JPH04131029U - piezoelectric resonator - Google Patents

Abstract

(57) [Summary] [Purpose] To reduce the size and improve reliability by improving airtightness. [Structure] On the first and second main surfaces of a rectangular piezoelectric substrate,
In a piezoelectric resonator comprising a piezoelectric element and a sealing substrate, each of which is provided with a vibrating electrode, an extraction electrode, and a lead electrode for connecting the vibrating electrode and the extraction electrode, and a sealing substrate, each of the extraction electrodes is arranged in plural pieces on the edge of the piezoelectric substrate. It is divided and set up,
Each extraction electrode is connected to a vibrating electrode through one or more lead electrodes.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention relates to the electrode structure of piezoelectric resonators, and is particularly applicable to piezoelectric resonators with improved airtightness. related.

0002

[Conventional technology]

As an example of a piezoelectric resonator made of a conventional energy-confining piezoelectric element, 9 and 10 are known. The piezoelectric resonator 101 has various electrodes installed on a piezoelectric substrate 102 made of piezoelectric ceramics. The piezoelectric element 103 is made of ceramic material, and the front and back surfaces of the piezoelectric element 103 are made of ceramic. The sealing substrates 104 and 105 made of a box etc. are stacked and integrated to form a block. It is configured by providing external electrodes 106 and 107. The piezoelectric element 103 has a first main surface (front surface) and a second main surface (front surface) via the piezoelectric substrate 102. A pair of vibrating electrodes 108 and 109 are provided facing each other on the back surface of the piezoelectric substrate 102. If extraction electrodes 110 and 111 are provided on the front and back surfaces of the opposing sides, respectively, Also, a lead electrode 112a connecting this extraction electrode 110 and the vibration electrode 108, 112b is provided, and the lead electrode 1 connects the vibrating electrode 109 and the extraction electrode 111. 13a and 113b are provided.

0003

[Problem that the idea aims to solve]

By the way, in the conventional piezoelectric resonator 101 described above, the extraction electrodes 110 and 111 are along the front and back edges of the two opposing sides of the plate 102, along the entire length of the sides. It is set up as follows. Therefore, the extraction electrode occupies a large area, which limits miniaturization. It was. In addition, the bonding surface between the extraction electrode and the sealing substrate is the contact surface between the piezoelectric ceramic substrate and the sealing substrate. It was weaker than normal, had poor airtightness, and tended to have a lot of leakage from the extraction electrode part. Furthermore, components mounted side by side with piezoelectric resonant components have become smaller, and various components have become smaller. Because they are mounted close together, unnecessary vibrations are likely to occur between adjacent electrodes (conductive parts). It had become.

0004 The present invention was devised in view of the above problems of the conventional piezoelectric resonators. The purpose of the The purpose of this invention is to provide an electric resonator.

[0005]

[Means to solve the problem]

The piezoelectric resonator according to the present invention has vibrations on the first and second main surfaces of a rectangular piezoelectric substrate. The electrode, the lead electrode, and the lead electrode that connects the vibration electrode and the lead electrode are connected to it. In a piezoelectric resonator consisting of a piezoelectric element and a sealing substrate, each of the above-mentioned extraction voltages is The poles are divided into multiple pieces on the edge of the piezoelectric substrate, and each lead-out electrode has one or more pieces. It is characterized by being connected to the vibrating electrode through the upper lead electrode.

[0006]

[Effect]

Since the piezoelectric resonator according to the present invention is configured as described above, the extraction electrode and the sealing The bonding area with the sealing substrate is reduced, and the piezoelectric substrate and sealing substrate are stacked and bonded. , these bonds became stronger and the airtightness improved, and one of the lead electrodes broke. However, since there is the other lead electrode, there is no possibility that the device will become unusable due to disconnection. Furthermore, since the extraction electrode can be made smaller, the piezoelectric resonator can be made smaller.

[0007]

【Example】

Embodiments of the piezoelectric resonator according to the present invention will be described below with reference to the drawings. 1 to 3 are diagrams illustrating a first embodiment of the present invention. In the figure, 1 is a piezoelectric resonator, 2 is a piezoelectric substrate, 3 is a piezoelectric element, and 4 and 5 are sealing bases. The plates 6 and 7 are external electrodes. This piezoelectric resonator 1 has electrodes on the front and back surfaces of a piezoelectric substrate 2 made of piezoelectric ceramics, for example. A piezoelectric element 3 provided with a piezoelectric element 3, and a ceramic sealing layer laminated on the front and back surfaces of the piezoelectric element 3. From the side of the board 4, 5 and the stacked and integrated block to the edge of the adjacent surface A pair of external electrodes 6 and 7 are formed into a two-terminal type circuit as shown in FIG. It is composed of

[0008] As shown in FIG. 2, the piezoelectric element 3 has a vibrating electrode 8 in the center of the surface and a vibrating electrode 8 in the corner. Lead electrodes 10a and 10b are provided, and the vibration electrodes 8 are connected to the lead electrodes 10a and 10b, respectively. Electrodes 12a and 12b are provided, and the vibration electrode 9 and extraction electrode 11 are provided on the back side as well. a, 11b and lead electrodes 13a, 13b. The extraction electrodes 10a and 10b on the surface of the piezoelectric substrate 2 are divided into two parts, and one connected to the external electrode 6 of The extraction electrodes 11a and 11b are divided into two and provided near the other external electrode. 7 is connected.

