JPH04115884A - Slide mechanism - Google Patents

Abstract

PURPOSE:To prevent dust caused from dispersing to the external part, by providing a 2nd hollow pipe which is connected to a moving side member at its one end freely rotatably in the horizontal direction and also connected freely rotatably to the other end of a 1st hollow pipe at its other end, and an air piping and/or electric wiring which connects the space between a fixing side member and moving side member. CONSTITUTION:Air piping 36 and/or electric wiring 37 connecting fixing side member 2 and moving side member 3 are inserted into 1st hollow pipe 22 and 2nd hollow pipe 23, also the 1st hollow pipe 22 is connected freely rotatably in the horizontal direction to the fixing side member 2 at its one end. Moreover the 2nd hollow pipe 23 is connected freely rotatably in the horizontal direction to the fixing side member 2 at its one end, yet, connected freely rotatably to the other end of the 1st hollow pipe 22 at its other end, a seal member of high asealing property is arranged at the rotating connection parts 24, 25 connected freely rotatably each other of the fixing side member 4, moving side member 3, 1st and 2nd hollow pipes 22, 23, and the space connected by the 1st, 2nd hollow pipes is cutoff from the external part.

Description

DETAILED DESCRIPTION OF THE INVENTION The slide mechanism of the present invention will be described in detail according to the following items.

A. Industrial field of application B1 Overview of the invention C1 Prior art [Figs. 12 to 14] D1 Problems to be solved by the invention E9 Means for solving the problems F. Examples [Figs. 1 to 11] Figures] a, Appearance [Figures 1 to 3] b, X-axis unit [Figures 1 to 6] c, Y-axis unit [Figures 1 to 3, Figures 5, 6] d. Tool drive unit [Fig. 1 to 3] e. Hollow pipe [Fig. 1 to 3, Fig. 7 to 9] Figures 7 to 9 g, Air piping, electrical wiring [Figure 1, Figure 7, Figure 8] h, Operation ['tS9 figure] i, Another application example [Figure 3410, Figure 11] G0 Effects of the Invention (A. Field of Industrial Application) The present invention relates to a novel slide mechanism. Specifically, by devising the routing of the air piping and/or electrical wiring that connects the fixed side member and the moving side member, air piping and/or electrical wiring that is exposed to the outside as the moving side member moves It is an object of the present invention to provide a novel slide mechanism that can prevent the scattering of dust generated from such objects and that can also reduce the space occupied by the entire slide mechanism.

(B. Summary of the Invention) The slide mechanism of the present invention inserts air piping and/or electric wiring connecting a stationary side member and a movable side member into a first hollow pipe and a second hollow pipe. A hollow pipe is connected at one end to a fixed side member so as to be horizontally rotatable, and one end of a second hollow pipe is connected to a movable side member so as to be horizontally rotatable, and the other end is connected to a movable side member so as to be horizontally rotatable. The above 1st
A sealing member is rotatably connected to the other end of the hollow pipe, and further rotatably connects the fixed side member, the moving side member, and the first and second hollow pipes to each other. A sealing member with a high sealing temperature is provided so that the space communicated by the first hollow pipe and the second hollow pipe is isolated from the outside, so that air piping and electrical wiring are prevented as the moving member moves. Also, dust generated by contact wear between electrical wirings is not scattered outside, and since the air piping and electrical wiring are routed horizontally, the amount of upward protrusion can be reduced. , the area occupied by the slide mechanism can be reduced.

(C, Prior Art) [Figs. 12 to 14] Figs. 12 to 14 show m pieces a in which a conventional slide mechanism is applied to a Cartesian robot.

The orthogonal robot a includes an X-axis unit b fixed to a base (not shown) and a Y-axis unit C supported by a moving body of the X-axis unit b and extending in a direction perpendicular to the X-axis unit b.
and a tool drive unit d attached to one end of the Y-axis unit C.

The X-axis unit b includes a moving body f coupled to a nut body which is threadedly engaged with a ball screw extending in the longitudinal direction inside the housing e and is moved by the rotation of the ball screw.

