JPH04138209A - Slicing device - Google Patents

Abstract

PURPOSE:To improve the accuracy of finishing, and to conduct dressing at a proper period by providing a blade deflection-quantity detecting means to a section near the inlet section, a section near the outlet section and a section near the central section of a work cutting section and adjusting the deflection of the whole blade on the basis of the results of these detection. CONSTITUTION:One blade deflection-quantity detecting sensor 20 arranged at a position oppositely faced to the surface 10a of a blade 10 is disposed near the inlet section of the work cutting section of the blade 10 and the other blade deflection-quantity detecting sensor 21 near the outlet section of the work cutting section of the blade 10, and a residual blade deflection-quantity detecting sensor 24 is arranged near the central section of the work cutting section of the blade 10 while being oppositely faced to the rear 10b of the blade 10. The number of revolution of a tension disc 9 is controlled on the basis of the results of detection of the central section sensor 24 and deflection in the axial direction of the whole blade 10 is adjusted, and the feed rate of cutting is also controlled on the basis of the results of detection of each sensor 20, 21, 24 and the deflection of the whole blade 10 is regulated.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a slicing apparatus for cutting a workpiece, such as a semiconductor ingot, into thin pieces, such as a semiconductor wafer.

[Conventional technology]

Conventionally, as a slicing device, one end of the workpiece is faced inside a blade having a circular inner peripheral edge, and while the blade is rotated, the blade or the workpiece is cut and fed in the radial direction of the blade. , a device configured to cut one end of the work to cut out a thin piece is known.

This slicing device has a problem in that the blade tends to bend during cutting, which leads to a decrease in processing accuracy.

Therefore, as shown in, for example, Japanese Utility Model Application Publication No. 62-70904, Japanese Patent Application Publication No. 1182011, etc., a blade deflection amount detection sensor that detects the deflection amount of the blade and a detection result of this blade deflection amount detection sensor are used. A blade deflection adjusting means for adjusting the deflection of the entire blade in the axial direction is provided, and when deflection occurs in the blade, the deflection can be detected by a blade deflection amount detection sensor and corrected by the blade deflection adjusting means. has been fully developed.

As shown in FIG. 6, all of the above-mentioned conventional devices set the blade deflection amount detection sensor 29 at a position that avoids the trajectory C along which the workpiece 30 moves by cutting feed, and at the workpiece cutting site (P) of the blade 10. The blade deflection amount detection sensor 2 is provided only at one location near the inlet P1 of ~P2 >, that is, near the upstream end P1 in the rotational direction (direction of arrow B in the figure).
The deflection of the entire blade 10 is adjusted in the axial direction based only on the detection result of 9.

[Problem to be solved by the invention]

During cutting, the blade 10 moves toward the entrance portion P1 of the workpiece cutting site.
Even if there is almost no bending in the vicinity, there may be a large bending in the vicinity of the outlet portion (downstream end in the rotational direction) P2 or the center portion P3 of the workpiece cutting site.

However, in the configuration of the conventional device described above, the inlet portion P1
Only the nearby deflecting darkness can be detected, and the entrance part P
Since the deflection of the entire blade 10 is adjusted in the axial direction based only on the detection results in one vicinity, the deflection of the entire blade 10 cannot be corrected correctly, leading to a decrease in processing accuracy.

In addition, in the conventional device described above, even if the sharpness of the inner circumferential blade 11 decreases, the deflection of the blade 10 becomes large and the machining accuracy deteriorates. If the size increases, the inner peripheral blade 11 is dressed to restore its sharpness. However, in the past, the dressing timing with the dressing # device was controlled only based on the detection results of the blade deflection detection sensor 29 installed near the entrance P1. The dressing timing is not controlled to accurately reflect the deflection of the blade 10, resulting in problems such as dressing not being performed when necessary or dressing being performed more than necessary.

In view of the above circumstances, it is an object of the present invention to provide a slicing apparatus that can improve processing accuracy and perform dressing at an appropriate time.

Means for Solving Problem C) The slicing apparatus according to the present invention has one end of the work facing inside a blade having a circular inner circumferential edge, and while rotating the blade, the slicing device rotates the blade or the work. A slicing device that cuts one end of the workpiece to cut a thin piece by cutting and feeding the blade in the radial direction, the blade deflection 1 detection means detecting the amount of deflection of the blade, and the blade deflection 1 detecting means detecting the deflection amount of the entire blade in the axial direction. blade deflection adjusting means for adjusting the blade deflection amount, the blade deflection amount detecting means being provided in at least one of the vicinity of the inlet and the outlet of the workpiece cutting portion of the blade, and the vicinity of the central portion, and the blade deflection amount detecting means is configured to be controlled based on the detection result of the total blade deflection amount detection means (claim 1).

