JPH0397607U - - Google Patents
Info
- Publication number
- JPH0397607U JPH0397607U JP460890U JP460890U JPH0397607U JP H0397607 U JPH0397607 U JP H0397607U JP 460890 U JP460890 U JP 460890U JP 460890 U JP460890 U JP 460890U JP H0397607 U JPH0397607 U JP H0397607U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- arm
- interferometer
- optical system
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP460890U JPH0738806Y2 (ja) | 1990-01-24 | 1990-01-24 | 干渉計 |
| US07/642,451 US5127734A (en) | 1990-01-24 | 1991-01-17 | Laser interferometer for inspecting the surface of a specimen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP460890U JPH0738806Y2 (ja) | 1990-01-24 | 1990-01-24 | 干渉計 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0397607U true JPH0397607U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-10-08 |
| JPH0738806Y2 JPH0738806Y2 (ja) | 1995-09-06 |
Family
ID=31508345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP460890U Expired - Lifetime JPH0738806Y2 (ja) | 1990-01-24 | 1990-01-24 | 干渉計 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0738806Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1990
- 1990-01-24 JP JP460890U patent/JPH0738806Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0738806Y2 (ja) | 1995-09-06 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |