JPH04127537U - force detection device - Google Patents

Abstract

(57) [Summary] [Purpose] To equalize the detection sensitivity of each XYZ axis direction component in a three-dimensional force detection device using a capacitive element. [Structure] An external force acts on the acting part 110 of the flexible substrate 100, and the fixing part 170 is fixed to the device housing 240. Concentric annular grooves 125 and 14 are provided between the action part and the fixed part.
5,165 are dug, and the annular flat plate portions 120, 14
0 and 160, and cylindrical portions 130 and 150 are formed.
A displacement board 22 is connected to the action part 110 via a joining member 225.
0 is joined. On the internal bottom of the device housing 240,
Fixed electrodes 211, 213, 215 via insulating layer 230
is formed. The displacement substrate 220 functions as a common displacement electrode, and forms a capacitive element with the fixed electrode. Since the capacitance of each capacitive element changes due to the action of external force, each axial component of the external force is detected based on this change.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention is based on a force sensing device, specifically a change in capacitance between a pair of electrodes. The present invention relates to a force detection device that detects a force exerted by a force.

0002

[Conventional technology]

In the automobile and machinery industries, force detection devices that can accurately detect applied force are needed. Demand is increasing. In particular, it is a compact device that can detect the force acting on each three-dimensional component. A device is desired.

0003 To meet this demand, gauge resistors are formed on semiconductor substrates such as silicon. The piezoresistive effect reduces the mechanical strain that occurs on the board due to external forces. A force detection device that converts the force into an electrical signal has been proposed. However, something like this Detection devices using gauge resistance are expensive to manufacture and require temperature compensation. There is a problem. Therefore, in the specification of Japanese Patent Application No. 2-274299, the capacitance is A novel force detection device that utilizes change has been proposed. This new force sensing device , a fixed electrode formed on a fixed substrate, and a displacement electrode that is displaced by the action of force. A capacitive element is constructed by , and the operation is performed based on the change in capacitance of this capacitive element. Each of the three-dimensional components of the applied force can be detected. Also, patent application No. 2-416188 The patent specification discloses a method for manufacturing this new force detection device, and the patent specification discloses a method for manufacturing this new force detection device, and The specification of PCT/JP91/00428 related to the international application A method of testing a detection device is disclosed.

0004

[Problem that the idea aims to solve]

However, the new force detection device that uses the change in capacitance described above has three There is a problem in that the detection sensitivity in each dimensional axis direction varies. Twist Physically, it is a three-dimensional coordinate with an XY plane parallel to the substrate plane of the fixed substrate and the displacement substrate. Define a system with a fixed electrode formed on a fixed substrate and a displacement formed on a displacement substrate. The applied force is based on the change in capacitance of the capacitive element composed of the electrode and When detecting each XYZ axis direction component, the detection sensitivity in the X axis direction and the detection sensitivity in the Y axis direction are the same, but there is a difference between these and the detection sensitivity in the Z-axis direction. this If there is a difference in detection sensitivity, the detection of each axial component extracted as an electrical signal will be difficult. It is necessary to perform sensitivity correction on the output value. Therefore, the voltage that processes the detection signal is This has the disadvantage of complicating the air circuit.

[0005] Therefore, the present invention is a force tester whose detection sensitivity for each direction component is as uniform as possible. The purpose is to provide an output device.

[0006]

[Means to solve the problem]

(1) The first invention of this application is A fixed part that is fixed to the device housing, an acting part to which external force is transmitted, and a fixed part and a flexible part having flexibility formed between the action part and the action part; a displacement board partially fixed to the action part; A fixed board fixed to the device housing so as to face the displacement board, Equipped with A fixed electrode formed on a fixed substrate and a displacement electrode formed on a displacement substrate. External force is detected based on changes in the distance between a pair of electrodes facing each other. In a force detection device, A thin cylindrical shape whose axis is almost perpendicular to the board surface of the flexible board. A cylindrical part and a thin annular flat plate part extending along a plane substantially parallel to the substrate surface. Therefore, it constitutes a flexible portion.

