JPH0412250U - - Google Patents
Info
- Publication number
- JPH0412250U JPH0412250U JP5333890U JP5333890U JPH0412250U JP H0412250 U JPH0412250 U JP H0412250U JP 5333890 U JP5333890 U JP 5333890U JP 5333890 U JP5333890 U JP 5333890U JP H0412250 U JPH0412250 U JP H0412250U
- Authority
- JP
- Japan
- Prior art keywords
- excitation
- quadrupole electromagnet
- power supply
- series
- annular part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図はこの考案による四極電磁石装置を備え
たマイクロＲＢＳ装置の構成説明図、第２図は第
１図に示す四極電磁石装置の電器回路図、第３図
は従来の四極電磁石装置を備えたマイクロＲＢＳ
装置の構成説明図、第４図は第３図に示す四極電
磁石装置の斜視図、第５図は第４図に示す四極電
磁石装置の電器回路図である。
１……イオンソース、２……コリメータ、３…
…スリツト、４……偏向電極コントローラ、５…
…偏向電極、６，２６……四極電磁石装置、７，
８……四極電磁石、７ａ……コア、７ａ１……環
状部、７ａ２１〜７ａ２４……磁極部、７ｂ１〜
７ｂ４……励磁コイル、、９，１０，２９，３０
……直流定電流電源、１２……分析試料、１３…
…半導体検出器、１４，１５……アンプ、１６…
…計算機、１７……記憶装置、１８……表示装置
、２１〜２４……可変抵抗器。
Fig. 1 is a configuration explanatory diagram of a micro RBS device equipped with a quadrupole electromagnet device according to this invention, Fig. 2 is an electrical circuit diagram of the quadrupole electromagnet device shown in Fig. 1, and Fig. 3 is a diagram showing the configuration of a micro RBS device equipped with a conventional quadrupole electromagnet device. Micro RBS
4 is a perspective view of the quadrupole electromagnet device shown in FIG. 3, and FIG. 5 is an electrical circuit diagram of the quadrupole electromagnet device shown in FIG. 4. 1...Ion source, 2...Collimator, 3...
...Slit, 4...Deflection electrode controller, 5...
... Deflection electrode, 6, 26 ... Quadrupole electromagnet device, 7,
8... Quadrupole electromagnet, 7a... Core, 7a 1 ... Annular part, 7a 21 to 7a 24 ... Magnetic pole part, 7b 1 to
7b 4 ... Excitation coil, 9, 10, 29, 30
...DC constant current power supply, 12...Analysis sample, 13...
...Semiconductor detector, 14, 15...Amplifier, 16...
...Calculator, 17...Storage device, 18...Display device, 21-24...Variable resistor.
Claims (1)
の間隔毎に相対して形成され双曲線形状の先端面
を持つ突起状の磁極部とからなるコアを有し、前
記四つの磁極部のそれぞれに巻かれた励磁コイル
をこの四つの磁極部の隣合う同士が互いに異なる
極性となるように直列接続してなる四極電磁石と
、前記直列接続された励磁コイルに励磁電流を供
給する直流定電流電源とを備え、前記直流定電流
電源から励磁電流を供給し前記四極電磁石によつ
て４回反対称の磁場を形成する四極電磁石装置に
おいて、前記励磁コイルのそれぞれに可変抵抗器
を並列接続したことを特徴とする四極電磁石装置
。 90° in the circumferential direction between the annular part and the inner peripheral surface of this annular part.
It has a core consisting of protruding magnetic pole parts with hyperbolic tip surfaces formed opposite each other at intervals of The magnet includes quadrupole electromagnets connected in series so that the magnets that match each other have different polarities, and a DC constant current power supply that supplies an excitation current to the series-connected excitation coils, and the DC constant current power supply supplies an excitation current. A quadrupole electromagnet device in which a four-fold antisymmetrical magnetic field is formed by the quadrupole electromagnet, characterized in that a variable resistor is connected in parallel to each of the excitation coils.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5333890U JPH0412250U (en) | 1990-05-22 | 1990-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5333890U JPH0412250U (en) | 1990-05-22 | 1990-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0412250U true JPH0412250U (en) | 1992-01-31 |
Family
ID=31574439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5333890U Pending JPH0412250U (en) | 1990-05-22 | 1990-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0412250U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01294338A (en) * | 1987-12-04 | 1989-11-28 | Philips Gloeilampenfab:Nv | Current controller for magnetic quadruple-pole lens |
-
1990
- 1990-05-22 JP JP5333890U patent/JPH0412250U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01294338A (en) * | 1987-12-04 | 1989-11-28 | Philips Gloeilampenfab:Nv | Current controller for magnetic quadruple-pole lens |
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