JPH04118992U - Chucking device - Google Patents

Abstract

(57) [Summary] [Purpose] To suppress dust generation with a simple structure by omitting mechanical sliding parts as much as possible in a chucking device used in a clean room. [Structure] A housing space 23 is formed in the case 24 to house the hollow expansion and contraction body 22. Said case 24
When fluid is pressurized into the expansion and contraction body 22 through the port 25, one end of the pair of holders 33a and 3b, which are swingably provided on both sides of the accommodation space 23, is moved by the expanded expansion and contraction body 22. Pressed. The holder 33a, 3
3b rotates around shafts 28a and 28b, and the other end closes. On the other hand, when the fluid in the expansion and contraction body 22 is discharged through the port 25, the springs 32a and 32b
The pair of holders 33a and 33b open due to the urging force.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is a chucking device that can grip workpieces such as substrates and semiconductors, especially The present invention relates to a chucking device suitably used in a phosphorus room.

0002

[Problems to be solved by conventional techniques and ideas]

Manufacturing and assembly of semiconductors to form fine circuit patterns on substrates The process is carried out in a clean room where dust and dust in the air are removed. This krinle Inside the system, a chucking device grips substrates and transports them one by one to the processing process. ing. When operating this chucking device in a clean room, dust-proofing is required. required.

0003 FIG. 5 is a schematic cross-sectional view showing a conventional chucking device. This chucking device The piston 42 is slidably disposed within a cylindrical cylinder 41, and the cylinder A port 43 for pressurizing gas into the cylinder 41 and a port 43 attached to the end of the cylinder 41. The connecting rod 44 is rotatably attached to the end of the connecting rod 44 and is curved. A pair of holders 45a and 45b are provided. The path of the holders 45a and 45b The middle portion is pivotally supported by pins 46a and 46b.

0004 In such a device, gas is pressurized into the cylinder 41 from the port 43. Then, the cylinder 42 slides, and the movement of the connecting rod 44 causes the holders 45a, 4 5b rotates around the pins 46a and 46b and can grip the substrate. Also, cha Move the substrate gripped by the packing device to the specified position and release the gas pressure. Or, by suctioning the gas inside the cylinder 41 from the port 43, the above can be achieved. On the other hand, the holders 45a and 45b can be separated and the gripped substrate can be released at a predetermined position. Ru.

[0005] However, in the chucking device, the piston 42 inside the cylinder 41 is Since the holders 45a and 45b open and close by rotating as well as sliding, there is no mechanical wear. Dust is generated due to wear and tear.

[0006] FIG. 6 is a schematic cross-sectional view showing another conventional chucking device. This chuckin The gating device includes a piston that is slidable within two cylinders formed in parallel within the case 51. ports 52a and 52b, and ports 5 for alternately pressurizing gas into the cylinders. 3a and 53b.

[0007] Racks 54a and 54b are formed on opposing surfaces of the pistons 52a and 52b, These racks 54a, 54b are arranged between each piston 52a, 52b. It meshes with the pinion 55. The end of one piston 52a is connected to the other piston 52a. b, and is fixed to one holder 56a that hangs down. There is. Further, the other holder 56b that hangs down is attached to the one piston 52a. It is attached.

[0008] In such a device, when gas is pressurized from one port 53a, one of the ports 53a The piston 52a moves inward into the cylinder and engages the racks 54a, 54b and the pinion. The other piston 52b and one hanging holder 56a are moved by the The pair of holders 57a and 57b open. On the other hand, the other port When gas is pressurized from 53b, the other piston 52b moves inward and closes the above-mentioned latch. The pair of holders 57a, 57b are closed by the locks 54a, 54b and the pinion 55, Grip the object to be transported.

[0009] However, in the chucking device, the reciprocating movement of the pistons 52a, 52b By engaging the racks 54a, 54b and the pinion 55, the pair of holders 56a , 56b are opened and closed, as mentioned above, dust is generated due to mechanical wear. live. In addition, since two pistons 52a and 52b are required, the device becomes complicated. do.

0010 Therefore, the purpose of this invention is to eliminate mechanical sliding parts as much as possible, to have a simple structure, and to reduce dust generation. An object of the present invention is to provide a chucking device that can be suppressed.

[0011]

[Means to solve the problem]

In order to achieve the above-mentioned purpose, the present invention provides a case for housing a hollow expansion and contraction body. , a port capable of supplying and discharging fluid to and from the inflatable and deflated body; is swingably provided on both sides of the housing space, and one end is connected to the expansion and contraction body. A pair of contactable holders and a direction in which the other end of the pair of holders is opened. To provide a chucking device comprising a biasing means for biasing the chucking device.

0012 In a preferred chucking device, the accommodation space is located toward one end of the holder. It is formed in an elliptical shape extending in the direction.

