JPH0394979U - - Google Patents
Info
- Publication number
- JPH0394979U JPH0394979U JP297890U JP297890U JPH0394979U JP H0394979 U JPH0394979 U JP H0394979U JP 297890 U JP297890 U JP 297890U JP 297890 U JP297890 U JP 297890U JP H0394979 U JPH0394979 U JP H0394979U
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- surface treatment
- treatment apparatus
- discharge nozzle
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP297890U JPH0721256Y2 (ja) | 1990-01-16 | 1990-01-16 | 基板の表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP297890U JPH0721256Y2 (ja) | 1990-01-16 | 1990-01-16 | 基板の表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0394979U true JPH0394979U (OSRAM) | 1991-09-27 |
| JPH0721256Y2 JPH0721256Y2 (ja) | 1995-05-17 |
Family
ID=31506820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP297890U Expired - Fee Related JPH0721256Y2 (ja) | 1990-01-16 | 1990-01-16 | 基板の表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721256Y2 (OSRAM) |
-
1990
- 1990-01-16 JP JP297890U patent/JPH0721256Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0721256Y2 (ja) | 1995-05-17 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |