JPH0396145U - - Google Patents

Info

Publication number
JPH0396145U
JPH0396145U JP532490U JP532490U JPH0396145U JP H0396145 U JPH0396145 U JP H0396145U JP 532490 U JP532490 U JP 532490U JP 532490 U JP532490 U JP 532490U JP H0396145 U JPH0396145 U JP H0396145U
Authority
JP
Japan
Prior art keywords
rotation axis
radius
chuck
wafer
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP532490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0724187Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990005324U priority Critical patent/JPH0724187Y2/ja
Publication of JPH0396145U publication Critical patent/JPH0396145U/ja
Application granted granted Critical
Publication of JPH0724187Y2 publication Critical patent/JPH0724187Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1990005324U 1990-01-23 1990-01-23 チャック Expired - Fee Related JPH0724187Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990005324U JPH0724187Y2 (ja) 1990-01-23 1990-01-23 チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990005324U JPH0724187Y2 (ja) 1990-01-23 1990-01-23 チャック

Publications (2)

Publication Number Publication Date
JPH0396145U true JPH0396145U (zh) 1991-10-01
JPH0724187Y2 JPH0724187Y2 (ja) 1995-06-05

Family

ID=31509039

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990005324U Expired - Fee Related JPH0724187Y2 (ja) 1990-01-23 1990-01-23 チャック

Country Status (1)

Country Link
JP (1) JPH0724187Y2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101375144B1 (ko) * 2013-02-22 2014-03-17 호서대학교 산학협력단 스핀코터용 기판 홀더 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0235636U (zh) * 1988-08-31 1990-03-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0235636U (zh) * 1988-08-31 1990-03-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101375144B1 (ko) * 2013-02-22 2014-03-17 호서대학교 산학협력단 스핀코터용 기판 홀더 장치

Also Published As

Publication number Publication date
JPH0724187Y2 (ja) 1995-06-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees