気中で420℃に加熱
した1重量%の水酸化カリウムを含む硝酸カリウムの溶
融塩に3分間漬けて、その後取り出した。この溶融塩を
冷却しその3gを採取し、 100m1の水に溶かして
溶液をつくった。この溶液のpHを測定したところ12
.5であった。得られた円盤ガラスを洗浄して走査型電
子顕微鏡でガラス表面を観察した結果、直径が0. 1
〜1μmの凹部が多数形成され、それにより形成された
表面の凹凸を走査型電子顕微鏡により中心線平均平方根
粗さR1で評価したところ約4OAであった。This disk glass was immersed for 3 minutes in a molten salt of potassium nitrate containing 1% by weight potassium hydroxide heated to 420° C. in a nitrogen gas atmosphere, and then taken out. This molten salt was cooled, 3 g of it was collected, and dissolved in 100 ml of water to prepare a solution. The pH of this solution was measured and was 12.
.. It was 5. The obtained glass disk was washed and the surface of the glass was observed using a scanning electron microscope. As a result, the diameter was 0. 1
A large number of concave portions of ~1 μm were formed, and the surface roughness thus formed was evaluated by a center line root mean square roughness R1 using a scanning electron microscope, and was found to be approximately 4 OA.
ガラス表面は、模式的に第1図(a)、 (b)に示す
ように磁気記録媒体のガラス基板として好ましい、すな
わち突起部分がない形状を呈していた。As schematically shown in FIGS. 1(a) and 1(b), the glass surface had a shape suitable for a glass substrate of a magnetic recording medium, that is, a shape without protrusions.
この円盤ガラスにスパッタリング法により150nmの
Crの下地膜および50nmのCo系磁性膜を順次形成
し、最後に38nmの厚みのカーボンの保護膜を形成し
た。このようにして得た磁気記録媒体について、耐C8
Sテストを実施したところ、3万回以上のC8Sテスト
後も磁気出力は初期値の90%以上であった。A 150 nm Cr base film and a 50 nm Co based magnetic film were sequentially formed on this disk glass by sputtering, and finally a 38 nm thick carbon protective film was formed. Regarding the magnetic recording medium obtained in this way, the resistance to C8
When the S test was conducted, the magnetic output was still 90% or more of the initial value even after more than 30,000 C8S tests.
比較例
実施例と同じようにしてソーダライム組成のフロートガ
ラス板を円盤状に切断し、ガラス表面を微小の酸化セリ
ウム粉末をl!A濁したう、ピッグ液によりガラス表面
を平滑にし、さらに工、ジ部分を面取り加工して円盤ガ
ラスとした。Comparative Example A float glass plate with a soda lime composition was cut into disks in the same manner as in the example, and the glass surface was coated with a small amount of cerium oxide powder. The surface of the glass was smoothed using pig solution, and the edges were chamfered to form a disk glass.
この円盤ガラスに実施例と同じ方法で150nmのCr
の下地膜および50nmのCo系磁性膜を順次形成し、
最後に38nmの厚みのカーボンの保護膜を形成した。This disk glass was coated with 150 nm of Cr by the same method as in the example.
A base film and a 50 nm Co-based magnetic film are sequentially formed.
Finally, a carbon protective film with a thickness of 38 nm was formed.
このようにして得た磁気記録媒体について、耐C8Sテ
ストを実施したところ、3千回でC5Sテスト後も磁気
出力は初期値より太き(低下した。When the magnetic recording medium thus obtained was subjected to a C8S resistance test, the magnetic output remained thicker (lower) than the initial value even after the C5S test after 3,000 cycles.
「発明の効果」
本発明によれば磁気記録媒体用のガラス基板に適した表
面凹凸を単一工程でかつ短時間にガラス表面に形成する
ことができる。また本方法は大量処理が可能で、かつ、
弗酸の液を用いないので酸廃液処理設備を必要とせず経
済性が優れている。"Effects of the Invention" According to the present invention, surface irregularities suitable for a glass substrate for a magnetic recording medium can be formed on a glass surface in a single step and in a short time. In addition, this method is capable of mass processing, and
Since no hydrofluoric acid solution is used, there is no need for acid waste treatment equipment, making it highly economical.
