JPH0397137U - - Google Patents

Info

Publication number
JPH0397137U
JPH0397137U JP347790U JP347790U JPH0397137U JP H0397137 U JPH0397137 U JP H0397137U JP 347790 U JP347790 U JP 347790U JP 347790 U JP347790 U JP 347790U JP H0397137 U JPH0397137 U JP H0397137U
Authority
JP
Japan
Prior art keywords
partition member
ceiling
clean room
gap
end portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP347790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP347790U priority Critical patent/JPH0397137U/ja
Publication of JPH0397137U publication Critical patent/JPH0397137U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP347790U 1990-01-18 1990-01-18 Pending JPH0397137U (US08087162-20120103-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP347790U JPH0397137U (US08087162-20120103-C00010.png) 1990-01-18 1990-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP347790U JPH0397137U (US08087162-20120103-C00010.png) 1990-01-18 1990-01-18

Publications (1)

Publication Number Publication Date
JPH0397137U true JPH0397137U (US08087162-20120103-C00010.png) 1991-10-04

Family

ID=31507295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP347790U Pending JPH0397137U (US08087162-20120103-C00010.png) 1990-01-18 1990-01-18

Country Status (1)

Country Link
JP (1) JPH0397137U (US08087162-20120103-C00010.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009094087A (ja) * 2006-01-27 2009-04-30 Opt Design:Kk 面照明光源装置及びこれを用いた面照明装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61202026A (ja) * 1985-03-01 1986-09-06 Fujita Corp クリ−ンル−ム
JPH01147238A (ja) * 1987-12-03 1989-06-08 Toshiba Corp クリーンベンチ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61202026A (ja) * 1985-03-01 1986-09-06 Fujita Corp クリ−ンル−ム
JPH01147238A (ja) * 1987-12-03 1989-06-08 Toshiba Corp クリーンベンチ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009094087A (ja) * 2006-01-27 2009-04-30 Opt Design:Kk 面照明光源装置及びこれを用いた面照明装置
JP4635128B2 (ja) * 2006-01-27 2011-02-16 株式会社オプトデザイン 面照明光源装置及びこれを用いた面照明装置

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