JPH04136897U - Current introduction terminal - Google Patents

Abstract

(57) [Summary] [Purpose] To obtain a current introduction terminal with small reactance and low loss. [Structure] The inner conductor 5 and the outer conductor 4 have a coaxial structure, and the two conductors 5 and 4 are insulated by a gap 6 and an insulator 9. The inner space of the internal conductor 5 is a cooling water passage 5a, and cooling water flows through the inside of the cooling passage 5a. First and second external conductors 4- constituting the external conductor 4
1, 4-2 is a cooling water passage 4a, and cooling water flows through the inside of the cooling passage 4a. A power supply side connection terminal 3 is connected to the power supply side of the current introduction terminal 11-1, and a heating coil side connection flange 2 is connected to the heating coil side.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention relates to current introduction terminals, and is applicable to vacuum induction heating equipment and induction heating furnaces in gas atmospheres. It is used for.

0002

[Conventional technology]

An example of the configuration of a conventional vacuum induction heating device is shown in FIGS. 9 and 10. Inside crucible 19 The charged object 13 is heated by the high frequency current 14 flowing through the heating coil 12. The generated high-frequency alternating magnetic field generates induction heating. Heating coil 12, crucible 19, and the object to be heated 13 are installed in a vacuum chamber 17, and the inside of the vacuum chamber 17 is equipped with a vacuum exhaust system. The vacuum state is maintained by a vacuum chamber 18. Heating coil 12 installed in vacuum chamber 17 In order to supply high frequency power to the It is provided together with the device 9 and connected to the high frequency power source 16 .

0003 The current introduction terminal 11 and the heating coil 12 are heated by the high frequency current 14 flowing therethrough. Because Joule heat is generated, cooling is required, and the current introduction terminal 11 and heating coil are usually 12 are hollow conductors with cooling water passages formed inside and through which cooling water can flow. are used, and are simultaneously water-cooled through cooling water supply and drainage holes 8 and 8'.

0004

[Problem that the idea aims to solve]

The current introduction terminal for the conventional vacuum induction heating device described above has the following problems.

[0005] (1) In other words, it is a current introduction terminal with parallel reciprocating conductors, and the current of each conductor is Since vacuum sealing is required at the flow introduction section, the gap between the conductors must be uniform. It is necessary to maintain a certain distance. Therefore, the reactance and resistance of the current introduction terminal become large. In addition, if Actance represents the reactive resistance component in alternating current, and is equivalent to "current x reactance". A corresponding voltage drop will occur. In a reciprocating conductor arranged in parallel, its reactance is It is proportional to the wave number and increases with the gap between both conductors.

[0006] (2) Because the reactance of the current introduction terminal is large, the voltage drop here is large. , an apparent power proportional to the reactance is required in addition to the coil heating power.

[0007] (3) Since the resistance of the current introduction terminal is large, the loss due to Joule heat generation here is Larger and less efficient. The disadvantages mentioned above are that the smaller the reactance and resistance of the induction heating coil, or The larger the frequency, the more noticeable it becomes.

[0008] In view of the above-mentioned conventional technology, the present invention aims to provide a current introduction terminal with low loss. purpose.

[0009]

[Means to solve the problem]

The present invention takes the following measures to solve the above problems. In other words, traditional With parallel reciprocating conductors at the flow introduction terminals, significant reactance and resistance decreases are Because I can't hope for it, The reciprocating conductor has a coaxial structure, By reducing the gap between the outer and inner conductors, the reactor reduce stress and resistance. (One to several tenths of the conventional method). In addition, both the outer conductor and the inner conductor must have a structure that allows cooling water to flow inside them. This also serves as a cooling water passage to the coil. In this way, a current introduction terminal with low loss even at high frequencies and large currents is provided.

0010

[Effect]

With the above means, the current introduction terminal according to the present invention functions as follows. (1) By using a coaxial structure for the reciprocating conductors, both conductors can be connected regardless of the vacuum seal area. Since the gap between them can be made smaller, the reactance becomes smaller. (2) When the reciprocating conductor has a coaxial structure, its resistance is inversely proportional to the circumference length, which is different from the conventional Compared to the conventional method, the resistance is reduced because the circumferential length is larger for the same occupied dimensions.

[0011]

【Example】

Embodiments of the present invention will be described in detail below with reference to the drawings.

0012 A current introduction terminal 11-1 according to an embodiment of the present invention will be explained based on FIGS. 1 to 6. 1 is a sectional view, FIG. 2 is a sectional view taken along II-II in FIG. 1, FIG. 3 is a plan view, and FIG. 4 is a front view. 5 is a view along the line V-V in FIG. 3, and FIG. 6 is a view along the line VI-VI in FIG.

[0013] As shown in these figures, the internal conductor 5 has a cylindrical shape, and the internal space is a cooling water passage 5a. It becomes. The outer conductor 4 includes a cylindrical first outer conductor 4-1 and a second outer conductor 4-2. and are arranged in a circular shape around the outer periphery of the internal conductor 5. and inside A gap 6 is provided between the outer conductor 5 and the first outer conductor 4-1. A space between the body 4-1 and the second outer conductor 4-2 serves as a cooling water passage 4a. Cooling water Cooling water 7, 7' is supplied to and discharged from the passages 4a, 5a via cooling water supply/drainage holes 8, 8'. It will be done. On the other hand, the vacuum chamber connection flange 1 is fixed to the second external conductor 4-2. , this current introduction terminal 11-1 is attached to the vacuum chamber 17 via the connection flange 1. and seal with O-ring 10.

