JPH04124672A - Manufacture of as-se alloy and electrophotographic sensitive body using same and manufacture of said body - Google Patents

Manufacture of as-se alloy and electrophotographic sensitive body using same and manufacture of said body

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Publication number
JPH04124672A
JPH04124672A JP24561590A JP24561590A JPH04124672A JP H04124672 A JPH04124672 A JP H04124672A JP 24561590 A JP24561590 A JP 24561590A JP 24561590 A JP24561590 A JP 24561590A JP H04124672 A JPH04124672 A JP H04124672A
Authority
JP
Japan
Prior art keywords
alloy
oxygen
temperature
ppm
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24561590A
Other languages
Japanese (ja)
Inventor
Kazuyuki Urabe
浦部 和幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP24561590A priority Critical patent/JPH04124672A/en
Publication of JPH04124672A publication Critical patent/JPH04124672A/en
Pending legal-status Critical Current

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  • Photoreceptors In Electrophotography (AREA)

Abstract

PURPOSE:To obtain the electrophotographic sensitive body superior in acceptance and stability of potential and image quality, such as color reproducibility, and not causing deterioration of oxygen concentration by executing distillation and melting in the material purification process of the As-Se alloy under an oxygen atmosphere specified in pressure and temperature. CONSTITUTION:The distillation and melting are carried out in the material purification process of the As-Se alloy in an oxygen atmosphere under the conditions of a vacuum of 10<-1> - 10 Torr and a temperature of 550 - 600 deg.C and a maintenance time of >=15hr, thus permitting the As-Se alloy to be stably doped with oxygen of >=100ppm concentration, and the photosensitive layer of the As-Se alloy formed under said vacuum deposition conditions to contain oxygen in an amount of 130 - 500ppm by weight and the obtained photosensitive body to be superior in potential acceptance and its maintenance.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、電子写真方式の複写機、レーザビームプリ
ンタ、ファクシミリなどに用いられるAs−Se系電子
写真感光体とその製法およびこれに用いるAs−Se合
金の製法に関する。
Detailed Description of the Invention [Industrial Application Field] The present invention relates to an As-Se electrophotographic photoreceptor used in electrophotographic copying machines, laser beam printers, facsimile machines, etc., a manufacturing method thereof, and an As-Se electrophotographic photoreceptor used therein. -Relating to a method for producing a Se alloy.

〔従来の技術〕[Conventional technology]

As−Se系電子写真感光体は、アルミニウム合金など
からなる導電性基体上に光導電性材料としてのAs−S
e合金からなる感光層を備えたものであり、その優れた
耐剛性、耐環境性を利用して、これまで主に高速のプリ
ンタ、複写機に使用されてきた。
An As-Se electrophotographic photoreceptor is an electrophotographic photoreceptor in which As-S is used as a photoconductive material on a conductive substrate made of an aluminum alloy or the like.
It is equipped with a photosensitive layer made of e-alloy, and has been used mainly in high-speed printers and copying machines due to its excellent rigidity and environmental resistance.