[0013]

[Effect]

In this chucking device, the expansion force of the expansion and contraction body and the urging force of the urging means are combined. Use this to open and close a pair of holders. That is, through the port, When fluid is pressurized into the hollow expandable body housed in the volume space, the expandable body expands. The force causes one end of a pair of holders provided on both sides of the storage space to be pushed outward on both sides. Press to. The other end of the pair of swingable holders is biased by the biasing means. Since it closes against force, it is possible to grip an article to be transferred such as a substrate.

[0014] On the other hand, when the fluid in the inflating and contracting body is discharged through the port, the biasing Due to the biasing force of the means, the other end of the pair of holders opens to release the transferred article. do.

[0015] In the case where the accommodation space is formed in an elliptical shape extending toward one end of the holder, In such cases, the inflatable and deflated body can be inflated to correspond to the elliptical accommodation space. The expansion force can efficiently press one end of the pair of holders.

[0016]

【Example】

Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

[0017] FIG. 1 is a schematic diagram showing a transfer device equipped with a chucking device according to an embodiment of the present invention. A side view, FIG. 2 is a schematic side view of the chucking device in FIG. 1, and FIG. 3 is a schematic side view of the chucking device in FIG. 2. 4 is a sectional view taken along the line III-III of the chucking device, and FIG. FIG.

[0018] As shown in Figure 1, the transfer device is movable in the front and rear directions relative to the plane of the paper. a hollow holder 3 supported by a stand 2 erected on a base 1; A cylinder 4 is rotatably arranged in the hollow part of the body 3, and the cylinder 4 is driven to rotate in forward and reverse directions. The drive unit 5 includes a built-in motor.

[0019] An arm 6 is attached to the cylinder 4, and an air cylinder 7 is attached to the arm 6. It is attached. The telescopic rod of this air cylinder 7 is attached to the tip of the arm 6. The guide member 8 has a groove formed in the vertical direction on its inner surface. The slidable holding member 9 is moved up and down. That is, the holding member 9 has the A protrusion 10 is formed to be slidably disposed in the groove of the air member. A bottom plate portion 11 is formed which is attached to the telescopic rod of the cylinder 7. Therefore, The holding member 9 moves up and down as the telescopic rod of the air cylinder 7 expands or contracts. reciprocate in the direction. A chuck is attached to the holding member 9 via the frame 12. A monitoring device 21 is attached.

[0020] This chucking device 21 is located in a clean room and is shown in FIGS. 1 to 3. As shown in FIG. A case 24 with an open bottom and gas supply and discharge to the expansion and contraction body 22 are provided. It is equipped with a possible port 25.

[0021] The expansion and contraction body 22 has a cylindrical shape on the port 25 side, and a distal end that expands and contracts. Ru. Further, a portion of the accommodation space 23 corresponding to the tip of the expansion/contraction resistor 22 is The vertical cross-sectional shape is formed into an elliptical shape extending in the direction of both sides. to the port 25 is a supply means 26 that can pressurize gas into the expansion and contraction body 22 and remove it by suction. is connected.

[0022] A rotating shaft is provided on both sides of the accommodation space 23 of the case 24 via bearings 27a and 27b. Rotatably supported shafts 28a, 28b are provided. these shuffs A pair of arms 29a, 29b are installed in the housing space 23 at the ports 28a, 28b. The other pair of arms 30a, 30b are attached in the other space 31. is installed. These arms 29a, 29b, 30a, 30b are It swings around shafts 28a and 28b as central axes.

[0023] Further, one end of the arms 30a, 30b, that is, the upper end in the figure, is located at the front. It is capable of contacting both sides of the inflatable and deflated body 22, and is capable of contacting both sides of the inflated and deflated body 22. Pressed by the sides. One end of the arms 30a, 30b is connected to the case. 24, a spring 3 provided above the shafts 28a, 28b; 2a and 32b, each is biased inward. Therefore, the spring Due to the urging force of 32a, 32b, the other arm 29a, 29b, 30a, 30b , that is, the end located below the case 24 is open.

[0024] A connecting plate is provided at the other end of the arms 29a, 29b, 30a, 30b. Holders 33a and 33 that grip objects to be transferred such as substrates via 34a and 34b b, 35a, and 35b are attached.

[0025] The operation of the transfer device and the chucking device will be explained below.

[0026] When gripping an article to be transferred such as a board, move the base 1 and use the chucking device. The chucking device 21 is placed at a predetermined location, and the chucking device 21 is moved by the air cylinder 7. lower it. When gas is pressurized through the port 25 of the chucking device 21, it expands and contracts. The collapsible body 22 expands within the accommodation space 23 and resists the urging force of the springs 32a and 32b. and press one end of the arms 29a, 29b, 30a, 30b. that time, Since the accommodation space 23 is formed in an elliptical shape, the expansion force of the expansion and contraction body 22 is To efficiently act on one end of arms 29a, 29b, 30a, 30b I can do it. The arms 29a, 29b, 30a, 30b are connected to the shafts 28a, 28b. Since the holders 33a, 33b, 35a, and 35b are rotated around the center axis, the holders 33a, 33b, 35a, and 35b close. Capable of gripping objects to be transported.