The Y-axis unit C includes a support frame g and a housing slidably supported by the support frame g.The support frame g is supported by the movable body f of the X-axis unit b, and the housing A nut body located inside the housing and moved in the longitudinal direction of the housing by the rotation of a ball screw also located inside the housing is connected to the support frame g, and the rotation of the ball screw causes the housing to move along the X axis. It is configured to move in a direction perpendicular to the moving direction of the moving body f of unit b. The tool drive unit d is attached to one end of the housing.

A tool l is attached to the tool drive unit d, and the tool i is moved vertically, rotated, sucked, etc. by a motor and an air cylinder (not shown), and is moved to a predetermined position on a workpiece (not shown). It is ready to work.

An air pipe j connects an air cylinder for driving the tool and negative pressure generating means (not shown) on the base side for fixing the X-axis unit b, and is made of relatively flexible synthetic resin.

The air pipe j protrudes upward from the top surface of the casing e at one end of the It is introduced into the body, further passes through the housing of the Y-axis unit C, and reaches the air cylinder for driving the tool.

Also, the part of the air pipe j that is exposed to the outside is
It is formed relatively long so that it can follow the movement of the moving body f of the axis unit b and the movement of the Y-axis unit C.

K is an electrical wiring for supplying electricity to a motor for driving a ball screw, a motor for driving a tool, etc., and after passing through the inside of the base and X-axis unit b from the power supply part (not shown) on the base side. , is extended to the outside together with the air pipe j, and after extending along the air pipe j is introduced into the Y-axis unit C and connected to the ball screw motor and tool drive motor of the Y-axis unit C. There is.

β, 1, . . . are bands for making the electrical wiring k run along the air piping j, so that the electrical wiring is tied along the air piping j so that it does not hang down. .

m, m are air piping j and electric wiring for each axis unit b,
A rubber bushing is disposed in the lead-out portion from c so as to surround the air piping j and the electric wiring k, thereby protecting the air piping j and the electric wiring k.

Therefore, by driving the X-axis unit b, the Y-axis unit C
is moved in the axial direction of the X-axis unit b, and by driving the Y-axis unit C, most of the Y-axis unit C, including the casing, is moved in a direction perpendicular to the axial direction of the X-axis unit b. , Therefore, the tool i will move in the so-called X-Y direction.

At this time, the length of the air piping j and the electrical wiring exposed to the outside does not change, so the posture may become lower and draw a large arc, or become higher and draw a small arc. It will move as if drawing.

(D. Problem to be Solved by the Invention) However, in the conventional orthogonal robot a, since the air piping j and the electric wiring k have exposed parts to the outside, the X-axis unit b and the Y As the axis unit C moves, air piping j, electrical wiring k and band °C, 1,
...etc. may rub or come into contact with each other, or the rubber bushing m1m may rub against the air piping j and electrical wiring, causing the dust generated by these to be scattered around. there were.

Furthermore, when the robot is not in operation, dust settles and adheres to various parts of the clean room due to downflow, and when robot a is in operation, the dust that has adhered to each part of the robot may be scattered. When the piping j and the electrical wiring k are extended upward and are in a high position, there is a problem in that the dust attached to them is scattered over a wider area, and therefore the dust is attached to the workpiece. .

(E. Means for Solving the Problems) Therefore, the slide mechanism of the present invention connects the air piping and/or electrical wiring between the stationary side member and the movable side member within the first hollow pipe and the second hollow pipe. At the same time, one end of the first hollow pipe is connected to the fixed side member so as to be horizontally rotatable, and one end of the second hollow pipe is connected to the movable side member so that the second hollow pipe is horizontally rotatable. and the other end is rotatably connected to the other end of the first hollow pipe, and the fixed side member, the movable side member, and the first and second hollow pipes are rotatably connected to each other. A sealing member with high sealing performance is disposed on the connected rotary connecting portion, so that the space communicated by the first hollow pipe and the second hollow pipe is cut off from the outside.

Therefore, according to the slide mechanism of the present invention, dust generated by contact abrasion between the air piping and the electrical wiring or between the electrical wirings due to the movement of the movable member is not scattered to the outside.
In addition, since the air piping and electrical wiring are routed horizontally, the amount of upward protrusion can be reduced.
Accordingly, the area occupied by the slide mechanism can be reduced, and furthermore, this prevents the dust that settles and adheres to various parts of the slide mechanism when it is not in operation to scatter and spread over a wide area when the slide mechanism is in operation. It is possible to reduce the adhesion of dust to the workpiece.