[0007] (2) The second invention of the present application is A fixed part that is fixed to the device housing, an acting part to which external force is transmitted, and a fixed part and a flexible part having flexibility formed between the action part and the action part; a displacement board partially fixed to the action part; A fixed board fixed to the device housing so as to face the displacement board, Equipped with A fixed electrode formed on a fixed substrate and a displacement electrode formed on a displacement substrate. External force is detected based on changes in the distance between a pair of electrodes facing each other. In a force detection device, The fixed part is configured to surround the acting part at a predetermined interval, and the fixed part and The flexible part is composed of a plurality of flexible bridge parts that are bridged between the action part and the action part. It is something that

[0008] (3) The third invention of the present application is based on the force detection device according to the first or second invention. There, An auxiliary board fixed to the device housing is further provided between the flexible board and the displacement board, and the displacement The displacement electrode formed on the substrate and the fixed electrode formed on the auxiliary substrate are opposed to each other. In order to detect external force, the change in the distance between the auxiliary electrode pairs is taken into consideration. This is what I did.

[0009]

[Effect]

(1) In the force detection device according to the first invention of the present application, the flexible portion of the flexible substrate is attached to the substrate surface. A cylindrical part with sufficient flexibility in the radial direction and perpendicular to the board surface. and an annular flat plate portion having sufficient flexibility in various directions. this Therefore, sufficient flexibility can be obtained in any direction, and detection of each direction component can be performed. The output sensitivity can be made uniform.

0010 (2) In the force detection device according to the second invention of the present application, the flexible portion of the flexible substrate is It is composed of a bridge section. A through hole is formed between each bridge part of the flexible substrate, and the The use part will be supported only by this bridge. For this reason, either direction It also provides sufficient flexibility in terms of direction, making the detection sensitivity uniform for each direction component. be able to.

[0011] (3) The force detection device according to the third invention of the present application does not apply to the first or second invention described above. In such a force detection device, detection is performed further taking into account changes in the distance between the auxiliary electrodes. . Therefore, more accurate detection becomes possible.

0012

【Example】

Hereinafter, the present invention will be described based on illustrated embodiments. First, application of this invention Let me briefly explain the basic structure and basic principles of the target force detection device. . FIG. 1 is a side sectional view showing the basic structure of a force detection device to which the present invention is applied. . The main components of this force detection device are a fixed substrate 10, a flexible substrate 20, and an effecting body 3. 0, and the device housing 40. FIG. 2 shows a bottom view of the fixed substrate 10. Figure 2 A cross section of the fixed substrate 10 taken along the X axis is shown in FIG. Fixed board 10 As shown in the figure, is a disk-shaped board, and the periphery is fixed to the device housing 40. On this lower surface, fan-shaped fixed electrodes 11 to 14 and a disc-shaped fixed electrode 15 are arranged as shown in the figure. It is formed like a sea urchin. On the other hand, FIG. 3 shows a top view of the flexible substrate 20. Flexible base in Figure 3 A cross section of the plate 20 taken along the X axis is shown in FIG. The flexible substrate 20 is also shown in FIG. As shown, it is a disk-shaped board, and the periphery is fixed to the device housing 40. above this On the surface, fan-shaped displacement electrodes 21 to 24 and a disk-shaped displacement electrode 25 are formed as shown in the figure. has been completed. The effecting body 30 has a circular top surface as shown by the broken line in FIG. It has a columnar shape and is coaxially joined to the lower surface of the flexible substrate 20. The device housing 40 is , has a cylindrical shape and firmly supports the fixed substrate 10 and the flexible substrate 20. Ru.

