JPH04105362A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPH04105362A
JPH04105362A JP2221346A JP22134690A JPH04105362A JP H04105362 A JPH04105362 A JP H04105362A JP 2221346 A JP2221346 A JP 2221346A JP 22134690 A JP22134690 A JP 22134690A JP H04105362 A JPH04105362 A JP H04105362A
Authority
JP
Japan
Prior art keywords
integrated circuit
pad
semiconductor integrated
light
circuit device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2221346A
Other languages
Japanese (ja)
Inventor
Kenichi Tsukamoto
塚本 研一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi ULSI Engineering Corp
Hitachi Ltd
Original Assignee
Hitachi ULSI Engineering Corp
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi ULSI Engineering Corp, Hitachi Ltd filed Critical Hitachi ULSI Engineering Corp
Priority to JP2221346A priority Critical patent/JPH04105362A/en
Publication of JPH04105362A publication Critical patent/JPH04105362A/en
Pending legal-status Critical Current

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  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To surely protect a semiconductor integrated circuit device from pollution, electrostatic destruction, etc., by performing delivery and reception of at least one of operating power and information with the outside in noncontact state by using light as a medium. CONSTITUTION:A photocell pad 3 for input is irradiated with input light P1 composed of, for example, a laser beam, etc., for which the light quantity, blinking time, etc., are varied and the electric signal generated in the pad 3 is supplied to an integrated circuit section 2 through an internal wiring structure 3a to input desired information from the outside to the section 2 in a noncontact state. In addition, another photocell pad 4 for power supply is irradiated with power supply light P2 composed of, for example, a laser beam, for which a prescribed light quantity is continuously maintained and the electric power continuously generated in the pad 4 is supplied to the integrated circuit section 2 through another internal wiring structure 4a to operate the section 2.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体集積回路装置に関し、特に、半導体集
積回路装置と外部との間を非接触に接続する技術に関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a semiconductor integrated circuit device, and particularly to a technique for contactlessly connecting a semiconductor integrated circuit device and the outside.

〔従来の技術〕[Conventional technology]

たとえば、株式会社オーム社、昭和54年3月発行、電
子通信学会編「電子通信ノ\ンドブック」P576、な
どの文献に記載されているように、従来の半導体集積回
路装置において、所望の機能を有する集積回路素子と外
部との間における動作電力や情報(動作信号)の授受は
、当該集積回路素子に設けられた外部接続端子(パッド
)などに所望の導体箔や導線などを外部から接続するこ
とによって行われている。
For example, as described in documents such as "Electronic Communication Note Book" P576, edited by the Institute of Electronics and Communication Engineers, published by Ohmsha Co., Ltd., March 1976, in conventional semiconductor integrated circuit devices, desired functions can be realized. Transfer of operating power and information (operating signals) between the integrated circuit element and the outside is performed by externally connecting a desired conductive foil or wire to an external connection terminal (pad) provided on the integrated circuit element. This is done by

二のため、たとえば、単体の集積回路素子を可搬性のカ
ードに組み込んだ、いわゆるICカードなどにおいては
、当該ICカードが装填されるカード読み取り端末との
電気的な接続は、ICカード上のパッドに対する直接的
な針り当てや導体プラグの押圧によって実現している。
For this reason, for example, in a so-called IC card in which a single integrated circuit element is incorporated into a portable card, the electrical connection with the card reading terminal into which the IC card is loaded is made through a pad on the IC card. This is achieved by directly applying the needle to the pin or pressing the conductor plug.

〔発明が解決しようとする課題) ところが、上記のように、集積回路素子のパッドに対す
る導体の接触によって電気的な接続を確保する方式では
、パッドを常に外部に露出させておく必要があるため、
静電気などによる悪影響を受けやすく、また、パッドの
汚損や摩耗などによって外部と集積回路素子との間にお
ける電気的な接続が阻害されたり不安定になるという問
題がある。
[Problems to be Solved by the Invention] However, as described above, in the method of ensuring electrical connection by contacting the conductor with the pad of the integrated circuit element, it is necessary to always expose the pad to the outside.
They are susceptible to the adverse effects of static electricity and the like, and there are also problems in that electrical connections between the outside and the integrated circuit element may be inhibited or become unstable due to contamination or abrasion of the pads.