第1図は本発明の実施により得られるガラス基板の表面
形状を説明するための図で、第1図(a)は平面図、第
1図(1))は断面図である。
特許 出願人 日本板硝子株式会社(a)
第
図
平成3年2月8日FIG. 1 is a diagram for explaining the surface shape of a glass substrate obtained by implementing the present invention, with FIG. 1(a) being a plan view and FIG. 1(1) being a sectional view. Patent Applicant Nippon Sheet Glass Co., Ltd. (a) Figure February 8, 1991
Claims (1)
、1価の陽イオンの硫酸塩、2価の陽イオンの硫酸塩の
少なくとも一つを含むアルカリ性の溶融塩にガラス表面
を接触させ、前記ガラス表面をエッチングすることより
、ガラス表面に凹凸を形成する方法。 2)前記溶融塩は、1価または2価の陽イオンの水酸化
物、1価または2価の陽イオンの炭酸塩、1価または2
価の陽イオンの重炭酸塩の群からなる塩の少なくと一つ
が添加されてアルカリ性に調整されていることを特徴と
する特許請求範囲第1項に記載のガラス表面に凹凸を形
成する方法。 3)前記溶融塩のアルカリ性が、前記溶融塩を3%水溶
液としたときに、pHが10以上であることを特徴とす
る特許請求範囲第1項または第2項に記載のガラス表面
に凹凸を形成する方法。[Claims] 1) An alkaline melt containing at least one of a nitrate of a monovalent cation, a nitrate of a divalent cation, a sulfate of a monovalent cation, and a sulfate of a divalent cation. A method of forming irregularities on a glass surface by bringing the glass surface into contact with salt and etching the glass surface. 2) The molten salt is a hydroxide of a monovalent or divalent cation, a carbonate of a monovalent or divalent cation, or a monovalent or divalent cation carbonate.
2. The method for forming irregularities on a glass surface according to claim 1, wherein at least one salt from the group of bicarbonates of valent cations is added to adjust the alkalinity. 3) The alkalinity of the molten salt is such that when the molten salt is made into a 3% aqueous solution, the pH is 10 or more. How to form.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2259918A JP2917480B2 (en) | 1990-09-29 | 1990-09-29 | Method for forming irregularities on glass substrate surface for magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2259918A JP2917480B2 (en) | 1990-09-29 | 1990-09-29 | Method for forming irregularities on glass substrate surface for magnetic recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04139034A true JPH04139034A (en) | 1992-05-13 |
JP2917480B2 JP2917480B2 (en) | 1999-07-12 |
Family
ID=17340740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2259918A Expired - Lifetime JP2917480B2 (en) | 1990-09-29 | 1990-09-29 | Method for forming irregularities on glass substrate surface for magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2917480B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012528775A (en) * | 2009-06-03 | 2012-11-15 | エージーシー グラス ユーロップ | Glass processing method |
JP2013512179A (en) * | 2009-12-01 | 2013-04-11 | サン−ゴバン グラス フランス | Surface structuring method by reactive ion beam etching, structured surface and utilization |
US9371250B2 (en) | 2009-12-01 | 2016-06-21 | Saint-Gobain Glass France | Method for structuring a surface by means of ion-beam etching, structured surface and uses |
CN109803938A (en) * | 2016-09-30 | 2019-05-24 | Agc株式会社 | The manufacturing method of chemically reinforced glass |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113905995A (en) | 2019-05-31 | 2022-01-07 | 康宁股份有限公司 | Etching of glass and glass ceramic materials in molten salts containing hydroxide |
-
1990
- 1990-09-29 JP JP2259918A patent/JP2917480B2/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012528775A (en) * | 2009-06-03 | 2012-11-15 | エージーシー グラス ユーロップ | Glass processing method |
JP2013512179A (en) * | 2009-12-01 | 2013-04-11 | サン−ゴバン グラス フランス | Surface structuring method by reactive ion beam etching, structured surface and utilization |
US9371250B2 (en) | 2009-12-01 | 2016-06-21 | Saint-Gobain Glass France | Method for structuring a surface by means of ion-beam etching, structured surface and uses |
CN109803938A (en) * | 2016-09-30 | 2019-05-24 | Agc株式会社 | The manufacturing method of chemically reinforced glass |
CN109803938B (en) * | 2016-09-30 | 2022-07-12 | Agc株式会社 | Method for producing chemically strengthened glass |
Also Published As
Publication number | Publication date |
---|---|
JP2917480B2 (en) | 1999-07-12 |
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