[0009] As mentioned above, for one vibrating electrode 8, there are two extraction electrodes 10a and 10b. The extraction electrodes 10a and 10b are provided separately, and the lead electrodes 12a and 10b are respectively lead electrodes 12a and 1. 2b. Also, for one vibrating electrode 9 on the back side, the extraction electrode 11 The extraction electrodes 11a and 11b are separated into two parts, a and 11b. are connected by field electrodes 13a and 13b. In this way, the extraction electrodes and lead electrodes are divided into multiple pieces, made smaller, and the piezoelectric substrate Since the number of connections between the electrode and the sealing substrate is increased, and the number of connections between the electrode and the sealing substrate is reduced, the pressure is reduced. The bonding between the electric substrate and the sealing substrate is improved.

0010 FIG. 4 shows the arrangement of the extraction electrodes of the piezoelectric element for the two-terminal piezoelectric resonator of the second embodiment. FIG. 3 is a plan view showing an example. The piezoelectric element 14 of this embodiment has a vibrating electrode 8 on the surface, extraction electrodes 10a, 10b, Lead electrodes 15a, 15b are provided, and a vibration electrode 9, extraction electrode 11a, 11b, and lead electrodes 16a and 16b. The piezoelectric resonator of this embodiment has a piezoelectric element 14 similar to the first embodiment described above. Sealing substrates (not shown) are laminated and integrated on the front and back surfaces, and external electrodes are provided. It is configured. As shown in FIG. 4, lead electrodes 10a and 10b on the front surface of the piezoelectric substrate 2 and lead electrodes on the back surface The output electrodes 11a and 11b are arranged at the corners of two opposing sides, as in FIG. 1 above. Lead electrodes 15a connected to the vibrating electrode 8 and the extraction electrodes 10a and 10b, respectively. , 15b are provided and connected to the vibrating electrode 9 and the extraction electrodes 11a, 11b, respectively. Lead electrodes 16a and 16b are provided. The lead electrodes 15a and 15b are It extends radially in the diametrical direction of the moving electrode 8 and is bent near the edges of the opposite sides to form a lead-out electrode. They are connected to the poles 10a and 10b, respectively. The lead electrodes 16a and 16b on the back side are spaced apart from the vibration electrode 9 on the back side. and extend parallel to the extraction electrodes 11a, 11b side, and the extraction electrodes 11a, 11b on the back side. The electrodes are bent to the sides and connected to the extraction electrodes 11a and 11b. .

[0011] FIG. 5 shows the arrangement of the extraction electrodes of the piezoelectric element for the two-terminal piezoelectric resonator of the third embodiment. FIG. 3 is a plan view showing an example. The piezoelectric resonator of this embodiment has a piezoelectric element 17 similar to the first embodiment described above. Sealing substrates (not shown) are laminated and integrated on the front and back surfaces, and external electrodes are provided. It is configured. The piezoelectric element 17 of this embodiment is the same as that shown in FIG. Extracting electrodes 18 and 19 are provided. Extracting electrode 1 on the surface of piezoelectric substrate 2 Divide it into 3 pieces, 0a, 10b, and 18, and provide them on the sides, center, and corners, and similarly on the back side. Extracting electrodes 11a, 11b, 19 are divided into three parts, and the extraction electrodes 10a, 1 on the surface are divided into three parts. It is provided at the center and corner of the side opposite to the side where 0b and 18 are provided. and, Lead electrodes 15a, 1 are connected to the vibrating electrode 8 and extraction electrodes 10a, 10b, 18. 5b, 20 are provided and connected to the vibrating electrode 9, respectively, and lead electrodes 16a, 16b, There are 21.