また、集積回路素子の高密度化および多機能化、さらに
は集積回路素子自体に対する小型化の要求などによって
、必要なパッドの数の増大および寸法の微細化が促進さ
れており、前述のような、針当てやプラグの押圧による
安定な電気的接続の確保がますます困難になりつつある
In addition, demands for higher density and multifunctionality of integrated circuit devices, as well as miniaturization of the integrated circuit devices themselves, have led to an increase in the number of required pads and miniaturization of their dimensions, resulting in the above-mentioned problems. , it is becoming increasingly difficult to secure a stable electrical connection by pressing a needle guard or a plug.

そこで、本発明の目的は、パッド数の増大や寸法の微細
化などに影響されることなく、外部との間における動作
電力および情報の少なくとも一方の授受を的確に行うこ
とが可能な半導体集積回路装置を提供することにある。
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a semiconductor integrated circuit capable of accurately transmitting and receiving at least one of operating power and information to and from the outside without being affected by an increase in the number of pads or miniaturization of dimensions. The goal is to provide equipment.

本発明の他の目的は、外部との間における動作電力およ
び情報の少なくとも一方の的確な授受を損なうことなく
、汚損や静電気対策を施すことが可能な半導体集積回路
装置を提供することにある。
Another object of the present invention is to provide a semiconductor integrated circuit device that can take measures against contamination and static electricity without impairing accurate exchange of at least one of operating power and information with the outside.

本発明の前記ならびにその他の目的と新規な特徴は、本
明細書の記述および添付図面から明らかになるであろう
The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

〔課題を解決するための手段〕[Means to solve the problem]

本願において開示される発明のうち、代表的なものの概
要を簡単に説明すれば、下記のとおりである。
A brief overview of typical inventions disclosed in this application is as follows.

すなわち、本発明になる半導体集積回路装置は、外部と
の間における動作電力および情報の授受の少なくとも一
方を光を媒介として非接触に行うようにしたものである
That is, the semiconductor integrated circuit device according to the present invention is configured to transfer at least one of operating power and information to and from the outside in a non-contact manner using light as a medium.

〔作用〕[Effect]

上記した本発明の半導体集積回路装置によれば、たとえ
ば、外部からの情報および動作電力の少なくとも一方の
入力が行われる光電池からなる第1のパッドと、レーザ
による電位センスによって情報の出力を行うか、または
出力信号を光に変換して外部に放射する発光ダイオード
などからなる第2のパッドとを設けることにより、当該
第1および第2のパッドに対するレーザビームの照射に
よって、非接触に半導体集積回路装置に対する動作電力
に供給および情報の授受の少なくとも一方を的確に行う
ことができ、たとえば、外部からの針当てやプラグなど
の抑圧による電気的な接続を行う場合のように、パッド
数の増大や寸法の微細化などに影響されることがなくな
る。
According to the semiconductor integrated circuit device of the present invention described above, for example, the first pad is formed of a photovoltaic cell to which at least one of information and operating power is inputted from the outside, and the first pad is formed of a photovoltaic cell to which at least one of external information and operating power is inputted, and the first pad is formed of a photovoltaic cell to which information is outputted by means of potential sensing using a laser. , or a second pad made of a light emitting diode or the like that converts the output signal into light and emits it to the outside.By irradiating the first and second pads with a laser beam, a semiconductor integrated circuit can be produced in a non-contact manner. It is possible to accurately supply operating power to the device and at least send and receive information. For example, when electrical connections are made by suppressing external needles or plugs, it is possible to increase the number of pads or It is no longer affected by miniaturization of dimensions.