[0013] The fixed substrate 10 and the flexible substrate 20 are arranged parallel to each other at a predetermined interval. It is set up. Both are disk-shaped substrates, but the fixed substrate 10 is highly rigid and does not bend. In contrast, the flexible substrate 20 has flexibility and does not easily bend when force is applied to it. This is a board that bends. In the example shown in FIG. 1, the fixed substrate 10 has a large thickness. The rigidity of the flexible substrate 20 is increased by reducing the thickness of the flexible substrate 20. It has flexibility, but by changing the material, it can be made stiffer and more flexible. It doesn't matter if you do it like this. Alternatively, grooves or through holes are formed in the substrate. It can also be made more flexible. Fixed substrate 10, flexible substrate 20, effecting body 3 What kind of material should 0 be made of as long as it can fulfill its original function? Good too. For example, it can be made of semiconductors, glass, etc., or it can be made of metal. You can also. However, if the fixed substrate 10 and the flexible substrate 20 are made of metal, In this case, methods such as forming an insulating layer between the electrodes to prevent short circuits between the electrodes. It is necessary to take the following steps. Also, if each electrode layer is also conductive, what can be done? It may be made of any material.

[0014] Now, as shown in FIG. 1, a point of action P is defined within the action body 30, and this point of action P is Define the XYZ three-dimensional coordinate system as the origin as shown in the figure. In other words, to the right in Figure 1 The Define each. The central part of the flexible substrate 20 to which the effecting body 30 is joined is referred to as an effecting part. , the peripheral part fixed by the device casing 40 is a fixed part, and the part between these parts is a flexible part. , when an external force acts on the effecting body 30, the flexible portion is bent, The acting part will be displaced relative to the fixed part. There is no force acting on the point of action P. In this state, as shown in FIG. 1, the fixed electrodes 11 to 15 and the displacement electrodes 21 to 25 are They maintain a parallel state with a predetermined interval. Now, fixed electrodes 11 to 15 and this The combinations of displacement electrodes 21 to 25 facing each other are capacitive elements C. We will call them 1 to C5. Here, for example, a force Fx in the X-axis direction is applied to the point of application P. When acted upon, this force Fx creates a moment force on the flexible substrate 20, as shown in FIG. As shown in FIG. 2, the flexible substrate 20 will be bent. This deflection causes displacement Although the distance between the electrode 21 and the fixed electrode 11 becomes larger, the distance between the displacement electrode 23 and the fixed electrode 13 increases. The distance between them becomes smaller. Suppose that the force acting on the point of application P is -Fx in the opposite direction. Then, a deflection with the opposite relationship will occur. In this way the force Fx or −Fx acts, a change will appear in the capacitance of capacitive elements C1 and C3. , by detecting this, the force Fx or -Fx can be detected. this When each of the displacement electrodes 22, 24, 25 and that of the fixed electrodes 12, 14, 15 Each interval may become larger or smaller in parts, but overall it will not change. It is safe to assume that it will not change. On the other hand, if a force Fy or -Fy in the Y direction is applied, The distance between the displacement electrode 22 and the fixed electrode 12 and the distance between the displacement electrode 24 and the fixed electrode 14 A similar change occurs only in the interval. In addition, the field where the force Fz in the Z-axis direction acts In this case, as shown in FIG. 5, the distance between the displacement electrode 25 and the fixed electrode 15 becomes smaller; If an opposite force -Fz is applied, this distance will be larger. At this time, the displacement voltage Although the distance between the poles 21 to 24 and the fixed electrodes 11 to 14 also becomes smaller or larger, The change in the distance between the displacement electrode 25 and the fixed electrode 15 is most remarkable. Therefore, this capacity Force Fz or -Fz is detected by detecting the change in capacitance of quantum element C5. can be done.

[0015] Generally, the electrostatic capacitance C of a capacitive element is defined by the electrode area S, the electrode spacing d, and the dielectric constant ε. Then, C=εS/d It is determined by Therefore, when the distance between the opposing electrodes gets closer, the capacitance C increases. , the capacitance C becomes smaller as the distance increases. This force detection device utilizes this principle, The change in capacitance between each electrode was measured, and the action was applied to the point of action P based on this measurement value. It detects external force. That is, the acceleration in the X-axis direction is caused by the capacitive elements C1 and C3. Based on the capacitance change between C2 and C4, the acceleration in the Y-axis direction is Based on this, the acceleration in the Z-axis direction can be detected based on the capacitance change of capacitive element C5. It will be done.

