JPH04122652A - Manufacture of end face thermal head - Google Patents

Manufacture of end face thermal head

Info

Publication number
JPH04122652A
JPH04122652A JP24332590A JP24332590A JPH04122652A JP H04122652 A JPH04122652 A JP H04122652A JP 24332590 A JP24332590 A JP 24332590A JP 24332590 A JP24332590 A JP 24332590A JP H04122652 A JPH04122652 A JP H04122652A
Authority
JP
Japan
Prior art keywords
substrate
heating element
protruded
thermal head
glaze layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24332590A
Other languages
Japanese (ja)
Inventor
Koji Kameda
浩司 亀田
Ikuo Kasai
笠井 郁男
Hiroyuki Goto
広之 後藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP24332590A priority Critical patent/JPH04122652A/en
Publication of JPH04122652A publication Critical patent/JPH04122652A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to print even on a record medium which can not be folded easily by covering protruded strips formed on the surface of a substrate with a glaze layer, forming a heating element arranged along the direction to the protruded strips, an electrode connected thereto, a protective film and bonding pad on the glaze layer, and cutting off the substrate at an interstice of the protruded strips so as to stick to an end face of a support plate. CONSTITUTION:A plurality of protruded strips are formed on the surface of a substrate 2. The protruded strips are covered with a glaze layer 4. A heat element 6 arranged along the direction of the protruded strips, an electrode 12 connected thereto, a protective film 14 and a bonding pad 16 are formed on the glaze layer. The substrate is cut off at an interstice of the protruded strips, and then, it is stuck to an end face of a support plate 18. At this time, the heating element 6 is to be formed in a position deviated from the top position of the protruded strip in order to make it easy to make electrodes 6, 8, 10 patterned. Also, in order to make it easy to connect to a semiconductor integrated circuit device 22 for driving the heating element, the back face of the substrate is polished in an oblique direction such that the heating element comes to the top position of the protruded strip after the substrate is cut off.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はプリンタやファクシミリなどに用いられるサー
マルヘッドに関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a thermal head used in printers, facsimile machines, and the like.

(従来の技術) サーマルヘッドとして一般的な形式は、発熱基板の主表
面に発熱体を形成した、いわゆる平面型サーマルヘッド
と称されるものである。平面型サーマルヘッドは薄膜型
サーマルヘッドにしても原模型サーマルヘッドにしても
製造は容易である。
(Prior Art) A general type of thermal head is a so-called planar thermal head in which a heating element is formed on the main surface of a heating substrate. The planar thermal head is easy to manufacture, whether it is a thin film thermal head or an original model thermal head.

感熱記録技術や記録媒体の多様化により、近年は熱転写
記録が増え、記録媒体もプラスチックカードや値札(タ
グ紙)にように、固く、厚いものが多くなっている。平
面型サーマルヘッドでは通紙範囲に駆動用半導体装置の
実装部が存在するので、平面型サーマルヘッドでプラス
チックカードや厚紙などの記録媒体に印字を行おうとす
ると、それらの記録媒体はその固さや腰の強さのために
通紙することができず、印字できないという問題がある
Due to the diversification of thermal recording technology and recording media, the number of thermal transfer recordings has increased in recent years, and many of the recording media are hard and thick, such as plastic cards and price tags. In a flat thermal head, the mounting part of the driving semiconductor device is present in the paper passing range, so if you try to print on a recording medium such as a plastic card or cardboard with a flat thermal head, the hardness and stiffness of the recording medium may be affected. There is a problem that paper cannot be passed due to the strength of the paper, and printing is not possible.

平面型サーマルヘッドでこの問題を解決する試みとして
は、駆動用半導体装置の実装部を低くして、保護カバー
をできるだけ低くすることが行なわれているが、それで
もプラスチックカードなどは固すぎて印字することがで
きない。
Attempts to solve this problem with planar thermal heads include lowering the mounting part of the driving semiconductor device and lowering the protective cover as much as possible, but even then, plastic cards are too stiff and printing is difficult. I can't.

プラスチックカードなど折り曲げにくい記録媒体に印字
を行うのに好都合なサーマルヘッドとして、端面に発熱
体を形成した端面型サーマルヘッドと称されるものが開
発されている(実開昭59−59342号公報、特開昭
60−19557号公報などを参照)。
As a thermal head convenient for printing on recording media that are difficult to fold, such as plastic cards, a so-called edge-type thermal head in which a heating element is formed on the end surface has been developed (Japanese Utility Model Publication No. 59-59342, (See Japanese Patent Application Laid-Open No. 1985-19557, etc.).