近年、こられの装贋のカラー化、あるいはファクシミリ
の04対応などに伴い、高解像度が要求されるようにな
ってきた。ところが、このような装萱に帯電・保持能力
の低いAs−Se系感光体を搭載すると、 ^)帯電・保持能力が変動しやすく、カラーの再現性が
悪い B)電荷保持能力が低く、画像濃度に濃淡を生じやすい などの問題があり、帯電・保持能力の良好な感光体が望
まれていた。このような感光体として、As−Se合金
からなる感光層中に酸素を^S20.の形態でlppm
〜500ppm含有したものが、特開昭58−1235
43号公報により公知であり、また、このような感光体
を得る方法としては、 (a)As−Se合金を真空蒸着して感光層を形成する
際にSe02をドーピングする方法(特開昭54993
1号公報) (ハ)As−Se合金に^S20.をドープした原料を
用いて感光層を蒸着する方法(特開昭58−12354
3号公報) が知られている。
In recent years, high resolution has been required due to the colorization of these counterfeits and the 04 compatibility of facsimile machines. However, when such a device is equipped with an As-Se photoconductor with low charging and holding capacity, the charging and holding capacity tends to fluctuate, resulting in poor color reproducibility.B) The charge holding capacity is low, resulting in poor image quality. There are problems such as shading in density, and a photoreceptor with good charging and holding ability has been desired. As such a photoreceptor, oxygen is added to the photosensitive layer made of As-Se alloy ^S20. lppm in the form of
The one containing ~500 ppm is published in JP-A-58-1235.
43, and methods for obtaining such a photoreceptor include (a) a method of doping Se02 when forming a photosensitive layer by vacuum evaporating an As-Se alloy (Japanese Unexamined Patent Publication No. 54993;
(C) As-Se alloy^S20. A method of vapor depositing a photosensitive layer using a raw material doped with
Publication No. 3) is known.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、上述の(a)の方法では、As−Se合
金、 Se02それぞれの蒸気圧を制御しながら蒸着を
行うことが必要で、感光層中に一様かつ安定的に酸素を
含有させることが難しいという間眩があった。
However, in method (a) above, it is necessary to perform vapor deposition while controlling the vapor pressure of each of the As-Se alloy and Se02, and it is difficult to uniformly and stably contain oxygen in the photosensitive layer. I felt dizzy.

また、(b)の方法では、As−Se合金原料中の酸素
ドーピング量は、特開昭47−26071号公報でも公
知であるように、5重量ppm〜10重量ρρm程度で
しかなく、As−Se合金原料中、そして感光層中に数
百重量ppmもの酸素を安定してドーピングすることは
非常に困難であるという問題があった。
Furthermore, in the method (b), the amount of oxygen doped in the As-Se alloy raw material is only about 5 ppm to 10 ρρm by weight, as is also known in JP-A-47-26071; There has been a problem in that it is extremely difficult to stably dope several hundred ppm of oxygen into the Se alloy raw material and into the photosensitive layer.

この発明は、上述の問題点を解消して、^s −Se合
金原料中に100重量ppm以上の酸素を含有させ得る
製法を提供すること、また、このようにして得られたへ
5−Se合金原料を所定の条件で真空蒸着して感光体を
作製し、帯電・保持能力の優れた感光体を提供すること
を解決しようとする課題とする。
The present invention solves the above-mentioned problems and provides a manufacturing method capable of containing 100 ppm or more of oxygen in the ^s -Se alloy raw material, and also provides a method for producing 5-Se The problem to be solved is to fabricate a photoreceptor by vacuum-depositing an alloy raw material under predetermined conditions, and to provide a photoreceptor with excellent charging and holding ability.

〔課題を解決するための手段〕[Means to solve the problem]

上記課題を解決するために、この発明によれば、へ5−
Se合金の原料精製工程での蒸留・溶融を、(a)10
−’Torr以上10Torr以下ノ範囲内の酸sx囲
気中 ら)温度550℃以上600℃以下 (c)保持時間15時間以上 の条件下で行うことにより、As−Se合全中に100
重量ppm以上の酸素を安定的にドーピングして、この
製法により得られたAs−Se合金を導電性基体上に所
定の条件で真空蒸着して感光層を形成し、As−Se合
金からなる感光層中に130重量ρpm以上500重p
pm以下の範囲内の酸素を含有する感光体とする。
In order to solve the above problems, according to the present invention, to 5-
Distillation and melting in the Se alloy raw material refining process (a) 10
-'Torr to 10 Torr in an atmosphere of acid sx) Temperature 550°C to 600°C (c) Holding time 15 hours or more.
The As-Se alloy obtained by this manufacturing method is stably doped with oxygen in an amount of ppm or more by weight, and is vacuum-deposited on a conductive substrate under predetermined conditions to form a photosensitive layer. 130 weight ρpm or more 500 weight p in the layer
The photoreceptor contains oxygen within a range of pm or less.

