JPH04110964U - Sample gripping device in fluorescent X-ray analyzer - Google Patents

Abstract

(57) [Summary] [Purpose] It is an object of the present invention to provide a sample gripping device that can increase the reliability of gripping a sample 41 in a fluorescent X-ray analyzer and does not place a large load on the motor 70. [Structure] A plurality of chuck claws 60 that grip a sample 41 perform a gripping operation by driving a motor 70 via a drive gear 11 and first to third driven gears 12 to 14. Above motor 70
is supported by a movable motor stand 71 that is swingable about a support shaft 72, and the movable motor stand 71 is constantly pulled by a tension spring 73. When the chuck jaws 60 grip the sample 41 by driving the motor 70 and the tip of the chuck jaws 60 comes into contact with the sample 41, the first driven gear 12 stops rotating, so the movable motor base 71 is connected to the drive gear. 11 and rotates around the support shaft 72.
Due to this rotation, the detected part rotates together with the movable motor stand 71.
74 rotates slightly to the position indicated by the two-dot chain line, the detector 75 detects the detected part 74, and the drive of the motor 70 is stopped.
The gripping operation is completed.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This idea is a sample gripping device for transporting a sample in a fluorescent X-ray analyzer. It is related to.

0002

[Conventional technology]

Fluorescent X-ray analyzers irradiate a sample with radiation and detect the fluorescent X-rays generated from the sample. Measure with an X-ray detector, and perform elemental analysis of the sample based on the detection results with this X-ray detector. It is a device that performs The sample to be analyzed is held in advance by a holding device and kept in a vacuum state. It is carried into the irradiation room.

0003 Here, the sample has a maximum weight of about 2 kg, whereas the analyzer is relatively small. Therefore, it is necessary to grip the sample firmly with a small gripping device. Therefore, Conventionally, the rotation angle of the motor that operates the chuck jaws of the gripping device, and the chuck jaws themselves The rotation angle of the sample is detected so that the sample can be gripped.

0004

[Problem that the idea aims to solve]

However, there are errors in the shape and size of the sample, and the sample being held It is inevitable that some variation will occur in the position of . Therefore, as mentioned above Even if the rotation angle of the motor or chuck jaws is detected, the sample may not be grasped securely. Moreover, if you grip it too tightly, a large load will be applied to the motor, which may lead to motor failure. Cause.

[0005] This idea was made in view of the above-mentioned conventional problems, and is This not only increases the reliability of sample gripping, but also reduces the burden on the motor. The purpose of the present invention is to provide a gripping device for a sample that does not cause any damage.

[0006]

[Means to solve the problem] In order to achieve the above objective, this invention first uses chuck jaws to grip the sample. , a motor that drives this chuck jaw, a movable motor stand that supports this motor, and , a spring biases this movable motor base to a low load position, and a spring biases the movable motor base to a high load position. A detector that detects movement to a certain position, and a sensor that receives a movement signal from the above detector to detect the above movement. The controller also includes a controller that stops driving the motor. The above motor has a drive gear and The movable motor base drives the chuck jaws through a driven gear and a driven gear. As the claw grips the sample, the driving gear rotates around the driven gear. It moves from the low load position to the high load position.

[0007]

[Effect]

According to this invention, when the chuck jaws come into contact with the sample and grip it, the chuck The load on the motor that drives the claw increases, causing the drive gear connected to the motor to become driven. As the gear rotates, the movable motor stand resists the spring force and moves to the low load position. to the high load position. Therefore, the movement of this movable motor base is detected by a detector. By knowing this, it is possible to detect that the chuck jaws are gripping the sample. The reliability of gripping can be increased.