[0016] In reality, force components in each axial direction are detected by a detection circuit as shown in Figure 6. . That is, the capacitance values of capacitive elements C1 to C5 are converted to CV conversion circuits 51 to 51, respectively. 55 into voltage values V1 to V5. Then, the force in the X-axis direction is calculated by the subtractor 6 1 is obtained at the terminal Tx as a differential voltage calculated as (V1-V3), and Y The axial force is the difference voltage obtained by calculating (V2-V4) using the subtracter 62. The force in the Z-axis direction is obtained as a voltage V5 at the terminal Tz. It will be done.

[0017] The detection principle of this force detection device has been explained above based on the basic structure shown in Figure 1. However, in a force detection device with such a basic structure, Detection sensitivity in the axial direction is not uniform. That is, each electrode is Considering that the arrangement is such that the detection sensitivity in the X-axis direction and the detection sensitivity in the Y-axis direction are Although the output sensitivity is the same, the detection sensitivity in the Z-axis direction is different from these. one In general, the detection sensitivity in the Z-axis direction is less sensitive than the detection sensitivity in the X-axis or Y-axis directions. descend. In this way, there are variations in detection sensitivity in each three-dimensional axis direction. This is not preferable because it requires a processing circuit for sensitivity correction. This invention is based on We have developed a practical structure that can make the detection sensitivity uniform in each axis direction, such as This is what we present.

[0018] FIG. 7 shows a side sectional view of an embodiment of a force detection device having this practical structure. The major components of this force detection device are a flexible substrate 100 and a device main body 200. . A bottom view of the flexible substrate 100 is shown in FIG. Cutting line 7-7 of the flexible substrate 100 in FIG. A cross section taken along the line is shown in FIG. Entire flexible substrate 100 The shape is disc-shaped, and the action parts are arranged in order from the center to the outer periphery as shown in the figure. 110, annular flat plate part 120, cylindrical part 130, annular flat plate part 140, cylindrical part 150, They will be referred to as an annular flat plate portion 160 and a fixed portion 170. Further, the annular flat plate portion 120, 140, 160 and the cylindrical portions 130, 150 will be collectively referred to as the flexible portion. . The annular flat plate portions 120, 140, 160 have a thickness that is smaller than the overall thickness of the flexible substrate 100. It is a thin, washer-like part. For this reason, the flexible substrate 100 direction perpendicular to the board surface (vertical direction in Figure 7, perpendicular to the plane of the paper in Figure 8) It has sufficient flexibility in both directions. Further, the cylindrical portions 130 and 150 have a thick wall. It is a thin, cylindrical portion, and extends in the radial direction along the substrate surface of the flexible substrate 100 (FIG. Sufficient flexibility in the radial direction from the center to the outer periphery within the plane of the paper. have sex. Note that in order to make the flexible substrate 100 have such a structure, it is necessary to , processing may be performed to form concentric annular grooves 125, 145, and 165. child In this embodiment, metal is used as the material for the flexible substrate 100.

[0019] The feature of the first invention of the present application is that the flexible portion of the flexible substrate 100 is formed into an annular flat plate portion in this way. 120, 140, 160 and cylindrical parts 130, 150, This provides sufficient flexibility in either direction. In the action part 110 , a screw hole 111 is provided, into which a stylus or the like as an effecting object is inserted. When attached, external force applied to the tip of the stylus is transmitted to the action section 110. solid If the fixed part 170 is fixed, the action part 110 will be displaced due to the bending of the flexible part. Therefore, this displacement is detected in the device main body 200.