Preferably, a dressing means for dressing the inner peripheral edge of the blade and a dressing timing control means for controlling the dressing timing of the dressing means are provided, and the dressing timing III'8 means is used as the detection result of the total blade deflection amount detecting means. (claim 2).

[Effect]

According to the configuration of claim 1, the deflection of the entire blade is detected with high accuracy by the blade deflection amount detection means provided in at least one of the vicinity of the inlet and the outlet of the workpiece cutting portion of the blade and the vicinity of the central portion. This allows the deflection of the entire blade to be adjusted with high precision.

Further, according to the second aspect of the present invention, since the dressing timing is controlled based on the deflection of the entire blade that is detected with high accuracy, the dressing timing can be controlled with high accuracy.

〔Example〕

1 to 3 show an embodiment of a slicing apparatus according to the present invention.

As shown in FIGS. 1 and 2, this slicing device includes a guide rail 2 installed on a base 1, and a slide table (second blade) supported slidably along the guide rail 2. A part of the deflection adjusting means) 3, and a headstock 4 installed on the base 1 facing the sphere table 3 are provided.

A main bearing 4a is provided on the upper part of the headstock 4, and a main shaft 6 is rotatably supported on the main bearing 4a.A main shaft drive motor 8 rotatably drives the main shaft 6 via a belt transmission mechanism 7. is installed. A tension disk (a part of the first blade deflection adjusting means) 9 is fixed to the tip of the main shaft 6, and this tension disk 9
It is configured to be rotationally driven by a rotational drive means (a part of the first blade deflection adjusting means) 5 consisting of a main shaft 6, a belt transmission mechanism 7, and a main shaft drive motor 8.

A blade 10 made of a doughnut-shaped thin plate is attached to the peripheral edge of the tension disk 9.
An inner peripheral blade 11 made of diamond particles or the like is fixed to the inner peripheral edge of the tension disc 9.
is rotated and its rotational speed N changes, so that it is displaced in the axial direction of the main shaft 6 (in the rotational axis direction of the blade 10) according to the rotational speed N. In other words, when the tension disk 9 rotates, a centrifugal force is applied to the peripheral edge of the tension disk 9 according to the rotational speed N, and thereby the magnitude and direction of the displacement in the direction of the rotational axis is applied from the tension disk 9 to the blade 10. is now determined.

A holding member 15 is placed on the slide table 3 so as to be slidable in the axial direction of the main shaft 6, and a semiconductor ingot (work>30) made of silicon is held on the holding member 15. A screw 16 and a holding member drive motor 17 that rotationally drives the ball screw 16.
The main shaft 6 is configured to be slid in the axial direction of the main shaft 6 by an indexing and feeding means 18 having the above. Therefore, by sliding the holding member 15 toward the main shaft 6 side, one end of the workpiece 30 is held on the surface 10 of the blade 10.
It is inserted into the inside of the blade 1o from the a side (work holding side) and can be made to protrude by a minute amount to the back surface 10b side of the blade 10.

Further, the slide table 3 is provided with a dressing device (dressing means) 19 for dressing the inner circumferential blade 11 so that its tool tip faces the inside of the blade 10.

The slide table 3 is moved along the guide rail 2 by a cutting feed means (a part of the second blade deflection adjusting means) 14 having a ball screw 12 and a cutting feed motor 13 that rotationally drives the ball screw 12. It is configured to be slidably driven in a direction perpendicular to the main shaft 6. Therefore, by sliding the slide table 3 toward the opposite side in FIG. 1, the workpiece 30 can be cut and fed in the radial direction of the blade 10 (in the direction of the arrow in FIG. 2). And blade 1
By cutting and feeding the workpiece 30 with one end facing inside the blade 10 in the radial direction of the blade 10 while rotating the blade 10, one end of the workpiece 30 is sliced by the inner peripheral blade 11 to create a wafer (thin slice). It is now possible to cut out.

The outer peripheral part of the workpiece 30 on the downstream side in the cutting feed direction, that is, the part of the workpiece 30 that is finally cut by the inner peripheral blade 11, includes:
A slice base 31 made of carbon or the like is fixed. This slicing base 31 is provided to prevent the aX cut portion of the work 30 from being chipped as a result of sudden release of cutting resistance applied to the blade 10 when cutting the work 30.