また、第1および第2のパッドに照射される光や第2の
パッドから放射される光に対して透明な絶縁物によって
、当該第1および第2のパッドを含む半導体集積回路装
置の全域を一様に覆うことで、外部との間における動作
電力および情報の少なくとも一方の的確な授受を損なう
ことな(、汚損や静電破壊などから半導体集積回路装置
を確実に保護することができる。
Furthermore, the entire area of the semiconductor integrated circuit device including the first and second pads is covered by an insulating material that is transparent to the light irradiated to the first and second pads and the light emitted from the second pad. By uniformly covering the semiconductor integrated circuit device, the semiconductor integrated circuit device can be reliably protected from contamination, electrostatic damage, etc. without impairing the accurate exchange of at least one of operating power and information with the outside.

〔実施例1〕 以下、図面を参照しながら、本発明の一実施例である半
導体集積回路装置の一例について詳細に説明する。
[Embodiment 1] Hereinafter, an example of a semiconductor integrated circuit device which is an embodiment of the present invention will be described in detail with reference to the drawings.

第1図は、本発明の一実施例である半導体集積回路装置
の外観を模式的に示す斜視図であり、第2図は、その略
断面図、また第3図は、その作用の一例を説明する斜視
図である。
FIG. 1 is a perspective view schematically showing the appearance of a semiconductor integrated circuit device according to an embodiment of the present invention, FIG. 2 is a schematic cross-sectional view thereof, and FIG. 3 is an example of its operation. FIG. 2 is a perspective view for explanation.

半導体集積回路装[1の中央部には、必要に応じて所望
の情報の記憶や演算処理を行う集積回路部2が設けられ
ている。
At the center of the semiconductor integrated circuit device [1], an integrated circuit section 2 is provided that stores desired information and performs arithmetic processing as needed.

この場合、集積回路部2の周辺部には、たとえば光電池
からなる入力用光電池パッド3および電源用光電池パッ
ド4が配置されており、それぞれ内部配線構造3aおよ
び内部配線構造4aを介して、集積回路部2に電気的に
接続されている。
In this case, an input photovoltaic cell pad 3 and a power source photovoltaic pad 4 made of, for example, a photovoltaic cell are arranged around the integrated circuit section 2, and are connected to the integrated circuit via an internal wiring structure 3a and an internal wiring structure 4a, respectively. It is electrically connected to section 2.

入力用光電池パッド3には、入力信号に応じて、たとえ
ば光量や点滅時間などが変化するレーザビームなどから
なる入力光P1が照射され、これによって、当該入力用
光電池パッド3に生じる電気信号を、内部配線構造3a
を介して集積回路部2に伝達することにより、非接触に
外部から集積回路部2に対する所望の情報(動作信号な
ど)の入力が行われる。
The input photovoltaic pad 3 is irradiated with input light P1 consisting of, for example, a laser beam whose light intensity and blinking time change depending on the input signal, thereby converting the electric signal generated at the input photovoltaic pad 3 into Internal wiring structure 3a
By transmitting the information to the integrated circuit section 2 via the , desired information (operation signals, etc.) can be input from the outside to the integrated circuit section 2 in a non-contact manner.

また、電源用光電池パッド4には、たとえば所定の光量
が継続的に維持されるレーザビームなどからなる電源光
P2が照射され、当該電源光P2の照射によって電源用
光電池バッド4に継続的に発生する電力を内部配線構造
4aを介して集積回路部2に供給することにより、集積
回路部2の動作に必要な電力を賄う。
Further, the power source photovoltaic pad 4 is irradiated with a power source light P2 consisting of, for example, a laser beam that continuously maintains a predetermined amount of light, and the irradiation of the power source light P2 causes continuous generation of light on the power source photovoltaic cell pad 4. By supplying the power to the integrated circuit section 2 via the internal wiring structure 4a, the power necessary for the operation of the integrated circuit section 2 is provided.

