JPH0411919U - - Google Patents
Info
- Publication number
- JPH0411919U JPH0411919U JP5331490U JP5331490U JPH0411919U JP H0411919 U JPH0411919 U JP H0411919U JP 5331490 U JP5331490 U JP 5331490U JP 5331490 U JP5331490 U JP 5331490U JP H0411919 U JPH0411919 U JP H0411919U
- Authority
- JP
- Japan
- Prior art keywords
- porous
- guide portion
- base member
- fitting
- movably supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011148 porous material Substances 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990053314U JP2576284Y2 (ja) | 1990-05-22 | 1990-05-22 | 静圧気体スライドテーブル |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990053314U JP2576284Y2 (ja) | 1990-05-22 | 1990-05-22 | 静圧気体スライドテーブル |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0411919U true JPH0411919U (US08124630-20120228-C00102.png) | 1992-01-30 |
JP2576284Y2 JP2576284Y2 (ja) | 1998-07-09 |
Family
ID=31574394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990053314U Expired - Fee Related JP2576284Y2 (ja) | 1990-05-22 | 1990-05-22 | 静圧気体スライドテーブル |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2576284Y2 (US08124630-20120228-C00102.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100966131B1 (ko) * | 2003-04-14 | 2010-06-25 | 가부시키가이샤 다이후쿠 | 판형체 반송 장치 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2981459B2 (ja) | 1998-05-01 | 1999-11-22 | 株式会社日本マクシス | 水晶基板傷検査装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0257722A (ja) * | 1988-08-22 | 1990-02-27 | Canon Inc | 直進型気体軸受の接続方法 |
JPH0243133U (US08124630-20120228-C00102.png) * | 1988-09-14 | 1990-03-26 |
-
1990
- 1990-05-22 JP JP1990053314U patent/JP2576284Y2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0257722A (ja) * | 1988-08-22 | 1990-02-27 | Canon Inc | 直進型気体軸受の接続方法 |
JPH0243133U (US08124630-20120228-C00102.png) * | 1988-09-14 | 1990-03-26 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100966131B1 (ko) * | 2003-04-14 | 2010-06-25 | 가부시키가이샤 다이후쿠 | 판형체 반송 장치 |
Also Published As
Publication number | Publication date |
---|---|
JP2576284Y2 (ja) | 1998-07-09 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |