JPH04134233A - Caulking method for tubular thin-plate metal piece and manufacture of gasket-type pressure sensor - Google Patents

Caulking method for tubular thin-plate metal piece and manufacture of gasket-type pressure sensor

Info

Publication number
JPH04134233A
JPH04134233A JP25792590A JP25792590A JPH04134233A JP H04134233 A JPH04134233 A JP H04134233A JP 25792590 A JP25792590 A JP 25792590A JP 25792590 A JP25792590 A JP 25792590A JP H04134233 A JPH04134233 A JP H04134233A
Authority
JP
Japan
Prior art keywords
caulking
base
ring
protruding
cylindrical portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25792590A
Other languages
Japanese (ja)
Inventor
Hiroaki Morii
森井 洋明
Yoshiaki Matsubara
儀明 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP25792590A priority Critical patent/JPH04134233A/en
Publication of JPH04134233A publication Critical patent/JPH04134233A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent generation of buckling on the inner peripheral wall of a caulked body after its caulking by caulking a protruding tubular portion protruded from a ring-form end face so that with the position of nearly halving the protruding tubular portion as the bounding the angle between the ring-form end face and the tubular portion is about 60 deg. at the tip and about 45 deg. at the base. CONSTITUTION:An assembly 1 is inserted into a tubular portion 220 of a metal piece 200 of L sectional form consisting of a tubular portion 220 and a flange portion 210 extending outward from one end thereof. A tubular portion 221 protruding from a rear-end face 18 of the assembly is caulked so that with the position (n) of nearly halving the protruding tubular portion as the boundary the angle between the ring-form end face 18 and the tubular portion 220 is 60 deg.+ or -15 deg. at the tip 222 and 45 deg.+ or -15 deg. at the base 223 (however, the angle at the tip theta1 > the angle at the base theta2). The base 223 is flat caulked so that the base 223 may abut on the rear-end face 18 of the assembly. Therefore, there occurs no buckling on the inner-peripheray wall 22 of a metal housing 2, so that cracking of a piezo-electric element 11 or of an insulating plate 14 and deformation of an electrode plate 12 and plate packings 13, 15 can be prevented.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、スパークプラグの座面に取り付けて燃焼室の
圧力変化を測定するガスケット型圧力センサの製造に好
適な技術に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a technique suitable for manufacturing a gasket-type pressure sensor that is attached to the seating surface of a spark plug to measure pressure changes in a combustion chamber.

[従来の技術] 従来より、ガスケット型圧力センサを製造する際、薄板
金具のかしめは、第2図(I)に示すように、鍔部およ
び筒部310からなる断面り字状の金具300の筒部3
10に、圧電素子410、絶縁板420、絶縁チューブ
430、押え金440、電極板450、板パツキン46
0等を組み付けた輪形400を嵌込み、第2図(II)
に示すように、輪形400の上端面401から突出した
部分311をかしめるという方法で行われている。
[Prior Art] Conventionally, when manufacturing a gasket-type pressure sensor, caulking of a thin plate metal fitting is performed by caulking a metal fitting 300 having a cross-sectional shape consisting of a flange portion and a cylindrical portion 310, as shown in FIG. 2(I). Cylinder part 3
10, a piezoelectric element 410, an insulating plate 420, an insulating tube 430, a presser foot 440, an electrode plate 450, and a plate packing 46
Insert the ring shape 400 with the 0 etc. attached, Fig. 2 (II)
As shown in FIG. 3, this is done by caulking a portion 311 protruding from the upper end surface 401 of the ring 400.

[発明が解決しようとする課題] しかるに、上記従来の技術において、かしめ部の長さ4
03が比較的短い(4,0mm〜4,5mm)場合は、
かしめ体320の内周壁321に座面が発生しないが、
かしめ部の長さ403が長い(8、Om m以ト)場合
、第2図(I[[>に示すように、座面が発生して圧電
素子410、絶縁板420等が破損するという欠点があ
る。
[Problems to be Solved by the Invention] However, in the above conventional technology, the length of the caulked portion is 4
If 03 is relatively short (4.0mm to 4.5mm),
Although no seating surface is generated on the inner peripheral wall 321 of the caulking body 320,
If the length 403 of the caulked portion is long (8, Om or more), as shown in FIG. There is.