[0008]

【Example】

An embodiment of this invention will be described below with reference to the drawings. First, the fluorescent X-ray analyzer will be explained. In FIG. 2, an X-ray tube 40 emits primary X-rays (radiation) B1 to a sample 41. It irradiates X-ray B1. The irradiated primary X-ray B1 excites the atoms of sample 41. , generates fluorescent X-rays B2 unique to that element. Fluorescent X-ray B2 from sample 41 is sent to the irradiation chamber. 42, passes through the solar slit 44 of the analysis chamber 43, is spectrally separated by the spectrometer 45, and The light enters the ray detector 46 and is detected. Elemental analysis of sample 41 is performed based on this detected value. be done. Note that sample 41 is held in the sample holder shown in this figure. Below, the specimen including the specimen holder is referred to as the specimen.

[0009] The irradiation chamber 42 and analysis chamber 43 are kept in a vacuum state to maintain high spectral accuracy. be done. The sample 41 is transferred from the sample stocker 47 to the irradiation chamber 42 by the loading/unloading device 50. will be transported to. The sample 41 carried into the irradiation chamber 42 is transported by a transfer device (not shown). It is transported to an analysis position P close to the X-ray tube 40.

0010 Next, the carrying-in/out device 50 will be explained. The loading/unloading device 50 has an arm 53 supported on a base plate 51 so as to be rotatable around a horizontal axis 52. A cap 48 is attached to the tip of the arm 53. This cap The pipe 48 also serves as a lid for the irradiation chamber 42 after being transported.

[0011] In FIG. 3, which shows a longitudinal section, there are three or four hook-shaped tips inside the cap 48. A jack claw 60 is provided. The chuck jaw 60 is attached to the bracket fixed to the cap 48. An annular member 63 is swingably attached to the shaft 61 and moves up and down together with the vertical shaft 62. The specimen 41 is gripped by swinging around the support pin 64 by the vertical movement of the specimen 41. Ru.

0012 A horizontal drive shaft 16 is connected to the vertical shaft 62 via a first cam member 65. Ru. The drive shaft 16 is rotatably supported by the tip 54 of the arm 53, and its rotation causes The second cam member 16a engages with the first cam member 65 to move the vertical shaft 62 up and down. be. The drive shaft 16 is driven by a chuck drive motor 70 via the first gear train 10 on the right side. It is driven to rotate.

[0013] The first gear train 10 includes a first drive gear 11 made of a planetary gear, and a first drive gear 11 that is a planetary gear, It is composed of second and third driven gears 12, 13, and 14. The first driven gear 12 is The sun gear rotates freely around the horizontal shaft 52 which is rotatably supported on the base plate 51. It is currently installed. The second driven gear 13 is rotated by a horizontal pin 15 protruding from the arm 53. It is rotatably attached. The third driven gear 14 is fixed to the drive shaft 16, It rotates together with the drive shaft 16.

[0014] The drive gear 11 is connected to a chuck drive motor 70. This chuck The drive motor 70 is driven through the drive gear 11 and the first to third driven gears 12 to 14. , the chuck jaws 60 are driven by rotating the drive shaft 16. The chuck drive motor 70 is fixed to a movable motor stand 71.

[0015] As shown in the front view of FIG. 1, the movable motor stand 71 can swing freely around a support shaft 72. The driving gear 11 has a small corner around the first driven gear 12. It can be rotated within a degree range. The movable motor stand 71 has a tension spring 73 As a result, it is pulled to the low load position P1 shown in this figure and comes into contact with the stopper 77. On the other hand, as the chuck jaw 60 grips the sample 41, the driving gear 11 is shifted to the first driven gear. 12, it also rotates slightly around the support shaft 72. Ru.

[0016] A detected part 74 that rotates together with the movable motor base 71 is attached to the movable motor base 71. It is attached. As shown in FIG. When the load rotates slightly to position P2, it enters the space inside the detector 75. This detector 75 is For example, by detecting the detected portion 74 with an optical sensor, the movable motor stand 71 A device that detects that the has moved to the high load position P2 and outputs a movement signal a to the controller 76. It is. The controller 76 receives this movement signal a and stops driving the movable motor stand 70. .

