JPH04127883A - Material carrier - Google Patents

Abstract

PURPOSE:To utilize static electricity effectively by providing a fixed section having base fixed with one apex of a movable body having at least four apexes, a displacement taking out section having an apex opposing to the apex of the movable body, a movable electrode section, and another electrode section fixed onto the base. CONSTITUTION:Upon application of a voltage between the fixed section 11 of a carrying actuator 8 and a fixed electrode section 15 from a voltage supply V based on a command from a controller, electrostatic force F is produced between the movable electrode sections 14a, 14b of a movable body 10 and an opposing fixed electrode section 15. The electrostatic force F causes resilient deformation of the pantograph type movable body 10 and the movable electrode sections 14a, 14b are attracted to the fixed electrode section 15, respectively, at the opposing positions. Consequently, a displacement take-out section 13 displaces downward as shown by an arrow P. Since the displacement take-out section 13 is coupled with rods 9a-9d, the rods 9a-9d displace correspondingly.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an object transport device used as a transport system for minute objects.

2. Description of the Related Art An example of a conventional object conveying device will be described with reference to FIG. The movable body 1 has a beam 2 provided at its center, and comb-teeth movable electrodes 3 located at both left and right ends of the beam 2. The beam 2 is fixed on a base 4 made of a Si substrate by a fixing part 5, and fixed comb electrodes 6 and 7 are fixed to the base 4 while being engaged with the comb movable electrode 3. It is provided.

In this case, the movable comb electrode 3 and the beam 2 are separated from the base 4, and by applying an alternating current voltage between the left and right fixed comb electrodes 6 and 7, electrostatic force acts, and as a result, The movable comb electrode 3 can be moved or vibrated in the direction of the fixed comb electrodes 6 and 7.

Problems to be Solved by the Invention In the case of the conventional device as described above, the movable body l is attached to the base 4.
It only vibrates horizontally in a plane parallel to the surface, and does not directly apply force to the outside. Furthermore, since the direction in which the electrostatic force acts is perpendicular to the direction A in which the comb-teeth movable electrode 3 moves, the force applied by the electrostatic force during deformation is extremely small.

Means for Solving the Problems Therefore, in order to solve such problems, the present invention provides a movable body having at least four vertices, a fixed part in which one vertex of the movable body is fixed to a base, and a fixed part having one vertex of the movable body fixed to a base. a displacement take-out part having apexes at positions facing each other; a movable electrode part having apexes at positions facing each other on both sides of each of the apexes; and a movable electrode part disposed parallel to each of the movable electrode parts and fixed on the base. A transport actuator having a fixed electrode part is provided, and a plurality of drive bodies driven by the transport actuator are arranged parallel to each other, and the drive control of the transport actuator is performed to move the drive bodies in the direction in which they are arranged. A driving body control means for moving the body is provided.

Operation By combining controls that move each driving body independently or simultaneously, it is possible to move an object placed on multiple driving bodies along the direction in which the driving bodies are arranged. Furthermore, since the direction in which the electrostatic force acts and the direction in which the movable electrode section moves match, the electrostatic force can be used effectively.

Embodiment An embodiment of the present invention will be explained based on FIGS. 1 to 7. This device includes a transport actuator 8, a plurality of rods 9a to 9d as driving bodies arranged parallel to each other and driven by the transport actuator 8, and the rods 9a to 9d that control the driving of the transport actuator 8. The controller includes a controller (not shown) as a drive control means for moving the drive body in the direction in which it is disposed.

First, the configuration of the conveyance actuator 8 will be described based on FIG. 2. A fixed part 11 is formed at the apex a of the pantograph-shaped movable body 10, and this fixed part 11 is fixed on a base 12.

A displacement take-out portion 13 is formed at the apex of the fixed portion 11 at a position opposite to the apex a. These vertices a,
Movable electrode portions 14a and 14b are formed at apexes c and d at positions facing each other on both sides of b, respectively. These movable electrode parts 14a.

A fixed electrode portion 15 is disposed in a U-shape around the movable body 10 parallel to the outer side of the movable body 14b.

In addition, as shown in FIG. 1, four rods 9 are used as driving bodies.
a to 9d are arranged parallel to each other. Both ends of these four rods 9a to 9d are respectively connected to the displacement take-out portions 13 of the aforementioned conveyance actuators 8 (here, eight in total are used). A conveyed object 16 is placed on the four rods 9a to 9d, striding over them. Further, a controller (not shown) is provided as a drive control means for controlling the drive of the transport actuator 8 and moving the rods 9a to 9d in the arrangement direction X. This controller includes a voltage source V connected between the fixed part 11 of the transport actuator 8 and the fixed electrode 15.

In such a configuration, the fixed part 1 of the conveying actuator 8 is
1 and the fixed electrode part 15, the movable electrode part 14a of the movable body 10.