(発明が解決しようとする課題) 従来の端面型サーマルヘッドでは、発熱体は基板端面に
形成され、電極が基板の主表面に形成される。そのため
、パターン化された発熱体を端面に形成し、それを主表
面の電極と接続する製造工程は難しく、製作できたとし
ても高価になる。
(Problems to be Solved by the Invention) In the conventional edge-type thermal head, the heating element is formed on the end surface of the substrate, and the electrode is formed on the main surface of the substrate. Therefore, the manufacturing process of forming a patterned heating element on the end face and connecting it to the electrode on the main surface is difficult, and even if it can be manufactured, it will be expensive.

また、1枚の基板には端面は発熱体を形成することので
きる端面は2個所しかないため、1枚の基板から3枚以
上のサーマルヘッドを形成することができず、量産化に
適していない。
In addition, since there are only two end faces on a single board where heating elements can be formed, it is not possible to form three or more thermal heads from a single board, making it unsuitable for mass production. do not have.

本発明はプラスチックカードなどの折り曲げにくい記録
媒体にも印字することができ、また記録媒体とのあたり
を良くして印字品質を上げることのできる端面型サーマ
ルヘッドを、量産性のある方法で、しかも容易に製造す
る方法を提供することを目的とするものである。
The present invention provides an edge-type thermal head that can print on recording media that are difficult to fold, such as plastic cards, and improves print quality by improving contact with the recording media, in a mass-producible manner. The purpose is to provide an easy manufacturing method.

(課題を解決するための手段) 本発明では、基板表面に複数個の凸条部を形成し、その
凸条部をグレーズ層で被い、グレーズ層上に前記凸条方
向に沿って配列された発熱体、それに接続される電極、
保護膜及びボンディングパッドを形成し、基板を凸条間
で切断した後に支持板端面に貼りつける工程を含んでい
る。
(Means for Solving the Problems) In the present invention, a plurality of protrusions are formed on the surface of a substrate, the protrusions are covered with a glaze layer, and the protrusions are arranged on the glaze layer along the direction of the protrusions. heating element, electrodes connected to it,
The method includes the steps of forming a protective film and bonding pads, cutting the substrate between the protrusions, and then attaching them to the end surface of the support plate.

電極などのパターン化を容易にするためには、発熱体を
凸条部の頂点位置からずらした位置に形成する。
In order to facilitate patterning of electrodes, etc., the heating element is formed at a position shifted from the apex position of the convex strip.

また、発熱体などを形成した基板を支持板に貼りつけた
後、発熱体を駆動する半導体集積回路装置などとの接続
を容易にするためには、基板を切断した後、発熱体が凸
条部の頂点位置にくるように基板の裏面側を斜め方向に
研磨する。
In addition, in order to facilitate connection to a semiconductor integrated circuit device, etc. that drives the heating element after pasting the substrate on which the heating element is formed on the support plate, it is necessary to cut the substrate and attach the heating element to a protruding strip. Polish the back side of the substrate diagonally so that it comes to the apex position of the part.

(実施例) 第1図から第4図により一実施例を説明する。(Example) One embodiment will be described with reference to FIGS. 1 to 4.

第1図に示されるように、セラミックなどの基板2の表
面に複数個の凸条部を形成する。基板2がセラミックで
ある場合には、凸条部を形成する方法には石膏などの型
を用いて整形し焼成すればよい。凸条部aの幅は1〜2
mmである。
As shown in FIG. 1, a plurality of protrusions are formed on the surface of a substrate 2 made of ceramic or the like. When the substrate 2 is made of ceramic, the protrusions may be formed by shaping using a mold made of plaster or the like and firing. The width of the protruding portion a is 1 to 2
It is mm.

凸条部をガラス質のグレーズ層4で被う。The protruding stripes are covered with a glassy glaze layer 4.

凸条部を形成した基板表面全面にTa2NやTa S 
i 02などの抵抗体層を形成し、その上にアルミニウ
ム電極層や、NiCrとAuの積層膜などの電極層を形
成する。写真製版とエツチングにより電極層と抵抗体層
にパターン化を施して、発熱体、選択電極及び共通電極
を形成する。
Ta2N or TaS is applied to the entire surface of the substrate on which the convex stripes are formed.
A resistor layer such as i02 is formed, and an electrode layer such as an aluminum electrode layer or a laminated film of NiCr and Au is formed thereon. The electrode layer and the resistor layer are patterned by photolithography and etching to form a heating element, a selection electrode, and a common electrode.