本発明の目的は、輪形またはセンサ本体の厚みが比較的
厚い場合でも、かしめ後にかしめ体の内周壁に座面が発
生しない筒状薄板金具のがしめ方法およびガスケット型
圧力センサの製造方法の提供にある。
An object of the present invention is to provide a method for crimping a cylindrical thin sheet metal fitting and a method for manufacturing a gasket-type pressure sensor in which a seat surface does not appear on the inner circumferential wall of the crimped body after crimping, even when the ring shape or the sensor body is relatively thick. It is in.

[課題を解決するための手段] 上記課題を解決するため、本発明は、以下の構成を採用
した。
[Means for Solving the Problems] In order to solve the above problems, the present invention employs the following configuration.

(1)筒部およびその一端から外方に延長された鍔部か
らなる断面り字状の筒状薄板金具の前記筒部に、脆性体
を含む輪形を嵌め込む工程、輪形端面より突出した突出
筒部の略二等分部位を境に、輪形端面と筒部との成す角
が、先部で約60゜基部で約45°になるようにこの突
出筒部をかし。
(1) A step of fitting a ring shape containing a brittle body into the cylindrical part of a cylindrical thin sheet metal fitting having a truncated cross-section, which consists of a cylindrical part and a flange extending outward from one end of the cylindrical part, and a protrusion protruding from the ring-shaped end surface. This protruding cylindrical portion is bent so that the angle formed between the annular end face and the cylindrical portion is approximately 60° at the tip and approximately 45° at the base, with the cylindrical portion approximately bisected.

める工程、前記基部が輪形端面に当接するようにかしめ
る工程、前記先部が輪形端面に当接するようにかしめる
工程、前記輪形の外周面より延出した部分を外周面方向
にかしめる工程からなる。
a step of caulking so that the base portion comes into contact with the ring-shaped end surface; a step of caulking so that the tip portion comes into contact with the ring-shaped end surface; caulking a portion extending from the outer peripheral surface of the ring shape in the direction of the outer peripheral surface. Consists of processes.

(2)筒部およびその一端から外方に延長された鍔部か
らなる断面り字状の筒状薄板金具の前記筒部に、セラミ
・リフ製圧電素子、電極板、絶縁板、板ノ(ツキン等を
積層してなる輪状のセンサ本体を嵌め込む工程、センサ
本体の端面より突出した突出筒部の略二等分部位を境に
、センサ本体の端面と筒部との成す角が、先部で約60
゜、基部で約45°になるようにこの突出筒部をかしめ
る工程、前記基部がセンサ本体の端面に当接するように
かしめる工程、前記先部がセンサ本体の端面に当接する
ようにかしめる工程、前記センサ本体の外周面より延出
した部分を外周面方向にがしめる工程からなる。
(2) A cylindrical thin sheet metal fitting with a cross section consisting of a cylindrical portion and a flange extending outward from one end of the cylindrical portion has a piezoelectric element made of Ceramic Lif, an electrode plate, an insulating plate, and a plate plate ( In the process of fitting the ring-shaped sensor body made of laminated pieces, etc., the angle formed by the end face of the sensor body and the cylindrical part is the tip of the protruding cylindrical part that protrudes from the end face of the sensor body. Approximately 60 in total
゜, a step of caulking this protruding cylinder so that the angle at the base is about 45 degrees, a step of caulking so that the base comes into contact with the end surface of the sensor body, a step of caulking so that the tip comes into contact with the end surface of the sensor body. a tightening step, and a step of tightening a portion extending from the outer circumferential surface of the sensor body in the direction of the outer circumferential surface.

[作用および発明の効果] (請求項1について) 輪形端面より突出した突出筒部の略二等分部位を境に、
輪形端面と筒部との成す角が、先部で約60゜、基部で
約45°になるようにこの突出筒部をかしめ、つぎに、
基部が輪形端面に当接するようにかしめ、さらに、先部
が輪形端面に当接するようにかしめている。
[Actions and Effects of the Invention] (Regarding Claim 1) With the approximately bisecting portion of the protruding cylindrical portion protruding from the ring-shaped end surface as the border,
The protruding cylindrical portion is caulked so that the angle formed between the ring-shaped end face and the cylindrical portion is approximately 60° at the tip and approximately 45° at the base, and then,
The base is caulked so as to come into contact with the annular end surface, and the tip is caulked so as to come into contact with the annular end surface.