[0027] On the other hand, when transferring the transferred article to a predetermined location, the transferred article is placed in the holders 33a, 3 3b, 35a, and 35b, use the air cylinder 7 to release the chuck. The chucking device 21 is raised, and the chucking device 21 is raised by the drive unit 5 as necessary. , and move the base 1 to a predetermined position. Next, the air cylinder 7 The chucking device 21 is lowered, and the inside of the inflatable and deflated body 22 is inserted through the port 25. When the gas is discharged, one end of the arms 29a, 29b, 30a, 30b becomes sprung. It is urged inward by rings 32a, 32b. Therefore, the arms 29a, 2 9b, 30a, 30b are opposite to the above, with the shafts 28a, 28b as the central axes. The holders 33a, 33b, 35a, 35b open, and the transferred article is opened. let go.

[0028] In addition, in the above embodiment, the base may be rotatable, and the base may be rotatable, and the base may be rotatable. Arm 6 etc. are constructed with multi-joint arms, and can be chucked in the vertical and horizontal directions as well as in the front and rear directions. The switching device may also be moved. In this case, the controller controls the chucking device. The moving direction, moving position, etc. of the position may also be controlled.

[0029] In a chucking device, the arm, connecting plate, and holder are integrated into a holder. You may also configure a folder. In this case, one end of the holder can be directly It can be pressed and directly biased inward by a biasing means. In addition, the holder is a case It is sufficient that it is swingable on both sides of the accommodation space, and may be pivoted by a pin. . Furthermore, at least a pair of holders are swingably provided on both sides of the storage space. All you have to do is stay there.

[0030] The hollow expandable body is an elastic bag made of synthetic rubber or the like. It may also be a non-stretchable bag. The shape of the accommodation space that accommodates the expansion and contraction body is , as in the above embodiment, in the direction of both sides, that is, the direction in which one end of the holder is located. It does not have to be an ellipse extending in the direction; for example, it may be a rectangular shape extending in the direction of both sides. You can.

[0031] The biasing means is not limited to the spring, but may be any elastic member.

[0032] The fluid supplied from the port into the expanding and contracting body is not limited to gas but may also be liquid. stomach. The supply and discharge of fluid is controlled by a solenoid valve and a control device that controls the opening and closing of the solenoid valve. The controller may control the transfer device more automatically. It may be linked with the movement of the chucking device. The amount of fluid press-in is controlled by the holder. It can be set according to the weight of the article to be transported.

[0033] The chucking device of this invention generates almost no dust, so it is suitable for handling precision parts, especially clean parts. This is suitable for transporting substrates and the like within the room.

[0034]

[Effect of the idea]

According to the chucking device of the present invention, the expansion force of the expansion and contraction body and the urging force of the urging means The holders are used to open and close the pair of holders to grasp and release the transferred items. , mechanical sliding parts can be omitted as much as possible, the structure is simple, and dust generation can be suppressed.

[0035] Further, the accommodation space for accommodating the inflatable and deflated body is formed by an ellipse extending toward one end of the holder. If it is formed in a circular shape, the expansion force of the expansion and contraction body can be applied efficiently. Therefore, the article to be transported can be gripped and released smoothly.

[Brief explanation of drawings]

FIG. 1 is a schematic side view of a transfer device equipped with a chucking device according to an embodiment of the present invention.

FIG. 2 is a schematic side view of the chucking device of FIG. 1;

FIG. 3 is a sectional view taken along line III-III of the chucking device in FIG. 2;

FIG. 4 is a sectional view taken along line IV-IV of the chucking device of FIG. 3;

FIG. 5 is a schematic cross-sectional view showing a conventional chucking device.

FIG. 6 is a schematic cross-sectional view showing another conventional chucking device.

[Explanation of symbols]

21...Chucking device 22... Expanding and contracting body 23...Accommodation space 24...Case 25...Port 28a, 28b...shaft 29a, 29b, 30a, 30b...arm 32a, 32b...Spring 33a, 33b, 35a, 35b...Holder

Claims (2)

[Scope of utility model registration request] [Claim 1] A case that accommodates a hollow expansion and contraction body;
a pair of ports that are capable of supplying and discharging fluid to and from the inflatable and deflated body; and a pair of ports that are swingably provided on both sides of the accommodation space for the inflatable and deflated body, and one end of which is capable of contacting the inflatable and deflated body; A chucking device comprising: a holder; and biasing means for biasing the other end of the pair of holders in a direction to open the holder. 2. The chucking device according to claim 1, wherein the accommodation space is formed in an elliptical shape extending toward one end of the holder.