JPH04116393A - Soaking device - Google Patents

Abstract

PURPOSE:To prevent any deformation caused by a temperature difference by a method wherein a fluid passage formed within a member deformed by an external heat or an inner heat is provided with a vibration generating member vibrating fluid in a direction of flow passage and its driving source. CONSTITUTION:Within a bed 3 of a lathe 10 is formed an annular flow passage 4. The bed 3 acting as a member deformable by heat absorbs the heat transmitted from a head stock 1 mounted on the upper part. In turn, fluid 5 is sealingly enclosed within the flow passage 4. A piston rod 6a extends from the driving source out of the bed 3. Its extremity end is provided with a piston 6 acting as a vibration generating member. The piston 6 is repeatedly slid within the flow passage 4 by the driving source rightward or leftward. Along with this operation, flow of fluid 5 in a clockwise direction or a counterclockwise direction is repetitively generated within the annular flow passage 4, so that the temperature distribution in the bed 3 is made uniform and a machining accuracy of the lathe 10 is improved.

Description

[Detailed Description of the Invention] <Field of Application of Industry-L> The present invention relates to a heat soaking device that can maintain high dimensional accuracy of equipment even when temperature changes occur, and is applicable to machine tools, optical equipment,
There is a type-C that can be applied to electronic component manufacturing equipment, etc.

<Conventional technology> Precision machinery and equipment are usually made of metal, so heat from an external heat source or self-generated heat causes uneven temperature, which causes thermal expansion in a part of the equipment, causing damage to the equipment. Displacement may occur in the relative positional relationship between members. In this case, it is conceivable that the accuracy of processing performed by these devices may be reduced.

FIG. 3 does not show a lathe 10, which is an example of a conventional precision mechanical device.

As shown in this example, when the humidity of the headstock 1 increases by approximately 5°C due to heat generated by the bare legs inside the headstock 1, the bed 3 deforms as shown by the dotted line, and the workpiece attached to the main shaft of the radstock 1 The relative position δ (displacement amount of the spindle) between the tool 2 and the processing tool 2 is displaced by several tens of micrometers, which poses a problem in terms of machining accuracy of the precision parts to be finished. Also, about 5
Since the temperature rise in degrees Celsius is a normal value, as a countermeasure against this, methods such as (1) to (4) described below are used to suppress thermal deformation and reduce temperature unevenness that causes it.

■ The structure is such that the processing dimensions do not change even if the temperature of the heat generating part increases. That is, at a displaced location, a thermally symmetrical design is adopted in which the structures on both sides of the plane orthogonal to the displacement direction are symmetrical to each other.

■ Increasing rigidity by making the parts thicker and longer so that they do not change due to temperature.

■ A liquid is supplied from outside the device, and the heat of vaporization generated by the liquid is released to cool the heat generating part.

■ Install a temperature compensation heater and a Peltier cooling device.

■ Cool by blowing air for cooling.

<Problems to be Solved by the Invention> However, the examples ① to ② listed in -, each have the following problems.

In the case of (2), since the measures were taken assuming displacement from only one direction, it becomes difficult to take measures when there are multiple heat sources. In the case (2), this goes against the desire to reduce the weight, size, and cost of mechanical devices, and the effect of reducing deformation is small. In the case of ■, power is required separately, which increases the overall running cost and also increases the refrigerant supply and
A discharge device, a refrigerant sealing device, etc. are required, resulting in mechanical changes to VI and H and increased costs. In the case of (2), a temperature distribution control device that comprehensively controls the temperature distribution is required, which makes the device complicated and expensive, and the running cost increases due to the use of a Peltier cooling device.

In the case of (2), the blower causes vibrations, causes dust to scatter, and has a small heating effect compared to the energy used for blowing.

Furthermore, a common problem in (1) to (2) is that it is difficult to reduce the temperature difference between the heat generating part and other parts to a few degrees or less.

Means for Solving the Problems> A heat equalizing device according to the present invention includes a two-fluid flow path formed in a member that is deformed by external heat or internal heat generation, and a two-fluid flow path installed within the fluid flow path. A vibration generating member that vibrates the fluid that is injected into the fluid flow path and can transfer heat in the flow path direction of the fluid flow path B; The vehicle is characterized by having a drive source that is operated within the road.

<Function> The vibration-generating member that is driven by the drive source generates
The fluid injected into the fluid channel vibrates within the fluid channel.

