JPH04133014A - Reflecting mirror support mechanism - Google Patents

Reflecting mirror support mechanism

Info

Publication number
JPH04133014A
JPH04133014A JP25836790A JP25836790A JPH04133014A JP H04133014 A JPH04133014 A JP H04133014A JP 25836790 A JP25836790 A JP 25836790A JP 25836790 A JP25836790 A JP 25836790A JP H04133014 A JPH04133014 A JP H04133014A
Authority
JP
Japan
Prior art keywords
weight
force
support
lever
load shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25836790A
Other languages
Japanese (ja)
Inventor
Harumasa Toda
遠田 治正
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP25836790A priority Critical patent/JPH04133014A/en
Publication of JPH04133014A publication Critical patent/JPH04133014A/en
Pending legal-status Critical Current

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  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

PURPOSE:To easily and accurately adjust a force that a load shaft outputs by providing force adjusting mechanisms which adjust the force that the load shaft outputs to the arms of a reverse surface and flank support lever which constitutes the mechanism respectively. CONSTITUTION:Plural weights which are different in weight value are provided on the arm of the reverse surface and flank support lever, which is a unit support mechanism constituting the reflecting mirror support mechanism, on the opposite side from a support side. An error generated when the weight 7a of the force adjusting mechanism is adjusted in position by 'lever' theory and nuts 10a and 11a are clamped is removed by adjusting the weight 7b which is about 1/50 time as heavy as the weight 7a. An error generated again in the output force of the load shaft owing to the clamping of nuts 10b and 10b is ignored as compared with an error generated after the adjustment of the weight 7a. Consequently, the force that the load shaft outputs can easily be adjusted and the reflecting mirror support mechanism which has high force support accuracy can be realized.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、反射鏡支持機構に関し、特に該機構に使用さ
れる[てこJの改良に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a reflecting mirror support mechanism, and particularly relates to an improvement of a lever J used in the mechanism.

〔従来の技術〕[Conventional technology]

第5図は従来から用いられている反射鏡の支持機構を示
す図である。
FIG. 5 is a diagram showing a conventionally used supporting mechanism for a reflecting mirror.

図において、1は反射鏡、2はセル、8,9は単位支持
機構である「てこJを示し、「てこJか支持する鏡の面
に対応して裏面支持てこ8と側面支持てこ9とに分類さ
れる。
In the figure, 1 is a reflecting mirror, 2 is a cell, 8 and 9 are unit support mechanisms, and ``lever J'' is shown. are categorized.

そしていずれの「てこ」も基本的には第6図に示すよう
に構成されており、図において、3は反射鏡を支える負
荷軸、4は短腕、5は[てこJの支点部、6は長腕、7
は重り、10.11はナツトである。
Each of the "levers" is basically constructed as shown in Fig. 6. In the figure, 3 is the load shaft that supports the reflector, 4 is the short arm, 5 is the fulcrum of lever J, and 6 is long arm, 7
is a weight, and 10.11 is a nut.

この支持機構は「てこ」の支点部5かセル2に取り付け
られ、「てこ」の負荷軸3か側面支持てこ9では反射鏡
1の側面に取り付けられた取付は部材を、また裏面支持
てこ8では反射鏡1の裏面に取り付けられた図示しない
受皿をそれぞれ支持するように構成されている。
This support mechanism is attached to the fulcrum part 5 of the "lever" or the cell 2, and the load shaft 3 of the "lever" or the side support lever 9 supports the member attached to the side surface of the reflector 1, and the back support lever 8 In this case, each of the mirrors is configured to support a saucer (not shown) attached to the back surface of the reflecting mirror 1.

次に動作について説明する。Next, the operation will be explained.