In the vicinity of the blade 10, non-contact blade deflection amount detection sensors (blade deflection amount detection means) 20, 21, and 24, such as magnetic sensors, for detecting the amount of deflection of the blade 10 are provided at three locations.

That is, these three blade deflection amount detection sensors 20
．． Two of the blade deflection amount detection sensors 20.21 of 21.24 are located at positions away from the trajectory C along which the workpiece 30 moves due to cutting feed, and located on the surface 1 of the blade 10.
It is arranged at a position opposite to 0a. Moreover, one of the blade deflection amount detection sensors 20 is connected to the blade 1.
Upstream end P1 near the inlet P1 of the workpiece cutting portion (P1 to P2) of No. 0, that is, the direction of rotation (in the direction of arrow B in FIG.
The other blade deflection amount detection sensor 21 is placed nearby.
is arranged near the outlet P2 of the workpiece cutting portion of the blade 10, that is, near the downstream end P2 in the rotational direction.

Further, the remaining blade deflection amount detection sensors 24 are arranged on the above-mentioned trajectory C and at positions facing the back surface 10b of the blade 10. In addition, this blade deflection amount detection sensor 24 detects the workpiece 30 when cutting the workpiece 30.
It is located close to one end surface of the blade 10, and near the center P3 of the workpiece cutting portion of the blade 10.

FIG. 3 shows the configuration of the control section 40 of this slicing apparatus.

This makeup section 40 includes a center reference displacement storage device 41, an entrance reference displacement storage device 43, and an exit portion reference displacement storage device 45.
, main shaft drive motor control device (part of the first blade deflection adjustment means) 49, cutting feed motor control device (part of the second blade deflection adjustment means) 52, dress 1illI
It has a device I (a part of the timing device I11111! means) 62 and the like.

Central part reference displacement storage device 41, entrance part reference displacement storage device M
43 and the exit section reference displacement storage device 45 contain the detection results of the blade deflection amount detection sensor (hereinafter referred to as "center section sensor j") 24 provided near the center section P3, the inlet I
! Detection results of the blade deflection amount detection sensor (hereinafter referred to as "inlet sensor") 20 provided near Pt and the blade deflection amount detection sensor provided near the outlet P2 (hereinafter referred to as "exit sensor") 21 detection results are respectively input. The center reference displacement storage device 41 is
When the workpiece 30 is moved by the cutting feed motor 13 to the position immediately before starting cutting (a position slightly to the left of the position indicated by the two-dot chain line on the left in FIG. 2), the center sensor 2
The amount of deflection of the blade 10 near the center P3 detected in step 4 is stored as the center reference deflection ii S a 3. In addition, the entrance section reference displacement storage device 43
is configured to store the amount of deflection of the blade 10 near the inlet P1 detected by the inlet sensor 20 when the workpiece 30 is moved to the position immediately before starting cutting as the inlet reference deflection S81. . In addition, when the exit part reference displacement memory device is moved to the position immediately before the disconnection starts, the exit part sensor 2
The amount of deflection of the blade 10 in the vicinity of the outlet portion P2 detected in step 1 is stored as the outlet portion reference deflection amount Sa2. Note that the fact that the workpiece 30 has been moved to the position immediately before the start of cutting is detected by a cutting feed position detection means 521 of the cutting feed motor control device 52, which will be described later.

The center reference deflection amount S83 stored in the center reference displacement storage device 41, the entrance reference deflection ISa+ stored in the entrance reference displacement storage device 43, and the exit reference deflection stored in the exit reference displacement storage device 45. ωS82 is output to the center displacement comparator 42, the entrance displacement comparator 44, and the exit displacement comparator 46, respectively. Central displacement comparator 4
In addition to the center reference deflection l5a3, the current deflection amount Sb3 of the blade 10 near the center P3 detected by the center sensor 24 is input to the center displacement comparator 4.
2 is the true central part deflection l (I in which the vicinity of the central part P3 of the blade 10 is actually bent by cutting) 83 by subtracting the central part standard deflection amount Sa3 from the central part flattened deflection amount Sb3.
is configured to detect. In addition, the inlet displacement comparator 44 includes, in addition to the upper inlet reference deflection 1lSa1,
The current deflection l5b1 of the blade 10 near the inlet P1 detected by the inlet sensor 20 is input, and the inlet displacement comparator 44 calculates the true value by subtracting the inlet reference deflection amount Sa+ from the inlet reference deflection 1isb. The inlet deflection ISl is configured to be detected. In addition to the outlet reference deflection amount Sa2, the outlet displacement comparator 46 also includes the blade 1 near the outlet P2 detected by the outlet sensor 21.
The current deflection 1sb2 of 0 is input, and the outlet displacement comparator 46 is configured to detect the true outlet deflection "S2" by subtracting the outlet reference deflection Sa2 from the outlet sensor 15b2. .

