JPH04100252U - - Google Patents

Info

Publication number
JPH04100252U
JPH04100252U JP849591U JP849591U JPH04100252U JP H04100252 U JPH04100252 U JP H04100252U JP 849591 U JP849591 U JP 849591U JP 849591 U JP849591 U JP 849591U JP H04100252 U JPH04100252 U JP H04100252U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP849591U
Other languages
Japanese (ja)
Other versions
JPH0745560Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP849591U priority Critical patent/JPH0745560Y2/ja
Publication of JPH04100252U publication Critical patent/JPH04100252U/ja
Application granted granted Critical
Publication of JPH0745560Y2 publication Critical patent/JPH0745560Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP849591U 1991-01-31 1991-01-31 蒸着装置 Expired - Lifetime JPH0745560Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP849591U JPH0745560Y2 (ja) 1991-01-31 1991-01-31 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP849591U JPH0745560Y2 (ja) 1991-01-31 1991-01-31 蒸着装置

Publications (2)

Publication Number Publication Date
JPH04100252U true JPH04100252U (enExample) 1992-08-31
JPH0745560Y2 JPH0745560Y2 (ja) 1995-10-18

Family

ID=31740872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP849591U Expired - Lifetime JPH0745560Y2 (ja) 1991-01-31 1991-01-31 蒸着装置

Country Status (1)

Country Link
JP (1) JPH0745560Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006063432A (ja) * 2004-08-30 2006-03-09 Japan Science & Technology Agency 成膜装置用マルチソース機構
JP2007239070A (ja) * 2006-03-10 2007-09-20 Fujifilm Corp 真空蒸着装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006063432A (ja) * 2004-08-30 2006-03-09 Japan Science & Technology Agency 成膜装置用マルチソース機構
JP2007239070A (ja) * 2006-03-10 2007-09-20 Fujifilm Corp 真空蒸着装置

Also Published As

Publication number Publication date
JPH0745560Y2 (ja) 1995-10-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term