第2図は発熱体6、共通電極8、選択電極10などのパ
ターンを示したものであり、発熱体6は凸条部aの長手
方向に配列されるように形成されている。第3図はさら
に保護膜も形成された状態を表わしている。発熱体6は
凸条部断面の頂点(b線上の位置)からずれた位置に形
成されている。発熱体6は隣接する1対6a、6bで1
ビット分の発熱体を構成し、それらは折返し電極12で
連結されているとともに、一方の発熱体6aは選択電極
10に接続され、他方の発熱体6bは共通電極8に接続
され、選択電極10と共通電極8は発熱体配列に対して
同じ方向に引き出されている。
FIG. 2 shows a pattern of the heating elements 6, the common electrode 8, the selection electrode 10, etc. The heating elements 6 are formed so as to be arranged in the longitudinal direction of the ridges a. FIG. 3 shows a state in which a protective film has also been formed. The heating element 6 is formed at a position offset from the apex (position on line b) of the cross section of the convex strip. The heating elements 6 are one pair of adjacent ones 6a and 6b.
They constitute heating elements for bits, and are connected by a folded electrode 12. One heating element 6a is connected to the selection electrode 10, the other heating element 6b is connected to the common electrode 8, and the heating element 6a is connected to the selection electrode 10. and the common electrode 8 are drawn out in the same direction with respect to the heating element array.

その後、全面に保護膜14を形成する。保護膜14とし
ては例えばSi3N、などを用いる。特に耐久性を必要
とする場合には、更に耐摩耗層としてSiCや5iAQ
ON膜などを形成する。
After that, a protective film 14 is formed on the entire surface. For example, Si3N is used as the protective film 14. In particular, when durability is required, SiC or 5iAQ can be used as an additional wear-resistant layer.
Form an ON film, etc.

保護膜14に写真製版とエツチングによりパターン化を
施してボンディングパッド16の部分の保護膜を除去す
る。ボンディングバンド16も凸条部の頂点位置からず
れた位置に形成する。
The protective film 14 is patterned by photolithography and etching, and the protective film at the bonding pad 16 portion is removed. The bonding band 16 is also formed at a position shifted from the apex position of the convex strip.

次に、基板2を凸条部間の位置(第3図でCで示される
位置)で凸条部1本ずつに分割する。分割の方法として
はグレードやレーザで切断してもよく、割るようにして
もよい。
Next, the substrate 2 is divided into protrusions one by one at positions between the protrusions (positions indicated by C in FIG. 3). The dividing method may be by cutting with a grade or laser, or by splitting.

分割された基板の裏面を支持板の端面に貼りつけてもよ
いが、この実施例では記号dで示され位置で基板2を斜
め方向に研磨する。
Although the back surface of the divided substrate may be attached to the end surface of the support plate, in this embodiment, the substrate 2 is polished diagonally at the position indicated by the symbol d.

一方、第4図に示されるように支持板】8に:リント配
線基板20を貼りつけておき、その貼つけたものを基板
2の支持板としてその端面に不磨した基板2の裏面を貼
りつける。
On the other hand, as shown in FIG. 4, a lint wiring board 20 is pasted on the support plate 8, and the unpolished back side of the board 2 is pasted on the end surface of the lint wiring board 20, which is used as a support plate for the board 2. Put on.

その後、プリント配線基板20に発熱体駆動1の半導体
集積回路装置(以下ECという)22イダイボンデイン
グし、IC22とボンディング/ノド16の間をワイヤ
ボンディング法により接糸し、IC22とプリント配線
基板2oの配線のでもワイヤボンディング法で接続し、
さらに共通1極のボンディングパッドとプリント配線基
板2〔の配線の間もワイヤボンディング法で接続する。
After that, the semiconductor integrated circuit device (hereinafter referred to as EC) 22 of the heating element drive 1 is die-bonded to the printed wiring board 20, and the IC 22 and the bonding/nod 16 are bonded by wire bonding, and the IC 22 and the printed wiring board 2o are bonded. Wiring is also connected using wire bonding method,
Further, the bonding pad of one common pole and the wiring of the printed wiring board 2 are also connected by the wire bonding method.