0012 FIG. 6 shows an example of arrangement of lead electrodes of a piezoelectric element for a two-terminal piezoelectric resonator according to the fourth embodiment. FIG. In the piezoelectric resonator of this embodiment, the front and back surfaces of the piezoelectric element 22 are provided with Sealing substrates (not shown) are laminated and integrated, and external electrodes are provided. ing. The piezoelectric element 22 of this embodiment includes a vibrating electrode 8 and an extraction electrode 23 on the surface of the piezoelectric substrate 2. a, 23b, and lead electrodes 25a, 25b, respectively, and are vibrated on the back surface of the piezoelectric substrate 2. Consisting of a dynamic electrode 9, extraction electrodes 24a, 24b, and lead electrodes 26a, 26b. are doing. The extraction electrodes 23a and 23b on the front surface are provided at the center of the opposing sides, and the vibrating electrodes 8 and are connected to lead electrodes 25a and 25b extending radially from each other. Also The extraction electrodes 24a and 24b on the back side are also placed in the center of the opposing sides where the extraction electrodes are not provided. The lead electrodes 26a and 26b are provided and extend radially from the vibrating electrode 9, respectively. Connected.

[0013] FIG. 7 is a plan view showing the circuit configuration of the three-terminal piezoelectric resonator of the fifth embodiment. In the piezoelectric resonator of this embodiment, for example, the piezoelectric element 27 shown in FIG. As in the embodiment, a sealing substrate (not shown) is provided. The piezoelectric element 27 of this embodiment has two vibrating electrodes 28a and 28b on the surface side of the substrate 2. Two sets of vibrating electrodes are provided, and one opposing electrode 29 for the capacitor is provided. Extracting electrodes 31 are provided at the four corners of the substrate 2, and each vibrating electrode 28 a and each extraction electrode 31 are connected by a lead electrode 33, and a vibrating electrode 28b and a pair It is connected to the facing electrode 29 through lead electrodes 34, 34.

[0014] Further, on the back surface of the substrate 2, there are provided a pair of vibrating electrodes 28a, 28b facing each pair of vibrating electrodes 28a, 28b. Vibrating electrodes 30, 30 are provided, and the other counter electrode 35 for the capacitor is provided. , extraction electrodes 36, 36 are provided at the center of two opposing sides. Lead electrodes 37, 37 are provided to connect each vibrating electrode 30 and the counter electrode 35, respectively. I'm being kicked. Then, the front and back surfaces are covered with a sealing substrate (not shown), and the two opposing sides of the outer surface are covered with a sealing substrate (not shown). External electrodes are provided on the surface and the center, and lead-out electrodes 32, 32, and 33 are provided, respectively. Connected.

[0015]

[Effect of the idea]

As mentioned above, according to the present invention, the area of the extraction electrode can be reduced by dividing it. This makes it possible to reduce the size, strengthen the bond, and improve airtightness. The present invention includes a piezoelectric filter, piezoelectric trap, oscillator, and FM discriminator. It can be applied to resonators for motors, etc.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a first embodiment of a two-terminal piezoelectric resonator according to the present invention.

FIG. 2 is a plan view of a piezoelectric element constituting this embodiment.

FIG. 3 is an equivalent circuit diagram of this embodiment.

FIG. 4 is a plan view showing a second embodiment.

FIG. 5 is a plan view showing a third embodiment.

FIG. 6 is a plan view showing a fourth embodiment.

FIG. 7 is an equivalent circuit diagram of a three-terminal piezoelectric resonator according to a fifth embodiment of the present invention.

FIG. 8 is a diagram showing a piezoelectric element constituting a three-terminal piezoelectric resonator according to a fifth embodiment of the present invention, in which (a) is a plan view;
(b) is a back view.

FIG. 9 is a perspective view showing a conventional example.

FIG. 10 is a plan view of a conventional piezoelectric element.

[Explanation of symbols]

1 Piezoelectric resonator 2 Piezoelectric substrate 3 Piezoelectric element 4,5 Sealing substrate 6,7 External electrode 8,9 Vibrating electrode 10a, 10b, 11a, 11b extraction electrode 12a, 12b, 13a, 13b lead electrode 14 Piezoelectric element 15a, 15b, 16a, 16b lead electrode 17 Piezoelectric element 18,19 Extraction electrode 20, 21 Lead electrode 22 Piezoelectric element 23a, 23b, 24a, 24b extraction electrode 25a, 25b, 26a, 26b lead electrode 27 Piezoelectric element 28a, 28b, 30 vibrating electrode 29,35 Counter electrode 31 Extraction electrode 33, 34, 37 Lead electrode

Claims (1)

[Scope of utility model registration request] 1. A piezoelectric element and a sealing substrate, each having a vibrating electrode, an extraction electrode, and a lead electrode connecting the vibrating electrode and the extraction electrode on the first and second principal surfaces of a rectangular piezoelectric substrate. In the piezoelectric resonator comprising: a piezoelectric resonator, each of the extraction electrodes is divided into a plurality of pieces and provided on the edge of the piezoelectric substrate, and each extraction electrode is connected to the vibrating electrode by one or more lead electrodes. Piezoelectric resonator.