反射鏡lが第5図のように天頂方向を向く場合には該反
射鏡1の重量は裏面支持てこ8にのみ作用し、側面支持
てこ9には作用しない。このとき、裏面支持でこ8の重
り7の重量と支点部5から上記重り7までの腕の長さと
をあらかじめ適切に調整しておくことにより、上記裏面
支持てこ8の負荷軸3が出す力の和を上記反射鏡1の重
量に釣り合わせることが可能である。このようにすると
、反射鏡1をセル2に触れさせることなく、裏面支持で
二8にのみよって宙に保持することができるようになる
。またナツト10.11は重りの調整時は緩めて重りと
の間には十分な間隔をとり、調整後は重りは両側から締
付けて、「てこ」の通常の使用状態において重りが勝手
に移動することを防止する。なお、この調整作業は一般
に、「てこ」をセルに取りつける前に行う。
When the reflecting mirror 1 faces toward the zenith as shown in FIG. 5, the weight of the reflecting mirror 1 acts only on the back support lever 8 and does not act on the side support lever 9. At this time, by appropriately adjusting the weight of the weight 7 of the back support lever 8 and the length of the arm from the fulcrum 5 to the weight 7, the force exerted by the load shaft 3 of the back support lever 8 can be adjusted in advance. It is possible to balance the sum of the above to the weight of the reflecting mirror 1. In this way, the reflecting mirror 1 can be held in the air by supporting the back surface only by the 28 without touching the cell 2. In addition, when adjusting the weight, loosen the nuts 10 and 11 to leave enough space between the weight and the weight, and after adjustment, tighten the weight from both sides so that the weight moves freely when the lever is used normally. prevent this from happening. Note that this adjustment work is generally performed before attaching the "lever" to the cell.

また反射鏡1が水平方向を向く場合には、鏡の重量は側
面支持てこ9にのみ作用し、裏面支持てこ8には作用し
ない。このときも上記裏面支持でこの場合と同様にして
、重り7の重量と支点部5から上記重り7までの腕の長
さとを適切に調整することによって、反射鏡lを側面支
持てこ9のみによって宙に保持することができるように
なる。
Further, when the reflecting mirror 1 faces in the horizontal direction, the weight of the mirror acts only on the side support levers 9 and does not act on the back support levers 8. In this case, the reflector l is supported only by the side support lever 9 by appropriately adjusting the weight of the weight 7 and the length of the arm from the fulcrum 5 to the weight 7 using the back support. You will be able to hold it in the air.

以上のようにして、「てこ」の調整を天頂、水平の各方
向に対して行っておくと、反射鏡1が天頂、水平の中間
方向を向く場合でも側面支持てこ9と裏面支持てこ8が
分担して上記反射鏡lを宙に保持するようになる。
If the "lever" is adjusted in the zenith and horizontal directions as described above, the side support lever 9 and the back support lever 8 will be adjusted even when the reflector 1 faces in the middle direction between the zenith and the horizontal They share the responsibility of holding the reflecting mirror l in the air.

これらの「てこ」は、反射鏡が重力方向に対して姿勢を
変えるとき、反射鏡をセルとの相対位置関係が不変とな
るよう保持、あるいは副反射鏡を相対させた光学系を構
成して用いる場合には副反射鏡との相対位置関係を保持
させる、保持精度の確保の目的に加え、鏡面に生じる重
力変形を抑制して鏡自身の結像能力の劣化を防止する、
いわゆる分解能の確保を目的として、重りの重量、腕の
長さ、 「てこ」の個数、各面での支持位置などの「て
こ」のパラメータを適切に選択して取り付けられる。
These "levers" hold the reflector in such a way that its relative position with the cell remains unchanged when the reflector changes its attitude with respect to the direction of gravity, or they form an optical system in which the sub-reflector is opposed to the reflector. When used, in addition to maintaining the relative positional relationship with the sub-reflector and ensuring retention accuracy, it also suppresses gravitational deformation that occurs on the mirror surface and prevents deterioration of the mirror's own imaging ability.
For the purpose of ensuring so-called resolution, the parameters of the ``levers'' such as the weight of the weight, the length of the arm, the number of ``levers'', and the support position on each surface are appropriately selected and installed.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来の反射鏡支持機構に適用されている「てこ」は以上
のように構成されているが、負荷軸が出す力の値につい
ては重りと腕の長さから決まるモーメントの理論値に基
づいて決定される程度であり、その実際の設定精度につ
いてはあまり関心が払われていなかった。
The "lever" applied to the conventional reflector support mechanism is constructed as described above, but the value of the force exerted by the load shaft is determined based on the theoretical value of the moment determined from the weight and arm length. However, little attention was paid to the actual setting accuracy.

