JPH0392033U - - Google Patents
Info
- Publication number
- JPH0392033U JPH0392033U JP15101089U JP15101089U JPH0392033U JP H0392033 U JPH0392033 U JP H0392033U JP 15101089 U JP15101089 U JP 15101089U JP 15101089 U JP15101089 U JP 15101089U JP H0392033 U JPH0392033 U JP H0392033U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- tank
- closing
- washing
- closing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005406 washing Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15101089U JPH0392033U (de) | 1989-12-29 | 1989-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15101089U JPH0392033U (de) | 1989-12-29 | 1989-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392033U true JPH0392033U (de) | 1991-09-19 |
Family
ID=31697328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15101089U Pending JPH0392033U (de) | 1989-12-29 | 1989-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392033U (de) |
-
1989
- 1989-12-29 JP JP15101089U patent/JPH0392033U/ja active Pending