JPH0392775U - - Google Patents

Info

Publication number
JPH0392775U
JPH0392775U JP77190U JP77190U JPH0392775U JP H0392775 U JPH0392775 U JP H0392775U JP 77190 U JP77190 U JP 77190U JP 77190 U JP77190 U JP 77190U JP H0392775 U JPH0392775 U JP H0392775U
Authority
JP
Japan
Prior art keywords
chemical liquid
vapor
chemical
carrier gas
surface treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP77190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0726365Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP77190U priority Critical patent/JPH0726365Y2/ja
Publication of JPH0392775U publication Critical patent/JPH0392775U/ja
Application granted granted Critical
Publication of JPH0726365Y2 publication Critical patent/JPH0726365Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP77190U 1990-01-08 1990-01-08 気相表面処理装置用の薬液気化装置 Expired - Lifetime JPH0726365Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP77190U JPH0726365Y2 (ja) 1990-01-08 1990-01-08 気相表面処理装置用の薬液気化装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP77190U JPH0726365Y2 (ja) 1990-01-08 1990-01-08 気相表面処理装置用の薬液気化装置

Publications (2)

Publication Number Publication Date
JPH0392775U true JPH0392775U (de) 1991-09-20
JPH0726365Y2 JPH0726365Y2 (ja) 1995-06-14

Family

ID=31504713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP77190U Expired - Lifetime JPH0726365Y2 (ja) 1990-01-08 1990-01-08 気相表面処理装置用の薬液気化装置

Country Status (1)

Country Link
JP (1) JPH0726365Y2 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007053186A (ja) * 2005-08-17 2007-03-01 Sumitomo Chemical Co Ltd 有機金属化合物供給容器
JP2011124457A (ja) * 2009-12-14 2011-06-23 Mitsubishi Electric Corp はんだ接合装置
JP2012169671A (ja) * 2012-05-28 2012-09-06 Watanabe Shoko:Kk 気化器
JP2018050040A (ja) * 2016-09-08 2018-03-29 東京エレクトロン株式会社 基板処理システムのための渦状微粒化ノズルアセンブリ、気化器、及び関連する方法
JP2022055313A (ja) * 2020-09-28 2022-04-07 株式会社Kokusai Electric 気化システム、基板処理装置および半導体装置の製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007053186A (ja) * 2005-08-17 2007-03-01 Sumitomo Chemical Co Ltd 有機金属化合物供給容器
JP4710481B2 (ja) * 2005-08-17 2011-06-29 住友化学株式会社 有機金属化合物供給容器
JP2011124457A (ja) * 2009-12-14 2011-06-23 Mitsubishi Electric Corp はんだ接合装置
JP2012169671A (ja) * 2012-05-28 2012-09-06 Watanabe Shoko:Kk 気化器
JP2018050040A (ja) * 2016-09-08 2018-03-29 東京エレクトロン株式会社 基板処理システムのための渦状微粒化ノズルアセンブリ、気化器、及び関連する方法
JP2022055313A (ja) * 2020-09-28 2022-04-07 株式会社Kokusai Electric 気化システム、基板処理装置および半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0726365Y2 (ja) 1995-06-14

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