また、実際に重りを腕に沿って移動させる際、重りを動
かす方向を変えるとガタやバックラッシュの存在のため
に設定が理論通りにならないという問題もあった。
Additionally, when the weight is actually moved along the arm, there is a problem in that if the direction of the weight movement is changed, the settings do not match the theory due to play and backlash.

さらに「てこJの重りの調整時以外は重り勝手に位置を
変えることがないように、なんらかのストッパーで腕に
固定される必要かあるが、重りを位置設定して負荷軸の
出す力を精度よく設定したとしても、このストッパーの
機能を働かせるのは重りの位置設定の後であるため、そ
の時点で負荷軸の力の設定精度が劣化するという問題が
あった。
Furthermore, ``It is necessary to fix the weight to the arm with some kind of stopper so that the weight does not change its position at will except when adjusting the weight of the lever J, but by setting the weight position, the force exerted by the load shaft can be adjusted accurately. Even if the stopper is set, the function of this stopper is activated after the position of the weight is set, so there is a problem that the setting accuracy of the force of the load shaft deteriorates at that point.

この劣化を考慮した設定を行うためには、経験と勘とを
必要とし極めて困難な作業となっていた。
Making settings that take this deterioration into consideration requires experience and intuition, making it an extremely difficult task.

しかし、高い集光能力を期待されて使用される大型反射
鏡においては、より高い保持精度と分解能を確保するた
めに、負荷軸の出す力を精度よく設定できる必要があり
、これを実現し得るための機能が必要とされるようにな
ってきた。
However, in large reflecting mirrors that are expected to have high light-gathering ability, it is necessary to accurately set the force exerted by the load shaft in order to ensure higher holding accuracy and resolution. There is a growing need for functions for this purpose.

本発明は上記のような要求に鑑みてなされたもので、負
荷軸が出す力を精度良く設定るために、重りの位置調整
を精密に行い得るとともに、その調整が容易な力調整機
構を備えた反射鏡支持機構を提供することを目的とする
The present invention has been made in view of the above-mentioned requirements, and in order to accurately set the force exerted by the load shaft, it is possible to precisely adjust the position of the weight and is equipped with a force adjustment mechanism that allows easy adjustment. The purpose of the present invention is to provide a reflector support mechanism that provides improved reflector support.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係る反射鏡支持機構は、その単位支持機構と
して、支点に支持された腕と敏腕の一端に取り付けられ
反射鏡裏面および側面を支持する負荷軸と、上記腕の他
端に取り付けられた重りとからなる裏面および側面支持
てこを用いたものにおいて、支持てこの重り側の腕に原
則として異なる重さの重りを複数個設けるようにしたも
のである。
The reflector support mechanism according to the present invention includes, as its unit support mechanism, an arm supported on a fulcrum, a load shaft attached to one end of the arm and supporting the back and side surfaces of the reflector, and an arm attached to the other end of the arm. In a device using a back and side support lever consisting of a weight, a plurality of weights of different weights are provided on the arm on the weight side of the support lever.

〔作用〕[Effect]

この発明においては、反射鏡支持機構を構成する単位支
持機構である「てこ」において、裏面および側面支持で
この支持側とは反対側の腕に原則として異なる重さの重
りを複数個設けて力調整機構を構成したため、これらの
重りのうち重たいものから順に調整していくことにより
、負荷軸が出す力を精度よく、しかも容易に調整するこ
とができる。
In this invention, in the "lever" which is the unit support mechanism that constitutes the reflector support mechanism, a plurality of weights of different weights are provided on the arm on the opposite side to the support side for back and side support, and the lever is used to apply force. Since the adjustment mechanism is configured, the force exerted by the load shaft can be adjusted easily and accurately by adjusting the heaviest of these weights in order.

〔実施例〕〔Example〕

以下この発明の実施例を図について説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例による反射鏡支持機構を示し
、特にその裏面支持でこの力調整機構を例にとって示す
図である。図において、7aは重りa、7bは重りbて
あり、重りbの重力は重りaの11b0程度とする。ま
た10a、10b。
FIG. 1 shows a reflecting mirror support mechanism according to an embodiment of the present invention, and in particular, is a diagram illustrating a force adjustment mechanism for supporting the rear surface of the mirror as an example. In the figure, 7a is a weight a, and 7b is a weight b, and the gravity of the weight b is about 11b0 of the weight a. Also 10a, 10b.

