JPH0411160Y2 - - Google Patents
Info
- Publication number
- JPH0411160Y2 JPH0411160Y2 JP1984104463U JP10446384U JPH0411160Y2 JP H0411160 Y2 JPH0411160 Y2 JP H0411160Y2 JP 1984104463 U JP1984104463 U JP 1984104463U JP 10446384 U JP10446384 U JP 10446384U JP H0411160 Y2 JPH0411160 Y2 JP H0411160Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sensor
- semiconductor manufacturing
- gas sensor
- gas concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Emergency Alarm Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10446384U JPS6121956U (ja) | 1984-07-12 | 1984-07-12 | 複合型ガス検知警報装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10446384U JPS6121956U (ja) | 1984-07-12 | 1984-07-12 | 複合型ガス検知警報装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6121956U JPS6121956U (ja) | 1986-02-08 |
| JPH0411160Y2 true JPH0411160Y2 (enEXAMPLES) | 1992-03-19 |
Family
ID=30663812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10446384U Granted JPS6121956U (ja) | 1984-07-12 | 1984-07-12 | 複合型ガス検知警報装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6121956U (enEXAMPLES) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56150340A (en) * | 1980-04-23 | 1981-11-20 | Yamatake Honeywell Co Ltd | Semiconductor detector for nitrogen oxide |
-
1984
- 1984-07-12 JP JP10446384U patent/JPS6121956U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6121956U (ja) | 1986-02-08 |
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