JPH0395549U - - Google Patents

Info

Publication number
JPH0395549U
JPH0395549U JP1990005201U JP520190U JPH0395549U JP H0395549 U JPH0395549 U JP H0395549U JP 1990005201 U JP1990005201 U JP 1990005201U JP 520190 U JP520190 U JP 520190U JP H0395549 U JPH0395549 U JP H0395549U
Authority
JP
Japan
Prior art keywords
tunnel current
measuring device
work function
binary data
scanning surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1990005201U
Other languages
English (en)
Other versions
JPH0621166Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990005201U priority Critical patent/JPH0621166Y2/ja
Publication of JPH0395549U publication Critical patent/JPH0395549U/ja
Application granted granted Critical
Publication of JPH0621166Y2 publication Critical patent/JPH0621166Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案に基づいた走査型表面仕事関数
計測装置の構成図、第２図は本考案に基づいた変
調信号発生部の内部構成図、第３図は本考案に基
づいた各信号波形タイムチヤートの例である。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) トンネル電流を変化させる為の任意な変調
    信号の２値化データを書込みもしくは読出しの為
    の記憶回路を具備した走査型表面仕事関数計測装
    置。 (2) トンネル電流又は該トンネル電流を処理し
    た信号の測定点を示すサンプル信号を変調信号の
    ２値化データを同期し、記憶回路に同時に書込み
    もしくは読出す事ができることを特徴とする請求
    項１記載の走査型表面仕事関数計測装置。
JP1990005201U 1990-01-23 1990-01-23 走査型表面仕事関数計測装置 Expired - Lifetime JPH0621166Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990005201U JPH0621166Y2 (ja) 1990-01-23 1990-01-23 走査型表面仕事関数計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990005201U JPH0621166Y2 (ja) 1990-01-23 1990-01-23 走査型表面仕事関数計測装置

Publications (2)

Publication Number Publication Date
JPH0395549U true JPH0395549U (ja) 1991-09-30
JPH0621166Y2 JPH0621166Y2 (ja) 1994-06-01

Family

ID=31508917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990005201U Expired - Lifetime JPH0621166Y2 (ja) 1990-01-23 1990-01-23 走査型表面仕事関数計測装置

Country Status (1)

Country Link
JP (1) JPH0621166Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238374A (ja) * 1985-08-14 1987-02-19 Canon Inc 電子回路の評価システム
JPH01233303A (ja) * 1988-03-15 1989-09-19 Agency Of Ind Science & Technol 探針位置制御方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6238374A (ja) * 1985-08-14 1987-02-19 Canon Inc 電子回路の評価システム
JPH01233303A (ja) * 1988-03-15 1989-09-19 Agency Of Ind Science & Technol 探針位置制御方法

Also Published As

Publication number Publication date
JPH0621166Y2 (ja) 1994-06-01

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term