11a、llbはナツトである。11a and llb are nuts.

次に動作について説明する。Next, the operation will be explained.

ここで「てこ」の動作自体は従来例と同一であるので省
略し、本発明に係る力調整機構の動作についてのみ、裏
面支持で二8を例にとって説明する。
Here, since the operation of the "lever" itself is the same as that of the conventional example, it will be omitted, and only the operation of the force adjustment mechanism according to the present invention will be explained using the case 28 with back support as an example.

第1図に示した本実施例における力調整機構では、まず
重り7aを「てこ」の理論に従って位置調整することに
よってナツト10a、llaの締付けまでを実施する。
In the force adjustment mechanism of this embodiment shown in FIG. 1, the weight 7a is first adjusted in position according to the "lever" theory, and then the nuts 10a and 11a are tightened.

ナツトの締付は時に負荷軸の出す力に誤差か生じるので
、その分を重量の小さい重り7bを調整することよって
除去する。このとき、ナツト10b、llbの締付によ
って再び負荷軸の出す力に誤差か生じるか、その値は重
り7aの調整後に生じる誤差に比べてオーダーか2桁程
度低くなるので通常は問題にならない。
Tightening the nut sometimes causes an error in the force exerted by the load shaft, so this error can be eliminated by adjusting the light weight 7b. At this time, whether an error occurs again in the force exerted by the load shaft due to the tightening of the nuts 10b and 11b, and this value is normally not a problem because it is about two orders of magnitude lower than the error that occurs after adjusting the weight 7a.

なお、上記実施例では重り7b重量を重り7aの11b
0程度としたが、この比率は本発明の本質とは無関係で
あり、任意に設定して良い。
In addition, in the above embodiment, the weight of the weight 7b is the weight of the weight 7a.
Although the ratio is about 0, this ratio is irrelevant to the essence of the present invention and may be set arbitrarily.

また、上記実施例では重り7bをナツト10b。Further, in the above embodiment, the weight 7b is replaced by a nut 10b.

11bとは別個に設けたか、これらのナツトの重量如何
によっては第2図に示すように重り7bを省略し、ナツ
ト10b、llbがその役割を兼ねるようにしても差し
つかえない。
Depending on the weight of these nuts, the weight 7b may be omitted as shown in FIG. 2, and the nuts 10b and llb may serve the same purpose.

さらに上記実施例では力調整機構に要する重りの数を2
個としたか、第3図に示すようにこれらを3個以上とし
て力調節機構を構成してもよいことは言うまでもない。
Furthermore, in the above embodiment, the number of weights required for the force adjustment mechanism is reduced to 2.
It goes without saying that the force adjustment mechanism may be constructed using three or more of these as shown in FIG. 3.

さらに、第1図の実施例では重り7aが重り7bよりも
腕の端部側にある場合について示したが、第4図に示す
ようにこれらの順序は逆であってもよい。
Furthermore, although the embodiment shown in FIG. 1 shows the case where the weight 7a is located closer to the end of the arm than the weight 7b, the order of these may be reversed as shown in FIG.