[0017] In FIG. 3, the fourth driven gear 24 is fixed to the arm 53. This fourth slave The gear 24 includes a second drive gear 22 that is rotationally driven by the arm rotation motor 21 (Fig. 4). They are engaged. The fourth driven gear 24 and the second drive gear 22 drive the second gear train 20. By rotating the arm 53, as shown in Fig. 2, the sample 41 can be and transported into the irradiation chamber 42 from the dock position P3.

[0018] In FIG. 3, the sun gear 31 of the third gear train 30 is fixed to the left base plate 51. ing. A second planetary gear 33 meshes with this sun gear 31 via a first planetary gear 32. ing. Like the second driven gear 13, the first planetary gear 32 has a horizontal pin 15A (Fig. ) is rotatably supported by the arm 53. The second planetary gear 33 is a drive shaft 16, and is fixed to the cap 48 via the collar 34. Ru.

[0019] The second planetary gear 33 and the sun gear 31 have the same number of teeth, and as described later, Even when the arm 53 rotates, the attitude of the cap 48 does not change. Also, The first driven gear 12 and the third driven gear 14 of the first gear train 10 have the same number of teeth, and As described above, even if the arm 53 rotates, the gripping state of the chuck jaws 60 does not change. The sea urchin is turning.

[0020] Next, the operation of the above configuration will be explained. First, the gripping operation of the sample 41 will be explained. As shown by the solid line in Figure 2, to grip the sample 41, press the key above the sample 41. Stop cap 48. When the chuck drive motor 70 shown in Fig. 3 is operated, the first drive The driving gear 11 rotates, and the drive shaft 16 rotates slightly via the first to third driven gears 12 to 14. Turn around. This rotation causes the vertical shaft 62 to move upward together with the first cam member 65, causing the annular portion to As the material 63 moves upward, the chuck jaws 60 rotate slightly around the support pin 64. and grip the sample 41.

[0021] When the tip of the chuck jaw 60 contacts the sample 41, the chuck jaw 60 and the first drive gear 12 cannot rotate any further, so the load on the chuck drive motor 70 is slightly increased. Ru. Along with this, the first drive gear 11, the movable motor stand 71, and the detected part 74 in FIG. , rotates around the support shaft 72 from the low load position P1 against the spring force of the tension spring 73. Start moving. When the detected part 74 moves to the position of the detector 75 indicated by the two-dot chain line, When the movable motor stand 71 moves to the high load position P2 indicated by the two-dot chain line, the detector 75 detects the detected part 74 and outputs a movement signal a to the controller 76. This will cause controller 76 stops the operation of the chuck drive motor 70.

[0022] In this way, this invention uses the movable motor to stop the chuck jaws 60 from coming into contact with the sample 41. Since the detection is performed by the movement of the table 71, it can be detected that the chuck jaws 60 are gripping the sample 41. Since the grip can be known, the reliability of gripping can be increased. On the other hand, chuck jaw 60 After contacting the sample 41 and gripping is completed, the drive gear 11 moves around the first driven gear 12. , a large load is not applied to the chuck jaws 60 or the chuck drive motor 70. Therefore, there will be no failure in the small chuck drive motor 70. Therefore, small A heavy sample 41 can be firmly gripped even with a heavy-duty device.

[0023] Next, the loading operation of the sample 41 will be explained. When the gripping operation of the sample 41 is completed, the arm rotation motor 21 shown in Fig. 4 is activated. , rotation of the second driving gear 22 causes the arm 53 to move in the direction of arrow A via the fourth driven gear 24. rotate.

[0024] As the arm 53 rotates, the cap 48 also rotates counterclockwise around the drive shaft 16. try However, as the arm 53 rotates, the first planetary gear 32 is connected to the sun gear 31. The second planetary gear 33 rotates clockwise, so the key Cap 48's posture is kept facing straight down.

[0025] Also, as the arm 53 rotates, the second driven gear 13 in FIG. The second driven gear 14 rotates counterclockwise, and the third driven gear 14 rotates clockwise. Therefore , even if the arm 53 turns counterclockwise (in the direction of arrow A), the drive shaft 16 does not rotate. Since the vertical shaft 62 of No. 3 does not move up and down, the state in which the sample 41 is held by the chuck jaws 60 is maintained. be done.