〔作用〕[Effect]

従来、As−Se合金の蒸留・溶融は1O−2Torr
程度の真空中で行われていた。この蒸留・溶融を酸素を
導入した雰囲気中で行うことにより、As−Se合金中
にドーピングされる酸素の量は従来量の2倍以上となり
、蒸留・溶融の温度を従来の600℃ないし650℃よ
り50℃ないし100℃低くすることにより、ドーピン
グされる酸素の量はさらに50%ないし100%多くな
る。 しかし、雰囲気に導入する酸素量を数十Torr
と多くしたり、蒸留・溶融の温度を500℃近辺まで下
げてしまうと、本来の目的であるへ5−Se合金の不純
物の除去が不充分となるので好ましくない。
Conventionally, distillation and melting of As-Se alloy was carried out at 1O-2 Torr.
It was carried out in a vacuum. By performing this distillation and melting in an oxygen-introduced atmosphere, the amount of oxygen doped into the As-Se alloy is more than twice the conventional amount, and the distillation and melting temperature is increased from the conventional 600°C to 650°C. By lowering the temperature by 50° C. to 100° C., the amount of oxygen doped is further increased by 50% to 100%. However, the amount of oxygen introduced into the atmosphere is several tens of Torr.
If the temperature is increased or the distillation/melting temperature is lowered to around 500°C, the original purpose of removing impurities from the 5-Se alloy will become insufficient, which is not preferable.

また、保持時間を長くすることにより、へ5−Se合金
中へドーピングされる酸素の量を増加させることは可能
であるが、酸素を導入しない真空中で、かつ、600℃
を超える高温下で、100重量ppm以上の酸素を含有
させるためには、24時間以上を要し、生産効率が低く
問題であるが、この発明による酸素雰囲気、蒸留・溶融
温度とすることにより、保持時間15時間以上で100
重量ppm以上の酸素を含有したAs−Se合金を効率
良く安定的に得ることができる。
Furthermore, it is possible to increase the amount of oxygen doped into the 5-Se alloy by increasing the holding time;
It takes more than 24 hours to contain 100 ppm or more of oxygen at a high temperature exceeding 100 for retention time of 15 hours or more
An As-Se alloy containing oxygen in an amount of ppm or more by weight can be efficiently and stably obtained.

このようにして得られたAs−Se合金を用いて、所定
の真空蒸着条件で感光層を形成して感光体とすることに
より、As−Se合金からなる感光層中に130重量p
pm以上500重量ρpm以下の範囲内の酸素を含有し
ており、帯電・保持能力の優れた感光体を得ることが可
能となる。
Using the As-Se alloy thus obtained, a photosensitive layer is formed under predetermined vacuum deposition conditions to form a photoreceptor.
It contains oxygen in a range of pm or more and 500 pm or less by weight, making it possible to obtain a photoreceptor with excellent charging and holding ability.

〔実施例〕〔Example〕

100重lppmのAS203を含むAs−Se合金を
原料とし、蒸留・溶融条件を変化させて精製を行い、得
られたAs2Se3中の酸素濃度をFT−IRで測定し
た。その結果を第1表に示す。なお雰囲気圧力はl X
 1O−2Torrの真空中に酸素を量を変化させて導
入したのちの圧力を示す。
Using an As-Se alloy containing 100 weight ppm of AS203 as a raw material, purification was performed by varying distillation and melting conditions, and the oxygen concentration in the obtained As2Se3 was measured by FT-IR. The results are shown in Table 1. Note that the atmospheric pressure is l
The pressure after introducing varying amounts of oxygen into a vacuum of 10-2 Torr is shown.