(F. Embodiment) [The details of the slide mechanism of the present invention will be explained in accordance with the illustrated embodiments below in FIGS. 1 to 11.

In the illustrated embodiment, the slide mechanism of the present invention is applied to an orthogonal robot 1.

(a, Appearance) [Figures 1 to 3] The orthogonal robot 1 is supported by an X-axis unit 2 fixed to a base (not shown) and a movable body of the X-axis unit 2. It consists of a Y-axis unit 3 that is movable in two orthogonal directions, and a tool drive unit 4 attached to one end of the Y-axis unit 3.

(b, X-axis unit) [FIGS. 1 to 6] The X-axis unit 2 includes an elongated box-shaped casing 5 and a longitudinal direction (hereinafter referred to as "X-axis direction") inside the casing 5. ) and arranged parallel to each other, circular guide rails 6.
6, both ends of which are rotatably supported by bearings 8.8 supported by internal partition walls 7.7 provided near both ends of the housing 5, and one end of which is connected to the rotating shaft of the motor 9. It consists of a connected ball screw 10, a moving body 12 that non-rotatably supports a nut member 11 screwed onto the ball screw 1o, and the like.

The movable body 12 is formed with guided portions 13.13 that are guided by the guide rails 6.6, and the guided portions 13.13 individually slide on the guide rails 6.6. By being freely supported, the movable body 12 is movably supported by the housing 5, and when the ball screw 1o rotates, the nut member 11 is sent and the movable body 12 is moved in the X-axis direction.

Further, a support leg 14.14 is provided protruding from the upper surface of the movable body 12, and the support leg 14.14 has a slit 15 formed in the top plate of the housing 5 so as to extend in the moving direction of the movable body 12.
．． 15 and protrudes above it.

Reference numeral 16 denotes a square cylindrical support frame that supports the Y-axis unit 3 in an internally fitted manner. The support legs 14 are arranged perpendicularly to the longitudinal direction of the X-axis unit 2.
．． It is fixed on 14.

Reference numeral 17 denotes a pull-out portion for air piping, etc., which is protruded from the side surface of the end of the housing 5 of the X-axis unit 2 on which the motor 9 is attached, and the pull-out portion 17 has a small box shape. A cylindrical portion 18 is provided protruding from its lower surface.

(c, Y-axis unit) [Figures 1 to 3, 5, 6] Since the Y-axis unit 3 has approximately the same structure as the X-axis unit 2, each part of the Y-axis unit 3 The symbols will be explained by adding "r'" to the symbols of the corresponding parts of the X-axis unit 2.

The Y-axis unit 3 includes an elongated box-shaped housing 5' and circles extending in the longitudinal direction (hereinafter referred to as the "Y-axis direction") inside the housing 5' and arranged parallel to each other. The rod-shaped guide rails 6', 6', and both ends thereof are rotatably supported by bearings 8', 8' supported by internal partition walls 7', 7' provided in portions near both ends within the housing 5'. , a ball screw 10' whose one end is connected to the rotating shaft of the motor 9';
It consists of a movable body 12' that non-rotatably supports a nut member 11' screwed onto the ball screw 10'.

The cross-sectional shape of the housing 5' is made one size smaller than the cross-sectional shape of the support hole 16a of the support frame 16, and
It is slidably inserted into the support hole 16a of No. 6.

Reference numeral 19 denotes a cylindrical portion protruding from the lower surface of the end of the outer casing 5' of the Y-axis unit 3 on the side where the motor 9' is attached. The inner and outer diameters of the formed cylindrical portion 18 are approximately the same.

The movable body 12' is formed with guided parts 13', 13' that are guided by the guide rails 6', 6' passing through the guide rails 6'. The movable body 12' is movably supported by the housing 5' by being individually and slidably supported by the housing 5'.
As the ball screw 10' rotates, the nut member 11' is fed and the movable body 12' is moved.

Further, support legs 14'14' are provided protruding from the upper surface of the movable body 12', and the support legs 14'14' are provided on the top plate of the housing 5' so as to extend in the moving direction of the movable body 12'. It projects upwardly through the formed slit 15'15'. The upper ends of the support legs 14', 14' of the movable body 12' are respectively fixed to the lower surface of the upper plate of the support frame 16, and the movable body 12' is integrated with the support frame 16.

