JPH04128145U - Cooling device for spindle structure - Google Patents

Abstract

(57) [Abstract] [Purpose] The present invention is a device for cutting or grinding semiconductor wafers, etc., in which an air bearing of a spindle mechanism equipped with a cutting wheel is actively cooled and driven continuously at high speed for a long period of time. This eliminates the effects of thermal expansion caused by the bearings and prevents seizure of the bearings. [Structure] This invention forms a cooling medium circulation path within the air bearing, and by forcibly circulating the cooling medium within the circulation path, the air bearing, which is a non-contact bearing, is completely cooled. This is a cooling device that eliminates the accumulation of heat generated by air friction caused by high-speed rotation and long-term continuous operation of the spindle mechanism.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is a device for grinding or cutting semiconductor wafers, etc. using a grinding or cutting wheel. a machine, which is equipped on the grinding or cutting device and is equipped with the grinding or cutting wheel; This invention relates to a cooling device for a spindle component that is rotationally driven.

0002

[Prior art]

This type of grinding or cutting device and spindle structure are disclosed in Japanese Patent Application Laid-Open No. 62-16 The configuration disclosed in Japanese Patent No. 2466 is well known as a conventional example. This conventional example , a device for wrapping a wrapping film on a wafer grinding device is installed. Additionally, a three-spindle arrangement for grinding is indicated at 25. It is.

0003 Spindle configurations commonly used in this type of grinding or cutting equipment The body is designed to obtain high speed rotation and to avoid applying load to the rotation of the spindle. For this reason, air bearings are used as the bearings.

0004 This air bearing has a non-contact precision with a gap of several micrometers between the spindle and the spindle. The spindle is supported in a state of contact, and by air passing through the gap It has the advantage of generating less heat, and forced cooling is generally not used.

[0005]

[Problem that the idea aims to solve]

However, heat generation due to air friction, which was not a problem at low speed rotation, Rotation (rotation speed of 7000 rpm per minute) cannot be ignored, and even short-term operation If you do so, the heat will not accumulate as much, but if you drive it for a long time, for example 40 minutes or more, it will not accumulate as much heat. If the machine moves, heat builds up and affects the air bearing and spindle. Thermal expansion occurs and the gap between the two disappears, causing further heat generation as they come into contact. The problem is that it seizes and becomes unrotatable.

[0006] Therefore, the spindle structure in the conventional example cannot be operated continuously for a long time and at high speed. There is a problem that needs to be solved with regard to seizure during rotation.

[0007]

[Means to solve the problem]

As a specific means for solving the problems of the conventional example, the present invention provides a method in which the grinding or cutting wheel is The attached spindle and the air bearing that rotatably supports the spindle. and a drive source for rotating the spindle. A cooling medium circulation path is formed in the air bearing, and a cooling medium circulation path is formed in the air bearing. A cooling device for a spindle structure characterized by forcibly circulating and supplying a cooling medium to the The air bearing is connected to the housing and the thrust bearing. The thrust bearing is integrated into the housing. The cooling medium circulation path is now in communication with the water supply port, It is formed by connecting a drainage port and a waterway in series.

[0008]

[Effect]

A cooling medium circulation path is formed within the air bearing, and the cooling medium is forced through the circulation path. The controlled circulation cools the air bearing, allowing it to rotate at high speeds and for long periods of time. This eliminates the accumulation of heat generated by air friction caused by the drive of The image sticking is completely eliminated.

[0009]

【Example】

Next, the present invention will be explained in more detail with reference to illustrated embodiments. 1 is a spindle mechanism. The spindle mechanism generally includes a shaft or a spindle 2. , an air bearing 3 that supports the spindle, and a drive that rotates the spindle 2. It is composed of a power source 4.

0010 Furthermore, a disk-shaped support is provided at one end (lower end in the figure) of the spindle 2. A cutting wheel 6 is attached via 5.

[0011] The drive source 4 is attached to the other end of the spindle 2. For example, a high frequency motor is used. This drive source 4 is entirely covered by a predetermined case 8. ing.

0012 The air bearing 3 is loosely fitted between the support body 5 and the partition wall 7. and is attached to case 8. Air bearing 3 and spin in this case The gap a between the dollar 2 and the air bearing 3 and the support body 5 and the partition wall 7, respectively. The gaps b and c are approximately 10 μm.