さらに、集積回路部2の周辺部には、たとえば鏡面加工
された導体などからなる出力パッド5が配置されており
、内部配線構造5aを介して、集積回路部2に電気的に
接続されている。
Further, an output pad 5 made of, for example, a mirror-finished conductor is arranged around the integrated circuit section 2, and is electrically connected to the integrated circuit section 2 via an internal wiring structure 5a. .

この出力パッド5には、たとえば偏光レーザビームP3
が照射され、この偏光レーザビームP3の当該出力バッ
ド5からの反射光P3bの偏光方向θ2が、集積回路部
2から出力バンド5に送出される出力信号に応じた電位
の変化を反映して、入射光P3aの偏光方向θ1に対し
て変化することを利用して、集積回路N2において得ら
れた所望の情報を外部から非接触に把握することが可能
になっている。
For example, the output pad 5 is provided with a polarized laser beam P3.
is irradiated, and the polarization direction θ2 of the reflected light P3b from the output pad 5 of this polarized laser beam P3 reflects the change in potential according to the output signal sent from the integrated circuit section 2 to the output band 5, By utilizing the fact that the incident light P3a changes with respect to the polarization direction θ1, it is possible to grasp desired information obtained in the integrated circuit N2 from the outside without contact.

また、半導体集積回路装置1の全体は、前述の入力用光
電池パッド3.電源用光電池バッド4゜出力パッド5を
含めた全体が、入力光PI、電源光P2.偏光レーザビ
ームP3などに対して透明で、機械的、熱的な強度の優
れた絶縁物層6によって一様に覆われて保護されている
Further, the entire semiconductor integrated circuit device 1 includes the input photovoltaic pad 3. The entire power supply photovoltaic pad 4° including the output pad 5 is connected to input light PI, power light P2. It is uniformly covered and protected by an insulating layer 6 that is transparent to the polarized laser beam P3 and has excellent mechanical and thermal strength.

このように、本実施例の半導体集積回路装置1によれば
、容易に微細なスポット径を実現できるレーザビームな
どの光を媒介として、非接触に、集積回路部2に対する
動作電力の供給や、外部との間における情報の人出力を
行うので、半導体集積回路装置1の小型化や、集積回路
部2の多機能化などによる入力用光電池パッド3.電源
用光電池パッド4.出力パッド5の数の増大や寸法の微
細化などに影響されることなく、的確な情報の入出力動
作を実現することができる。
As described above, according to the semiconductor integrated circuit device 1 of the present embodiment, operating power can be supplied to the integrated circuit section 2 in a non-contact manner using light such as a laser beam that can easily realize a fine spot diameter. Since information is outputted to and from the outside, the input photovoltaic cell pad 3. Photovoltaic pad for power supply 4. Accurate information input/output operations can be realized without being affected by an increase in the number of output pads 5 or miniaturization of dimensions.

また、外部からの針当てやプラグの接触などのために、
パッド部分を選択的に露出させる必要がないので、入力
用光電池バッド3.電源用光電池バッド4.出力パッド
5などを含めた半導体集積回路装置1の全体を、絶縁物
層6によって一様に覆うことができ、当該入力用光電池
パッド3.電源用光電池パッド4.出力パッド5などの
汚損や摩耗の防止、さらには集積回路部2などの静電破
壊からの保護などを確実に実現することができる。
Also, due to external contact with the needle guard or plug, etc.
Since there is no need to selectively expose the pad portion, the input photovoltaic cell pad 3. Photovoltaic battery pad for power supply 4. The entire semiconductor integrated circuit device 1 including the output pads 5 and the like can be uniformly covered with the insulating layer 6, and the input photovoltaic pads 3. Photovoltaic pad for power supply 4. It is possible to reliably prevent the output pad 5 and the like from being soiled and worn out, and further protect the integrated circuit section 2 and the like from electrostatic damage.