Thus, in the X-axis unit 3, the ball screw 10' is rotated by the rotation of the motor 9', and as the nut member 11' is fed, the moving body 12' is moved relative to the housing 5'. Therefore, the moving body 12' is connected to the X-axis unit 2.
Since the X-axis unit 3 is fixed to the support frame 16 of That will happen.

(d. Tool drive unit) [Figures 1 to 3] A tool 20 is attached to the tool drive unit 4, and the tool 20 is moved up and down and rotated by a motor and an air cylinder (not shown). and a suction operation, etc., to perform a predetermined operation on the workpiece 21.

(e, hollow pipe) [Figures 1 to 3, Figures 7 to 9] One end of 22 is attached to the end of the X-axis unit 2 on the side where the motor 9 is attached, so that it can rotate in the horizontal direction. a first hollow pipe connected to the first hollow pipe 22, and both ends 2 of the first hollow pipe 22
2a and 22b are each bent so that their openings face upward.

Reference numeral 23 denotes a second hollow pipe that is horizontally rotatably connected to the end of the X-axis unit 3 on which the motor 9' is attached, and the second hollow pipe 23 is connected to the first hollow pipe 23. The inner and outer diameters are the same as those of the pipe 22, and one end 23a is bent so that its opening faces upward, and the other end 23b is bent so that its opening faces downward.

Furthermore, a portion of the end portion 23b of the second hollow pipe 23 whose opening faces downward, from a position slightly below the bent portion to the lower end is formed as a large diameter portion 23c; The inner and outer diameters of the cylindrical portions 18 and 19 are the same.

An end 22a on the fulcrum side of the first hollow pipe 22 is connected to the X-axis unit 2 via a rotational connection, which will be described later, and an end 22b on the rotational end side is connected to a rotational connection, which will be described later. are connected to the rotating end side ends 23b of the second hollow pipe 23, and furthermore, the fulcrum side end 23a of the second hollow pipe 23 is connected to the X-axis via a rotating connecting portion to be described later. Connected to unit 3.

(f, rotational connection part) [Figs. 1 to 's3, Figs. 7 to 9] 24 is a side surface of the end of the housing 5 of the X-axis unit 2 on which the motor 9 is attached. This is a first rotational connection portion that connects the cylindrical portion 18 of the protruding drawer portion 17 and the end portion 22a of the first hollow pipe 22 on the fulcrum side.

25 connects the cylindrical portion 19 protruding from the lower surface of the housing 5' of the X-axis unit 3 on the side where the motor 9' is attached and the end 23a of the second hollow pipe 23 on the fulcrum side. This is the second rotational connection part.

Reference numeral 26 denotes a third rotational connection portion that connects the rotational end side end 22b of the first hollow pipe 22 and the rotational end side end 23b of the second hollow pipe 23.

Note that each of the rotational connections 24, 25 and 26 is constructed in exactly the same way, so the first rotational connection 24 will be described in detail, and the other rotational connections 25 and 26 will be explained in detail with reference to the first rotational connection. By adding the numerals ``r''' to the numerals given to similar parts of the dynamic coupling portion 24, the explanation thereof will be omitted.

The first rotational connection part 24 is connected to the cylindrical part 18 of the drawer part 17.
, a connecting pipe 27 that is integrally attached to the fulcrum side end 22a of the first hollow pipe 22 and rotatably supported with respect to the cylindrical part 18, and the connecting pipe 27 and the cylindrical part 18. Ball bearings 28, 28 interposed between the connecting pipe 27
a labyrinth seal 29 interposed between and the cylindrical portion 18
Consists of etc.

The connecting pipe 27 has a cylindrical shape that is longer than the cylindrical part 18 and has an outer diameter smaller than the inner diameter of the cylindrical part 18, and has an outwardly protruding flange located closer to the lower end than the center in the vertical direction. 30 is integrally formed, and the inner peripheral surface of the lower part of the flange 30 is formed into an enlarged diameter part 31 whose diameter is larger than that of the upper part, and an annular groove is formed on the outer peripheral surface of the upper end part. 32 is formed.