このため、かしめ作業に起因する応力が基部の基にかか
り難いので かしめ部の長さを比較的長くしてもかしめ
体の内周壁に座面は発生しない。
For this reason, the stress caused by the caulking work is not easily applied to the base of the base, so that even if the length of the caulked portion is relatively long, no seating surface is generated on the inner circumferential wall of the caulked body.

よって、上記座面に起因する脆性体の破損は起こらない
Therefore, damage to the brittle body due to the seat surface does not occur.

なお、輪形端面と筒部との成す角が、先部で60゜、基
部で45°の範囲から著しく(各±15°を越える)外
れると座面が発生し易くなる。
Incidentally, if the angle formed between the annular end face and the cylindrical portion deviates significantly from the range of 60° at the tip and 45° at the base (by more than ±15° each), a seat surface is likely to occur.

(請求項2について) センサ本体の端面より突出した突出筒部の略−等分部位
を境に、センサ本体の端面と筒部との成す角が、先部で
約60゜、基部で約45°になるようにこの突出筒部を
かしめ、つぎに、基部がセンサ本体の端面に当接するよ
うにかしめ、さらに、先部がセンサ本体の端面に当接す
るようにがしめている。
(Regarding Claim 2) The angle formed by the end surface of the sensor body and the cylinder part is about 60 degrees at the tip and about 45 degrees at the base, with the protruding cylinder part protruding from the end surface of the sensor body dividing into approximately equal parts. The protruding cylindrical portion is caulked so that the protruding tube has an angle of 1.degree., the base portion is caulked so as to come into contact with the end surface of the sensor body, and the tip portion is further caulked so as to come into contact with the end surface of the sensor body.

このため、かしめ作業に起因する応力が基部の基にかか
り難いので、がしめ部の長さを比較的長くしてもかしめ
体の内周壁に座面は発生しない。
Therefore, the stress caused by the caulking work is not easily applied to the base of the base, so that even if the length of the caulking part is relatively long, no seating surface is generated on the inner circumferential wall of the caulking body.

よって、上記座面に起因するセラミック製圧電素子や絶
縁板の破損は起こらない。
Therefore, damage to the ceramic piezoelectric element and the insulating plate due to the seat surface does not occur.

なお、センサ本体の端面と筒部との成す角が、先部で6
0゜、基部で45°の範囲がら著しく(各±15°を越
える)外れると座面が発生し易くなる。
Note that the angle formed by the end surface of the sensor body and the cylindrical portion is 6 mm at the tip.
If it deviates significantly from the range of 0° and 45° at the base (more than ±15° each), a seat surface is likely to occur.

[実施例] 本発明の一実施例を第1図に基づき説明する。[Example] An embodiment of the present invention will be described based on FIG.

第1図(V)に示すように、ガスケット型圧力センサA
は、組付体1を、金属薄板で形成した金属ハウジング2
で包囲してなる。
As shown in Figure 1 (V), gasket type pressure sensor A
The assembled body 1 is a metal housing 2 formed of a thin metal plate.
It will be surrounded by

組付体1は、全体で輪形を呈し、圧電素子11、電極板
12、板パツキン13.15、絶縁板14、絶縁チュー
ブ16、押え金17からなる。
The assembly 1 has a ring shape as a whole and is composed of a piezoelectric element 11, an electrode plate 12, a plate packing 13, 15, an insulating plate 14, an insulating tube 16, and a presser foot 17.

脆性体である圧電素子11は、環状を呈し、チタン酸ジ
ルコン酸鉛等の圧電セラミックで焼結により形成されて
おり、加えられた圧力に応じた起電力を発生する。この
圧電素子11の図示上面には前記電極板]2が重ねられ
、図示下面には板!<ッキン13が重ねられる。
The piezoelectric element 11, which is a brittle body, has an annular shape and is formed by sintering piezoelectric ceramic such as lead zirconate titanate, and generates an electromotive force in response to applied pressure. The electrode plate ] 2 is stacked on the top surface of the piezoelectric element 11 in the drawing, and the plate !2 is stacked on the bottom surface in the drawing. <Cooking 13 is stacked.

