JPH04118764U - Motor integrated air bearing - Google Patents

Abstract

(57) [Summary] [Purpose] The purpose is to reduce the space occupied by the air bearing and motor. [Structure] A part of a housing 1 is constituted by a stator 5 of an inner rotor motor, a rotor 2 of the inner rotor motor is inserted into the housing 1, and air supply passages 3a to 3d are formed in the housing 1. The rotor 2 rotates when energized, and an air layer is formed between the rotor 2 and the housing 1 by air supplied through the air supply passages 3a to 3d. [Effect] The present invention has the effect that it can be used without any problem even on a thin turntable or the like.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This idea is based on a motor-integrated air shaft equipped with a motor that serves as the rotational drive source for the rotating shaft. Regarding reception.

0002

[Conventional technology]

Air bearings allow air to flow between the bearing housing and the rotating shaft. It is designed to ensure smooth rotation of the rotating shaft, for example, a turntable. It is used as a bearing for wheels and spindles.

0003 As shown in FIG. 4, conventionally, a rotor supported by this type of air bearing 100 The rotating shaft 101 is usually a motor placed continuously in the axial direction of the air bearing 100. It is rotated by a motor 200. That is, one end of the air bearing 100 In the section, a rotor 201 of a motor 200 is connected to the rotating shaft 101. are doing. Note that in FIG. 4, the motor 200 is fixed to the housing 202. The annular stator 203 and the rotor 201 passing through the stator 203 are This is an inner rotor type motor. Further, 204 is the core of the stator 203; Similarly, 205 is a winding, and 206 is a magnet of the rotor 201.

0004

[Problem that the idea aims to solve]

However, as shown in FIG. When the motor 200 for rotation is arranged, the air bearing 100 and The total length of the motor 200 increases, making it difficult to use for thin turntables, etc. There was a problem that problems could occur when

[0005] This idea was made in view of the above circumstances, and it This reduces the space taken up, making it easy to use even with thin turntables, etc. The purpose is to enable the use of air bearings.

[0006]

[Means to solve the problem]

The motor-integrated air bearing devised by this invention has the following advantages: Both have a housing partially composed of the stator of the inner rotor motor, and a At least a portion of the housing is inserted into the housing, and the outside thereof is inserted into the housing. The housing can be arranged with a gap provided between the peripheral surface and the inner peripheral surface of the housing, and The rotor, which together with the stator constitutes an inner rotor motor, is shaped into the housing. an air supply passage that is formed in the housing and communicates with a portion facing the rotor in the housing; It is characterized by being prepared.

[0007]

[Effect]

The motor-integrated air bearing constructed as described above supplies air to the air supply passage. By energizing the motor while the rotor is in the Rotate in the completed state.

[0008]

【Example】

The motor-integrated air bearing designed as shown in Fig. 1 consists of a housing 1, a rotor 2, and and air supply passages 3a to 3d.

[0009] The housing 1 includes a housing body 4, a stator 5 of an inner rotor motor, and It consists of a thin-walled metal inner cylinder 6. The housing main body 4 is made up of two divided bodies, for example. They are connected together and have a through hole 41. The inner diameter of the upper half of the through hole 41 is the same as that of the lower half. It is formed to have a larger diameter than the inner diameter of. In addition, the upper and lower portions of the lower half of the through hole 41 with a smaller diameter are An annular recess 41a is formed in the middle portion. The inner cylinder 6 is a stratified iron core 5 which will be described later. This is provided to prevent air from escaping through the gaps between the steel plates that form part 1. be. The outer diameter of this inner cylinder 6 is equal to the inner diameter of the lower half of the through hole 41. , is arranged at a position extending from the upper end of the housing body 4 to the upper end of the recess 41a. Ru. By arranging the inner cylinder 6 in this position, the upper half of the housing body 4 An annular space 42 is formed between the inner peripheral surface of the inner cylinder 6 and the outer peripheral surface of the inner cylinder 6. The stator 5 is arranged in the space 42. The stator 5 has a winding 52 on a stratified iron core 51. It is made by applying. The outer peripheral surface and lower surface of the stratified iron core 51 are bonded to the housing body 4. At the same time, its inner peripheral surface is bonded to the inner cylinder 6. In addition, the housing body 4 , a part of the winding 52 is placed on the step surface at the boundary between the upper half and the lower half where the inner diameter of the through hole 41 is different. A recess 41b is formed in which the is housed. Housing 1 made as above , by the inner circumferential surface of the through hole 41 below the recess 41a and the inner circumferential surface of the inner cylinder 6. An insertion hole 7 is formed.

0010 The rotor 2 includes a cylindrical output shaft 21 and a magnet fixed to the inner peripheral surface of the output shaft 21. It consists of a gunnet 22. The output shaft 21 has flanges 21a and 21b at the upper and lower ends. The portion excluding the flange 21a on the upper end side is inserted into the insertion hole 7 of the housing 1. It is located. The flange 21a on the upper end side protrudes above the housing 1. , the rotary shaft R can be coupled coaxially with the output shaft 21. On the other hand, the flap on the lower end side The screw 21b is loosely fitted into the recess 41a within the housing 1. Ru. The output shaft 21 is connected to the housing 1 along its entire circumference between the inner wall of the insertion hole 7 and the inner wall of the insertion hole 7. They can be arranged with a gap of a predetermined size formed between them. This rotor 2 Together with the stator 5, it constitutes an inner rotor motor.