Further, the outer diameter of the flange 30 is slightly smaller than the inner diameter of the cylindrical portion 18, and an appropriate gap is formed between the two, and the labyrinth seal 29 is attached to the outer peripheral surface of the flange 30 to close the gap. Further, an annular protrusion 33 having a smaller diameter than the outer diameter of the flange 30 is formed on the upper surface of the flange 30 .

The ball bearings 28, 28 have their inner races fitted externally in a press-fitted manner onto a portion above the flange 30 of the connecting pipe 27, and their outer races fitted internally in a press-fitted manner into the cylindrical portion 18.

Thus, the first rotational connection part 24 is assembled as follows.

First, the negative ball bearing 28 is inserted from the top of the connecting pipe 27 until it hits the top surface of the protrusion 33 of the flange 30. Next, the spacer 34 and the other ball bearing 28 are fitted into the connecting pipe 27 in this order. This upper ball bearing 28 has an upper surface of its inner race that corresponds to the groove 3 of the connecting pipe 27.
A retaining ring 35 is engaged with the groove 32, and the two ball bearings 28.
28 and spacer 34 are regulated in the vertical direction.

Next, attach the labyrinth seal 29 to the flange 30 of the connecting pipe 27.
Fix it externally.

Further, the enlarged diameter portion 31 of the connecting pipe 27 is formed so that its inner diameter is approximately the same as the outer diameter of the end 22a of the first hollow pipe 22 on the fulcrum side. The road half of the end portion 22a is press-fitted and fixed to the enlarged diameter portion 31.

Then, the connecting pipe 27 with the ball bearings 28, 28, labyrinth seal 29, etc. assembled in this way is inserted into the cylindrical part 18 from below, and the ball bearings 28.
, 28 are press-fitted and fixed to the inner circumferential surface of the cylindrical portion 18, thereby forming the first rotational connection portion 24.

Thus, in the first rotational connection part 24, the first hollow pipe 22 extends horizontally from the lower part of the drawer part 17 of the X-axis unit 2, and is connected to the first rotational connection part 24 so as to be rotatable in the horizontal direction. At the same time, it is isolated from the outside by the labyrinth seal 29.

In addition, in the second rotation connection part 25, a member corresponding to the cylindrical part 18 of the first rotation connection part 24 is provided to protrude downward from the lower surface of one end of the housing 5' of the Y-axis unit 3. Cylindrical part 19
In addition, in the third rotational connection portion 26, the member corresponding to the cylindrical portion 18 of the first rotation connection portion 24 is the large diameter portion 23c of the rotation end portion 23b of the second hollow pipe 23. be.

Therefore, in the second rotational connection part 25, the second hollow pipe 23 is connected to the motor 9 in the housing 5' of the Y-axis unit 3.
’ extends horizontally from the lower surface of the end on which it is attached;
are horizontally rotatably connected and are isolated from the outside by a labyrinth seal 29'.

In addition, in the third rotation connecting portion 26, the rotation end 22b of the first hollow pipe 22 and the rotation end 23b of the second hollow pipe 23 are rotatably connected, and both hollow The inside of the pipes 22, 23 is isolated from the outside by a labyrinth seal 29'.

(g, air piping, electrical wiring) [Figs. 1, 7, and 8] Fig. 36 shows an air cylinder (not shown) for driving the tool 20 of the tool drive unit 4 and an air cylinder (not shown) disposed on the base side (not shown). The air pipe 36 connects the negative pressure generating means (not shown) on the base to the The hollow pipe 22 - the third rotational connection part 26 - the second hollow pipe 23 - the second rotational connection part 25 - are connected to the air cylinder of the tool drive unit 4 via the X-axis unit 3.

Reference numeral 37 designates electrical wiring for supplying power to the motors (not shown) for driving the motor 9 of the XN unit 2, the motor 9' of the X-axis unit 3, and the tool 20 of the tool drive unit 4, and is connected from the power supply section on the base side. , the housing 5 of the X-axis unit 2
It is connected to the motor 9 and connected to the air pipe 36 as well as the drawer part 17 - the first rotary connection part 24 - the first
It is introduced into the housing 5' of the X-axis unit 3 via the hollow pipe 22 - the third rotational connection part 26 - the second hollow pipe 23 - the second rotational connection part 25 and is connected to the motor 9'. It is further connected to the motor of the tool drive unit 4 through the casing 5' of the X-axis unit 3.

