JPH0396037U - - Google Patents
Info
- Publication number
- JPH0396037U JPH0396037U JP345690U JP345690U JPH0396037U JP H0396037 U JPH0396037 U JP H0396037U JP 345690 U JP345690 U JP 345690U JP 345690 U JP345690 U JP 345690U JP H0396037 U JPH0396037 U JP H0396037U
- Authority
- JP
- Japan
- Prior art keywords
- heating
- substrate electrode
- susceptor
- substrate
- electrode body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Description
第１図はこの考案の実施例の平面図、第２図は
第１図の−線で切断した断面図、第３図ａ〜
ｃはこの考案の実施例の動作を示す説明図である
。第４図は従来の基板加熱電極の平面図、第５図
は第４図の−線で切断した断面図、第６図ａ
〜ｄは従来の基板加熱電極の動作を示す説明図で
ある。
図中、１１……基板電極本体、１１ａ……基板
電極本体の側壁、１１ｂ……基板電極本体の側壁
の穴、１２……石英製加熱窓、１３……サセプタ
ー、１４……赤外線加熱ランプ、１５……リフタ
、１５ａ……リフタの昇降軸、１５ｂ……リフタ
の支持部。
Fig. 1 is a plan view of an embodiment of this invention, Fig. 2 is a sectional view taken along the - line in Fig. 1, and Figs.
c is an explanatory diagram showing the operation of the embodiment of this invention. Figure 4 is a plan view of a conventional substrate heating electrode, Figure 5 is a sectional view taken along the - line in Figure 4, and Figure 6 a.
-d are explanatory diagrams showing the operation of a conventional substrate heating electrode. In the figure, 11...substrate electrode body, 11a...side wall of substrate electrode body, 11b...hole in side wall of substrate electrode body, 12...quartz heating window, 13...susceptor, 14...infrared heating lamp, 15... Lifter, 15a... Lifter lifting shaft, 15b... Lifter support part.
Claims (1)
部開口を密閉するように水平に取り付けられた加
熱窓と、この加熱窓の上面に載置されたサセプタ
ーと、上記加熱窓の下方の上記筒状の基板電極本
体内に配設された加熱ランプと、上記サセプター
を中間に挟んで設けられた水平な支持部を昇降さ
せる昇降自在な一対のリフタとを備えたことを特
徴とする基板加熱電極。 A cylindrical substrate electrode body, a heating window installed horizontally so as to seal the upper opening of the substrate electrode body, a susceptor placed on the top surface of the heating window, and the tube below the heating window. A substrate heating electrode comprising: a heating lamp disposed within a shaped substrate electrode main body; and a pair of lifters that can be raised and lowered to raise and lower a horizontal support section provided with the susceptor sandwiched between them. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP345690U JPH0396037U (en) | 1990-01-18 | 1990-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP345690U JPH0396037U (en) | 1990-01-18 | 1990-01-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0396037U true JPH0396037U (en) | 1991-10-01 |
Family
ID=31507273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP345690U Pending JPH0396037U (en) | 1990-01-18 | 1990-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0396037U (en) |
-
1990
- 1990-01-18 JP JP345690U patent/JPH0396037U/ja active Pending