この結果、たとえば本実施例の半導体集積回路装置工を
組み込んだICカードなどの製品の多機能化や、寿命お
よび操作性の向上などを、容易に実現することができる
As a result, products such as IC cards incorporating the semiconductor integrated circuit device of this embodiment can be multi-functionalized, and their lifespan and operability can be improved.

〔実施例1〕 第4図は、本発明の他の実施例である半導体集積回路装
置10の構成の一例を模式的に示す斜視図である。
[Embodiment 1] FIG. 4 is a perspective view schematically showing an example of the configuration of a semiconductor integrated circuit device 10 which is another embodiment of the present invention.

この実施例2の場合には、出力パッドとして、集積回路
部2から送出される出力信号を出力光P4として外部に
放射する発光ダイオードなどからなる出力用発光ダイオ
ードバッド7を設けたところが前記実施例1の場合と異
なるものである。
In the case of this second embodiment, an output light-emitting diode pad 7 made of a light-emitting diode or the like that emits an output signal sent from the integrated circuit section 2 to the outside as output light P4 is provided as an output pad, but this embodiment is different from the one described above. This is different from case 1.

本実施例2の場合も、前記実施例1の場合と同様の効果
を得ることができる。
In the case of the present embodiment 2, the same effects as in the case of the above-mentioned embodiment 1 can be obtained.

以上本発明者によってなされた発明を実施例に基づき具
体的に説明したが、本発明は前記実施例に限定されるも
のではなく、その要旨を逸脱しない範囲で種々変更可能
であることはいうまでもない。
Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

たとえば、バッドの位置は、半導体集積回路装置の一生
面側に配置することに限らず、表裏両面または、裏面の
みに配置してもよいことは言うまでもない。
For example, it goes without saying that the position of the pad is not limited to being placed on the entire surface of the semiconductor integrated circuit device, but may be placed on both the front and back surfaces or only on the back surface.

〔発明の効果〕〔Effect of the invention〕

本願において開示される発明のうち、代表的なものによ
って得られる効果を簡単に説明すれば、以下のとおりで
ある。
Among the inventions disclosed in this application, the effects obtained by typical inventions are briefly described below.

すなわち、本発明になる半導体集積回路装置によれば、
たとえば、外部からの針当てやプラグなどの押圧による
電気的な接続を行う従来の場合のように、パッド数の増
大や寸法の微細化などに影響されることなく、非接触に
半導体集積回路装置に対する動作電力に供給および情報
の授受の少なくとも一方を的確に行うことができる。
That is, according to the semiconductor integrated circuit device of the present invention,
For example, semiconductor integrated circuit devices can be connected without contact, without being affected by an increase in the number of pads or miniaturization of dimensions, unlike in the conventional case where electrical connections are made by pressing externally with a needle guard or plug. At least one of supplying operating power to the device and exchanging information can be performed accurately.

