JPH0392767U - - Google Patents
Info
- Publication number
- JPH0392767U JPH0392767U JP15295089U JP15295089U JPH0392767U JP H0392767 U JPH0392767 U JP H0392767U JP 15295089 U JP15295089 U JP 15295089U JP 15295089 U JP15295089 U JP 15295089U JP H0392767 U JPH0392767 U JP H0392767U
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- source
- recess
- evaporation
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15295089U JPH0392767U (fr) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15295089U JPH0392767U (fr) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392767U true JPH0392767U (fr) | 1991-09-20 |
Family
ID=31699186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15295089U Pending JPH0392767U (fr) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392767U (fr) |
-
1989
- 1989-12-28 JP JP15295089U patent/JPH0392767U/ja active Pending