[0020] The main components of the device body 200 are fixed electrodes 211 to 215 and displacement electrodes. This is the substrate 220. Fixed electrodes 211 to 215 are fixed electrodes in the device shown in FIG. It corresponds to the poles 11 to 15, and has the same position as the fixed electrodes 11 to 15 shown in FIG. It is located at On the other hand, the displacement substrate 220 is a displacement substrate in the device shown in FIG. This corresponds to poles 21-25. Five displacement electrodes are placed on the top surface of the displacement substrate 220. However, in this embodiment, the displacement substrate 220 is made of metal. Thus, the displacement substrate 220 itself functions as an electrode. In the device shown in FIG. 1, five fixed electrodes 11 to 15 and five displacement electrodes 21 to 25 are used. were made to face each other to form five sets of capacitive elements C1 to C5, but one electrode There is no problem in configuring it with one common electrode. In the embodiment shown in FIG. 7, the displacement electrode side is composed of one common electrode. A single sheet like this is placed on the displacement board 220. Although a common electrode may be formed, in this embodiment, metal is used as the displacement substrate 220. Therefore, the displacement substrate 220 itself is used as a common electrode. This kind of structure It is preferable that the structure of the device be made very simple. It is shown in Figure 7. In addition, the upper surface of a cylindrical joining member 225 is fixed to the center of the lower surface of the displacement board 220. The lower surface of this bonding member 225 is located above the operating portion 110 of the flexible substrate 100. fixed to the surface.

[0021] Displacement board 220 is covered by device housing 240. The device housing 240 is , has a space for accommodating the displacement substrate 220 therein, and around the space, the flexible substrate 1 It is joined to the upper surface of the fixing part 170 of 00. On the internal bottom surface of this device housing 240 Fixed electrodes 211 to 215 are formed with an insulating layer 230 interposed therebetween. Sunawa That is, in this embodiment, the internal bottom surface of the device housing 240 is fixed in the device shown in FIG. This corresponds to the fixed substrate 10. Note that the insulating layer 230 is provided here in the device casing. This is because the body 240 is made of metal, and if the device housing 240 is an insulator, the insulating layer 230 is not necessary. Further, the device housing 240 has a wiring hole formed therein. Wiring to each electrode is performed by a wire W inserted through the electrode.

[0022] The operation of this device is as follows. When an external force acts on the acting portion 110, the above-mentioned As shown in FIG. , and a displacement occurs in the action portion 110. This displacement is changed via the joining member 225. The position is transmitted to the fixed electrodes 211 to 215 and the displacement electrode (displacement substrate 220). (top surface) changes. This change in the distance between the electrodes is detected as a change in capacitance. What can be achieved is as described above. As shown in Figure 7, If we define the Z axis in the upward direction of the figure and the Y axis in the direction perpendicular to the plane of the figure, we get , sufficient deflection in the Z-axis direction can be obtained by the annular flat plate portions 120, 140, and 160. The cylindrical portions 130 and 150 provide sufficient deflection in the X-axis and Y-axis directions. You will get it. Actually, the annular flat plate parts 120, 140, 160 and the cylindrical part 1 30 and 150 in all directions of the X, Y, and Z axes. flexibility. Therefore, according to the force detection device having the structure shown in FIG. Detection sensitivity in the axial direction can be made uniform, and detection sensitivity can be increased overall. You can

[0023] FIG. 9 is a bottom view of a flexible substrate 300 used in a force detection device according to the second invention of the present application. be. This flexible substrate 300 has four quadrant shapes on the flexible substrate 100 shown in FIG. Through holes H1 to H4 are formed. That is, the flexible substrate 100 shown in FIG. It can be obtained by hollowing out 4 places. Penetration like this By forming the holes H1 to H4, four bridge parts B1 to B4 are obtained. Figure 9 The cross section of the flexible substrate 300 shown in FIG. It has the same structure as the cross section of 00. In the end, the central action part 310 has four bridge parts B1 ~B4, it is connected to the surrounding fixing part 370. Action part 3 10 is provided with a screw hole 311, to which an action body such as a stylus is connected. be done. In the flexible substrate 300 having such a structure, there are four bridge parts B1 to B4. will function as a flexible part. Instead of the flexible substrate 100, the flexible substrate 30 If 0 is used, a force detection device with higher sensitivity can be realized.