〔発明の効果〕〔Effect of the invention〕

以上のように、本発明に係る反射鏡の支持機構によれば
、その機構を構成する裏面および側面支持てこの腕にそ
れぞれ負荷軸が出す力を調節する力調節機構を設けたの
で、裏面および側面支持てこを負荷軸の出す力を容易に
調節でき、力支持精度の高い反射鏡支持機構を実現でき
る効果がある。
As described above, according to the support mechanism for a reflector according to the present invention, the force adjustment mechanism for adjusting the force exerted by the load shaft is provided on the back and side support lever arms that constitute the mechanism, so that It is possible to easily adjust the force exerted by the load shaft using the side support lever, which has the effect of realizing a reflector support mechanism with high force support accuracy.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例による反射鏡支持機構におけ
る裏面支持てこの力調節機構とその構成の詳細を示す図
、第2図は本発明の第2の実施例を示す図、第3図は本
発明の第3の実施例を示す図、第4図は本発明の第4の
実施例を示す図、第5図は従来の反射鏡支持機構を示す
図、第6図は従来の反射鏡支持機構に用いられている「
てこ]を示す図である。 図において、■は反射鏡、2はセル、3は負荷軸、4は
短腕、5は支点部、6は長腕、7.7a。 7b、7cは重り、8は裏面支持てこ、9は側面支持て
こ、10.10a、10b、10c、11゜11a、l
lb、llcはナツトである。 なお図中同一符号は同−又は相当部分を示す。
FIG. 1 is a diagram showing the details of the force adjustment mechanism of the back support lever in the reflecting mirror support mechanism according to one embodiment of the present invention and its configuration, FIG. 2 is a diagram showing the second embodiment of the present invention, and FIG. The figure shows a third embodiment of the present invention, FIG. 4 shows a fourth embodiment of the invention, FIG. 5 shows a conventional reflector support mechanism, and FIG. 6 shows a conventional reflector support mechanism. "" used in the reflector support mechanism
FIG. In the figure, ■ is a reflector, 2 is a cell, 3 is a load shaft, 4 is a short arm, 5 is a fulcrum, 6 is a long arm, and 7.7a. 7b, 7c are weights, 8 is a back support lever, 9 is a side support lever, 10.10a, 10b, 10c, 11° 11a, l
lb and llc are nuts. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] (1)重力方向に対して姿勢が変化する反射鏡の裏面お
よび側面に配設され、 支点に支持された腕と、 該腕の一端に取付けられ、上記反射鏡裏面および側面を
支持する負荷軸と、 上記腕の他端側にその位置を調整可能に取り付けられた
重りとからなる支持てこからなり、該反射鏡を支持する
複数の単位底面および単位側面支持機構を備え、 該反射鏡をその姿勢変化に伴う鏡面変形が抑制されるよ
うに保持する反射鏡支持機構において、1個のてこにつ
き2個以上設置された上記重りからなり、上記支持てこ
の負荷軸が出す力を調整する力調整機構を設けたことを
特徴とする反射鏡支持機構。
(1) An arm that is disposed on the back and side surfaces of the reflector whose attitude changes with respect to the direction of gravity and is supported by a fulcrum, and a load shaft that is attached to one end of the arm and supports the back and side surfaces of the reflector. and a weight attached to the other end of the arm so that its position can be adjusted, and a plurality of unit bottom and side support mechanisms for supporting the reflector; In a reflecting mirror support mechanism that holds the mirror so that deformation of the mirror surface due to changes in posture is suppressed, the force adjustment mechanism comprises the above-mentioned weights installed at least two per lever, and adjusts the force exerted by the load shaft of the support lever. A reflecting mirror support mechanism characterized by having a mechanism.
JP25836790A 1990-09-25 1990-09-25 Reflecting mirror support mechanism Pending JPH04133014A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25836790A JPH04133014A (en) 1990-09-25 1990-09-25 Reflecting mirror support mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25836790A JPH04133014A (en) 1990-09-25 1990-09-25 Reflecting mirror support mechanism

Publications (1)

Publication Number Publication Date
JPH04133014A true JPH04133014A (en) 1992-05-07

Family

ID=17319261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25836790A Pending JPH04133014A (en) 1990-09-25 1990-09-25 Reflecting mirror support mechanism

Country Status (1)

Country Link
JP (1) JPH04133014A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6043863A (en) * 1996-11-14 2000-03-28 Nikon Corporation Holder for reflecting member and exposure apparatus having the same
CN115308874A (en) * 2022-09-06 2022-11-08 中国科学院长春光学精密机械与物理研究所 Non-interference gravity unloading mechanism of large-diameter reflector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6043863A (en) * 1996-11-14 2000-03-28 Nikon Corporation Holder for reflecting member and exposure apparatus having the same
CN115308874A (en) * 2022-09-06 2022-11-08 中国科学院长春光学精密机械与物理研究所 Non-interference gravity unloading mechanism of large-diameter reflector

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