(H, Operation) [Fig. 9] However, the orthogonal robot 1 sends the movable body 12 and the X-axis unit 3 in the X-axis direction by the rotation of the motor 9 of the X-axis unit 2, and also moves the By rotation of the motor 9', the portion of the X-axis unit 3 excluding the moving body 12' is moved to the Y direction.
It will be moved in the axial direction.

That is, when the motor 9 of the X-axis unit 2 rotates, the movable body 12 and the support frame 16 are moved in the X-axis direction, and the support frame 1
The entire Y-axis unit 3 supported by 6 is moved in the X-axis direction.

Furthermore, when the motor 9' of the X-axis unit 3 rotates, the movable body 12' of the X-axis unit 3 rotates.
Since the moving body 12' is supported by
The portion of the shaft unit 3 excluding the movable body 12' moves in the Y-axis direction.

Therefore, the tool 20 is moved in the X-axis direction by the X-axis unit 2 and in the Y-axis direction by the X-axis unit 3, and the movement depends on the amount of movement of each axis unit 2.3. The range is determined.

Furthermore, the portion of the X-axis unit 3 excluding the moving body 12' is
Since they are moved in the Y direction, the 's1 hollow pipe 22 and the second hollow pipe 23 change their postures and rotate at their respective rotational connections 24, 25 and 26, respectively. Become.

FIG. 9 shows the movement range of the X-axis unit 3 of the orthogonal robot 1, and the range indicated by the - dotted chain line is the movement range of the 20th rotation coupling part 25.

Further, in the state shown by the solid line in the figure, the movable body 12 of the X-axis unit 2 is located on the motor 9 side, and the X-axis unit 3
The state in which the part excluding the moving body 12' is located furthest to the left (
In the state shown by the thin two-dot chain line, the motor 9' of the X-axis unit 3 rotates from the first state to the
This shows a state (second state) in which the portion of the axis unit 3 excluding the movable body 12' is located at the rightmost position (second state), and the state indicated by the thick two-dot chain line is the motor 9 of the X-axis unit 2 from the first state.
rotates, and the entire Y-axis unit 3 is moved by the motor 9 in the X-axis direction.
The broken line indicates the state in which the motor 9 of the X-axis unit 2 has been moved from the second state to the farthest position.
The figure shows a state in which the X-axis unit 3 has been rotated and the portion of the X-axis unit 3 excluding the movable body 12' has been moved to the farthest position to the right and farthest from the motor 9.

Then, as the X-axis unit 3 moves as described above, the first hollow pipe 22 and the second hollow pipe 23 move, and further rotate at each rotation connecting portion 24, 25, and 26. Therefore, the air piping 36 and the electric wiring 37 inserted into each of the hollow pipes 22, 23 come into contact therein, and may rub against each other, resulting in wear and dust generation.

However, even if dust is generated inside the hollow pipes 22.23, the dust will not leak to the outside because the inside of each hollow pipe 22.23 is isolated from the outside by the labyrinth seals 29.29'29'. .

In particular, in the orthogonal robot 1, the movable body 12.12' moves within the housing 5.5' (in the X-axis unit 3, the movable body 12' moves within the housing 5.5' of the X-axis unit 3). Even with such internal pressure changes, each pivot connection 24 . In 25.26, the labyrinth seal 29.29'29' prevents the internal air from flowing out or flowing into the outside.
Therefore, no dust is scattered outside.

(i. Another application example) [FIGS. 10 and 11] In the above embodiment, the slide mechanism of the present invention is used in the orthogonal robot 1,
Although the description has been made regarding a case where the portion of the X-axis unit 3 excluding the moving body 12' moves in the Y-axis direction, the present invention is not limited to this. The present invention can also be applied to an orthogonal robot in which the tool drive unit is fixed to the movable body.

Figures 10 and 11 show such an orthogonal robot IA.
The difference between the orthogonal robot IA and the orthogonal robot 1 of the above embodiment is that the casing of the Y-axis unit is fixed to the moving body of the X-axis unit, and the housing of the Y-axis unit is fixed to the moving body of the Y-axis unit. At the point where the tool drive unit is fixed, a hollow pipe for passing air piping and electrical wiring to the air cylinder and motor of the tool drive unit is connected between the X-axis unit and the tool drive unit. This is an added point.

