JPH0393089U - - Google Patents

Info

Publication number
JPH0393089U
JPH0393089U JP197390U JP197390U JPH0393089U JP H0393089 U JPH0393089 U JP H0393089U JP 197390 U JP197390 U JP 197390U JP 197390 U JP197390 U JP 197390U JP H0393089 U JPH0393089 U JP H0393089U
Authority
JP
Japan
Prior art keywords
wafer
suctions
slidably
maintain
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP197390U
Other languages
English (en)
Japanese (ja)
Other versions
JP2535628Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990001973U priority Critical patent/JP2535628Y2/ja
Publication of JPH0393089U publication Critical patent/JPH0393089U/ja
Application granted granted Critical
Publication of JP2535628Y2 publication Critical patent/JP2535628Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990001973U 1990-01-12 1990-01-12 ウエハー吸着装置 Expired - Lifetime JP2535628Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990001973U JP2535628Y2 (ja) 1990-01-12 1990-01-12 ウエハー吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990001973U JP2535628Y2 (ja) 1990-01-12 1990-01-12 ウエハー吸着装置

Publications (2)

Publication Number Publication Date
JPH0393089U true JPH0393089U (cs) 1991-09-24
JP2535628Y2 JP2535628Y2 (ja) 1997-05-14

Family

ID=31505857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990001973U Expired - Lifetime JP2535628Y2 (ja) 1990-01-12 1990-01-12 ウエハー吸着装置

Country Status (1)

Country Link
JP (1) JP2535628Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013159430A (ja) * 2012-02-02 2013-08-19 Honda Motor Co Ltd ワーク受取り装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136391A (ja) * 1985-12-10 1987-06-19 株式会社東芝 把持装置
JPS632347A (ja) * 1986-06-23 1988-01-07 Hitachi Ltd ハンド
JPH01138545U (cs) * 1988-03-07 1989-09-21

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62136391A (ja) * 1985-12-10 1987-06-19 株式会社東芝 把持装置
JPS632347A (ja) * 1986-06-23 1988-01-07 Hitachi Ltd ハンド
JPH01138545U (cs) * 1988-03-07 1989-09-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013159430A (ja) * 2012-02-02 2013-08-19 Honda Motor Co Ltd ワーク受取り装置

Also Published As

Publication number Publication date
JP2535628Y2 (ja) 1997-05-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term