JPH04117574A - Graphic data processor - Google Patents

Abstract

PURPOSE:To attain duplication removing, the high speed execution of white/ black reversal processing and the correcting of a proximity effect by introducing a frame memory to hold a multistage value every one picture element and moreover, providing a dedicated graphic processing arithmetic device to execute direct processing to graphic data represented on the frame memory. CONSTITUTION:A frame memory able to hold a multistage value a picture element is used as a frame memory 4, graphic data developed by a bit map is direct-processed by a graphic processing arithmetic device 5 and the processed result of it is represented on the frame memory 4 as the numerical value every the picture elements. Accordingly, duplication removing and white/black reversal processing are attained and moreover, since the processed result is represented as the numerical value every the picture element, an electron beam irradiating quantity can be set every the picture element. Thus, quicking the white/black reversal processing is attained and the graphic processing of proximity effect correcting and so on can be realized.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a graphic data processing device, and more particularly to a graphic data processing device necessary for producing drawing data for a charged beam exposure device.

[Conventional technology]

FIG. 3 is a block diagram showing the configuration of a conventional graphic data processing device.

In the figure, 2 is a data disk that stores graphic data, 1 is a computer that processes graphic data, 3 is a rasterization device that develops the graphic data into a bitmap, and 14 is a bitmap memory.

Further, FIG. 4 is a diagram representing a figure on the bitmap memory 14. 6 represents one pixel of the bitmap memory 14. A pixel of 1 on the bitmap indicates a figure, and a pixel of 0 indicates that no figure exists.

Next, the operation will be explained. In FIG. 3, the graphic data stored on the data disk 2 is input to the computer l,
After the necessary graphic processing is performed, the processed graphic data is stored on the data disk 2 again. Alternatively, the graphic data stored on the data disk 2 is developed into a bitmap onto the bitmap memory 14 by the rasterization device 3 via the computer 1. This bitmap development operation means that the redundancy removal process and the black and white inversion process of the figure development are executed.

[Problem to be solved by the invention]

In conventional graphic data processing devices, when graphic data processing is executed on a computer using only software, there is a problem that the processing time is slow, and the processing time is 0. When using the bitmap memory 14, which is expressed in binary values of l, is it appropriate to perform overlap removal processing between figures and black-and-white inversion processing? For example, when performing proximity effect correction processing, is it appropriate to use a specific There was a problem in that the amount of electron beam irradiation could only be set.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a graphic data processing apparatus which can perform duplication removal and black-and-white inversion processing at high speed, and which can also correct proximity effects.

[Means to solve the problem]

The graphic data processing device according to the present invention introduces a frame memory that can hold multi-level values for each pixel, and furthermore, a dedicated frame memory that directly processes the graphic data expressed on the frame memory. It is equipped with a graphic processing arithmetic unit.

[Effect]

In the graphic data processing device according to the present invention, the graphic processing arithmetic unit directly processes the graphic data developed in the form of a bitmap on the frame memory, and the processing result is expressed as a numerical value for each pixel.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a block diagram showing a graphic data processing device according to an embodiment of the present invention. In the figure, 1 is a computer, 2 is a data disk that stores graphic data, and 3 is a bitmap expansion device that develops graphic data into a bit map. , 4 is a frame memory for storing bitmap-developed graphic data, 5 is a graphic processing arithmetic unit for directly processing the graphics on the frame memory 4, and 6 is for directly inputting the processed graphic data to the electron beam exposure device 8. 7 is an interface device, 7 is a vectorization device that converts (vectorizes) bitmap-developed graphic data into normal coordinate values, and 3 is an electron beam exposure device.

Further, FIG. 2 shows graphic data expressed on the frame memory 4. As shown in FIG.

In the figure, 9 indicates one pixel in the frame memory 4, where the pixel is 0, there is no figure, and where the pixel is not 0, there is a figure.

Next, the operation of this embodiment will be explained.

First, the graphic data stored on the data disk 2 is expanded into a bitmap by the bitmap expansion device 3 via the computer 1, and then stored in the frame memory 4. At this time, all pixels where a figure exists are set to a certain constant value, and pixels where there is no figure are set to 0. At this point, first, the overlap removal between the figures and the black and white reversal process are completed.

Thereafter, the graphic data on the frame memory 4 is processed by the dedicated graphic processing arithmetic unit 5.

For example, in the case of proximity effect correction processing, the amount of electric beam to be irradiated to each pixel is determined using techniques such as iterative calculation methods and neural networks so that the energy accumulated in each pixel by electron beam irradiation is constant. do.

The obtained results are expressed as numerical values for each pixel, as shown in FIG.

After the processing is completed, the data on the frame memory 4 is input directly to the electron beam exposure device 8 via the electron beam exposure device connection interface 6, or directly stored on the data disk 2 via the computer 1. Alternatively, the vectorization device 7 converts the coordinate value into a normal coordinate value representation and stores it on the data disk 2 via the computer 1.

According to this embodiment, a frame memory 4 capable of holding multiple levels of values per pixel is used, and the graphic processing arithmetic unit 5 directly processes the graphic data developed in a bitmap. Since the results are expressed as numerical values for each pixel on the frame memory 4, it is possible to remove duplicates and invert black and white at a higher speed than when graphic gator processing is performed only by a computer, and furthermore, the processing results are Since it is expressed as a numerical value for each pixel, the electron beam irradiation amount can be set for each pixel, and graphic processing such as proximity effect correction can also be realized.

In the above embodiment, only one set of each of the rasterization device 3, frame memory 4, and graphic processing arithmetic device 5 is connected to the computer 1, but in this case, multiple sets are connected to the computer 1 in order to increase speed. However, the processing area may be divided appropriately to perform parallel processing.

〔Effect of the invention〕

As described above, according to the present invention, the frame memory is configured to hold multilevel numerical values for each pixel, and is equipped with a graphic processing arithmetic unit that can directly process graphic data on the frame memory. Therefore, graphic processing such as proximity effect correction can be performed, and overlap removal and black-and-white reversal processing can also be performed at high speed.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a graphic data processing device according to an embodiment of the present invention, and FIG. 2 is a diagram showing graphic data expressed on a frame memory, which is a component of the graphic data processing device according to an embodiment of the present invention. , FIG. 3 is a diagram showing the configuration of a conventional graphic data processing device, and FIG. 4 is a diagram representing a graphic on a bitmap memory of a conventional graphic data processing device. In the figure, 1 is a computer, 2 is a data disk, 3 is a bitmap expansion device, 4 is a frame memory, 5 is a graphic processing arithmetic unit, 6 is an interface device for connecting an electron beam exposure device, 7 is a vectorization device, and 8 is an electronic In the beam exposure device, 9 is a pixel. Note that the same reference numerals in the figures indicate the same or equivalent parts.

Claims (1)

[Claims] (1) A frame memory capable of holding multi-level values for at least one pixel to hold bitmap-developed graphic data, and graphic processing performed on the graphic data held in the frame memory. A graphic data processing device comprising: a graphic processing arithmetic device.