[0014] The power supply side connection terminal 3 is provided on the power supply side of the conductors 4 and 5, and is connected to the second external conductor 4. -2 electrically connected to the connecting terminal 3a and the first external conductor 4-1 electrically connected. It has a connecting terminal 3b, an insulator 9, and O-rings 10a and 10b. Contact The connection terminals 3a and 3b are connected to the output terminal of the power supply.

[0015] The heating coil side connection flange 2 is provided on the heating coil side of the conductors 4 and 5. , has two connection terminals 2a and 2b. The connection terminal 2a connects the outer conductor 4 and the heating coil. electrically connect one end of the coil cooling water passage to the outside. It communicates with the cooling water passage 4a of the conductor 4. The connection terminal 2b is connected to the internal conductor 5 and the heating coil. In addition to electrically connecting the other end of the coil, the other end of the cooling water passage of the coil and the internal conductor No. 5 cooling water passage 5a is communicated with the cooling water passage 5a.

[0016] 7 and 8 show the power supply 16 and heating coil using the current introduction terminal 11-1 according to the embodiment. The state in which the file 12 is connected is shown. Note that 13 is an object to be heated.

[0017] The operation of the current introduction terminal 11-1 having the above-described configuration will be explained next. High frequency current supplied from the power supply 16 via the connection terminal 3a of the power supply side connection terminal 3 14 is led into the vacuum chamber through the outer conductor 4 (4-1, 4-2), and is connected to the heating coil. It is supplied to the heating coil 12 in the vacuum chamber via the connection terminal 2a of the side connection flange 2. Ru. The high frequency current 14 flowing through the heating coil 12 is transmitted to the heating coil side connection flange. 2 connection terminal 2b → internal conductor 5 → power supply side connection terminal 3 through connection terminal 3b Return to 16. Note that although the above is shown as a unidirectional current for convenience, it is an alternating current. Therefore, the current direction alternates according to the period of the high frequency. In this example, the reactance was 27% of the conventional method, and the loss was 25%.

[0018] An insulator 9 and a gap are provided between the outer conductor 4 (4-1, 4-2) and the inner conductor 5. It is electrically insulated by the top 6. Vacuum chamber connection flange 1 and insulator 9 part O-rings 10, 10a, and 10b installed in the vacuum chamber create a vacuum seal between the vacuum chamber and the atmosphere. will be sent. In addition, the cooling water 7, 7' supplied through the cooling water supply and drainage holes 8, 8' is formed inside each of the outer conductor 4 (4-1, 4-2) and the inner conductor 5. Passes through the cooling water passages 4a, 5a and via the heating coil side connection flange 2 (2a, 2b). to cool the heating coil.

[0019]

[Effect of the idea]

As explained above, the present invention has the following effects. (1) Because it has a coaxial reciprocating conductor structure, reactance is extremely small. , the apparent power can be reduced. In the example, the reactance is 27 in the conventional method. %, the loss was 25%. (2) Since it is also a coaxial type, it can realize a low-loss current introduction terminal and has a heating effect. improves. (3) Since the structure allows cooling water to flow through both the external conductor and internal conductor, Similarly, it can also be used as a cooling water passage to the heating coil.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing a current introduction terminal according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along II-II in FIG. 1;

FIG. 3 is a plan view showing the current introduction terminal of the embodiment.

FIG. 4 is a front view showing the current introduction terminal of the embodiment.

FIG. 5 is a view taken along the line V-V in FIG. 3;

FIG. 6 is a view taken along the line VI-VI in FIG. 3;

FIG. 7 is a configuration diagram showing the usage state of the embodiment.

FIG. 8 is a configuration diagram showing the usage state of the embodiment.

FIG. 9 is a configuration diagram showing a prior art.

FIG. 10 is a configuration diagram showing a prior art.

[Explanation of symbols]

1 Vacuum chamber connection flange 2 Heating coil side connection flange 2a, 2b connection terminal 3 Power supply side connection terminal 3a, 3b connection terminal 4, 4-1, 4-2 Outer conductor 4a Cooling water passage 5 Internal conductor 5a Cooling water passage 6 Gap 7,7' Cooling water 8, 8' Cooling water supply and drainage hole 9 Insulator 10, 10a, 10b 0 ring 11, 11-1 Current introduction terminal 12 Heating coil 13 Object to be heated 14 High frequency current

Continuation of front page (72) Creator Yasushi Takeoka 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries, Ltd. Hiroshima Research Center (72) Creator Kiyoshi Izumi 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City, Hiroshima Prefecture Mitsubishi Heavy Industries, Ltd. Hiroshima Research Center

Claims (1)

[Scope of utility model registration request] Claim 1: A heating device equipped with a heating coil inside the tank, transmitting current between a power source outside the tank and the heating coil inside the tank, and cooling water inside and outside the tank. In a current introduction terminal that functions to send cooling water between the heating coil and the heating coil in which a passage is formed, an internal conductor having a cylindrical shape and an internal space serving as a cooling water passage through which the cooling water passes, and a gap A cylindrical first outer conductor is arranged concentrically on the outer periphery of the inner conductor, and a cylindrical second outer conductor is arranged concentrically with a space serving as a cooling water passage on the outer periphery of the first outer conductor. an outer conductor consisting of a conductor, a power supply side connection terminal provided on the power supply side of the inner conductor and outer conductor to electrically connect the inner conductor and outer conductor to the power supply, and a heating coil side of the inner conductor and outer conductor. It is equipped with a heating device that electrically connects the inner conductor and one end of the heating coil, and the outer conductor and the other end of the heating coil, and connects the cooling water passage of the inner conductor and outer conductor with the cooling water passage of the heating coil. A current introduction terminal comprising a coil side connection flange.