電極板12は、環状を呈し、ステンレス鋼珪、たは銅系
の金属板て′あり、圧電素子11と電気導通し、圧電素
子11で発生した起電力を検出装置(図示せず)に送る
接続コード(図示せず)と溶接により接続されている。
The electrode plate 12 has an annular shape and is made of stainless steel, silicon, or copper-based metal plate, and is electrically conductive with the piezoelectric element 11 and sends the electromotive force generated by the piezoelectric element 11 to a detection device (not shown). It is connected by welding to a connecting cord (not shown).

また、この電極板12の図示上面には、絶縁板14が重
ねられている。
Further, an insulating plate 14 is stacked on the upper surface of the electrode plate 12 in the drawing.

脆性体である絶縁板14は、環状を呈し、セラミックか
らなる絶縁材である。また、この絶縁板14の図示」−
面には板パツキン15が重ねられている。
The insulating plate 14, which is a brittle body, has an annular shape and is an insulating material made of ceramic. Also, the illustration of this insulating plate 14"-
A plate packing 15 is stacked on the surface.

板パツキン]3.15は、環状を呈し、ステンレス鋼ま
たは銅系の金属板であり、圧電素子11、絶縁板14に
加わる外力をやわらげる。
Plate packing] 3.15 is an annular metal plate made of stainless steel or copper, and softens the external force applied to the piezoelectric element 11 and the insulating plate 14.

絶縁チューブ16は、電極板12をハウジング2から電
気絶縁するテフロン樹脂である。
The insulating tube 16 is made of Teflon resin that electrically insulates the electrode plate 12 from the housing 2.

押え金17は、気密を保つための樹脂を外側面に被覆し
た金属筒である。
The presser foot 17 is a metal tube whose outer surface is coated with resin to maintain airtightness.

金属ハウジング2は、オーステナイト系の5US304
 (厚さ0.3mm)で形成され、開口21付の中空輪
状(内径14 m m 、外径22mm、高さ8.6m
m)に成形されている。
The metal housing 2 is made of austenitic 5US304.
(thickness 0.3 mm), hollow ring shape with opening 21 (inner diameter 14 mm, outer diameter 22 mm, height 8.6 m
m).

つぎに、ガスケット型圧力センサAの製造方法(かしめ
工程)を説明する。
Next, the manufacturing method (crimping process) of the gasket type pressure sensor A will be explained.

(1)第1図(I>に示すように、組付体1を、筒部2
20およびその一端から外方に延長された鍔部210か
らなる断面り字状の金具200の前記筒部220に嵌め
込む。
(1) As shown in FIG.
20 and a flange 210 extending outward from one end of the metal fitting 200, which has an angular cross section.

(2)第1図(U)に示すように、組付体後端面(図示
上方)18より突出した突出筒部221の略二等分部位
nを境に、組付体後端面18と筒部220との成す角が
、先部222で60°±15、基部223で45°±1
5°となるように(但し、先部の角度θ1〉基部の角度
θ2)この突出筒部221をかしめる。
(2) As shown in FIG. 1 (U), the rear end surface 18 of the assembled body and the cylinder The angle formed with the part 220 is 60°±15 at the tip 222 and 45°±1 at the base 223.
This protruding cylindrical portion 221 is caulked so that the angle is 5° (where the angle θ1 at the tip is greater than the angle θ2 at the base).

(3)第1図(I[[)に示すように、基部223が組
付体後端面18に当接するように、基部223のフラッ
トかしめを行う。
(3) As shown in FIG. 1 (I[[), the base portion 223 is flat caulked so that the base portion 223 comes into contact with the rear end surface 18 of the assembled body.

(4)第1図(IV)に示すように、先部222が組付
体後端面18に当接するように、先部222のフラット
かしめを行う。
(4) As shown in FIG. 1 (IV), the tip portion 222 is flat caulked so that the tip portion 222 comes into contact with the rear end surface 18 of the assembled body.