[0024] The present invention has been explained above based on the illustrated embodiments, but the present invention is not limited to these embodiments. The invention is not limited to these examples, and can be implemented in various other ways. for example, In the embodiment shown in FIG. 7, three annular flat plate parts 120, 140, 160 and two cylinders Although the shaped portions 130 and 150 are formed, the number of annular flat plate portions and cylindrical portions may be arbitrary. do not have. The flexible substrate 400 in the embodiment shown in FIG. Between the use part 410 and the fixed part 450, two annular flat plate parts 420 and 440 and one This is an example in which a cylindrical portion 430 is provided. To obtain a flexible substrate 400 with such a structure It is only necessary to form two concentric annular grooves 425 and 445. Further, the number and arrangement of electrodes are not limited to those in the above-mentioned embodiments. Tertiary In order to detect the force in the original direction, as in the embodiment shown in FIG. It is most practical to configure the two electrodes with one common electrode, but it is possible to configure one with four electrodes and the other with one common electrode. It may be configured with a single electrode. It also detects two-dimensional and one-dimensional forces. If only, the number of electrodes can be further reduced. In addition, the displacement board 220 The method for detecting the displacement state is to detect the change in capacitance due to a capacitive element. It is not limited to law. For example, in the device shown in FIG. This can be solved by inserting a piezoelectric element between 11 to 215 and the displacement board 220. It is also possible to detect the distance between the electrodes by the electromotive force of the piezoelectric element.

[0025] Finally, I will give one more example. The embodiment shown in FIG. 11 is an implementation of FIG. This example is further improved to increase detection accuracy in the Z-axis direction. Flexible substrate 100 and The terminal board 220 is connected to the connecting member 225, and an auxiliary A substrate 235 is provided. A through hole is formed in the center of this auxiliary board 235. A connecting member 225 is inserted into this through hole. Displacement board 220 and fixed voltage The point that the capacitive elements C1 to C5 are configured by the poles 211 to 215 is the same as in the above implementation. Similar to the example, but in this example, additional The fixed electrode 216 formed on the surface constitutes a capacitive element C6. child In a detection device with a configuration like this, the detected value in the Z-axis direction is determined by the circuit shown in Figure 12. That's what you get. That is, the capacitance values of the capacitive elements C5 and C6 are converted to the CV conversion circuit 55, 56 into voltage values V5 and V6, and the subtracter 63 calculates the difference V5-V6. This is determined as the detected value in the Z-axis direction. In this way, there are also differences in detection in the Z-axis direction. By using , error factors are canceled out and more accurate detection becomes possible. Regarding this reason, please refer to the international application PCT/JP91/ It is detailed in §4 of the 00428 specification. In addition, the detection accuracy in this Z-axis direction is The structure for increasing the height can also be applied to the embodiments shown in FIGS. 9 and 10.

[0026]

[Effect of the idea]

As described above, in the force detection device according to the first invention of the present application, the flexible portion of the flexible substrate is A cylindrical part with sufficient flexibility in the radial direction along the board surface and a an annular flat plate having sufficient flexibility in the direction perpendicular to the As a result, sufficient flexibility can be obtained in either direction, and each direction component can be Detection sensitivity can be made uniform.

[0027] In addition, in the force detection device according to the second invention of the present application, the flexible portion of the flexible substrate is connected to a plurality of frames. Since it is composed of a bridge section, it has sufficient flexibility in any direction. As a result, the detection sensitivity for each direction component can be made uniform.

[Brief explanation of drawings]

FIG. 1 is a side sectional view showing the basic structure of a force detection device to which the present invention is applied.

2 is a bottom view of the fixed substrate 10 in the force detection device shown in FIG. 1. FIG.

