JPH04128642A - Device for x-ray analysis - Google Patents
Device for x-ray analysisInfo
- Publication number
- JPH04128642A JPH04128642A JP2250579A JP25057990A JPH04128642A JP H04128642 A JPH04128642 A JP H04128642A JP 2250579 A JP2250579 A JP 2250579A JP 25057990 A JP25057990 A JP 25057990A JP H04128642 A JPH04128642 A JP H04128642A
- Authority
- JP
- Japan
- Prior art keywords
- conductive material
- semiconductor detector
- refrigerator
- heat conductive
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002441 X-ray diffraction Methods 0.000 title claims 3
- 239000004065 semiconductor Substances 0.000 claims abstract description 23
- 238000005057 refrigeration Methods 0.000 claims abstract description 6
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 abstract description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 16
- 239000007788 liquid Substances 0.000 abstract description 8
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 8
- 238000009413 insulation Methods 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はＸ線分析装置に関し、特に半導体検出器を用い
たエネルギー分散型Ｘ線分析装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray analyzer, and particularly to an energy dispersive X-ray analyzer using a semiconductor detector.
従来のＸ線分析装置は、第２図に示すように、真空チャ
ンバー１ａ内で保持されている試料２へ電子ビーム３を
集束させて照射させ、その時発生するＸ線４を半導体検
出器５へ入射させ、半導体検出器５からの出力信号を計
数演算装置６で処理するＸ線分析装置において、半導体
検出器５に熱伝導材７の一端を接触させ、熱伝導材７の
他端を液体窒素８が満たされた容器９に取り付け、半導
体検出器を冷却する構造である。容器９及び熱伝導材７
は真空チャンバー１ｂにより真空断熱されている。As shown in FIG. 2, the conventional X-ray analyzer focuses and irradiates an electron beam 3 onto a sample 2 held in a vacuum chamber 1a, and sends the generated X-rays 4 to a semiconductor detector 5. In an X-ray analyzer in which the output signal from the semiconductor detector 5 is processed by the counting unit 6, one end of the thermally conductive material 7 is brought into contact with the semiconductor detector 5, and the other end of the thermally conductive material 7 is exposed to liquid nitrogen. 8 is attached to a container 9 filled with the semiconductor detector to cool the semiconductor detector. Container 9 and thermally conductive material 7
is vacuum-insulated by a vacuum chamber 1b.
従来のＸ線分析装置は、半導体検圧器の冷却に液体窒素
を使用しているので、液体窒素が気化するため定期的に
液体窒素を補充するという手間がかかる問題点があった
。Conventional X-ray analyzers use liquid nitrogen to cool semiconductor pressure detectors, which has the problem of requiring time and effort to regularly replenish liquid nitrogen because the liquid nitrogen vaporizes.
本発明のＸ線分析装置は、真空チャンバー内で保持され
ている試料へ電子ビームを集束させて照射させ、半導体
検出器からの出力信号を計数演算装置で処理するＸ線分
析装置において、半導体検出器に熱伝導材の一端を接触
させ、熱伝導材の他端をカルノー冷凍サイクルを応用し
た冷凍器に取り付け、冷凍器及び熱伝導材は真空断熱で
きる真空チャンバー内に備えられている構成である。The X-ray analyzer of the present invention is an X-ray analyzer that focuses an electron beam on a sample held in a vacuum chamber and irradiates it, and processes the output signal from a semiconductor detector with a counting unit. One end of the thermally conductive material is in contact with the container, and the other end of the thermally conductive material is attached to a refrigerator that applies the Carnot refrigeration cycle, and the refrigerator and the thermally conductive material are installed in a vacuum chamber that can be vacuum insulated. .
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の一実施例のＸ線分析装置の断面図であ
る。真空チャンバー１ａ内で保持される試料２へ電子ビ
ーム３を集束させて照射させ、半導体検出器５からの出
力信号を計数演算装置６で処理する。半導体検出器５は
、熱伝導材７の一端に接触している。熱伝導材７の他端
はカルノー冷凍サイクルを応用した冷凍器１０に取り付
けられている。冷凍器１０及び熱伝導材７は真空断熱で
きる真空チャンバー１ｂ内に備えられている。FIG. 1 is a sectional view of an X-ray analyzer according to an embodiment of the present invention. An electron beam 3 is focused and irradiated onto a sample 2 held in a vacuum chamber 1a, and an output signal from a semiconductor detector 5 is processed by a counting unit 6. The semiconductor detector 5 is in contact with one end of the thermally conductive material 7. The other end of the heat conductive material 7 is attached to a refrigerator 10 to which the Carnot refrigeration cycle is applied. The refrigerator 10 and the heat conductive material 7 are provided in a vacuum chamber 1b that can be vacuum-insulated.