With this vibration, the fluid transfers heat within the member, making the temperature of the member uniform.

<Embodiment> An embodiment of the burning device of the present invention applied to the bed of a lathe is shown in FIG. 1, and this embodiment will be explained based on this figure.

Incidentally, the same members as those described in the related art are given the same reference numerals, and redundant explanation will be omitted.

As shown in Fig. 1, a flow path 4, which is an annular fluid flow path, is formed in the bed 3 of the lathe 100, and the bed 3, which is a member that deforms due to heat, is installed above the bed 3. The structure is such that the heat generated by the headstock 1 can be transferred. Further, a workpiece is attached to a main shaft (not shown) of the headstock 1.

On the other hand, a fluid 5 such as water capable of transmitting heat is injected into the flow path 4 and sealed, and a piston rod 6a extends from a drive source (not shown) outside the bellows 1 to 3. A piston 6, which is a vibration generating member, is installed at the tip of the piston rod 6a, and the piston 6 can repeatedly slide in the left and right directions in the figure by a driving source. ing.

When the piston 6 repeatedly slides within the flow path 4, the fluid 5 repeatedly flows clockwise and counterclockwise within the annular flow path 4.

In other words, when the piston 6 repeatedly slides, the fluid 5 vibrates along the flow path direction, and due to the effect of promoting heat transfer in the flow path direction, the temperature distribution of the bed 3 changes from that of the conventional method shown by the dotted line A in FIG. As compared to the technique shown in FIG.

As a result, the relative position δ shown in FIG. 3 of the prior art is significantly reduced, and the machining accuracy of the lathe 10 is improved.

In addition, the horizontal axis of the graph shown in FIG. 2 (represents the position corresponding to each part of the bed 3 with the left end of the bed 3 as a reference, and the vertical axis represents the temperature 1''('C).

Also, as mentioned above, how is the temperature distribution uniform?
This is for the following reasons.

In other words, when creating a temperature difference in the direction of the flow path, when the fluid 5 is vibrated in the direction of the flow path, the heat on the high temperature side is transferred between the fluid 5 and the flow path.
This is because it does not transmit between the inner wall of the tube and moves toward the low temperature side in the flow path direction.

According to the inventor's experiments, the amount of heat transferred is determined by the length of the cross section of the flow path 4 where the fluid 5 contacts, the length of the cross section, the 3/2 power of the frequency, the square of the amplitude, and the heat of the fluid. It is proportional to the conductivity and kinematic viscosity of the fluid. For example, in a steel channel with an inner diameter of 1.0 mm, water as a fluid is heated at l OHz x amplitude 20
By shaking a solid copper rod with the same diameter, it is possible to achieve a heat transport scene ten times as large.

As a result, the temperature unevenness of the bed in the direction of the flow path disappears.
The bed exhibits the same thermal displacement reduction effect as a thermally symmetrical design. It can be applied to a wide range of equipment other than machine tools, such as optical equipment and electronic component manufacturing equipment.

Further, as the fluid, it is possible to apply a low-cost liquid from outside the waterside to the apparatus of the present invention, and the flow path may also have a shape other than that of this embodiment.

<Effects of the Invention> According to the present invention, a structure is adopted in which a fluid flow path is formed in a member and the fluid in the fluid flow path is vibrated, so that precision processing can be achieved where conventionally a temperature difference of several degrees would be a problem. In mechanical devices, this difference can be almost eliminated, thereby preventing deformation caused by temperature differences, and making it possible to operate the device with high positioning accuracy.

In addition, as mentioned above, it is possible to have a compact design, keep costs low, and reduce running costs.

[Brief explanation of the drawing]

Fig. 1 (=1) is a front sectional view of a lathe to which an embodiment of the sintering device of the present invention is applied, and Fig. 2 is a graph of bed temperature distribution of an embodiment of the present invention and a conventional technology. Fig. 3 is a front view of a lathe according to the conventional technology. Fluid, 6 is screw 1-on, 10 is lathe, A, +3 is temperature, /IJ is the curve in Table 1. Patent filed 1 person Mitsubishi Heavy Industries, Ltd.

Claims (1)

[Claims] A fluid passage formed in a member that causes deformation due to external heat or internal heat generation, and a fluid installed in this fluid passage and injected into this fluid passage to transfer heat. A heat soaking device comprising: a vibration generating member that vibrates in the direction of the fluid flow path; and a drive source that is connected to the vibration generating member and operates the vibration generating member within the fluid flow path.