The central portion deflection amount S3 detected by the central portion displacement comparator 42 is calculated by a rotation speed calculating device (part of the first blade deflection adjusting means) 48, a cutting feed rate calculating device (part of the second blade deflection adjusting means) part) 51 and dress timing judgment 11f
(part of the dress timing control means) 61, respectively. In addition, the entrance section deflection l1iS1 detected by the entrance section displacement comparator 44 and the exit section deflection IS2 detected by the exit section displacement comparator 46 are outputted to the cutting feed rate calculation device f51 and the dress timing determining device 61, respectively. Ru.

When receiving a drive command signal from a command means 523 of a cutting feed motor control device 52 (described later), the rotation speed calculation device 48 calculates the current rotation speed N of the tension disk 9 and the center detected by the center displacement comparator 42. Based on the central portion deflection IS3, a target rotational speed Na of the tension disk 9 necessary to make the central portion deflection amount S3 zero is calculated, and a signal corresponding to the calculation result is output to the main shaft drive motor control device 49. is configured to do so.

The main shaft drive motor control device f149 is the rotation speed calculation device 48
When a signal is received from
The spindle drive motor 8 is controlled so that the rotation speed is set to a basic rotation speed NO which is otherwise set and stored in advance.

When the cutting feed speed calculating device f51 receives a drive command signal from the command means 523 of the cutting feed motor control device 152, the cutting feed speed calculation device f51 calculates the values in the inlet displacement comparator 44, the outlet displacement comparator 46, and the center displacement comparator 42, respectively. Detected inlet deflection ls+, outlet deflection IS2, and center deflection amount S
3, reduce the center deflection amount S3 shown in FIG. 5, the difference ΔS1 between the entrance deflection amount S1 and the center deflection ff1s3, or the difference ΔS2 between the outlet deflection amount S2 and the center deflection amount S3. Calculate the target cutting feed rate ya required for
It is configured to output a signal corresponding to the calculation result to the cutting feed motor control device 52.

The calculation of the target cutting feed speed Va is performed, for example, using the following formula (2).

va=vo-kS...■ Here, vO is the basic cutting feed speed set and stored in advance,
k indicates the calculation coefficient, S is the absolute value of S3, S+-83
Assign the maximum value among the absolute values of 82-83.

In addition, the cutting feed speed calculation conditions [51 are S+, S2
, S3, and if the condition is not the predetermined cutting feedrate calculation condition (when S is less than or equal to a predetermined value), the target cutting feed is It is also configured so that the speed aVa is not calculated and no signal is output to the cutting feed motor control device @52.

The cutting feed motor control device 52 calculates the cutting feed speed Vj
, 1251, the cutting feed rate V becomes the target cutting feed rate [Va calculated by the cutting feed rate calculating device 151, otherwise the basic cutting feed rate V
It is configured to control the cutting feed motor 13 so that the rotation speed is 0.

The cutting feed motor control device 52 also includes cutting feed position detection means 521, cutting feed position determination means 522, and command means 523. The cutting feed position detection means 521 detects the cutting feed position If (position in the cutting feed direction) of the workpiece 30 based on the pulse signal detected from the cutting feed motor 13, and the cutting feed position determining means 522
The cutting feed position of the workpiece 30 changes from the cutting start position (the position indicated by the two-dot chain line on the left side in FIG. It is configured to determine whether or not the cutting end position of the chisel is within the range up to the position ff1) indicated by the two-dot chain line on the right side in FIG. Also,
The command means 523 sends a drive command signal when the cutting feed position determining means 522 determines that the cutting feed position of the workpiece 30 is within the range, and sends a stop command signal to the rotation speed calculation device when it determines that the cutting feed position of the workpiece 30 is outside the range. 4B, the dress timing determination device 61 configured to output to the cutting feed speed calculation device 51 and the dress timing determination device 61, respectively, receives a drive command signal from the command means 523 of the cutting feed motor control device 52. , 81. determines whether it is time to cause the dressing device 19 to perform the dressing. S2, S
3.

The dress control device 62 includes a dress timing determination device 61.
The device is configured to output a dressing command signal to one dressing device at a predetermined time when it is determined that it is the dressing timing (described in detail later).

The I control unit 40 also controls the holding member drive motor 17 for indexing and feeding the workpiece 30 with respect to the blade 10.

Here, the above-mentioned control section 40 when performing slicing processing
A specific example of one control is shown in FIG.

