JPH0410332U - - Google Patents
Info
- Publication number
- JPH0410332U JPH0410332U JP5006690U JP5006690U JPH0410332U JP H0410332 U JPH0410332 U JP H0410332U JP 5006690 U JP5006690 U JP 5006690U JP 5006690 U JP5006690 U JP 5006690U JP H0410332 U JPH0410332 U JP H0410332U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- solvent discharge
- resist solvent
- wafer
- discharge plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002904 solvent Substances 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5006690U JPH0410332U (enExample) | 1990-05-14 | 1990-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5006690U JPH0410332U (enExample) | 1990-05-14 | 1990-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0410332U true JPH0410332U (enExample) | 1992-01-29 |
Family
ID=31568300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5006690U Pending JPH0410332U (enExample) | 1990-05-14 | 1990-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410332U (enExample) |
-
1990
- 1990-05-14 JP JP5006690U patent/JPH0410332U/ja active Pending