半導体検出器５で発生した熱は熱伝導材７を伝わりカル
ノー冷凍サイクルを応用した冷凍器１０により外部へ放
熱され、半導体検出器５は極低温が保たれる。The heat generated by the semiconductor detector 5 is transmitted through the thermally conductive material 7 and is radiated to the outside by the refrigerator 10 to which the Carnot refrigeration cycle is applied, so that the semiconductor detector 5 is maintained at an extremely low temperature.
以上説明したように本発明は、真空チャンバー内で保持
される試料へ電子ビームを集束させて照射させ、半導体
検出器からの出力信号を計数演算装置で処理するＸ線分
析装置において、半導体検出器に熱伝導材の一端を接触
させ、熱伝導材の他端をカルノー冷凍サイクルを応用し
た冷凍器に取り付け、冷凍器及び熱伝導材は真空断熱で
きる真空チャンバーを備えているので、従来のＸ線分析
装置では、半導体検出器の冷却用の液体窒素が気化する
ために定期的に液体窒素を補充するという手間がかかる
問題点を無くすことができるという効果を有する。As explained above, the present invention provides an X-ray analyzer that focuses an electron beam onto a sample held in a vacuum chamber and processes the output signal from the semiconductor detector with a counting unit. One end of the thermal conductive material is placed in contact with the other end of the thermal conductive material, and the other end of the thermal conductive material is attached to a refrigerator using the Carnot refrigeration cycle. The analyzer has the effect of eliminating the troublesome problem of periodically replenishing liquid nitrogen because the liquid nitrogen used to cool the semiconductor detector evaporates.
第１図は本発明の一実施例を示す断面図、第２図は従来
の技術を示す断面図である。
ｌａ、ｂ・・・真空チャンバー、２・・・試料、３・・
・電子ビーム、４・・・Ｘ線、５・・・半導体検出器、
６・・・計数演算装置、７・・・熱伝導材、８・・・液
体窒素、９・・容器、
Ｏ・・・冷凍器。FIG. 1 is a sectional view showing one embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional technique. la, b...vacuum chamber, 2...sample, 3...
・Electron beam, 4...X-ray, 5...semiconductor detector,
6... Counting device, 7... Heat conductive material, 8... Liquid nitrogen, 9... Container, O... Freezer.
Claims (1)
集束させて照射させ、発生するＸ線を半導体検出器へ入
射させ、半導体検出器からの出力信号を計数演算装置で
処理するＸ線分析装置において、半導体検出器の冷却に
冷凍サイクルを応用した極低温冷凍器を用いたことを特
徴とするＸ線分析装置。In an X-ray analysis device that focuses and irradiates a sample held in a vacuum chamber with an electron beam, causes the generated X-rays to enter a semiconductor detector, and processes the output signal from the semiconductor detector with a counting unit. , an X-ray analysis device characterized by using a cryogenic refrigerator that applies a refrigeration cycle to cool a semiconductor detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2250579A JPH04128642A (en) | 1990-09-20 | 1990-09-20 | Device for x-ray analysis |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2250579A JPH04128642A (en) | 1990-09-20 | 1990-09-20 | Device for x-ray analysis |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04128642A true JPH04128642A (en) | 1992-04-30 |
Family
ID=17209992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2250579A Pending JPH04128642A (en) | 1990-09-20 | 1990-09-20 | Device for x-ray analysis |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04128642A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH109700A (en) * | 1996-06-21 | 1998-01-16 | Seiko Epson Corp | Low temperature device |
| JP2005257349A (en) * | 2004-03-10 | 2005-09-22 | Sii Nanotechnology Inc | Superconductive x-ray analyzer |
-
1990
- 1990-09-20 JP JP2250579A patent/JPH04128642A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH109700A (en) * | 1996-06-21 | 1998-01-16 | Seiko Epson Corp | Low temperature device |
| JP2005257349A (en) * | 2004-03-10 | 2005-09-22 | Sii Nanotechnology Inc | Superconductive x-ray analyzer |
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