IC22及びワイヤを含むボンディング部をシリコン系
やエポキシ系などの封止用樹脂24で妻止する。
The bonding portion including the IC 22 and wires is sealed with a sealing resin 24 such as silicone or epoxy resin.

第3図に示されるdの位置で基板2を斜め方−に研磨す
ることにより、支持板の端面にこの基杉を貼りつけたと
き、発熱体6を基板の凸条部の頂点位置に位置させるこ
とができて印字特性がよくなるとともに、ホンディング
パッド16をプリント配線基板20に近づけることがで
きて、IC22とのボンディング作業が容易になる。
By polishing the substrate 2 diagonally at position d shown in FIG. 3, when this base cedar is attached to the end face of the support plate, the heating element 6 is positioned at the apex position of the convex strip of the substrate. This makes it possible to improve printing characteristics, and also allows the bonding pad 16 to be brought closer to the printed wiring board 20, facilitating bonding work with the IC 22.

第4図では支持板18とプリント配線基板20を貼りあ
わせたものの端面に分割した基板2を貼りつけているが
、基板2の幅3は1〜2mm程度と狭いため、第5図に
示されるように支持板としてプリント配線基板26のみ
を用い、プリント配線基板26の端面に基板2を貼りつ
けるようにしてもよい。
In FIG. 4, the support plate 18 and the printed wiring board 20 are pasted together, and the divided board 2 is pasted on the end face, but since the width 3 of the board 2 is narrow, about 1 to 2 mm, the width 3 shown in FIG. In this way, only the printed wiring board 26 may be used as the support plate, and the board 2 may be attached to the end surface of the printed wiring board 26.

(発明の効果) 本発明では基板の表面に複数の凸条部を形成するが、発
熱体や電極を形成するプロセスでは基板表面に成膜し、
パターンを施すので、平面型サーマルヘッドを形成する
のと同じ設備と同じ技法を用いて行なうことができ、パ
ターン化が容易になって、製造工程が容易になる。
(Effect of the invention) In the present invention, a plurality of protrusions are formed on the surface of the substrate, but in the process of forming heating elements and electrodes, a film is formed on the surface of the substrate,
Because the pattern is applied, it can be done using the same equipment and techniques used to form planar thermal heads, facilitating patterning and facilitating the manufacturing process.

1枚の基板を複数個の凸条部ごとに分割することにより
同時に多数の発熱基板を形成することができ、量産性に
優れている。
By dividing one substrate into a plurality of protruding stripes, a large number of heat generating substrates can be formed at the same time, resulting in excellent mass productivity.

発熱体を凸条部の頂点位置からずらすことにより、電極
パターンを凸条部の平面に近い部分に形成することがで
きてパターン化が一層容易になるまた、基板分割後に裏
面を斜め方向に切断することにより、発熱体を凸条部の
頂点付近に位置させ、かつボンディングパッドを駆動用
ICに近づけることができるので、印字特性が向上する
とともに、ボンディング工程が容易になり、歩留まりが
向上する。
By shifting the heating element from the apex position of the protruding strip, the electrode pattern can be formed on a portion close to the flat surface of the protruding strip, making patterning even easier.Also, after dividing the substrate, the back surface can be cut diagonally. By doing so, the heating element can be located near the apex of the convex stripe and the bonding pad can be brought closer to the driving IC, so that printing characteristics are improved, the bonding process is facilitated, and the yield is improved.

このようにして、本発明方法によれば端面型サーマルヘ
ッドを容易に、かつ、量産性よく製造することができる
In this way, according to the method of the present invention, an end face type thermal head can be manufactured easily and with good mass productivity.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は一実施例において、基板に凸条部を形成しグレ
ーズ層を形成した状態を示す斜視図、第2図は凸条部に
発熱体、電極及び保護膜(保護膜の図示略)を形成した
状態を示す平面図、第3図は第2図のX−X線位置での
断面図、第4図は一実施例により完成したサーマルヘッ
ドを示す側面断面図、第5図は他の実施例により形成さ
れるサーマルヘッドを示す側面断面図である。 2・・・・・基板、4・・・グレーズ層、6・・・・発
熱体、8・・・・・共通電極、1o・・・・選択電極、
14・・・・・保護膜、16・・・・・・ボンディング
パッド、18・・・・支持板、20.26・・・プリン
ト配線基板、22・・・・・駆動用IC9
Fig. 1 is a perspective view showing a state in which protrusions are formed on a substrate and a glaze layer is formed in one embodiment, and Fig. 2 is a heating element, an electrode, and a protective film on the protrusions (the protective film is not shown). 3 is a sectional view taken along line X-X in FIG. 2, FIG. 4 is a side sectional view showing a completed thermal head according to one embodiment, and FIG. FIG. 3 is a side sectional view showing a thermal head formed according to the embodiment. 2...Substrate, 4...Glaze layer, 6...Heating element, 8...Common electrode, 1o...Selection electrode,
14... Protective film, 16... Bonding pad, 18... Support plate, 20.26... Printed wiring board, 22... Drive IC9

