JPH0413662U - - Google Patents
Info
- Publication number
- JPH0413662U JPH0413662U JP5430090U JP5430090U JPH0413662U JP H0413662 U JPH0413662 U JP H0413662U JP 5430090 U JP5430090 U JP 5430090U JP 5430090 U JP5430090 U JP 5430090U JP H0413662 U JPH0413662 U JP H0413662U
- Authority
- JP
- Japan
- Prior art keywords
- clamping rod
- spring
- shaped
- ring
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5430090U JPH0627657Y2 (ja) | 1990-05-23 | 1990-05-23 | 板状被処理物の保持装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5430090U JPH0627657Y2 (ja) | 1990-05-23 | 1990-05-23 | 板状被処理物の保持装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0413662U true JPH0413662U (ko) | 1992-02-04 |
| JPH0627657Y2 JPH0627657Y2 (ja) | 1994-07-27 |
Family
ID=31576241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5430090U Expired - Lifetime JPH0627657Y2 (ja) | 1990-05-23 | 1990-05-23 | 板状被処理物の保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627657Y2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010528474A (ja) * | 2007-05-21 | 2010-08-19 | ラム リサーチ コーポレーション | 統合電気接点を有する基板把持装置 |
-
1990
- 1990-05-23 JP JP5430090U patent/JPH0627657Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010528474A (ja) * | 2007-05-21 | 2010-08-19 | ラム リサーチ コーポレーション | 統合電気接点を有する基板把持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627657Y2 (ja) | 1994-07-27 |