An electrostatic force F is generated between the fixed electrode portion 14b and the fixed electrode portion 15 facing thereto. Due to this electrostatic force F, the pantograph-shaped movable body 10 causes elastic deformation, and the left and right movable electrode parts 1
4a and 14b are attracted to the fixed electrode portions 15 at opposing positions, respectively. Accordingly, the displacement take-out portion 13 is displaced in the downward arrow direction P. As shown in FIG. 1, the displacement extracting portions 13 are connected to the rods 9a to 9d, respectively, so that the rods 9a to 9d are also displaced as the displacement extracting portions 13 change.

Figures 3(a) to 3(f) show those four rods 9a to 9d.
This figure shows how the displacement operation is performed. First, (a) is
This shows a state in which a conveyed object] 6 is placed on four rods 9a to 9d.

Next, as shown in (b), only the rod 9a is moved in the direction of the arrow. At this time, the weight of the conveyed object 16 is equal to the weight of the four rods 9a to 9.
d equally, and if the coefficients of friction are all the same and do not differ, then the conveyed object 16 itself will be moved by the remaining three rods 9b.
, 9c, and 9d and does not move. Next, move only the rod 9b in the direction of the arrow as shown in (c), and then move only the rod 9C and only the rod 9d (cl).
As shown in (e), move sequentially in the direction of the arrow.

At this time, as shown in (e), each of the rods 9a to 9d is displaced from the initial position (a), but the conveyed object 16 remains in the initial position (a). Not displaced.

In this state, as shown in (f), the four rods 9a to 9d are simultaneously driven using a controller to return to the initial position. At this time, the conveyed object 16 mounted on the four rods 9a to 9d also moves by the same distance in the direction of the arrow.

Therefore, when comparing (a) and (f), it can be seen that the positions of the rods 9a to 9d are the same, and only the conveyed object 16 is moving. Note that it is also possible to transport the paper in the opposite direction using a method similar to this.

As described above, by repeating the series of operations (a) to (f), the conveyed object 16 is moved to the rods 9a to 9.
It becomes possible to move in a direction perpendicular to the arrangement direction of d. Moreover, the direction in which the electrostatic force F acts and the direction in which the movable electrode parts 14a and 14b move coincide (
(Y direction), it becomes possible to utilize the electrostatic force F more effectively than in the past.

Next, an example of a method for manufacturing this device will be explained based on FIGS. 4 to 7. First, as shown in FIGS. 4(a) and 4(b), Si
N, 18, Si, N419 are laminated with a thickness of 0.2 μm each. Next, as shown in FIGS. 5(a) and 5(b), deposition and etching are performed to form a sinusoid that will later become a sacrificial layer.
, 20 patterns with a thickness of 1 μm are prepared. Next, the sixth
As shown in Figures (a) and (b), deposition and etching are performed to create a structure made of poly-3i21.

Finally, by etching and removing Sin, 20, a pantograph-shaped movable body 10 can be obtained, and the structure of the conveyance actuator 8 can be manufactured from this.

Effects of the Invention The present invention provides a movable body having at least four vertices, a fixed part in which one vertex of the movable body is fixed to a base, a displacement take-out part having a vertex at a position facing the said vertex, and both sides of each of said vertices. A transport actuator is provided, which includes a movable electrode part having apexes facing each other, and a fixed electrode part disposed parallel to each of the movable electrode parts and fixed on the base, and driven by the transport actuator. a plurality of drive bodies arranged parallel to each other,
Since the drive control means for controlling the drive of the conveyance actuator and moving the drive bodies in the direction in which the drive bodies are disposed is provided, it is possible to control the movement of a plurality of drive bodies by combining controls for moving each drive body independently or simultaneously. It becomes possible to move an object placed on top of the object along the direction in which the driving body is arranged, and the direction in which the electrostatic force acts coincides with the direction in which the movable electrode section moves. Therefore, electrostatic force can be used effectively.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing an embodiment of the present invention, FIG. 2 is a configuration diagram showing the transport actuator, FIG. 3 is an explanatory diagram showing the operation of the device, and FIGS. FIG. 7 is a process diagram showing an outline of the manufacturing process of this device, and FIG. 8 is a configuration diagram showing a conventional example. 8... Conveyance actuator, 9a-9d... Drive body, 1o... Movable body, 11... Fixed part, 12... Base, 13... Displacement take-out part, 14 a, l 4
b...Movable electrode part, 15...Fixed electrode part, a to d.
...Apex, X...Amount of arrangement direction Applicant Ricoh Co., Ltd.

Claims (1)

[Claims] A movable body having at least four vertices, a fixed part having one vertex of the movable body fixed to the base, a displacement take-out part having a vertex at a position facing the apex, and apexes at positions facing each other on both sides of each of the apexes. a transport actuator comprising a movable electrode section having a movable electrode section and a fixed electrode section disposed parallel to each of the movable electrode sections and fixed on the base; An object conveyance device comprising: a plurality of drive bodies; and a drive body control means that controls the drive of the conveyance actuator and moves the drive bodies in the direction in which the drive bodies are disposed.