(5)さらに、組付体1の外周面19より延出しな部分
p、qの側方かしめを行い、第1図(V)に示すガスケ
ット型圧力センサAとなる。
(5) Furthermore, the parts p and q extending from the outer circumferential surface 19 of the assembled body 1 are laterally caulked, resulting in the gasket type pressure sensor A shown in FIG. 1(V).

以下、本実施例の作用効果を述べる (あ)金属ハウジング2の内周壁22に座面が発生せず
 圧電素子11や絶縁板1゜1の割れ、電極板12、板
パツキン13.15の変形が防止できれる。
The effects of this embodiment will be described below. (A) No seating surface occurs on the inner circumferential wall 22 of the metal housing 2, cracks in the piezoelectric element 11 and the insulating plate 1°1, and deformation of the electrode plate 12 and the plate packing 13 and 15. can be prevented.

くい)金属ハウジング2の内周壁22が変形しないので
、ガスゲット型圧力センサAをスパークプラグの座面ハ
\精度良く配設できる。
(2) Since the inner circumferential wall 22 of the metal housing 2 does not deform, the gas get type pressure sensor A can be placed on the seat surface of the spark plug with high precision.

(う)かしめの工程が簡単であるので、著しく製造コス
トを増大させない。
(c) Since the caulking process is simple, manufacturing costs do not increase significantly.

くえ〉金属ハウジング2に用いる金具200の厚さが0
.2mm〜0.6mmの場合、特に良好である。
Kue> The thickness of the metal fitting 200 used for the metal housing 2 is 0
.. A value of 2 mm to 0.6 mm is particularly good.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例におけるガスケット型圧力セ
ンサの製造工程図である。 第2図は従来の方法によるガスケット型圧力センサの製
造工程図である。 図中 1・・・組付体く輪形、センサ本体)11・・・
圧電素子 12・・・電極板 13.15・・・板パ・
ソキン 14・・・絶縁板 18・・・組付体後端面(
輪形端面、センサ本体の端面) 200・・・薄板金具
(筒状薄板金具) 210・・・鍔部 220・・・筒
部221・・・突出筒部 222・・・先部 223・
・・基部 n・・・略二等分部位 θ1・・・角度(輪
形端面と筒部との成す角、センサ本体の端面と筒部との
成す角) θ訃・・角度(輪形端面と筒部との成す角、
センサ本体の端面と筒部との成す角) A・・・ガスケ
ラ1〜型圧力センサ
FIG. 1 is a manufacturing process diagram of a gasket type pressure sensor according to an embodiment of the present invention. FIG. 2 is a process diagram for manufacturing a gasket type pressure sensor using a conventional method. In the diagram 1... Assembly body ring-shaped, sensor body) 11...
Piezoelectric element 12... Electrode plate 13.15... Plate plate
Socking 14... Insulating plate 18... Rear end surface of the assembly (
Ring-shaped end surface, end surface of sensor body) 200... Thin sheet metal fitting (cylindrical thin sheet metal fitting) 210... Flange portion 220... Cylindrical portion 221... Projecting cylinder portion 222... Tip portion 223.
...Base n...Approximately bisecting part θ1...Angle (angle formed by the ring-shaped end face and the cylinder part, angle formed by the end face of the sensor body and the cylinder part) θ-...Angle (the angle formed by the ring-shaped end face and the cylinder part) The angle formed by the
Angle formed between the end face of the sensor body and the cylinder part) A... Gaskera 1~ type pressure sensor

Claims (1)

