JPH0396037U - - Google Patents
Info
- Publication number
- JPH0396037U JPH0396037U JP345690U JP345690U JPH0396037U JP H0396037 U JPH0396037 U JP H0396037U JP 345690 U JP345690 U JP 345690U JP 345690 U JP345690 U JP 345690U JP H0396037 U JPH0396037 U JP H0396037U
- Authority
- JP
- Japan
- Prior art keywords
- heating
- substrate electrode
- susceptor
- substrate
- electrode body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP345690U JPH0396037U (ru) | 1990-01-18 | 1990-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP345690U JPH0396037U (ru) | 1990-01-18 | 1990-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0396037U true JPH0396037U (ru) | 1991-10-01 |
Family
ID=31507273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP345690U Pending JPH0396037U (ru) | 1990-01-18 | 1990-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0396037U (ru) |
-
1990
- 1990-01-18 JP JP345690U patent/JPH0396037U/ja active Pending