[0013] The air bearing 3 arranged in this way originally has the above-mentioned gaps a, b, An air supply passage 9 is formed for supplying air to each of the air supply passages 9 and 9. The spindle 2 is supported in a non-contact state by the jet of air blown in. The configuration is as follows.

[0014] As shown in Fig. 2, this air bearing 3 is a cylindrical hub located in the center. Consists of a housing 10 and thrust bearings 11 installed at both ends of the housing. The thrust bearing 11 is made up of a donut-shaped base metal 12 and a metal 13. These are used by being integrally stacked on the housing 10.

[0015] The cylindrical housing 10 has a plurality of water passages at positions avoiding the air supply passage 9. 14 are provided, and these water passages 14 are substantially parallel along the length direction of the housing 10. , and each water passageway opens at the end face of the housing 10. It is. One of the water passages is located approximately at the center of the housing 10. It has a water supply port 15 and a drain port 16 that are opened on the side surface.

[0016] The thrust bearing 11 also has the same number of holes corresponding to the water passages 14. Water passages 17 are provided in parallel. In particular, the base metal 12 has a strainer opening on both end faces. A U-shaped or C-shaped groove for a U-turn is formed in the metal 13. A hole 18 is formed. This slot 18 connects the openings of two adjacent water passages 17. It is something that connects.

[0017] By providing the water passages 14, 17 and the slot 18 in this way, the central housing Attach the thrust bearings 11 to both sides of the engine 10 by contacting or combining them. When the earth bearing 3 is formed, a water passageway runs from the water supply port 15 in the center to the drain port 16. A cooling medium circulation path is formed in which the cooling medium is connected in series.

[0018] These water supply ports 15 and drain ports 16 are connected to the water supply section through a predetermined pipe or the like. It is connected to the drain and drain section, and allows cooling water or other cooling medium to be forced to circulate within the circulation path at any time. The air bearing 3 can now be cooled by making a ring.

[0019]

[Effect of the idea]

As explained above, the spindle structure cooling device according to the present invention is suitable for grinding or cutting. A spindle to which a grinding wheel is attached, and an airvehicle that rotatably supports the spindle. A spin grinding or cutting device that includes a ring and a drive source that rotates a spindle. A cooling medium circulation path is formed in the air bearing, and the cooling medium circulation path is formed in the air bearing. By forcibly circulating cooling medium in the circulation path, spin Even if the dollar mechanism is driven continuously at high speed for a long period of time, the inside of the air bearing may Since the entire body can be cooled with a cooling medium, heat generation due to air friction that occurs during high-speed driving is eliminated. The excellent effect of eliminating the accumulation of play. It is.

[0020] Further, the air bearing may include a housing having a water supply port, a drain port, and a water passage. The thrust bearing has a passageway and is located in front of the housing. By combining the thrust bearings, the cooling medium circulation path becomes connected. The cooling medium circulation path is formed by connecting the water supply inlet, drainage outlet, and water passage in series. The structure allows for easy formation of circulation paths and subsequent maintenance and inspection. It has an excellent effect.

[Brief explanation of drawings]

FIG. 1 is an abbreviated sectional view showing essential parts of a spindle structure according to the present invention.

FIG. 2 is a schematic perspective view of the main parts of the air bearing, which is the main part of the spindle structure according to the present invention, in an exploded manner.

[Explanation of symbols]

1 Spindle structure 2 Shaft or spindle 3 Air bearing 4 Drive source 5 Support 6 Cutting wheel 7 Partition wall 8 cases 9 Air supply port 10 Housing 11 Thrust bearing 12 Base money 13 Metal 14,17 Canal 15 Water supply port 16 Drain port 18 Groove a, b, c gap

Claims (3)

[Scope of utility model registration request] 1. A spindle structure for a grinding or cutting device, comprising a spindle to which a grinding or cutting whetstone is mounted, an air bearing that rotatably supports the spindle, and a drive source that rotates the spindle, the spindle structure comprising: A cooling device for a spindle structure, characterized in that a cooling medium circulation path is formed in an air bearing, and the cooling medium is forcibly circulated and supplied into the circulation path. 2. Cooling of a spindle structure according to claim 1, wherein the air bearing is composed of a housing and a thrust bearing, and the thrust bearing is integrated with the housing so that a cooling medium circulation path is communicated with the housing. Device. 3. The cooling device for a spindle structure according to claim 1, wherein the cooling medium circulation path is formed by connecting a water supply port, a drainage port, and a water passage in series.