【特許請求の範囲】 1)以下の工程からなる筒状薄板金具のかしめ方法。 筒部およびその一端から外方に延長された鍔部からなる
断面L字状の筒状薄板金具の前記筒部に、脆性体を含む
輪形を嵌め込む工程。 輪形端面より突出した突出筒部の略二等分部位を境に、
輪形端面と筒部との成す角が、先部で約60゜、基部で
約45゜になるようにこの突出筒部をかしめる工程。 前記基部が輪形端面に当接するようにかしめる工程。 前記先部が輪形端面に当接するようにかしめる工程。 前記輪形の外周面より延出した部分を外周面方向にかし
める工程。 2)以下の工程からなるガスケット型圧力センサの製造
方法。 筒部およびその一端から外方に延長された鍔部からなる
断面L字状の筒状薄板金具の前記筒部に、セラミック製
圧電素子、電極板、絶縁板、板パッキン等を積層してな
る輪状のセンサ本体を嵌め込む工程。 センサ本体の端面より突出した突出筒部の略二等分部位
を境に、センサ本体の端面と筒部との成す角が、先部で
約60゜、基部で約45゜になるようにこの突出筒部を
かしめる工程。 前記基部がセンサ本体の端面に当接するようにかしめる
工程。 前記先部がセンサ本体の端面に当接するようにかしめる
工程。 前記センサ本体の外周面より延出した部分を外周面方向
にかしめる工程。
[Claims] 1) A method for caulking a cylindrical thin sheet metal fitting comprising the following steps. A step of fitting a ring shape containing a brittle body into the cylindrical portion of a cylindrical thin sheet metal fitting having an L-shaped cross section and consisting of a cylindrical portion and a flange portion extending outward from one end of the cylindrical portion. Bordering the approximately bisecting portion of the protruding cylinder protruding from the ring-shaped end surface,
The process of caulking this protruding cylindrical portion so that the angle formed between the ring-shaped end face and the cylindrical portion is approximately 60° at the tip and approximately 45° at the base. crimping the base so that it comes into contact with the ring-shaped end surface. A step of caulking so that the tip comes into contact with the ring-shaped end surface. A step of caulking the portion extending from the outer peripheral surface of the ring shape in the direction of the outer peripheral surface. 2) A method for manufacturing a gasket type pressure sensor comprising the following steps. A cylindrical thin sheet metal fitting having an L-shaped cross section and consisting of a cylindrical portion and a flange extending outward from one end thereof, and a ceramic piezoelectric element, an electrode plate, an insulating plate, a plate packing, etc. are laminated on the cylindrical portion. The process of fitting the ring-shaped sensor body. This is done so that the angle formed by the end surface of the sensor body and the cylindrical portion is approximately 60° at the tip and approximately 45° at the base, with the approximately bisecting portion of the protruding cylindrical portion protruding from the end surface of the sensor body. Process of caulking the protruding cylinder. crimping the base so that it comes into contact with the end surface of the sensor body. crimping the tip so that it comes into contact with the end surface of the sensor body. a step of caulking a portion extending from the outer peripheral surface of the sensor body in the direction of the outer peripheral surface;
JP25792590A 1990-09-26 1990-09-26 Caulking method for tubular thin-plate metal piece and manufacture of gasket-type pressure sensor Pending JPH04134233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25792590A JPH04134233A (en) 1990-09-26 1990-09-26 Caulking method for tubular thin-plate metal piece and manufacture of gasket-type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25792590A JPH04134233A (en) 1990-09-26 1990-09-26 Caulking method for tubular thin-plate metal piece and manufacture of gasket-type pressure sensor

Publications (1)

Publication Number Publication Date
JPH04134233A true JPH04134233A (en) 1992-05-08

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JP25792590A Pending JPH04134233A (en) 1990-09-26 1990-09-26 Caulking method for tubular thin-plate metal piece and manufacture of gasket-type pressure sensor

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007292628A (en) * 2006-04-26 2007-11-08 Hitachi Engineering & Services Co Ltd Flange fastening surveillance device
JP2010133729A (en) * 2008-12-02 2010-06-17 Ngk Spark Plug Co Ltd Pressure sensor
JP2010256030A (en) * 2009-04-21 2010-11-11 Ngk Spark Plug Co Ltd Method for producing pressure sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007292628A (en) * 2006-04-26 2007-11-08 Hitachi Engineering & Services Co Ltd Flange fastening surveillance device
JP4699935B2 (en) * 2006-04-26 2011-06-15 株式会社日立エンジニアリング・アンド・サービス Flange fastening monitoring device
JP2010133729A (en) * 2008-12-02 2010-06-17 Ngk Spark Plug Co Ltd Pressure sensor
JP2010256030A (en) * 2009-04-21 2010-11-11 Ngk Spark Plug Co Ltd Method for producing pressure sensor

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