JPH0410952U - - Google Patents
Info
- Publication number
- JPH0410952U JPH0410952U JP5010290U JP5010290U JPH0410952U JP H0410952 U JPH0410952 U JP H0410952U JP 5010290 U JP5010290 U JP 5010290U JP 5010290 U JP5010290 U JP 5010290U JP H0410952 U JPH0410952 U JP H0410952U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- belt
- support base
- inclined portion
- holding mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5010290U JPH0410952U (fr) | 1990-05-14 | 1990-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5010290U JPH0410952U (fr) | 1990-05-14 | 1990-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0410952U true JPH0410952U (fr) | 1992-01-29 |
Family
ID=31568364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5010290U Pending JPH0410952U (fr) | 1990-05-14 | 1990-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410952U (fr) |
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1990
- 1990-05-14 JP JP5010290U patent/JPH0410952U/ja active Pending