また、媒介となる光に対して透明な絶縁物によって、パ
ッドを含む半導体集積回路装置の全域を一様に覆うこと
で、外部との間における動作電力および情報の少なくと
も一方の的確な授受を損なうことなく、汚損や静電破壊
などから半導体集積回路装置を確実に保護することがで
きる。
In addition, by uniformly covering the entire area of the semiconductor integrated circuit device, including the pads, with an insulator that is transparent to the light that acts as a medium, it impairs the accurate exchange of operating power and/or information with the outside. The semiconductor integrated circuit device can be reliably protected from contamination, electrostatic damage, etc., without causing any damage.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、本発明の一実施例である半導体集積回路装置
の外観を模式的に示す斜視図、第2図は、その略断面図
、 第3図は、その作用の一例を説明する斜視図、第4図は
、本発明の他の実施例である半導体集積回路装置の外観
を模式的に示す斜視図である。 1・・・半導体集積回路装置、2・・・集積回路部、3
・・・入力用光電池パッド、3a・・・内部配線構造、
4・・・電源用光電池パッド、4a・・・内部配線構造
、5・・・出力パッド、5a・・・内部配線構造、6・
・・絶縁物層、Pl・・・入力光、P2・・・電源光、
P3・・・偏光レーザビーム、P3a・・・入射光、P
3b・・・反射光、θ1.θ2・・・偏光方向、1o・
・・半導体集積回路装置、7・・・出力用発光ダイオー
ドパッド、P4・・・出力光。 θIL  θ2:偏光方向 第4図 1′4二山刀尤
FIG. 1 is a perspective view schematically showing the appearance of a semiconductor integrated circuit device that is an embodiment of the present invention, FIG. 2 is a schematic sectional view thereof, and FIG. 3 is a perspective view illustrating an example of its operation. 4 are perspective views schematically showing the appearance of a semiconductor integrated circuit device according to another embodiment of the present invention. 1... Semiconductor integrated circuit device, 2... Integrated circuit section, 3
...input photovoltaic pad, 3a...internal wiring structure,
4... Photovoltaic cell pad for power supply, 4a... Internal wiring structure, 5... Output pad, 5a... Internal wiring structure, 6.
...Insulator layer, Pl...Input light, P2...Power light,
P3... Polarized laser beam, P3a... Incident light, P
3b...Reflected light, θ1. θ2...Polarization direction, 1o・
...Semiconductor integrated circuit device, 7...Light emitting diode pad for output, P4...Output light. θIL θ2: Polarization direction Fig. 4 1'4

Claims (1)

【特許請求の範囲】 1、外部との間における動作電力および情報の授受の少
なくとも一方を光を媒介として非接触に行うようにした
ことを特徴とする半導体集積回路装置。 2、外部からの情報および動作電力の少なくとも一方の
入力が行われる光電池からなる第1のパッドと、レーザ
による電位センスによって情報の出力を行う第2のパッ
ドとを備えたことを特徴とする請求項1記載の半導体集
積回路装置。 3、前記レーザとして偏光レーザを用い、前記第2のパ
ッドにおける電位の変化を反映した前記偏光レーザの偏
光面の変化を検出することによって前記第2のパッドに
おける電位センスを行うようにしたことを特徴とする請
求項1または2記載の半導体集積回路装置。 4、外部からの情報および動作電力の少なくとも一方の
入力が行われる光電池からなる第1のパッドと、出力信
号を光に変換して外部に放射する発光ダイオードからな
る第2のパッドとを備えたことを特徴とする請求項1記
載の半導体集積回路装置。
[Claims] 1. A semiconductor integrated circuit device characterized in that at least one of operating power and information is exchanged with the outside in a non-contact manner using light as a medium. 2. A claim characterized by comprising a first pad made of a photovoltaic cell to which at least one of external information and operating power is input, and a second pad which outputs information by sensing potential with a laser. The semiconductor integrated circuit device according to item 1. 3. A polarized laser is used as the laser, and the potential at the second pad is sensed by detecting a change in the polarization plane of the polarized laser that reflects a change in the potential at the second pad. A semiconductor integrated circuit device according to claim 1 or 2. 4. A first pad made of a photovoltaic cell to which at least one of external information and operating power is input, and a second pad made of a light emitting diode which converts an output signal into light and radiates it to the outside. The semiconductor integrated circuit device according to claim 1, characterized in that:
JP2221346A 1990-08-24 1990-08-24 Semiconductor integrated circuit device Pending JPH04105362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2221346A JPH04105362A (en) 1990-08-24 1990-08-24 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2221346A JPH04105362A (en) 1990-08-24 1990-08-24 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPH04105362A true JPH04105362A (en) 1992-04-07

Family

ID=16765364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2221346A Pending JPH04105362A (en) 1990-08-24 1990-08-24 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPH04105362A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6359313B1 (en) * 1998-05-18 2002-03-19 Samsung Electronics Co., Ltd. Electrostatic discharge protection transistor for a semiconductor chip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6359313B1 (en) * 1998-05-18 2002-03-19 Samsung Electronics Co., Ltd. Electrostatic discharge protection transistor for a semiconductor chip

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