/ / 第 表 第1表に見られるとおり、雰囲気に酸素を導入した場合
と導入しない場合とでは、^s、Se=中にドーピング
される酸素の量に大きな差があり、雰囲気への酸素の導
入量が多くなる程^s、Se、中にドーピングされる酸
素の量は多(なる。しかしながら雰囲気圧力が数十To
rr以上になると^s、Se3中の不純物の除去が不充
分となることが判っており、雰囲気に導入する酸素の量
は10丁orr程度が限度である。
/ / As seen in Table 1, there is a large difference in the amount of oxygen doped into ^s, Se = when oxygen is introduced into the atmosphere and when it is not introduced, and the amount of oxygen doped into the atmosphere is The larger the amount introduced, the larger the amount of oxygen doped into S, Se, and Se. However, when the atmospheric pressure is tens of To
It is known that if the temperature exceeds rr, the removal of impurities in Se3 becomes insufficient, and the amount of oxygen introduced into the atmosphere is limited to about 10 orr.

また、蒸留・溶融の温度が低いほうがAs2Ses中に
ドーピングされる酸素の量は多くなる。これは、^S、
0.の融点(立方晶系で275℃、単斜晶系で315℃
) と関係すると考えられ、例えば、特開昭58−12
3543号公報で公知の650℃という温度はAs20
3の融点に比べてかなり高く、^S20.が安定してド
ーピングされず、より低い温度とすることにより安定し
てドーピングされやすくなるためと考えられる。 しか
しながら、500℃近傍まで下げると不純物の除去が不
充分となる問題が生じてくるので、500℃が下限値と
考えられる。
Furthermore, the lower the distillation/melting temperature, the greater the amount of oxygen doped into As2Ses. This is ^S,
0. melting point (275°C for cubic system, 315°C for monoclinic system)
), for example, JP-A-58-12
The temperature of 650°C known in Publication No. 3543 is As20
It is considerably higher than the melting point of 3, ^S20. It is thought that this is because the doping is not stably performed, and it becomes easier to be doped stably at a lower temperature. However, if the temperature is lowered to around 500°C, a problem arises in that impurity removal is insufficient, so 500°C is considered to be the lower limit.

また、保持時間を長くすることにより^s、Se、の酸
素含有量は多くなるが、雰囲気に酸素を導入せず、蒸留
・溶融の温度も650℃のままでは、100重量ppm
以上の酸素を含有させるためには24時間以上を要する
と推定され、これに対してこの発明による条件では15
時間程度で100重量ρpm以上の酸素を含有させ得る
ことが判る。
In addition, by increasing the holding time, the oxygen content of ^s, Se increases, but if oxygen is not introduced into the atmosphere and the distillation/melting temperature remains at 650°C, the oxygen content is 100 ppm by weight.
It is estimated that it would take more than 24 hours to contain more than 10% of oxygen, whereas under the conditions according to this invention, 15
It can be seen that more than 100 weight ρpm of oxygen can be contained in about an hour.

このようにして精製されたAs2Se、を用いて、I 
X 1O−sTorrの真空中で、蒸発源温度を400
℃とし、蒸着材料のAs2sesのガラス転移点(Tg
)の温度(約180℃)に保たれたM合金ドラム上に蒸
着して感光層を形成し感光体を作製した。得られた感光
体の特性および感光層中の酸素含有量を使用したAs2
Se、原料中の酸素濃度とともに第2表に示す。
Using As2Se purified in this way, I
In a vacuum of X 1O-sTorr, the evaporation source temperature was set to 400
℃, and the glass transition point (Tg
) A photosensitive layer was formed by vapor deposition on an M alloy drum maintained at a temperature of about 180° C. to produce a photoreceptor. As2 using the characteristics of the obtained photoreceptor and the oxygen content in the photosensitive layer
Table 2 shows the Se and oxygen concentrations in the raw materials.

第 表 なお、感光層の膜厚は60μmで、帯電位測定時の基体
への流れ込み電流は110μ^とじた。また、繰り返し
残留電位は帯電・除電200サイクル後の値である。
In Table 1, the thickness of the photosensitive layer was 60 μm, and the current flowing into the substrate at the time of measuring the charged potential was 110 μm. Further, the repeated residual potential is the value after 200 charging/discharging cycles.