To start this ilJ'al, first, the main shaft drive motor 8 of the rotation drive means 5 is driven to rotate the tension disc 9 at the basic rotation speed No. (step S+), and the indexing and feeding means 18 is held. The member drive motor 17 is driven to slide the workpiece 3o held by the holding member 15 toward the main shaft 6 (step 82
). As a result, one end portion of the workpiece 30 is inserted into the inside of the blade 10 from the front surface 10a side of the blade 1o, and is caused to protrude by a minute amount toward the back surface 10b side of the blade 10.

Next, the cutting feed motor 13 of the cutting feed means 14 is driven to move the workpiece 3o in the radial direction of the blade 1o at the basic cutting feed speed Vo (step S3).

Simultaneously with the movement of the workpiece 30, the cutting feed position detection means 521 detects the cutting feed position of the workpiece 3o (step S4), and each sensor 20°21.24 detects the current deflection amount Sb+ of the entrance section and the current deflection of the exit section. Detection of l5b2 and center current deflection sb3 is performed (step 85)
. Then, the cutting feed position detection means 521 determines whether or not the workpiece 30 has exceeded the position immediately before starting cutting (step S6). If it is determined in step S6 that it has not exceeded the position immediately before starting cutting, further feeding The position detecting means 521 determines whether or not the cutting start position 1 has been reached (step s7), and steps s4 and subsequent steps are repeated until it is determined in step s7 that the cutting has moved to the position immediately before the cutting start (rYEsJ).

If it is determined in step S7 that the position has moved to the position immediately before starting cutting, that is, it is determined that cutting is immediately before starting, rYEs
Current deflection ISb+ of the entrance section detected immediately before determining J
, the current deflection at the exit lSb2 and the current deflection at the center l
S b 3 is set as the entrance section reference deflection ISa+, the exit section reference deflection amount sa2, and the center section reference deflection l5a3 as the entrance section reference displacement recording device 43, the exit section reference displacement storage device [45, and the center section reference displacement record 1! After performing step S8), the inlet displacement comparator 44, the outlet displacement comparator 46, and the center displacement comparator 42 calculate the inlet deflection IS1, the outlet deflection amount s2, and the center deflection, respectively. 183 is detected (step 89 to step 511).

On the other hand, if it is determined in step S6 that the position is beyond the cutting start position (a position which has not yet reached the cutting start position described later), steps S7 and S8 are skipped and steps 89 to S11 are executed.

After executing step S11, the cutting feed position detection means 521
It is determined whether the workpiece 30 is beyond the cutting start position (step 5t2). If it is determined in step 812 that the workpiece 30 is beyond the cutting start position, the determination in step sT3 is skipped and step Sm and step s15, which will be described later, are executed.

On the other hand, if it is determined in step s12 that the workpiece 3o has not exceeded the cutting start position, the cutting feed position detection means 521 further determines whether or not it has moved to the cutting start position (step 5t3), and this step St! Step S4 and subsequent steps are repeated until it is determined that the cutting start position has been reached (determined as rYEsJ). And step S13
When it is determined that it has moved to the cutting start position, that is, that cutting has started, the rotation speed calculation device 48 calculates the target rotation speed Na of the tension disc 9 based on the central deflection -83 (step Sw), and the spindle drive motor control is performed. The spindle drive motor 8 is controlled by the m device 49 so that the rotation speed N of the tension disk 9 becomes the target rotation speed Na (step Ss).

As a result, the rotational speed N of the tension disk 9 is controlled to the target rotational speed Na, and the blade 10 is displaced in the axial direction according to the target rotational speed Na, and the central portion of the blade 10 is
The deflection of the entire blade 10 is adjusted so that the deflection 1 in the vicinity of 3 becomes zero.

When executing step Sw and step S15, in parallel with the execution, the cutting feed rate calculation device 151
It is determined whether or not the predetermined cutting feed speed calculation conditions are met (step 8%). That is, the absolute value of S3, the absolute value of 5l-83, and the absolute value of S2-83 are each within the preset tolerance. It is determined whether or not the limit value R1 is exceeded.

In step Ss, the cutting feed rate calculation condition, that is, R
+<ls3 If it is determined that R1<ls+
-831 and R+ <182-
83 1, the cutting feed rate calculation device 51 calculates the inlet deflection amount S+ and the outlet deflection l1i.
The target cutting feed speed ya is calculated based on S2 and the center deflection IS3 (step 517), and the cutting feed motor 13 is controlled by the cutting feed motor control device 52 so that the cutting feed speed V becomes the target cutting feed speed Va (step 517). Step 5
18).

