JPH0294253U - - Google Patents
Info
- Publication number
- JPH0294253U JPH0294253U JP76289U JP76289U JPH0294253U JP H0294253 U JPH0294253 U JP H0294253U JP 76289 U JP76289 U JP 76289U JP 76289 U JP76289 U JP 76289U JP H0294253 U JPH0294253 U JP H0294253U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- base
- prevention plate
- deposition prevention
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 3
Landscapes
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP76289U JPH0294253U (enExample) | 1989-01-07 | 1989-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP76289U JPH0294253U (enExample) | 1989-01-07 | 1989-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0294253U true JPH0294253U (enExample) | 1990-07-26 |
Family
ID=31200069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP76289U Pending JPH0294253U (enExample) | 1989-01-07 | 1989-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0294253U (enExample) |
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1989
- 1989-01-07 JP JP76289U patent/JPH0294253U/ja active Pending