JPH0411271U - - Google Patents
Info
- Publication number
- JPH0411271U JPH0411271U JP5205190U JP5205190U JPH0411271U JP H0411271 U JPH0411271 U JP H0411271U JP 5205190 U JP5205190 U JP 5205190U JP 5205190 U JP5205190 U JP 5205190U JP H0411271 U JPH0411271 U JP H0411271U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- variable capacity
- gate valve
- vacuum
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5205190U JPH0411271U (no) | 1990-05-18 | 1990-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5205190U JPH0411271U (no) | 1990-05-18 | 1990-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0411271U true JPH0411271U (no) | 1992-01-30 |
Family
ID=31572028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5205190U Pending JPH0411271U (no) | 1990-05-18 | 1990-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0411271U (no) |
-
1990
- 1990-05-18 JP JP5205190U patent/JPH0411271U/ja active Pending