As a result, the cutting feed speed V is controlled to the target cutting feed speed Va (the cutting feed speed V is reduced), cutting resistance is reduced, and the elastic restoring force of the blade 10 causes the blade 10 to
The difference △S between the entrance part deflection 1iiS1 and the center part deflection amount S3
1 or the difference Δ between the outlet portion deflection amount S2 and the center portion deflection amount S3
The axial deflection of the entire blade 10 is adjusted so that S2 is shortened.

On the other hand, if it is not the cutting feedrate calculation condition in step S16,
That is, R1≧1S31, R1≧1s1-831 and R
If it is determined that 1≧182-831, step S17 and step S18 are not performed, and step S1
Do 9.

In step S19, the dress timing determination device 61
Based on S+, 82, and S3, it is determined whether a predetermined dress timing condition is met. That is, it is determined whether the absolute value of S3 exceeds the limit IR2 (>R+) and whether the absolute value of S+-83 and the absolute value of S2-83 each exceed the limit 1IR3 (>R1). .

If it is determined in step S19 that the dress timing condition is met, that is, R2<1S31, then R3<1s1-
83 1 and R3<132-8
3 1, the dress control llI device 62 issues a dress command to the dress device 19 (step 52).
0). Thereby, the dressing device 19 performs dressing after the processing of the work 30 currently being cut is completed.

After performing step S, step S21 is performed.

On the other hand, if step SFI is not a dress timing condition,
That is, if it is determined that R2≧is3l, R3≧ls+−831, and R3≧1s2−831, step S21 is performed without performing step 320.

In step S21, the cutting feed position detection means 521 determines whether the workpiece 30 has reached the cutting end position If (the position indicated by the two-dot chain line on the right in FIG. 2), and if it has not reached the cutting end position. If it is determined that the cutting end position has been reached, step S4 and subsequent steps are repeated until it is determined that the cutting end position has been reached.If it is determined that the cutting end position has been reached, the rotation speed N of the tension disc 9 is switched to the basic rotation speed No (step 522
), and after switching the cutting feed rate V to the basic cutting feed rate Vo (step 823), step 824 is performed.

That is, in step S24, the cutting feed position detection means 521 detects that the workpiece 30 is completely cut at the complete cutting position (a position further to the right than the position indicated by the two-dot chain line on the right in FIG. 2, and the slicing base 31 is also completely cut). If it is determined that it has not reached the complete cutting position, this step 824 is repeated until it is determined that the image cutting complete position has been reached, and the complete cutting position is reached. If it is determined that this has been reached, a predetermined cutting completion operation is performed and then this control is terminated.

In the configuration of this slicing device, from the start of cutting the workpiece 30 until the cutting of only the workpiece 30 is finished,
A first motor comprising a rotational drive means 5, a tension disk 9, a rotational speed calculation device 48, and a main shaft drive motor control device 49.
By means of the blade deflection 131 of the central sensor 24
The rotation speed N of the tension disc 9 is determined based on the detection result of
m is controlled, and the axial deflection of the entire blade 10 is adjusted. Therefore, the axial deflection of the blade 10 can be constantly corrected during cutting, and the workpiece 30 can be processed with high precision.

Moreover, in the configuration of this slicing apparatus, even if the deflection of the entire blade 10 is adjusted by the first blade deflection adjusting means, if the deflection of the blade 10 exceeds a predetermined value (the center deflection 183 When the absolute value exceeds the limit value R1, when the absolute value of the difference ΔS1 between the entrance section deflection amount S1 and the center section deflection 183 exceeds the limit 1iR1, and when the exit section deflection amount S2 and the center section deflection ff1
s3), the cutting feed means 14 and the cutting feed motor control [1
A second section consisting of an 8 position 52 and a cutting feed rate calculation device 51
The blade deflection adjustment means of each sensor 20.21
．． Based on the detection results of 24, the cutting feed speed V is also set to IIJ.
III, the deflection of the entire blade 10 is adjusted. Therefore, the deflection of the blade 10 can be more reliably removed during cutting.

Further, in the configuration of this slicing apparatus, the blade 10 is adjusted by the first and second blade deflection adjusting means.
Even after adjusting the overall deflection, if the blade 10 is deflected beyond a predetermined value (if the absolute value of the center deflection 183 exceeds the limit value R2, then the inlet deflection lS1 and the center deflection -83 If the absolute value of the difference ΔS1 exceeds the limit value R3, and if the absolute value of the difference ΔS2 between the exit part deflection position S2 and the center part deflection amount S3 exceeds the limit value R3), the dress system 'm@ 1162 and dress timing calculation device 1
The dressing timing ill III means 61 determines that the deflection of the blade 10 has become large because the inner peripheral blade 11 has become dull, and the dressing device 19 performs dressing. Therefore, during cutting, the inner peripheral blade 11
Blade 10 can maintain its sharpness in good condition.
deflection can be reduced.