Claims (3)

【特許請求の範囲】[Claims] (1)基板表面に複数個の凸条部を形成し、その凸条部
をグレーズ層で被い、グレーズ層上に前記凸条方向に沿
って配列された発熱体、それに接続される電極、保護膜
及びボンディングパッドを形成し、基板を凸条間で切断
した後に支持板端面に貼りつける工程を含む端面型サー
マルヘッドの製造方法。
(1) forming a plurality of protrusions on the surface of the substrate, covering the protrusions with a glaze layer, heating elements arranged along the direction of the protrusions on the glaze layer, and electrodes connected thereto; A method for manufacturing an edge-type thermal head, which includes a step of forming a protective film and bonding pads, cutting a substrate between protrusions, and then pasting the substrate to an end surface of a support plate.
(2)発熱体を凸条部の頂点位置からずらした位置に形
成する請求項1に記載の端面型サーマルヘッドの製造方
法。
(2) The method for manufacturing an end face type thermal head according to claim 1, wherein the heating element is formed at a position shifted from the apex position of the convex strip.
(3)基板を切断した後、発熱体が凸条部の頂点位置に
くるように基板の裏面側を斜め方向に研磨する請求項2
に記載の端面型サーマルヘッドの製造方法。
(3) After cutting the substrate, the back side of the substrate is polished in an oblique direction so that the heating element is located at the apex position of the convex strip.
A method for manufacturing an end face type thermal head described in .
JP24332590A 1990-09-12 1990-09-12 Manufacture of end face thermal head Pending JPH04122652A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24332590A JPH04122652A (en) 1990-09-12 1990-09-12 Manufacture of end face thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24332590A JPH04122652A (en) 1990-09-12 1990-09-12 Manufacture of end face thermal head

Publications (1)

Publication Number Publication Date
JPH04122652A true JPH04122652A (en) 1992-04-23

Family

ID=17102152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24332590A Pending JPH04122652A (en) 1990-09-12 1990-09-12 Manufacture of end face thermal head

Country Status (1)

Country Link
JP (1) JPH04122652A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09321253A (en) * 1996-05-27 1997-12-12 United Microelectron Corp Capacitor for dram memory cell and method of fabricating the capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09321253A (en) * 1996-05-27 1997-12-12 United Microelectron Corp Capacitor for dram memory cell and method of fabricating the capacitor

Similar Documents

Publication Publication Date Title
JPH04122652A (en) Manufacture of end face thermal head
JP2001232838A (en) Thermal printing head and manufacturing method
US5428373A (en) Thermal head for thermal recording or thermal transfer recording and method of manufacturing the same
US4982201A (en) Thermal head
JP2633701B2 (en) Thermal head
JPH02231153A (en) Thermal head
JP2021003809A (en) Thermal print head and method of manufacturing the same
JPH07214808A (en) Thin film thermal print head and manufacture thereof
JPH04348957A (en) Thermal head and manufacture thereof
JPH04163157A (en) Thermal head
JPS6068974A (en) Thermal head
JP2547140Y2 (en) Thermal head
JPH04110160A (en) End face-type thermal head
JPS63111065A (en) End face type thermal head
JPH0839852A (en) Thermal head and production thereof
JP3625915B2 (en) Print head
JPH04175173A (en) Thermal head and production thereof
JPH01128848A (en) End face thermal head
JPS63118272A (en) Elongate electronic device
JPH04319448A (en) Thermal head
JP2020059223A (en) Thermal print head and manufacturing method thereof
JPH04226769A (en) Thermal head
JP2021011021A (en) Thermal print head and method for manufacturing the same
JPS6359558A (en) Manufacture of thermal head
JPH05338255A (en) Manufacture of electrostatic recording head