JPH0392768U - - Google Patents
Info
- Publication number
- JPH0392768U JPH0392768U JP15215789U JP15215789U JPH0392768U JP H0392768 U JPH0392768 U JP H0392768U JP 15215789 U JP15215789 U JP 15215789U JP 15215789 U JP15215789 U JP 15215789U JP H0392768 U JPH0392768 U JP H0392768U
- Authority
- JP
- Japan
- Prior art keywords
- target
- substrate holder
- parallel
- holding surface
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215789U JPH0392768U (en, 2012) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215789U JPH0392768U (en, 2012) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392768U true JPH0392768U (en, 2012) | 1991-09-20 |
Family
ID=31698432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15215789U Pending JPH0392768U (en, 2012) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392768U (en, 2012) |
-
1989
- 1989-12-28 JP JP15215789U patent/JPH0392768U/ja active Pending
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