JPH0413658U - - Google Patents
Info
- Publication number
- JPH0413658U JPH0413658U JP5502890U JP5502890U JPH0413658U JP H0413658 U JPH0413658 U JP H0413658U JP 5502890 U JP5502890 U JP 5502890U JP 5502890 U JP5502890 U JP 5502890U JP H0413658 U JPH0413658 U JP H0413658U
- Authority
- JP
- Japan
- Prior art keywords
- sealing member
- cooling gas
- processing apparatus
- gas passage
- plasma processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000112 cooling gas Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 3
- 239000007789 gas Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5502890U JPH0413658U (en:Method) | 1990-05-25 | 1990-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5502890U JPH0413658U (en:Method) | 1990-05-25 | 1990-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0413658U true JPH0413658U (en:Method) | 1992-02-04 |
Family
ID=31577617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5502890U Pending JPH0413658U (en:Method) | 1990-05-25 | 1990-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413658U (en:Method) |
-
1990
- 1990-05-25 JP JP5502890U patent/JPH0413658U/ja active Pending
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