第2表に見られるとおり、感光体胤2,3および4の帯
電・保持能力は感光体Nα1より明らかに優れており、
この発明の効果は明らかである。繰り返し残留電位は、
感光層中の酸素濃度の増加と共に上昇する傾向を有する
が、酸sa震度50重量ppm以下では実用上問題とな
るレベルではなし)。
As seen in Table 2, the charging and holding abilities of photoreceptors 2, 3 and 4 are clearly superior to photoreceptor Nα1,
The effects of this invention are obvious. The repeated residual potential is
It tends to increase as the oxygen concentration in the photosensitive layer increases, but it is not at a level that poses a practical problem at an acid SA seismic intensity of 50 ppm by weight or less).

また、この繰り返し残留電位の上昇の問題は、よう素な
どのハロゲン元素を感光層に微量添加することにより容
易に解決することができる。
Further, this problem of repeated increase in residual potential can be easily solved by adding a small amount of a halogen element such as iodine to the photosensitive layer.

〔発明の効果〕〔Effect of the invention〕

Claims (1)

【特許請求の範囲】 1)As−Se合金の原料精製工程での蒸留・溶融を、
(a)10^−^1Torr以上10Torr以下の範
囲内の酸素雰囲気中 (b)温度550℃以上600℃以下 (c)保持時間15時間以上 の条件下で行うことにより、As−Se合金中に100
重量ppm以上の酸素を含有させることを特徴とするA
s−Se合金の製法。 2)請求項1記載の製法で作製した100重量ppm以
上の酸素を含有したAs−Se合金を所定の条件で真空
蒸着して導電性基体上に感光層を形成することを特徴と
する電子写真感光体の製法。 3)1×10^−^4Torr以下の真空中、蒸発源温
度400℃で、蒸着材料のAs−Se合金のガラス転移
点の温度に保持された導電性基体上に蒸着を行うことを
特徴とする請求項2記載の電子写真感光体の製法。 4)請求項2または3記載の製法で作製されたAs−S
e合金からなる感光層中に130重量ppm以上500
重量ppm以下の範囲内の酸素を含有することを特徴と
する電子写真感光体。
[Claims] 1) Distillation and melting in the As-Se alloy raw material refining process,
(a) In an oxygen atmosphere within the range of 10^-^1 Torr or more and 10 Torr or less (b) At a temperature of 550°C or more and 600°C or less (c) For a holding time of 15 hours or more. 100
A characterized by containing oxygen in an amount of ppm or more by weight
Manufacturing method of s-Se alloy. 2) Electrophotography characterized by forming a photosensitive layer on a conductive substrate by vacuum-depositing an As-Se alloy containing 100 ppm or more of oxygen by the method according to claim 1 under predetermined conditions. Manufacturing method of photoreceptor. 3) Vapor deposition is carried out in a vacuum of 1×10^-^4 Torr or less at an evaporation source temperature of 400°C on a conductive substrate maintained at a temperature of the glass transition point of the As-Se alloy used as the evaporation material. The method for producing an electrophotographic photoreceptor according to claim 2. 4) As-S produced by the production method according to claim 2 or 3
130 ppm or more by weight in the photosensitive layer made of e-alloy 500
An electrophotographic photoreceptor characterized by containing oxygen within a range of ppm by weight or less.
JP24561590A 1990-09-14 1990-09-14 Manufacture of as-se alloy and electrophotographic sensitive body using same and manufacture of said body Pending JPH04124672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24561590A JPH04124672A (en) 1990-09-14 1990-09-14 Manufacture of as-se alloy and electrophotographic sensitive body using same and manufacture of said body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24561590A JPH04124672A (en) 1990-09-14 1990-09-14 Manufacture of as-se alloy and electrophotographic sensitive body using same and manufacture of said body

Publications (1)

Publication Number Publication Date
JPH04124672A true JPH04124672A (en) 1992-04-24

Family

ID=17136337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24561590A Pending JPH04124672A (en) 1990-09-14 1990-09-14 Manufacture of as-se alloy and electrophotographic sensitive body using same and manufacture of said body

Country Status (1)

Country Link
JP (1) JPH04124672A (en)

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