JPH0392392U - - Google Patents

Info

Publication number
JPH0392392U
JPH0392392U JP55690U JP55690U JPH0392392U JP H0392392 U JPH0392392 U JP H0392392U JP 55690 U JP55690 U JP 55690U JP 55690 U JP55690 U JP 55690U JP H0392392 U JPH0392392 U JP H0392392U
Authority
JP
Japan
Prior art keywords
opening
light
guide member
light guide
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55690U
Other languages
English (en)
Japanese (ja)
Other versions
JP2507905Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990000556U priority Critical patent/JP2507905Y2/ja
Publication of JPH0392392U publication Critical patent/JPH0392392U/ja
Application granted granted Critical
Publication of JP2507905Y2 publication Critical patent/JP2507905Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)
  • Physical Vapour Deposition (AREA)
JP1990000556U 1990-01-10 1990-01-10 輻射導入加熱装置 Expired - Lifetime JP2507905Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990000556U JP2507905Y2 (ja) 1990-01-10 1990-01-10 輻射導入加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990000556U JP2507905Y2 (ja) 1990-01-10 1990-01-10 輻射導入加熱装置

Publications (2)

Publication Number Publication Date
JPH0392392U true JPH0392392U (de) 1991-09-19
JP2507905Y2 JP2507905Y2 (ja) 1996-08-21

Family

ID=31504498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990000556U Expired - Lifetime JP2507905Y2 (ja) 1990-01-10 1990-01-10 輻射導入加熱装置

Country Status (1)

Country Link
JP (1) JP2507905Y2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2418915A3 (de) * 2010-08-13 2013-04-24 Kabushiki Kaisha Saamo Riko Hochwirksame Infrarotstrahl-Heizvorrichtung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225572A (en) * 1975-08-22 1977-02-25 Hitachi Ltd Resin-seal type semiconductor device
JPS61211978A (ja) * 1985-03-15 1986-09-20 株式会社サーモ理工 輻射加熱装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225572A (en) * 1975-08-22 1977-02-25 Hitachi Ltd Resin-seal type semiconductor device
JPS61211978A (ja) * 1985-03-15 1986-09-20 株式会社サーモ理工 輻射加熱装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2418915A3 (de) * 2010-08-13 2013-04-24 Kabushiki Kaisha Saamo Riko Hochwirksame Infrarotstrahl-Heizvorrichtung

Also Published As

Publication number Publication date
JP2507905Y2 (ja) 1996-08-21

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term