Therefore, the explanation of this orthogonal robot IA will mainly focus on the points that are different from the orthogonal robot 1 in the embodiment described above, and other parts will be designated by the same reference numerals as those assigned to the same or similar parts in the embodiment described above. By doing so, the explanation will be omitted.

The housing 5' of the X-axis unit 3 is the movable body 1 of the X-axis unit 2.
It is fixed on two support legs 14.14.

The housing 5' of the X-axis unit 3 has two slits 15' extending in the Y-axis direction and parallel to each other on one side thereof.
15' is formed.

The movable body 12' of the X-axis unit 3 is supported by guide rails 6' and 6' extending parallel to each other in the Y-axis direction at appropriate intervals in the vertical direction within the housing 5'.
4'14'' project laterally from the slits 15''15''.

The tool drive unit 4 is fixed so that the frame is passed between the ends of the support legs 14'14', and thus moves integrally with the movable body 12' as it moves in the Y-axis direction. It looks like this.

Reference numeral 38 denotes a lead-in portion protruding from the side surface of the tool drive unit 4 on the X-axis unit 2 side, from which the air pipe 36 is connected.
and electrical wiring 37 are drawn into the tool drive unit 4.

39 is a first hollow pipe, with both ends 39a and 39b.
are both bent so as to face downward, one end 39a is longer than the other end 39b, and is connected to the upper surface of the drawer part 17 of the X-axis unit 2 via a fourth rotational connection part 40. It is rotatably supported.

41 is a second hollow pipe, with both ends 41a and 41b.
are both bent so as to face upward, and one end 41a is rotatably supported on the lower surface of the retracting portion 38 of the tool drive unit 4 via a fifth rotary connecting portion 42. , the other end portion 41b is rotatably connected to the other end portion 39b of the first hollow pipe 39 via a sixth rotational connection portion 43.

The air pipe 36 is connected from negative pressure generating means (not shown) on the base side to the X-axis unit 2 - the drawer part 17 - the fourth rotational connection part 41 - the first hollow pipe 39 - the sixth rotational connection part 43. −
It is drawn into the tool drive unit 4 via the second hollow pipe 41 - the fifth rotating connection part 42 - the drawing part 38 .

Further, the electrical wiring 37 is connected to the motor 9' of the Y-axis unit 3, which connects the Connecting part 2
6 - Second hollow pipe 23 - Connected to the motor 9' of the Y-axis unit 3 via the second rotational connection part 25, and the wiring to the motor of the tool drive unit 4 is connected to the air pipe 3.
6 together with the X-axis unit 2 - the drawer part 17 - the fourth rotational connection part 40 - the first hollow pipe 39 - the sixth rotational connection part 43
- the second hollow pipe 41 - the fifth rotary connection part 42 - is connected to the motor of the tool drive unit 4 via the retracting part 38.

Therefore, when the movable body 12 of the X-axis unit 2 moves in the X-axis direction, the Y-axis unit 3 is moved in the X-axis direction, and when the movable body 12' of the Y-axis unit 3 moves in the Y-axis direction, the tool is driven. The unit 4 will be moved in the Y-axis direction, and along with this, each hollow pipe 22, 23, 39
and 41 are each rotating connection part 24.25.26.40.42
and 43, the position is changed while being rotated.

In addition, in the above-mentioned other application example, the air piping 36 and the electric wiring 37 to the tool drive unit 4 are directly connected to the first hollow pipe 39 and the second hollow pipe from the pull-out part 17 of the X-axis unit 2. Although the description has been given of a device connected to the tool drive unit 4 via the tool drive unit 41, the present invention is not limited to this.
Air piping 36 and electrical wiring 3 to tool drive unit 4
7 may be routed through the Y-axis unit 3.