[0011] The air supply passages 3a to 3d are formed in the housing 1 as described above. There is. Air supply piping A is connected to the outer peripheral surface and bottom surface of the housing body 4, respectively. Air is introduced into the air supply passage 3a via the air supply pipe A connected to the outer circumferential surface. Air is introduced into the air supply passage 3c via the air supply pipe A connected to the bottom surface. It is designed to be entered. The air supply passage 3a is located on the outer peripheral surface of the housing body 4. It extends in the radial direction toward the rotor 2 side, and extends in the circumferential direction at the part facing the rotor 2. The air supply passage 3b is an annular air supply passage 3b. On the other hand, the air supply passage 3c extending in the axial direction from the lower surface of the flange body 4, and located at a position facing the lower surface of the flange 21b. It transitions to an annular air supply passage 3d extending in the circumferential direction.

0012 The motor-integrated air bearing constructed as described above receives air through air supply piping A. By introducing air into the supply passages 3a and 3c and energizing the winding 52, The rotor 2 rotates with an air layer a formed between it and the housing 1. air supply Via the passages 3a and 3b, the air is supplied to the opposing part of the housing 1 and the rotor 2, that is, to the air layer a. The supplied air mainly separates the rotor 2 from the housing 1 in the radial direction. . Furthermore, the air supplied to the air layer a via the air supply passages 3c and 3d is mainly The motor 2 is separated from the housing 1 in the axial direction.

[0013] FIG. 2 shows a cross section of another motor-integrated air bearing according to this invention. this The motor-integrated air bearing in Fig. 2 has almost the same configuration as that in Fig. 1, and is equivalent to Fig. 1. The parts to be used are indicated by a code with A appended to the end of the number part of the code. . This motor-integrated air bearing differs from the one shown in FIG. 1 in the following points.

[0014] First, the iron core 51A of the stator 5A that constitutes the housing 1A is not a stratified iron core. As shown in Fig. 3, it is a solid iron core with slots 51Aa for winding. . A winding 52A is provided on this iron core 51A. Such a solid iron core 51A By using this motor-integrated air bearing, the inner cylinder 6 of the one in Fig. 1 is omitted. It is essential. Therefore, the inner peripheral surface of the iron core 51A directly faces the rotor 2A. Ru. This iron core 51A also includes a wall along the inner circumferential wall inside the slot 51Aa. A plurality of air supply passages 3Ae arranged annularly are formed. As shown in Figure 2 In addition, this air supply passage 3Ae extends in the axial direction within the iron core 51A, and also extends in the axial direction. It extends in the radial direction at a plurality of locations and opens at a portion facing the rotor 2A. This air supply The supply passage 3Ae is provided in the housing main body 4A together with the air supply passages 3Aa to 3Ad. It communicates with an air supply passage 3Af formed in . Air supply passage 3Af is a housing It extends in the radial direction from the outer circumferential surface of the ring body 4A, branches in the middle, and one end is connected to the rotor 2A. and the other extends in the axial direction. Air supply passage 3A extending in the radial direction f transitions to an annular air supply passage 3Ag extending in the circumferential direction at a portion facing the rotor 2A. are doing. On the other hand, the air supply passage 3Af extending in the axial direction is connected to the housing body 4A. At the boundary of the iron core 51A, it transitions to an annular air supply passage 3Ah extending in the circumferential direction. , communicates with the air supply passage 3Ae via this air supply passage 3Ah.

[0015] In the motor-integrated air bearing of FIG. 2 described above, the air bearing is The air supplied to the opposing part of the housing 1A and rotor 2A causes this opposing part to A more stable air layer a is formed than in FIG. This motor-integrated air in Figure 2 Bearings are particularly suitable for low-speed, high-precision positioning.

[0016] The motor-integrated air bearing shown in Fig. 1 or 2 as described above is different from conventional motors. Since it does not require the space previously occupied, it does not interfere with thin turntables, etc. Air bearings can be used.

[0017] In addition, when using a solid iron core like the above iron core 51A, the air supply piping should be By connecting directly to the air supply passage formed in this iron core, the stator alone can be used. Uzing can also be configured.

[0018]

[Effect of the idea]

As mentioned above, the motor-integrated air bearing of this invention is different from conventional air bearings. Since there is no need to install a motor, which was the main component, the motor part and air bearing part occupy more space. The total length can be reduced, making it less of a problem even with thin turntables, etc. This has the effect that it can be used without having to use it.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of a motor-integrated air bearing according to the invention.

FIG. 2 is a sectional view of another motor-integrated air bearing according to the invention.

3 is a perspective view showing the iron core of the motor-integrated air bearing shown in FIG. 2 in an inverted state; FIG.

FIG. 4 is a partial sectional view showing a state in which a motor is connected to a conventional air bearing.

[Explanation of symbols]

1,1A housing 2,2A rotor 3a~3d, 3a~3h Air supply passage 5,5A stator

Claims (1)

[Scope of utility model registration request] 1. A housing, at least a part of which is constituted by a stator of an inner rotor motor, and a housing, at least a part of which is inserted into the housing, between an outer circumferential surface of the housing and an inner circumferential surface of the housing. A rotor that can be arranged with a gap and that forms an inner rotor motor together with the stator, and an air supply passage that is formed in the housing and communicates with a portion of the housing that faces the rotor. Motor-integrated air bearing.