In addition, in the configuration of this slicing apparatus, the blade deflection amount detection sensors 20, 21, and 24 are installed in the vicinity of the entrance part P1, the vicinity of the exit part P2, and the center part of the workpiece cutting part of the blade 10.
They are installed in three locations, including three nearby locations. For this reason,
It is possible to detect the deflection amounts 81, 82, and 33 at three locations near the inlet portion P1, near the outlet IP2, and near the center portion P3 of the blade 10, and the deflection of the entire blade 10 can be detected with high accuracy. And 11! Based on the well-detected detection results, the first blade deflection adjusting means and the second blade deflection adjusting means adjust the deflection of the entire blade 10, and the dressing timing control means controls the dressing timing of the dressing device 19. Therefore, the deflection of the entire blade 10 can be adjusted with high precision, and the dressing timing can be controlled with high precision. Therefore, according to the configuration of this slicing device, processing accuracy can be improved and dressing can be performed at an appropriate time.

In particular, in the configuration of this slicing device, the central portion deflection 1
The deflection adjustment by the first and second blade deflection adjustment means and the dress timing control by the dress timing control means are performed using lS3 as a reference.

That is, in the first blade deflection adjusting means, the rotation speed N of the tension disk 9 is controlled to III so that the deflection of the entire blade 10 is adjusted to be all, so that the center deflection lS3 becomes zero. In addition, in the second blade deflection adjusting means, the center portion deflection amount S3, the difference ΔS1 between the inlet portion deflection amount S1 and the center portion deflection amount S3, or the difference ΔS2 between the outlet portion deflection amount S2 and the center portion deflection amount S3 are small. The cutting feed speed V is adjusted so that the deflection of the entire blade 10 is adjusted. In addition, in the dress timing control means, when the absolute value of the central portion deflection amount S3 exceeds the limit IR2, and when the absolute value of the difference ΔS1 between the entrance portion deflection amount S1 and the central portion deflection amount S3 exceeds the limit value R3. Dressing is performed when the absolute value of the difference ΔS2 between the exit portion deflection amount S2 and the center portion deflection amount S3 exceeds a limit value R3.

In other words, the central part P3 of the workpiece cutting part of the blade 10 is the part that continues to cut the workpiece 30 for the longest time from the start of cutting until the end of cutting the workpiece 30, and is the part that affects the machining accuracy the most. . Therefore, as in this slicing device, the deflection adjustment by the first and second blade deflection adjusting means and the dress timing control by the dress timing control means are performed based on the deflection 183 near the center P3 of the workpiece cutting portion of the blade 10. If this is done, processing accuracy can be further improved, and dressing can be performed at a more appropriate time.

Further, in the configuration of this slicing apparatus, a cutting feed position detecting means 521, a cutting feed position determining means 522, and a command means 523 are provided, and the deflection adjustment by the first and second blade deflection adjusting means and the dress timing control means are performed. Since the range in which the dress timing control is performed is limited to the range from the cutting start position to the cutting end position, there are the following advantages.

That is, since the center sensor 24 is provided near the center P3 of the workpiece cutting portion of the blade 10, when the workpiece 30 passes the cutting end position, the slice base 31 enters the detection range of the center sensor 24. slice base 3
1 is made of a conductor such as carbon. For this reason,
When the slice base 31 enters the detection range of the central sensor 24, the central sensor 24 malfunctions, and the central sensor 24
Detection results become incorrect. Therefore, if the range in which the deflection adjustment and dress timing control of the blade 10 is performed is limited to a certain range, the deflection adjustment of the blade 10 and the dress timing M ill will be performed based on inaccurate detection results of the central sensor 24. It is possible to prevent this from occurring.

Note that although the inlet sensor 20 and the outlet sensor 21 are provided on the front surface 10a side of the blade 10 in the above embodiment, they may be provided on the back surface 10b side of the blade 10. Further, an inlet sensor 20 and an outlet sensor 2
In the above embodiment, the workpiece 30 is placed at a position that avoids the trajectory C along which the workpiece 30 moves due to the cutting feed, but it is placed on the trajectory C as shown by two-dot chain lines 20a and 21a in FIG. You can do it like this. However, in this case, each blade deflection amount detection sensor 20a, 21a is provided on the back surface 10b side of the blade 10, and is arranged at a position close to one end surface of the workpiece 30 when cutting the workpiece 30.