[0026] As shown by the two-dot chain line in FIG. 2, when the sample 41 is carried into the irradiation chamber 42, the chamber shown in FIG. The drive motor 70 rotates in the opposite direction, and the movable motor stand 71 and the detected part 74 are at the position indicated by the solid line. After returning to the position, the movable motor stand 71 comes into contact with the stopper 77. After this, the drive shaft 16 Through the first to third driven gears 12 to 14, it rotates slightly and vertically reaches the position shown in FIG. The straight shaft 62 descends. Due to this descent, the grip of the sample 41 by the chuck jaws 60 is released. It will be done.

[0027] After that, the sample 41 is transferred to the analysis position P in the irradiation chamber 42 shown in FIG. Analysis is performed. After the analysis, the sample 41 is carried out of the irradiation chamber 42. In addition, the unloading operation This is the same as the carrying-in operation, and detailed explanation thereof will be omitted.

[0028] By the way, in the above embodiment, the drive gear 11 of the chuck drive motor 70 in FIG. 1 and the driven gear 12, but it is not necessarily necessary to do so. For example, The first and second driven gears 12 and 13 are not provided, and the first drive gear 11 is connected to the third driven gear 14. May be directly interlocked.

[0029] However, if the first drive gear 11 is directly engaged with the third driven gear 14, the Since the chuck drive motor 70 is provided at the tip of the arm 53, the rotation of the arm 53 is Since the arm 53 rotates greatly as a result, the wiring of the chuck drive motor 70 is It becomes troublesome to handle the materials. In contrast, in this embodiment, the first drive gear 11 is Since it meshes with the first driven gear 12, which is a positive gear, the chuck drive motor 70 Since the arm 53 does not rotate much with the arm 53, it is difficult to remove the wiring of the chuck drive motor 70. It becomes easier to rotate.

[0030] In the above embodiment, three chuck claws 60 are provided, but two or more chuck claws 60 are provided. It is fine as long as it is above.

[0031]

[Effect of the idea]

As explained above, according to this invention, the chuck jaws can grip the sample. Since the driving gear integrated with the motor rotates around the driven gear, the movable motor By detecting the movement of the table with a detector, the chuck jaws grasp the sample. It can be detected that there is a Therefore, the reliability of gripping by the chuck jaws increases. Also, since the motor is not overloaded, no large load is placed on the motor.

[Brief explanation of drawings]

FIG. 1 is a partially cutaway schematic front view showing the main parts of an embodiment of this invention.

FIG. 2 is a schematic configuration diagram of a fluorescent X-ray analyzer.

FIG. 3 is a longitudinal sectional view of the sample gripping device.

FIG. 4 is a partially cutaway schematic front view showing the second and third gear trains.

[Explanation of symbols]

11...(1st) drive gear, 12...(1st) driven gear, 41...sample, 46...X-ray detector, 60...chuck jaw, 70...(chuck drive) motor, 71...movable motor stand, 73 ... (tension) spring, 75...detector, 76...controller, B1...primary X-ray (radiation)
, P1...Low load position, P2...High load position, a...Movement signal.

Claims (1)

[Scope of utility model registration request] Claim 1: A sample in a fluorescent X-ray analyzer that is equipped with an X-ray detector that detects fluorescent X-rays from a sample that has been exposed to radiation, and that performs elemental analysis of the sample based on the detection results of the X-ray detector. This gripping device includes a plurality of chuck jaws that grip a sample, a motor that drives these chuck jaws via a drive gear and a driven gear, and a motor that supports the motor and that the chuck jaws grip the sample. A movable motor base that moves as the drive gear rotates around the driven gear, a spring that biases the movable motor base to a low load position, and a spring that moves the movable motor base to a high load position. A sample gripping device for a fluorescent X-ray analyzer, comprising: a detector that detects when the motor is moved; and a controller that stops driving the motor in response to a movement signal from the detector.