3 is a top view of the flexible substrate 20 in the force detection device shown in FIG. 1. FIG.

4 is a side cross-sectional view showing a state where a force Fx in the X-axis direction is applied to the force detection device shown in FIG. 1; FIG.

5 is a side cross-sectional view showing a state where a force Fz in the Z-axis direction is applied to the force detection device shown in FIG. 1. FIG.

6 is a circuit diagram showing a signal processing circuit used in the force detection device shown in FIG. 1. FIG.

FIG. 7 is a side sectional view showing the structure of a force detection device according to an embodiment of the first invention of the present application.

[FIG. 8] Flexible substrate 100 in the force detection device shown in FIG. 7.
FIG.

FIG. 9 is a bottom view of a flexible substrate 300 used in a force detection device according to an embodiment of the second invention of the present application.

FIG. 10 is a side sectional view showing the structure of a force detection device according to another embodiment of the first invention of the present application.

FIG. 11 is a side sectional view showing the structure of a force detection device according to still another embodiment of the first invention of the present application.

12 is a circuit diagram of a signal processing circuit used in the detection device shown in FIG. 11. FIG.

[Explanation of symbols]

10...Fixed board 11-15...Fixed electrode 20...Flexible board 21-25...displacement electrode 30...Action body 40...Device housing 51-56...CV conversion circuit 61-63...Subtractor 100...Flexible substrate 110...Action part 111...Screw hole 120...Annular flat plate part 125...Annular groove 130...Cylindrical part 140...Annular flat plate part 145...Annular groove 150...Cylindrical part 160...Annular flat plate part 165...Annular groove 170...Fixed part 200...Device body 211-216...Fixed electrode 220...Displacement board 225...Joining member 230...Insulating layer 235...Auxiliary board 240...Device housing 300...Flexible board 310...Action part 311...Screw hole 370...Fixed part 400...Flexible board 410...Action part 411...Screw hole 420...Annular flat plate part 425...Annular groove 430...Cylindrical part 440...Annular flat plate part 445...Annular groove 450...Fixed part B1 to B4...Crosslinked portion H1~H4...Through hole W...Wire

Claims (3)

[Scope of utility model registration request] 1. A fixed part fixed to a device housing, an acting part to which external force is transmitted, and a flexible part formed between the fixed part and the acting part. a flexible substrate having a flexible substrate, a displacement substrate partially fixed to the action section, and a fixed substrate fixed to the device casing so as to face the displacement substrate, a fixed electrode formed, a displacement electrode formed on the displacement substrate,
In a force detection device that detects an external force based on a change in the distance between a pair of electrodes facing each other, the flexible substrate has a cylindrical shape whose axis is substantially perpendicular to the substrate surface of the flexible substrate. A force detecting device characterized in that the flexible portion is constituted by a thin cylindrical portion having a shape of 10 mm, and a thin annular flat plate portion extending along a plane substantially parallel to the substrate surface. 2. A fixed part fixed to a device housing, an acting part to which external force is transmitted, and a flexible part formed between the fixed part and the acting part. a flexible substrate having a flexible substrate, a displacement substrate partially fixed to the action section, and a fixed substrate fixed to the device casing so as to face the displacement substrate, a fixed electrode formed, a displacement electrode formed on the displacement substrate,
In the force detection device that detects an external force based on a change in the distance between the electrodes of a pair of electrodes facing each other, the fixed part is configured to surround the acting part at a predetermined interval. . A force detection device, characterized in that the flexible section is constituted by a plurality of flexible bridging sections that are bridged between the fixed section and the action section. 3. The force detection device according to claim 1, wherein an auxiliary substrate fixed to the device housing is further provided between the flexible substrate and the displacement substrate, and the displacement formed on the displacement substrate is further provided. A force detection device characterized in that an external force is detected by taking into account a change in the distance between the electrodes of a pair of auxiliary electrodes in which an electrode and a fixed electrode formed on the auxiliary substrate face each other. Device.