In addition, in the above embodiment, the central sensor 24 was placed on the trajectory of the slice base 31 moving by the cutting feed, as shown in FIG. You may also do so. In this way, there is no need to limit the range in which deflection adjustment and dress timing control are performed.

In addition to the blade deflection adjusting means shown in the above embodiments, the blade deflection adjusting means may be one that adjusts the amount of deflection of the entire blade 10 by, for example, moving the tension disk 9 in the direction of the rotation axis.

The cutting feed may be performed by moving the blade 10 in the radial direction instead of the workpiece 30.

Furthermore, in the above embodiment, the blade deflection amount detection means 20
(20a), 21 (21a), and 24 are provided at three locations near the inlet, near the outlet, and near the center of the workpiece cutting site, and these three blade deflection amount detection means 20 (2
0a), 21 (21a).

The local deflection correction and the overall deflection adjustment of the blade 10 are controlled based on the detection results of No. 24, but the blade deflection amount detecting means is used in two locations, one near the entrance and the other near the center of the workpiece cutting site. The blade deflection amount is determined based on the detection results of the two blade deflection amount detection means, which are provided at two locations, near the outlet and near the center of the workpiece cutting location.
0 local deflection corrections and global deflection adjustments may be controlled.

Further, the overall deflection adjustment of the blade 10 may be performed by only one of the first and second blade deflection adjusting means.

〔Effect of the invention〕

The slicing apparatus according to claim 1 is provided with blade deflection amount detection means in at least one of the vicinity of the inlet and the outlet of the workpiece cutting portion of the blade, and in the vicinity of the central portion, and the detection results of the total blade deflection amount detection means are used. Blade deflection based on: l! ! Since the deflection of the entire blade is adjusted by the means, the deflection of the entire blade can be detected with high accuracy, and thereby the deflection of the entire blade can be reliably removed, improving machining accuracy. I can do it.

A slicing apparatus according to a second aspect of the present invention is provided with a dressing means for dressing the inner peripheral edge of the blade, and a dressing timing control means for controlling the dressing timing of the dressing means, and the dressing timing controlling means controls the total blade deflection amount detecting means. Since the dressing timing is configured to be controlled based on the detection results, the dressing timing can be controlled based on the deflection of the entire blade that is detected with high accuracy, and the dressing can be performed at the appropriate time.゛.

[Brief explanation of drawings]

FIG. 1 is a partially sectional front view showing an embodiment of a slicing apparatus according to the present invention, FIG. 2 is a sectional view taken along line II-I of FIG. 1, and FIG. 3 is a block diagram showing a control section. Fig. 4 is a flowchart showing a specific example of the control unit ilJ 11[1, Fig. 5 is a graph showing the relationship between the cutting feed position and the amount of blade deflection, and Fig. 6 is the amount of blade deflection in a conventional slicing device. FIG. 3 is a cross-sectional view showing the installation position of the detection means. 5.9.48.49... First blade deflection adjustment means, 10... Blade, 11... Inner peripheral blade, 14, 51
．． 52...Second blade deflection adjustment means, 19...
Dressing means, 20, 208...Blade deflection amount detection means provided near the entrance of the workpiece cutting portion of the blade, 2
1,218...Blade deflection amount detection means provided near the outlet of the workpiece cutting portion of the blade, 24...Blade deflection amount detection means provided near the center of the workpiece cutting portion of the blade, 30... Work, 61.62...Dress timing control means.

Claims (1)

[Claims] 1. One end of the workpiece is faced inside a blade having a circular inner circumferential edge, and the blade or the workpiece is cut and fed in the radial direction of the blade while rotating the blade. In the slicing device for cutting one end of the workpiece into thin pieces, the blade deflection amount detection means detects the deflection amount of the blade, and the blade deflection adjustment means adjusts the deflection of the entire blade in the axial direction. The blade deflection amount detecting means is provided in at least one of the vicinity of the inlet and the outlet of the workpiece cutting portion of the blade, and the vicinity of the central portion, and the blade deflection adjusting means is provided in the vicinity of the entire blade deflection amount detecting means. A slicing device configured to be controlled based on a detection result. 2. Dressing means for dressing the inner peripheral edge of the blade and dressing timing control means for controlling the dressing timing of this dressing means are provided, and this dressing timing control means is based on the detection results of the total blade deflection amount detection means. Slicing device according to claim 1, characterized in that it is configured to be controlled.