(G. Effects of the Invention) As is clear from the above description, the slide mechanism of the present invention includes a fixed side member, a movable side member movably supported by a guide means with respect to the fixed side member, a moving means for moving the movable member relative to the fixed member; a first hollow pipe having one end rotatably connected to the fixed member in a horizontal direction; and a first hollow pipe having one end horizontally connected to the movable member; a second hollow pipe that is rotatably connected in the direction and whose other end is rotatably connected to the other end of the first hollow pipe, and a fixed side member and a movable side member. The air piping and/or the electric wiring are inserted into the first hollow pipe and the second hollow pipe, and the fixed side member, the movable side member, and the first A sealing member with high sealing properties is disposed at the rotary connection portions of the second hollow pipes that are rotatably connected to each other, so that the space communicated by the first hollow pipe and the second hollow pipe is sealed to the outside. It is characterized by being cut off.

Therefore, according to the slide mechanism of the present invention, dust generated by contact abrasion between the air piping and the electrical wiring or between the electrical wirings due to the movement of the moving member is not scattered to the outside.
In addition, since the air piping and electrical wiring are routed horizontally, the amount of upward protrusion can be reduced.
As a result, the area occupied by the slide mechanism can be reduced, and this also prevents dust that settles and adheres to various parts of the slide mechanism when it is not in operation from scattering and spreading over a wide area when the slide mechanism is in operation. It is possible to reduce dust adhesion to the workpiece.

In the above embodiments, a labyrinth seal is used as the seal member in each rotary connection portion, but the present invention is not limited to this, and for example, a magnetic fluid seal or the like may also be used.

Further, although the above embodiment shows the application of the present invention to an orthogonal robot, the scope of application of the present invention is not limited to such a robot, and can be widely used as a linear slide mechanism. .

Furthermore, the specific shapes and structures shown in the above embodiments are merely examples of embodiments of the present invention, and the technical scope of the present invention should not be construed as limited by these. It is not something that will be done.

[Brief explanation of the drawing]

1 to 11 show an example of an embodiment in which the slide mechanism of the present invention is applied to an orthogonal robot, in which FIG. 1 is a perspective view, FIG. 2 is a plan view, FIG. 3 is a front view, and FIG. The figure is a perspective view with a part of the X-axis unit cut away, Figure 5 is an enlarged sectional view taken along line V-V in Figure 2, and Figure ¥S6 is an enlarged sectional view taken along line ■-■ in Figure 2. 7 is an enlarged sectional view of the first rotational connection part, FIG. 8 is an enlarged sectional view of the third rotational connection part, FIG. 9 is a schematic plan view showing the movement range, and FIG.
Figures 11 and 11 show another example of application of the slide mechanism of the present invention. Figure 10 is a plan view, Figure 11 is a front view, and Figure 11 is a front view.
2 to 14 show a conventional orthogonal robot, with FIG. 12 being a perspective view, FIG. 13 being a plan view, and FIG. 14 being a front view. Explanation of symbols 1... Slide mechanism, 2... Fixed side member, 3... Moving side member, 4...
Moving side member, 6.13.6'13'...Guiding means, 10.11.
10. 11'...Moving means, 22...First hollow pipe, 23...Second hollow pipe, 24...Rotating connection part, 25...Rotating connection part, 26... Rotation connection part, 29. 29' Seal member, A Air piping, 37 Electric wiring, Slide mechanism, First hollow pipe, Rotation connection part, Second hollow pipe , ・Rotating connection part, ・Rotation connection part 1... Mechanism plan view 2゛ Dimensions from N to F: (j) Fixed 91 member Electric west column 1...・Slide mechanism 24, 25, 26... Simplified plan view of the rotating joint part No. 9, drawing plan view (another common example) Fig. 10 Division line

Claims (1)

[Scope of Claims] A fixed member; a movable member movably supported by a guide means relative to the fixed member; and a moving means for moving the movable member relative to the fixed member. a first hollow pipe whose one end is horizontally rotatably connected to the stationary member; and one end which is horizontally rotatably connected to the movable member and whose other end is the first hollow pipe. A second hollow pipe rotatably connected to the other end of the pipe, and air piping and/or electrical wiring connecting between the fixed side member and the movable side member, the air piping and/or electrical wiring The wiring is inserted through the first hollow pipe and the second hollow pipe, and the fixed side member, the movable side member, and the first and second hollow pipes are rotatably connected to each other. A slide mechanism characterized in that a sealing member with high sealing performance is disposed at the connecting portion so that a space communicated by the first hollow pipe and the second hollow pipe is isolated from the outside.