JPH04131938U - semiconductor wafer carrier - Google Patents

Abstract

(57) [Summary] [Purpose] When a worker stores semiconductor wafers, the high and low partitions are arranged alternately, making it easier for the worker to store the semiconductor wafers by lightly touching the side of the high partition. By erroneously storing the semiconductor wafer in the same recess, damage caused by contact with the semiconductor wafer is prevented. [Structure] A pair of high partitions 1 that support the edge of a semiconductor wafer
and a pair of low partitions 2 adjacent to the high partition 1 and having a lower height from the lower surface 8 than the high partition 1, which are parallel to the front surface 7 and alternately,
A recess 4 is provided between the high partition 1 and the high partition 2.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a semiconductor wafer carrier.

0002

[Conventional technology]

(a) and (b) are a perspective view and a sectional view showing a conventional example.

0003 Traditional semiconductor wafer carriers have a front surface that supports the edge of adjacent semiconductor wafers. A pair of partitions 9 parallel to 7 and a pair of partitions 10 of the same shape adjacent to partition 9 It has concave portions 4 parallel to and facing each other on the front surface 7.

0004 When storing the semiconductor wafer in the recess 4, the operator may use tweezers, for example. Grip the edge of the semiconductor wafer, bring it close to between partition 9 and partition 10, and visually confirm it. After recognition, it was stored in recess 4.

[0005]

[Problem that the idea aims to solve]

In the conventional semiconductor wafer carrier mentioned above, a pair of adjacent partitions have the same shape. Because they are lined up at a relatively fine pitch, it is difficult for workers to store semiconductor wafers. , if either the left or right side of the semiconductor wafer is already accommodated with an adjacent semiconductor wafer. It is easy to accidentally store the semiconductors in the recesses where they are placed. There was a problem in that the wafers came into contact with each other and were easily damaged.

[0006]

[Means to solve the problem]

The semiconductor wafer carrier of the present invention consists of a pair of high-quality materials that support the edge of a semiconductor wafer. a pair of low partitions adjacent to the high partition and having a lower height from the lower surface than the high partition; , having parallel recesses on the front surface that accommodate the semiconductor wafer and facing each other.

[0007]

【Example】 Next, embodiments of the present invention will be described with reference to the drawings.

[0008] FIGS. 1(a) and 1(b) are a perspective view and a sectional view showing an embodiment of the present invention.

[0009] The semiconductor wafer carrier shown in Figures (a) and (b) supports the end surface of the semiconductor wafer. a pair of high partitions 1 that are adjacent to the high partition 1 and whose height from the bottom surface 8 is lower than the high partition 1; It has a pair of low partitions 2 parallel to the front surface 7 and alternately, and between the high partitions 1 and 2. It has a recess 4.

0010 Next, we will explain how to use this example when storing semiconductor wafers in a semiconductor wafer carrier. explain.

[0011] A worker holds the first semiconductor wafer, the end of which is gripped with tweezers, into the high partition 1. Lightly touch the end surface of the semiconductor wafer to the side surface 5 of the Make sure that it is stored properly.

0012 Next, when storing the second semiconductor wafer, the side surface 6 of the high partition 3 in the next position In the same way, lightly touch the end face of the semiconductor wafer and store it.

[0013]

[Effect of the idea]

As explained above, the present invention provides a pair of devices that support the end surfaces of adjacent semiconductor wafers. a pair of high partitions that are adjacent to the high partition and whose height from the bottom surface is lower than that of the high partition. It has a low partition and parallel recesses facing each other on the front surface for storing semiconductor wafers. Therefore, when workers store semiconductor wafers, they need to use high and low partitions alternately. This makes it easier for the worker to visually check the difference in the partition and store it by lightly touching the side of the high partition. At the same time, by incorrectly storing semiconductor wafers in the same recess, semiconductor wafers may be connected. It has the effect of preventing scratches caused by touch.

[Brief explanation of drawings]

FIGS. 1(a) and 1(b) are a perspective view and a sectional view showing an embodiment of the present invention.

FIGS. 2(a) and 2(b) are a perspective view and a sectional view showing a conventional example.

[Explanation of symbols]

1 High partition 2 Low partition 3 High partition 4 Recess 5 side 6 side 7 Front 8 Bottom surface 9 Partition 10 Partition

Claims (1)

[Scope of utility model registration request] 1. A pair of high partitions that support end surfaces of semiconductor wafers, a pair of low partitions adjacent to the high partitions and having a lower height from the lower surface than the high partitions, and opposing recesses that accommodate the semiconductor wafers. A semiconductor wafer carrier characterized in that it has parallel to the front surface.